ATE499333T1 - Verfahren zur herstellung von dichtem siliziumcarbid - Google Patents

Verfahren zur herstellung von dichtem siliziumcarbid

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Publication number
ATE499333T1
ATE499333T1 AT05770502T AT05770502T ATE499333T1 AT E499333 T1 ATE499333 T1 AT E499333T1 AT 05770502 T AT05770502 T AT 05770502T AT 05770502 T AT05770502 T AT 05770502T AT E499333 T1 ATE499333 T1 AT E499333T1
Authority
AT
Austria
Prior art keywords
silicon carbide
carbon
article
pores
precursor
Prior art date
Application number
AT05770502T
Other languages
English (en)
Inventor
Abuagela Rashed
Rex Sheppard
Donald Bray
Original Assignee
Poco Graphite Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Poco Graphite Inc filed Critical Poco Graphite Inc
Application granted granted Critical
Publication of ATE499333T1 publication Critical patent/ATE499333T1/de

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0022—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0022—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors
    • C04B38/0032—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors one of the precursor materials being a monolithic element having approximately the same dimensions as the final article, e.g. a paper sheet which after carbonisation will react with silicon to form a porous silicon carbide porous body
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00905—Uses not provided for elsewhere in C04B2111/00 as preforms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/20—Resistance against chemical, physical or biological attack
    • C04B2111/2084—Thermal shock resistance
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/614—Gas infiltration of green bodies or pre-forms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/616—Liquid infiltration of green bodies or pre-forms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/95—Products characterised by their size, e.g. microceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
AT05770502T 2004-06-30 2005-06-30 Verfahren zur herstellung von dichtem siliziumcarbid ATE499333T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US58424404P 2004-06-30 2004-06-30
PCT/US2005/023490 WO2006004999A1 (en) 2004-06-30 2005-06-30 A process for the manufacturing of dense silicon carbide

Publications (1)

Publication Number Publication Date
ATE499333T1 true ATE499333T1 (de) 2011-03-15

Family

ID=35094472

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05770502T ATE499333T1 (de) 2004-06-30 2005-06-30 Verfahren zur herstellung von dichtem siliziumcarbid

Country Status (7)

Country Link
US (2) US7799375B2 (de)
EP (1) EP1761475B1 (de)
JP (1) JP5053085B2 (de)
AT (1) ATE499333T1 (de)
DE (1) DE602005026523D1 (de)
ES (1) ES2359412T3 (de)
WO (1) WO2006004999A1 (de)

