CN1309096C - 用于退火多种处理物的装置和方法 - Google Patents
用于退火多种处理物的装置和方法 Download PDFInfo
- Publication number
- CN1309096C CN1309096C CNB008173818A CN00817381A CN1309096C CN 1309096 C CN1309096 C CN 1309096C CN B008173818 A CNB008173818 A CN B008173818A CN 00817381 A CN00817381 A CN 00817381A CN 1309096 C CN1309096 C CN 1309096C
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Links
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/34—Methods of heating
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Heat Treatment Of Articles (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
Description
Claims (31)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19950498.9 | 1999-10-20 | ||
DE19950498 | 1999-10-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1411613A CN1411613A (zh) | 2003-04-16 |
CN1309096C true CN1309096C (zh) | 2007-04-04 |
Family
ID=7926265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB008173818A Expired - Lifetime CN1309096C (zh) | 1999-10-20 | 2000-10-20 | 用于退火多种处理物的装置和方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6787485B1 (zh) |
EP (1) | EP1277238B1 (zh) |
JP (1) | JP4524438B2 (zh) |
CN (1) | CN1309096C (zh) |
AT (1) | ATE481741T1 (zh) |
AU (1) | AU780287B2 (zh) |
DE (1) | DE50015996D1 (zh) |
ES (1) | ES2353106T3 (zh) |
WO (1) | WO2001029902A2 (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7442413B2 (en) * | 2005-11-18 | 2008-10-28 | Daystar Technologies, Inc. | Methods and apparatus for treating a work piece with a vaporous element |
DE102005062977B3 (de) * | 2005-12-28 | 2007-09-13 | Sulfurcell Solartechnik Gmbh | Verfahren und Vorrichtung zur Umsetzung metallischer Vorläuferschichten zu Chalkopyritschichten von CIGSS-solarzellen |
EP2180534B1 (en) * | 2008-10-27 | 2013-10-16 | Corning Incorporated | Energy conversion devices and methods |
US20110203655A1 (en) * | 2010-02-22 | 2011-08-25 | First Solar, Inc. | Photovoltaic device protection layer |
CA2705650A1 (en) * | 2010-05-27 | 2011-11-27 | Pyromaitre Inc. | Heat treatment furnace |
KR101590684B1 (ko) * | 2010-08-27 | 2016-02-01 | 쌩-고벵 글래스 프랑스 | 복수의 다층체를 열처리하기 위한 장치 및 방법 |
US20120264072A1 (en) * | 2011-02-03 | 2012-10-18 | Stion Corporation | Method and apparatus for performing reactive thermal treatment of thin film pv material |
ITRE20110055A1 (it) * | 2011-07-25 | 2013-01-26 | Keraglass Engineering S R L | Forno per la ricottura di lastre di vetro |
US10100402B2 (en) | 2011-10-07 | 2018-10-16 | International Business Machines Corporation | Substrate holder for graphene film synthesis |
US20130344646A1 (en) * | 2011-12-21 | 2013-12-26 | Intermolecular, Inc. | Absorbers for High-Efficiency Thin-Film PV |
US11655515B2 (en) | 2014-06-06 | 2023-05-23 | Nippon Steel & Sumikin Texeng. Co., Ltd. | Far-infrared radiation heating furnace for steel sheet for hot stamping |
CN104810300A (zh) * | 2015-03-31 | 2015-07-29 | 山西南烨立碁光电有限公司 | 新型Wafer Bonding设备 |
JP2017216397A (ja) * | 2016-06-01 | 2017-12-07 | 株式会社アルバック | アニール処理装置およびアニール処理方法 |
JP6673778B2 (ja) * | 2016-08-02 | 2020-03-25 | 光洋サーモシステム株式会社 | 金属部品の製造方法、および、熱処理装置 |
EP3690962A1 (de) * | 2019-01-31 | 2020-08-05 | (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. | Anordnung, vorrichtung und verfahren zum wärmebehandeln eines mehrschichtkörpers |
KR102686945B1 (ko) * | 2021-12-08 | 2024-07-22 | 한화모멘텀 주식회사 | 복층식 열처리로 |
JP2024532642A (ja) | 2022-06-23 | 2024-09-10 | 中建材玻璃新材料研究院集▲団▼有限公司 | 腐食性ガス内の金属基材の省エネルギー型熱処理装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09246277A (ja) * | 1996-03-13 | 1997-09-19 | Japan Radio Co Ltd | 電磁加熱型活性化アニール装置 |
