ATE487231T1 - Verfahren zur herstellung einer antireflektiven beschichtung - Google Patents
Verfahren zur herstellung einer antireflektiven beschichtungInfo
- Publication number
- ATE487231T1 ATE487231T1 AT04758855T AT04758855T ATE487231T1 AT E487231 T1 ATE487231 T1 AT E487231T1 AT 04758855 T AT04758855 T AT 04758855T AT 04758855 T AT04758855 T AT 04758855T AT E487231 T1 ATE487231 T1 AT E487231T1
- Authority
- AT
- Austria
- Prior art keywords
- group
- alkoxy
- bonded
- silicon atom
- acyloxy silane
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000006117 anti-reflective coating Substances 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- -1 acyloxy silane Chemical compound 0.000 abstract 3
- 125000003545 alkoxy group Chemical group 0.000 abstract 3
- 229910000077 silane Inorganic materials 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- 239000003377 acid catalyst Substances 0.000 abstract 1
- 125000003118 aryl group Chemical group 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
- H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
- H01L21/3121—Layers comprising organo-silicon compounds
- H01L21/3122—Layers comprising organo-silicon compounds layers comprising polysiloxane compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Materials For Photolithography (AREA)
- Silicon Polymers (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Paints Or Removers (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US45973003P | 2003-04-02 | 2003-04-02 | |
PCT/US2004/010330 WO2004090965A2 (en) | 2003-04-02 | 2004-03-31 | Organosilicate resin formulation for use in microelectronic devices |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE487231T1 true ATE487231T1 (de) | 2010-11-15 |
Family
ID=33159680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04758855T ATE487231T1 (de) | 2003-04-02 | 2004-03-31 | Verfahren zur herstellung einer antireflektiven beschichtung |
Country Status (9)
Country | Link |
---|---|
US (1) | US8178159B2 (de) |
EP (2) | EP2278611B1 (de) |
JP (1) | JP2006522861A (de) |
KR (1) | KR101197526B1 (de) |
CN (1) | CN1768418B (de) |
AT (1) | ATE487231T1 (de) |
DE (1) | DE602004029879D1 (de) |
TW (1) | TW200505966A (de) |
WO (1) | WO2004090965A2 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
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TW200505966A (en) | 2003-04-02 | 2005-02-16 | Dow Global Technologies Inc | Organosilicate resin formulation for use in microelectronic devices |
US9257302B1 (en) | 2004-03-25 | 2016-02-09 | Novellus Systems, Inc. | CVD flowable gap fill |
JP5412037B2 (ja) * | 2004-12-17 | 2014-02-12 | ダウ・コーニング・コーポレイション | シロキサン樹脂、シロキサン樹脂の調製方法および抗反射コーティング組成物 |
ATE400672T1 (de) * | 2004-12-17 | 2008-07-15 | Dow Corning | Verfahren zur ausbildung einer antireflexionsbeschichtung |
US7691275B2 (en) * | 2005-02-28 | 2010-04-06 | Board Of Regents, The University Of Texas System | Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing |
KR101324052B1 (ko) | 2006-02-13 | 2013-11-01 | 다우 코닝 코포레이션 | 반사방지 코팅 재료 |
JP5007511B2 (ja) * | 2006-02-14 | 2012-08-22 | 富士通株式会社 | 露光光遮蔽膜形成用材料、多層配線及びその製造方法、並びに半導体装置 |
US20070212886A1 (en) * | 2006-03-13 | 2007-09-13 | Dong Seon Uh | Organosilane polymers, hardmask compositions including the same and methods of producing semiconductor devices using organosilane hardmask compositions |
US7629260B2 (en) * | 2006-03-22 | 2009-12-08 | Cheil Industries, Inc. | Organosilane hardmask compositions and methods of producing semiconductor devices using the same |
KR20070095736A (ko) * | 2006-03-22 | 2007-10-01 | 제일모직주식회사 | 유기실란계 중합체를 포함하는 레지스트 하층막용 하드마스크 조성물 및 이를 이용한 반도체 집적회로 디바이스의 제조방법 |
US8581094B2 (en) | 2006-09-20 | 2013-11-12 | Dow Global Technologies, Llc | Electronic device module comprising polyolefin copolymer |
US9245739B2 (en) * | 2006-11-01 | 2016-01-26 | Lam Research Corporation | Low-K oxide deposition by hydrolysis and condensation |
JP5470687B2 (ja) * | 2007-08-10 | 2014-04-16 | 富士通株式会社 | シリコン化合物、紫外線吸収体、多層配線装置の製造方法および多層配線装置 |
WO2009088600A1 (en) | 2008-01-08 | 2009-07-16 | Dow Corning Toray Co., Ltd. | Silsesquioxane resins |
US9023433B2 (en) | 2008-01-15 | 2015-05-05 | Dow Corning Corporation | Silsesquioxane resins and method of using them to form an antireflective coating |
CN101990551B (zh) | 2008-03-04 | 2012-10-03 | 陶氏康宁公司 | 倍半硅氧烷树脂 |
KR101541939B1 (ko) | 2008-03-05 | 2015-08-04 | 다우 코닝 코포레이션 | 실세스퀴옥산 수지 |
EP2373722A4 (de) | 2008-12-10 | 2013-01-23 | Dow Corning | Silsesquioxanharze |
JP5062352B2 (ja) * | 2010-09-09 | 2012-10-31 | Jsr株式会社 | レジストパターン形成方法 |
US9719169B2 (en) | 2010-12-20 | 2017-08-01 | Novellus Systems, Inc. | System and apparatus for flowable deposition in semiconductor fabrication |
