ATE481741T1 - Vorrichtung und verfahren zum gleichzeitigen temperieren mehrerer prozessiergüter - Google Patents

Vorrichtung und verfahren zum gleichzeitigen temperieren mehrerer prozessiergüter

Info

Publication number
ATE481741T1
ATE481741T1 AT00987008T AT00987008T ATE481741T1 AT E481741 T1 ATE481741 T1 AT E481741T1 AT 00987008 T AT00987008 T AT 00987008T AT 00987008 T AT00987008 T AT 00987008T AT E481741 T1 ATE481741 T1 AT E481741T1
Authority
AT
Austria
Prior art keywords
appliance
tempering
items
controlling
temperature
Prior art date
Application number
AT00987008T
Other languages
German (de)
English (en)
Inventor
Volker Probst
Original Assignee
Saint Gobain
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain filed Critical Saint Gobain
Application granted granted Critical
Publication of ATE481741T1 publication Critical patent/ATE481741T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/128—Annealing
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heat Treatment Of Articles (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
AT00987008T 1999-10-20 2000-10-20 Vorrichtung und verfahren zum gleichzeitigen temperieren mehrerer prozessiergüter ATE481741T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19950498 1999-10-20
PCT/DE2000/003720 WO2001029902A2 (de) 1999-10-20 2000-10-20 Vorrichtung und verfahren zum temperieren mehrerer prozessiergüter

Publications (1)

Publication Number Publication Date
ATE481741T1 true ATE481741T1 (de) 2010-10-15

Family

ID=7926265

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00987008T ATE481741T1 (de) 1999-10-20 2000-10-20 Vorrichtung und verfahren zum gleichzeitigen temperieren mehrerer prozessiergüter

Country Status (9)

Country Link
US (1) US6787485B1 (enExample)
EP (1) EP1277238B1 (enExample)
JP (1) JP4524438B2 (enExample)
CN (1) CN1309096C (enExample)
AT (1) ATE481741T1 (enExample)
AU (1) AU780287B2 (enExample)
DE (1) DE50015996D1 (enExample)
ES (1) ES2353106T3 (enExample)
WO (1) WO2001029902A2 (enExample)

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US7442413B2 (en) * 2005-11-18 2008-10-28 Daystar Technologies, Inc. Methods and apparatus for treating a work piece with a vaporous element
DE102005062977B3 (de) 2005-12-28 2007-09-13 Sulfurcell Solartechnik Gmbh Verfahren und Vorrichtung zur Umsetzung metallischer Vorläuferschichten zu Chalkopyritschichten von CIGSS-solarzellen
EP2180534B1 (en) * 2008-10-27 2013-10-16 Corning Incorporated Energy conversion devices and methods
US20110203655A1 (en) * 2010-02-22 2011-08-25 First Solar, Inc. Photovoltaic device protection layer
CA2705650A1 (en) * 2010-05-27 2011-11-27 Pyromaitre Inc. Heat treatment furnace
WO2012025607A1 (de) 2010-08-27 2012-03-01 Saint-Gobain Glass France Vorrichtung und verfahren zur wärmebehandlung mehrerer mehrschichtkörper
US20120264072A1 (en) * 2011-02-03 2012-10-18 Stion Corporation Method and apparatus for performing reactive thermal treatment of thin film pv material
ITRE20110055A1 (it) 2011-07-25 2013-01-26 Keraglass Engineering S R L Forno per la ricottura di lastre di vetro
US10100402B2 (en) 2011-10-07 2018-10-16 International Business Machines Corporation Substrate holder for graphene film synthesis
US20130344646A1 (en) * 2011-12-21 2013-12-26 Intermolecular, Inc. Absorbers for High-Efficiency Thin-Film PV
JP5927355B2 (ja) 2014-06-06 2016-06-01 日鉄住金テックスエンジ株式会社 熱間プレス用鋼板の遠赤外線式加熱炉
CN104810300A (zh) * 2015-03-31 2015-07-29 山西南烨立碁光电有限公司 新型Wafer Bonding设备
JP2017216397A (ja) * 2016-06-01 2017-12-07 株式会社アルバック アニール処理装置およびアニール処理方法
JP6673778B2 (ja) * 2016-08-02 2020-03-25 光洋サーモシステム株式会社 金属部品の製造方法、および、熱処理装置
EP3690962A1 (de) * 2019-01-31 2020-08-05 (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. Anordnung, vorrichtung und verfahren zum wärmebehandeln eines mehrschichtkörpers
KR102766394B1 (ko) * 2019-12-24 2025-02-11 삼성디스플레이 주식회사 유리 제품의 가공 장치, 유리 제품의 제조 방법, 유리 제품, 및 유리 제품을 포함하는 디스플레이 장치
KR102686945B1 (ko) * 2021-12-08 2024-07-22 한화모멘텀 주식회사 복층식 열처리로
WO2023245550A1 (en) * 2022-06-23 2023-12-28 Cnbm Research Institute For Advanced Glass Materials Group Co., Ltd. Energy-saving heat treatment device for metal substrate in corrosive gas
DE102023117945A1 (de) * 2023-07-07 2025-01-09 Singulus Technologies Aktiengesellschaft Schleusenkammer

