ATE483114T1 - Magnetlagereinrichtung mit verbesserter gehäusedurchführung bei vakuum - Google Patents

Magnetlagereinrichtung mit verbesserter gehäusedurchführung bei vakuum

Info

Publication number
ATE483114T1
ATE483114T1 AT05405492T AT05405492T ATE483114T1 AT E483114 T1 ATE483114 T1 AT E483114T1 AT 05405492 T AT05405492 T AT 05405492T AT 05405492 T AT05405492 T AT 05405492T AT E483114 T1 ATE483114 T1 AT E483114T1
Authority
AT
Austria
Prior art keywords
housing
bearing device
magnetic bearing
sensors
connection element
Prior art date
Application number
AT05405492T
Other languages
English (en)
Inventor
Philipp Buehler
Rene Larsonneur
Original Assignee
Mecos Traxler Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mecos Traxler Ag filed Critical Mecos Traxler Ag
Application granted granted Critical
Publication of ATE483114T1 publication Critical patent/ATE483114T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0457—Details of the power supply to the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
AT05405492T 2005-08-24 2005-08-24 Magnetlagereinrichtung mit verbesserter gehäusedurchführung bei vakuum ATE483114T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05405492A EP1757825B1 (de) 2005-08-24 2005-08-24 Magnetlagereinrichtung mit verbesserter Gehäusedurchführung bei Vakuum

Publications (1)

Publication Number Publication Date
ATE483114T1 true ATE483114T1 (de) 2010-10-15

Family

ID=35735286

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05405492T ATE483114T1 (de) 2005-08-24 2005-08-24 Magnetlagereinrichtung mit verbesserter gehäusedurchführung bei vakuum

Country Status (7)

Country Link
US (1) US7932655B2 (de)
EP (1) EP1757825B1 (de)
JP (1) JP5059005B2 (de)
CN (1) CN101243263B (de)
AT (1) ATE483114T1 (de)
DE (1) DE602005023866D1 (de)
WO (1) WO2007022657A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005023866D1 (de) * 2005-08-24 2010-11-11 Mecos Traxler Ag Magnetlagereinrichtung mit verbesserter Gehäusedurchführung bei Vakuum
DE102006016405A1 (de) * 2006-04-07 2007-10-11 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE202007012070U1 (de) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Stromdurchführung einer Vakuumpumpe
MY163687A (en) * 2008-04-17 2017-10-13 Synchrony Inc High-speed permanent magnet motor and generator with low-loss metal rotor
JP2011520410A (ja) 2008-04-18 2011-07-14 シンクロニー，インコーポレイテッド 集積電子工学を用いた磁力スラスト軸受
EP2154386A1 (de) * 2008-08-11 2010-02-17 Siemens Aktiengesellschaft Lagerbock mit einem geteilten magnetischen Radiallager und einem geteilten Fanglager in einem gemeinsamen geteilten Lagergehäuse
JP5281916B2 (ja) * 2009-02-10 2013-09-04 山洋電気株式会社 小型モータ
US20100230901A1 (en) * 2009-03-12 2010-09-16 Ferrotec (Uk), Ltd. Magnetic fluid rotary feedthrough with sensing and communication capability
DE102009022835B3 (de) * 2009-05-27 2011-03-03 Schaeffler Kg Verfahren zur Überwachung des Zustands eines Fanglagers einer Maschine
US9583991B2 (en) * 2009-06-24 2017-02-28 Synchrony, Inc. Systems, devices, and/or methods for managing magnetic bearings
WO2011163456A1 (en) 2010-06-23 2011-12-29 Synchrony, Inc. Split magnetic thrust bearing
FR2962602B1 (fr) * 2010-07-08 2013-08-30 Mecanique Magnetique Sa Procede et dispositif de liaison electrique a traversee etanche entre deux milieux differents
US20130129482A1 (en) * 2010-08-06 2013-05-23 Shimadzu Corporation Vacuum pump
DE102011004919A1 (de) * 2011-03-01 2012-09-06 Robert Bosch Gmbh Verbindungselement zwischen Motor und Steuereinheit
CN102425562B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
WO2013152061A2 (en) 2012-04-04 2013-10-10 Carrier Corporation Multiple-axis magnetic bearing and control of the magnetic bearing with active switch topologies
DE102012105969A1 (de) * 2012-07-04 2014-01-09 Hella Kgaa Hueck & Co. Drehwinkelsensor
JP6735526B2 (ja) * 2013-08-30 2020-08-05 エドワーズ株式会社 真空ポンプ
RU2545146C1 (ru) * 2013-09-17 2015-03-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Комсомольский-на-Амуре государственный технический университет" (ФГБОУ ВПО "КнАГТУ") Способ работы управляемого газомагнитного подшипникового узла и подшипниковый узел
US9941766B2 (en) 2014-04-04 2018-04-10 Solar Turbines Incorporated Penetrator power connector for an integrated rotary machine
EP3026278B1 (de) * 2014-11-27 2020-03-18 Skf Magnetic Mechatronics Magnetlager, rotierende Vorrichtung mit solch einem Magnetlager und Verfahren zur Herstellung solch eines Magnetlagers
JP6912196B2 (ja) * 2016-12-28 2021-08-04 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置
IT201700040835A1 (it) * 2017-04-12 2017-07-12 Agilent Tech Inc A Delaware Corporation Pompa da vuoto provvista di un passante elettrico da vuoto migliorato
CN107887721B (zh) * 2017-11-03 2019-12-13 珠海格力电器股份有限公司 磁悬浮轴承的接线结构及压缩机及空调
RU2677387C1 (ru) * 2017-11-27 2019-01-16 Федеральное государственное бюджетное образовательное учреждение высшего образования "ОРЛОВСКИЙ ГОСУДАРСТВЕННЫЙ УНИВЕРСИТЕТ имени И.С. ТУРГЕНЕВА" (ОГУ им. И.С. Тургенева) Управляемый газомагнитный подшипниковый узел
CN109281863A (zh) * 2018-11-21 2019-01-29 珠海格力电器股份有限公司 一种新型磁悬浮压缩机结构
EP3660319B1 (de) * 2018-11-27 2021-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schneidklemmen
JP7454928B2 (ja) * 2019-08-23 2024-03-25 エドワーズ株式会社 真空ポンプ及び真空ポンプに用いられる電磁石ユニット
WO2021059838A1 (ja) * 2019-09-27 2021-04-01 日本電産株式会社 回転電機および診断装置
EP3808988B1 (de) * 2020-03-27 2024-01-10 Pfeiffer Vacuum Technology AG Vakuumpumpe und verfahren zum überwachen einer vakuumpumpe
GB2616264A (en) * 2022-03-01 2023-09-06 Edwards Ltd Electrical feedthrough, vacuum apparatus and method for assembly