US9011591B2 (en) | 2011-09-21 | 2015-04-21 | Dow Global Technologies Llc | Compositions and antireflective coatings for photolithography |
US9366964B2 (en) | 2011-09-21 | 2016-06-14 | Dow Global Technologies Llc | Compositions and antireflective coatings for photolithography |
US9068086B2 (en) | 2011-12-21 | 2015-06-30 | Dow Global Technologies Llc | Compositions for antireflective coatings |
US8748317B2 (en) | 2012-08-03 | 2014-06-10 | Infineon Technologies Austria Ag | Method of manufacturing a semiconductor device including a dielectric structure |
US8999625B2 (en) * | 2013-02-14 | 2015-04-07 | International Business Machines Corporation | Silicon-containing antireflective coatings including non-polymeric silsesquioxanes |
US9847222B2 (en) | 2013-10-25 | 2017-12-19 | Lam Research Corporation | Treatment for flowable dielectric deposition on substrate surfaces |
US10049921B2 (en) | 2014-08-20 | 2018-08-14 | Lam Research Corporation | Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor |
US9502255B2 (en) | 2014-10-17 | 2016-11-22 | Lam Research Corporation | Low-k damage repair and pore sealing agents with photosensitive end groups |
KR101807208B1 (ko) | 2015-08-18 | 2017-12-08 | 주식회사 엘지화학 | 저굴절층 및 이를 포함하는 반사 방지 필름 |
US10388546B2 (en) | 2015-11-16 | 2019-08-20 | Lam Research Corporation | Apparatus for UV flowable dielectric |
US9916977B2 (en) | 2015-11-16 | 2018-03-13 | Lam Research Corporation | Low k dielectric deposition via UV driven photopolymerization |
KR102016710B1 (ko) | 2016-01-07 | 2019-09-02 | 주식회사 엘지화학 | 반사 방지 필름 |
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US6218317B1 (en) | 1999-04-19 | 2001-04-17 | National Semiconductor Corp. | Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low K, dual damascene interconnect integration |
US6509259B1 (en) | 1999-06-09 | 2003-01-21 | Alliedsignal Inc. | Process of using siloxane dielectric films in the integration of organic dielectric films in electronic devices |
JP2001022082A (ja) * | 1999-07-12 | 2001-01-26 | Jsr Corp | レジスト下層膜用組成物の製造方法 |
JP3361779B2 (ja) * | 1999-08-05 | 2003-01-07 | 日本山村硝子株式会社 | コーティング組成物 |
US6498399B2 (en) | 1999-09-08 | 2002-12-24 | Alliedsignal Inc. | Low dielectric-constant dielectric for etchstop in dual damascene backend of integrated circuits |
US6420088B1 (en) * | 2000-06-23 | 2002-07-16 | International Business Machines Corporation | Antireflective silicon-containing compositions as hardmask layer |
US7115531B2 (en) * | 2000-08-21 | 2006-10-03 | Dow Global Technologies Inc. | Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices |
US6441491B1 (en) | 2000-10-25 | 2002-08-27 | International Business Machines Corporation | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same |
US6406794B1 (en) * | 2001-02-08 | 2002-06-18 | Jsr Corporation | Film-forming composition |
JP2002299441A (ja) * | 2001-03-30 | 2002-10-11 | Jsr Corp | デュアルダマシン構造の形成方法 |
EP1493183B1 (de) * | 2002-04-02 | 2012-12-05 | Dow Global Technologies LLC | Prozess zur herstellung luftlückenhaltiger halbleitender bauelemente und resultierendes halbleiterbauelement |
KR101051276B1 (ko) * | 2002-04-02 | 2011-07-22 | 다우 글로벌 테크놀로지스 엘엘씨 | 이중 다마신 배선의 패터닝을 위한 3층 마스킹 구조물 |
TW200505966A (en) | 2003-04-02 | 2005-02-16 | Dow Global Technologies Inc | Organosilicate resin formulation for use in microelectronic devices |
-
2004
- 2004-03-26 TW TW093108398A patent/TW200505966A/zh unknown
- 2004-03-31 WO PCT/US2004/010330 patent/WO2004090965A2/en active Application Filing
- 2004-03-31 AT AT04758855T patent/ATE487231T1/de not_active IP Right Cessation
- 2004-03-31 US US10/549,356 patent/US8178159B2/en active Active
- 2004-03-31 JP JP2006509673A patent/JP2006522861A/ja active Pending
- 2004-03-31 DE DE602004029879T patent/DE602004029879D1/de not_active Expired - Lifetime
- 2004-03-31 CN CN2004800089433A patent/CN1768418B/zh not_active Expired - Fee Related
- 2004-03-31 KR KR1020057018491A patent/KR101197526B1/ko active IP Right Grant
- 2004-03-31 EP EP10177841A patent/EP2278611B1/de not_active Expired - Lifetime
- 2004-03-31 EP EP04758855A patent/EP1614151B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR20050108417A (ko) | 2005-11-16 |
US8178159B2 (en) | 2012-05-15 |
TW200505966A (en) | 2005-02-16 |
EP1614151B1 (de) | 2010-11-03 |
EP1614151A2 (de) | 2006-01-11 |
WO2004090965A2 (en) | 2004-10-21 |
EP2278611B1 (de) | 2012-09-19 |
DE602004029879D1 (de) | 2010-12-16 |
CN1768418A (zh) | 2006-05-03 |
CN1768418B (zh) | 2011-01-19 |
EP2278611A1 (de) | 2011-01-26 |
KR101197526B1 (ko) | 2012-11-09 |
JP2006522861A (ja) | 2006-10-05 |
WO2004090965A3 (en) | 2005-04-14 |
US20070185298A1 (en) | 2007-08-09 |
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