US5871688A (en) * | 1997-08-06 | 1999-02-16 | North American Manufacturing Company | Multi-stack annealer |
CN1224924A (zh) * | 1997-12-26 | 1999-08-04 | 佳能株式会社 | 热处理soi衬底的方法和设备及利用其制备soi衬底的方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6022835B2 (ja) | 1978-08-17 | 1985-06-04 | 株式会社村田製作所 | 圧電性磁器の製造方法 |
US5090898A (en) | 1979-11-16 | 1992-02-25 | Smith Thomas M | Infra-red heating |
US4368111A (en) * | 1980-12-17 | 1983-01-11 | Phillips Petroleum Company | Oil recovery from tar sands |
JPS57183041A (en) * | 1981-05-06 | 1982-11-11 | Nec Corp | Annealing method for chemical semiconductor |
JPS61129834A (ja) * | 1984-11-28 | 1986-06-17 | Dainippon Screen Mfg Co Ltd | 光照射型熱処理装置 |
US5011794A (en) * | 1989-05-01 | 1991-04-30 | At&T Bell Laboratories | Procedure for rapid thermal annealing of implanted semiconductors |
JP3386127B2 (ja) | 1992-09-22 | 2003-03-17 | シーメンス アクチエンゲゼルシヤフト | 基板上に黄銅鉱半導体を迅速に作成する方法 |
JPH0778830A (ja) | 1993-09-07 | 1995-03-20 | Hitachi Ltd | 半導体製造装置 |
JP2932918B2 (ja) | 1993-12-22 | 1999-08-09 | 日本鋼管株式会社 | α+β型チタン合金押出材の製造方法 |
DE4413215C2 (de) * | 1994-04-15 | 1996-03-14 | Siemens Solar Gmbh | Solarmodul mit Dünnschichtaufbau und Verfahren zu seiner Herstellung |
JP2875768B2 (ja) | 1994-11-30 | 1999-03-31 | 新日本無線株式会社 | 半導体基板の熱処理方法 |
US5861609A (en) | 1995-10-02 | 1999-01-19 | Kaltenbrunner; Guenter | Method and apparatus for rapid thermal processing |
US5851929A (en) * | 1996-01-04 | 1998-12-22 | Micron Technology, Inc. | Controlling semiconductor structural warpage in rapid thermal processing by selective and dynamic control of a heating source |
DE69637769D1 (de) * | 1996-10-09 | 2009-01-15 | Josuke Nakata | Halbleitervorrichtung |
US6171982B1 (en) * | 1997-12-26 | 2001-01-09 | Canon Kabushiki Kaisha | Method and apparatus for heat-treating an SOI substrate and method of preparing an SOI substrate by using the same |
US6127202A (en) * | 1998-07-02 | 2000-10-03 | International Solar Electronic Technology, Inc. | Oxide-based method of making compound semiconductor films and making related electronic devices |
-
2000
- 2000-10-20 AU AU23450/01A patent/AU780287B2/en not_active Ceased
- 2000-10-20 JP JP2001531149A patent/JP4524438B2/ja not_active Expired - Lifetime
- 2000-10-20 DE DE50015996T patent/DE50015996D1/de not_active Expired - Lifetime
- 2000-10-20 US US10/111,283 patent/US6787485B1/en not_active Expired - Lifetime
- 2000-10-20 AT AT00987008T patent/ATE481741T1/de not_active IP Right Cessation
- 2000-10-20 CN CNB008173818A patent/CN1309096C/zh not_active Expired - Lifetime
- 2000-10-20 EP EP00987008A patent/EP1277238B1/de not_active Expired - Lifetime
- 2000-10-20 ES ES00987008T patent/ES2353106T3/es not_active Expired - Lifetime
- 2000-10-20 WO PCT/DE2000/003720 patent/WO2001029902A2/de active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09246277A (ja) * | 1996-03-13 | 1997-09-19 | Japan Radio Co Ltd | 電磁加熱型活性化アニール装置 |
US5871688A (en) * | 1997-08-06 | 1999-02-16 | North American Manufacturing Company | Multi-stack annealer |
CN1224924A (zh) * | 1997-12-26 | 1999-08-04 | 佳能株式会社 | 热处理soi衬底的方法和设备及利用其制备soi衬底的方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2001029902A3 (de) | 2002-11-07 |
ATE481741T1 (de) | 2010-10-15 |
JP4524438B2 (ja) | 2010-08-18 |
EP1277238A2 (de) | 2003-01-22 |
AU780287B2 (en) | 2005-03-10 |
DE50015996D1 (de) | 2010-10-28 |
JP2003524745A (ja) | 2003-08-19 |
CN1411613A (zh) | 2003-04-16 |
EP1277238B1 (de) | 2010-09-15 |
WO2001029902A2 (de) | 2001-04-26 |
AU2345001A (en) | 2001-04-30 |
ES2353106T3 (es) | 2011-02-25 |
US6787485B1 (en) | 2004-09-07 |
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