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JPS6022835B2 (ja) 1978-08-17 1985-06-04 株式会社村田製作所 圧電性磁器の製造方法
US5090898A (en) 1979-11-16 1992-02-25 Smith Thomas M Infra-red heating
US4368111A (en) * 1980-12-17 1983-01-11 Phillips Petroleum Company Oil recovery from tar sands
JPS57183041A (en) 1981-05-06 1982-11-11 Nec Corp Annealing method for chemical semiconductor
JPS61129834A (ja) 1984-11-28 1986-06-17 Dainippon Screen Mfg Co Ltd 光照射型熱処理装置
US5011794A (en) 1989-05-01 1991-04-30 At&T Bell Laboratories Procedure for rapid thermal annealing of implanted semiconductors
DE59309438D1 (de) 1992-09-22 1999-04-15 Siemens Ag Schnelles verfahren zur erzeugung eines chalkopyrit-halbleiters auf einem substrat
JPH0778830A (ja) 1993-09-07 1995-03-20 Hitachi Ltd 半導体製造装置
JP2932918B2 (ja) 1993-12-22 1999-08-09 日本鋼管株式会社 α＋β型チタン合金押出材の製造方法
DE4413215C2 (de) * 1994-04-15 1996-03-14 Siemens Solar Gmbh Solarmodul mit Dünnschichtaufbau und Verfahren zu seiner Herstellung
JP2875768B2 (ja) 1994-11-30 1999-03-31 新日本無線株式会社 半導体基板の熱処理方法
US5861609A (en) 1995-10-02 1999-01-19 Kaltenbrunner; Guenter Method and apparatus for rapid thermal processing
US5851929A (en) 1996-01-04 1998-12-22 Micron Technology, Inc. Controlling semiconductor structural warpage in rapid thermal processing by selective and dynamic control of a heating source
JP3028467B2 (ja) * 1996-03-13 2000-04-04 日本無線株式会社 電磁加熱型活性化アニール装置
DE69637769D1 (de) * 1996-10-09 2009-01-15 Josuke Nakata Halbleitervorrichtung
US5871688A (en) * 1997-08-06 1999-02-16 North American Manufacturing Company Multi-stack annealer
CN1224924A (zh) * 1997-12-26 1999-08-04 佳能株式会社 热处理soi衬底的方法和设备及利用其制备soi衬底的方法
US6171982B1 (en) * 1997-12-26 2001-01-09 Canon Kabushiki Kaisha Method and apparatus for heat-treating an SOI substrate and method of preparing an SOI substrate by using the same
US6127202A (en) * 1998-07-02 2000-10-03 International Solar Electronic Technology, Inc. Oxide-based method of making compound semiconductor films and making related electronic devices

Also Published As

Publication number Publication date
EP1277238B1 (de) 2010-09-15
DE50015996D1 (de) 2010-10-28
CN1309096C (zh) 2007-04-04
JP2003524745A (ja) 2003-08-19
WO2001029902A2 (de) 2001-04-26
AU2345001A (en) 2001-04-30
JP4524438B2 (ja) 2010-08-18
EP1277238A2 (de) 2003-01-22
ES2353106T3 (es) 2011-02-25
CN1411613A (zh) 2003-04-16
AU780287B2 (en) 2005-03-10
US6787485B1 (en) 2004-09-07
WO2001029902A3 (de) 2002-11-07

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Legal Events

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