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490614A (en) * 1982-04-30 1984-12-25 Interad Systems, Inc. Housing for an ionization detector array in a tomographic scanner
CN1038859A (zh) * 1988-06-23 1990-01-17 弗拉基米尔帕夫罗维奇萨金夫 涡轮式分子真空泵
GB8830057D0 (en) * 1988-12-23 1989-02-22 Lucas Ind Plc An electrical connection arrangement and a method of providing an electrical connection
DE4038394A1 (de) * 1990-12-01 1992-06-04 Bosch Gmbh Robert Anordnung zur dichten durchfuehrung eines leiters durch die wand eines gehaeuses
IT1255190B (it) * 1992-06-30 1995-10-20 Giuseppe Marchisi Dispositivo di interfaccia di comando per un motore elettrico
WO1997033359A1 (fr) * 1996-03-07 1997-09-12 Seiko Epson Corporation Moteur et son procede de fabrication
JPH10184685A (ja) * 1996-12-25 1998-07-14 Fuji Xerox Co Ltd 磁気軸受
JPH11101235A (ja) * 1997-07-30 1999-04-13 Nippon Seiko Kk 磁気軸受
DE19827772C2 (de) * 1998-06-23 2000-09-14 Freudenberg Carl Fa Ringdichtung
JP2002122137A (ja) * 2000-10-10 2002-04-26 Sankyo Seiki Mfg Co Ltd 軸受装置
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
JP4462525B2 (ja) * 2001-03-14 2010-05-12 株式会社リコー 動圧空気軸受型ポリゴンスキャナおよびその加工方法
JP3593102B2 (ja) * 2002-01-08 2004-11-24 三菱電機株式会社 電動パワーステアリング装置
JP3894853B2 (ja) * 2002-07-11 2007-03-22 株式会社日本自動車部品総合研究所 回転機
EP1422492A1 (de) 2002-11-22 2004-05-26 Mecos Traxler AG Vorrichtung zur berührungslosen Abstandsmessung in mehrfache Richtungen
CN2597738Y (zh) * 2002-12-11 2004-01-07 中国科学院电工研究所 混合磁悬浮轴承
US6897587B1 (en) * 2003-01-21 2005-05-24 Calnetix Energy storage flywheel with minimum power magnetic bearings and motor/generator
US6882072B2 (en) * 2003-06-13 2005-04-19 Honeywell International Inc. Energy storage flywheel system with a power connector that integrally mounts one or more controller circuits
JP4293185B2 (ja) * 2003-07-04 2009-07-08 三菱電機株式会社 磁気軸受装置
JP2005033924A (ja) * 2003-07-14 2005-02-03 Honda Motor Co Ltd 電動機および電動機を搭載した電動パワーステアリング装置
EP1517042A1 (de) * 2003-09-17 2005-03-23 Mecos Traxler AG Magnetlagerung für eine Vakuumpumpe
US6921998B2 (en) * 2003-10-15 2005-07-26 Honeywell International, Inc. Energy storage flywheel auxiliary bearing system and method
FR2861142B1 (fr) 2003-10-16 2006-02-03 Mecanique Magnetique Sa Pompe a vide turbo moleculaire
JP4292983B2 (ja) * 2003-12-24 2009-07-08 市光工業株式会社 モータ駆動装置及び電動格納式ドアミラー
DE202004021791U1 (de) * 2004-05-29 2011-02-10 Krones Ag Maschine zum Ausrichten und Ausstatten von Gegenständen
EP1679492A1 (de) 2005-01-11 2006-07-12 Mecos Traxler AG Wirbelstromsensor und Magnetlagervorrichtung
DE602005023866D1 (de) * 2005-08-24 2010-11-11 Mecos Traxler Ag Magnetlagereinrichtung mit verbesserter Gehäusedurchführung bei Vakuum

Also Published As

Publication number Publication date
CN101243263A (zh) 2008-08-13
WO2007022657A1 (en) 2007-03-01
CN101243263B (zh) 2010-08-11
US7932655B2 (en) 2011-04-26
JP2009506733A (ja) 2009-02-12
EP1757825B1 (de) 2010-09-29
JP5059005B2 (ja) 2012-10-24
EP1757825A1 (de) 2007-02-28
DE602005023866D1 (de) 2010-11-11
US20080231128A1 (en) 2008-09-25

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