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JP2009210266A (ja) * 2008-02-29 2009-09-17 Ibiden Co Ltd 管状体
WO2009140791A1 (en) * 2008-05-21 2009-11-26 Dalian Institute Of Chemical Physics, Chinese Academy Of Sciences Process for producing silicon carbide
US8721906B2 (en) 2008-06-09 2014-05-13 Poco Graphite, Inc. Method to increase yield and reduce down time in semiconductor fabrication units by preconditioning components using sub-aperture reactive atom etch
WO2012122186A2 (en) 2011-03-07 2012-09-13 Entegris, Inc. Chemical mechanical planarization pad conditioner
US8642214B2 (en) * 2011-08-25 2014-02-04 Uchicago Argonne, Llc Silicon-carbonaceous encapsulated materials
RU2513497C1 (ru) * 2012-09-04 2014-04-20 Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" Способ изготовления изделий из углерод-карбидокремниевого материала в форме оболочек
CN108409110A (zh) * 2013-01-31 2018-08-17 安瀚视特控股株式会社 玻璃基板的制造方法
WO2014150393A2 (en) 2013-03-15 2014-09-25 Lazur Andrew J Method for producing high strength ceramic matrix composites
JP6411448B2 (ja) 2013-03-15 2018-10-24 ロールス−ロイス コーポレイション セラミックスマトリックス複合材料及びセラミックスマトリックス複合材料を製造する製造方法
EP2860015B1 (de) 2013-10-10 2017-12-20 Discma AG Verfahren zur bereitstellung eines flüssigkeitsvolumens und zugehörige vorrichtung
WO2015143278A1 (en) 2014-03-21 2015-09-24 Entegris, Inc. Chemical mechanical planarization pad conditioner with elongated cutting edges
FR3026961B1 (fr) * 2014-10-10 2016-12-09 Commissariat Energie Atomique Dispositif de conversion catalytique presentant un temps d'activation reduit
CN104446656B (zh) * 2014-12-15 2016-10-05 航天特种材料及工艺技术研究所 一种多孔碳材料抗氧化涂层的制备方法
JP2016150873A (ja) * 2015-02-18 2016-08-22 株式会社Ihi セラミックス基複合材の製造方法
US10227264B2 (en) 2015-07-13 2019-03-12 Rolls-Royce High Temperature Composites, Inc. Method for making ceramic matrix composite articles
KR101941232B1 (ko) * 2016-12-20 2019-01-22 주식회사 티씨케이 반도체 제조용 부품, 복합체 코팅층을 포함하는 반도체 제조용 부품 및 그 제조방법
WO2019010169A1 (en) 2017-07-06 2019-01-10 Entegris, Inc. SILICON CARBIDE FILTER MEMBRANE AND METHODS OF USE
CN110092381B (zh) * 2019-05-22 2021-04-16 浙江工业大学 一种高纯碳化硅材料的制备方法
RU2740984C1 (ru) * 2019-10-23 2021-01-22 Федеральное государственное бюджетное учреждение науки Институт физики твердого тела Российской академии наук (ИФТТ РАН) Способ получения изделий из карбидокремниевой керамики
CN115894069B (zh) * 2022-11-29 2023-07-14 厦门大学 一种多孔碳化硅高温隔热瓦及其制备方法
CN115594514B (zh) * 2022-11-30 2023-03-21 常熟通乐电子材料有限公司 一种三维SiC骨架增强SiC的高致密陶瓷及制备方法

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Publication number Priority date Publication date Assignee Title
US3205043A (en) * 1962-04-04 1965-09-07 Carborundum Co Cold molded dense silicon carbide articles and method of making the same
FR2741063B1 (fr) * 1995-11-14 1998-02-13 Europ Propulsion Procede pour l'introduction dans des substrats poreux d'une composition en fusion a base de silicium
EP0835853A1 (de) * 1996-10-14 1998-04-15 Societe Europeenne De Propulsion Reibelement aus Kohlenstoff/Kohlenstoff-Siliciumcarbidverbundwerkstoff und Verfahren zu seiner Herstellung
US5981002A (en) * 1998-02-09 1999-11-09 Textron Systems Corporation Method for densifying the edges and surfaces of a preform using a liquid precursor
US6743393B1 (en) * 1998-06-17 2004-06-01 Coi Ceramics, Inc. Method for producing ceramic matrix composites
US6162543A (en) * 1998-12-11 2000-12-19 Saint-Gobain Industrial Ceramics, Inc. High purity siliconized silicon carbide having high thermal shock resistance
DE60118085T2 (de) * 2000-12-27 2006-11-02 Toshiba Ceramics Co., Ltd. Silicium/Siliciumkarbid-Komposit und Verfahren zur Herstellung desselben
DE10143015C2 (de) * 2001-09-03 2003-11-13 Deutsch Zentr Luft & Raumfahrt Verfahren zur Herstellung eines Verbundwerkstoffes
US6953605B2 (en) * 2001-12-26 2005-10-11 Messier-Bugatti Method for densifying porous substrates by chemical vapour infiltration with preheated gas
US20040067316A1 (en) * 2002-10-04 2004-04-08 Paul Gray Method for processing silicon-carbide materials using organic film formers

Also Published As

Publication number Publication date
ES2359412T3 (es) 2011-05-23
JP2008505045A (ja) 2008-02-21
DE602005026523D1 (de) 2011-04-07
EP1761475A1 (de) 2007-03-14
US8142845B2 (en) 2012-03-27
US20060003098A1 (en) 2006-01-05
EP1761475B1 (de) 2011-02-23
US7799375B2 (en) 2010-09-21
JP5053085B2 (ja) 2012-10-17
WO2006004999A1 (en) 2006-01-12
US20110059240A1 (en) 2011-03-10

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