ATE478343T1 - Messaufnehmer für dynamische grössen - Google Patents

Messaufnehmer für dynamische grössen

Info

Publication number
ATE478343T1
ATE478343T1 AT04017412T AT04017412T ATE478343T1 AT E478343 T1 ATE478343 T1 AT E478343T1 AT 04017412 T AT04017412 T AT 04017412T AT 04017412 T AT04017412 T AT 04017412T AT E478343 T1 ATE478343 T1 AT E478343T1
Authority
AT
Austria
Prior art keywords
piezoelectric vibrators
current
signal
dynamic
circuit
Prior art date
Application number
AT04017412T
Other languages
English (en)
Inventor
Muneharu Yamashita
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE478343T1 publication Critical patent/ATE478343T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measuring Fluid Pressure (AREA)
  • Steroid Compounds (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT04017412T 2003-09-08 2004-07-22 Messaufnehmer für dynamische grössen ATE478343T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003315945A JP4066916B2 (ja) 2003-09-08 2003-09-08 力学量センサ

Publications (1)

Publication Number Publication Date
ATE478343T1 true ATE478343T1 (de) 2010-09-15

Family

ID=34131946

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04017412T ATE478343T1 (de) 2003-09-08 2004-07-22 Messaufnehmer für dynamische grössen

Country Status (6)

Country Link
US (1) US7109636B2 (de)
EP (1) EP1512976B1 (de)
JP (1) JP4066916B2 (de)
CN (1) CN100395552C (de)
AT (1) ATE478343T1 (de)
DE (1) DE602004028696D1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7179746B2 (en) * 2002-12-02 2007-02-20 Foundation fõr Advancement of Internati{dot over (o)}nal Science Method of surface treatment for manufacturing semiconductor device
JP4654913B2 (ja) * 2003-07-30 2011-03-23 株式会社村田製作所 力学量センサ
WO2005101029A1 (ja) * 2004-03-30 2005-10-27 Murata Manufacturing Co., Ltd. 力学量センサ
JP4410051B2 (ja) * 2004-07-22 2010-02-03 本田技研工業株式会社 角速度計測装置および脚式移動ロボット
FI120803B (fi) * 2007-05-21 2010-03-15 Waertsilae Finland Oy Ilmaisinjärjestely
CN102439405B (zh) * 2009-05-27 2013-10-16 松下电器产业株式会社 物理量传感器
JP5669452B2 (ja) * 2009-07-28 2015-02-12 キヤノン株式会社 振動体の製造方法
USRE47211E1 (en) 2009-10-01 2019-01-22 Panasonic Corporation Inertial sensor
SG10201507731XA (en) 2010-09-22 2015-10-29 Univ Singapore Vibration detector and method
JP5638419B2 (ja) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
US8854062B2 (en) * 2011-08-29 2014-10-07 Robert Bosch Gmbh Readout circuit for self-balancing capacitor bridge
EP2767808B9 (de) * 2013-02-14 2021-09-01 Meggitt SA Messschaltung
CN104101763B (zh) * 2013-04-03 2017-11-14 中芯国际集成电路制造(上海)有限公司 一种芯片上传感器
JP6581443B2 (ja) * 2015-09-04 2019-09-25 日立オートモティブシステムズ株式会社 センサ装置
CN105467150B (zh) * 2015-12-29 2018-03-30 嘉兴学院 一种同时测量旋转角速度、角加速度的便携式发电机
JP6615638B2 (ja) * 2016-02-29 2019-12-04 日立オートモティブシステムズ株式会社 慣性力検出装置
RU2671290C1 (ru) * 2017-11-20 2018-10-30 ООО "ГлобалТест" Пьезоэлектрический преобразователь
CN108761128B (zh) * 2018-09-05 2024-04-02 中国工程物理研究院电子工程研究所 压电振动激励自诊断mems加速度计表芯及加速度计
US20240068812A1 (en) * 2022-08-24 2024-02-29 Panasonic Intellectual Property Management Co., Ltd. Continuous monitoring of gyroscope sensor forced-to-rebalance loop electronics

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3097464B2 (ja) 1994-09-26 2000-10-10 株式会社村田製作所 加速度センサ
US5939630A (en) * 1995-05-30 1999-08-17 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3752737B2 (ja) * 1996-08-12 2006-03-08 トヨタ自動車株式会社 角速度検出装置
JPH10197255A (ja) * 1997-01-10 1998-07-31 Sony Corp 角速度センサー
JP3709793B2 (ja) 2001-01-29 2005-10-26 株式会社村田製作所 振動ジャイロおよびそれを用いた電子装置および振動ジャイロの自己診断方法
JP3514240B2 (ja) * 2001-02-19 2004-03-31 株式会社村田製作所 加速度センサ
JP4843855B2 (ja) 2001-03-09 2011-12-21 パナソニック株式会社 角速度センサ
JP4066786B2 (ja) * 2001-12-28 2008-03-26 株式会社村田製作所 力学量センサ

Also Published As

Publication number Publication date
EP1512976B1 (de) 2010-08-18
CN1595172A (zh) 2005-03-16
CN100395552C (zh) 2008-06-18
EP1512976A1 (de) 2005-03-09
DE602004028696D1 (de) 2010-09-30
US20050052096A1 (en) 2005-03-10
US7109636B2 (en) 2006-09-19
JP2005083884A (ja) 2005-03-31
JP4066916B2 (ja) 2008-03-26

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Legal Events

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