ATE473517T1 - Präzisions-substratspeicherbehälter und halteglied dafür - Google Patents

Präzisions-substratspeicherbehälter und halteglied dafür

Info

Publication number
ATE473517T1
ATE473517T1 AT02730786T AT02730786T ATE473517T1 AT E473517 T1 ATE473517 T1 AT E473517T1 AT 02730786 T AT02730786 T AT 02730786T AT 02730786 T AT02730786 T AT 02730786T AT E473517 T1 ATE473517 T1 AT E473517T1
Authority
AT
Austria
Prior art keywords
contacting part
shaped
parts
precision substrates
peripheries
Prior art date
Application number
AT02730786T
Other languages
English (en)
Inventor
Toshitsugu Yajima
Masato Hosoi
Hideo Kudo
Takashi Matsuo
Original Assignee
Shinetsu Polymer Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Polymer Co filed Critical Shinetsu Polymer Co
Application granted granted Critical
Publication of ATE473517T1 publication Critical patent/ATE473517T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
    • H10P72/1912—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like characterised by shock absorbing elements, e.g. retainers or cushions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/16—Making multilayered or multicoloured articles

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Manipulator (AREA)
AT02730786T 2001-05-30 2002-05-30 Präzisions-substratspeicherbehälter und halteglied dafür ATE473517T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001161773A JP3938293B2 (ja) 2001-05-30 2001-05-30 精密基板収納容器及びその押さえ部材
PCT/JP2002/005274 WO2002097879A1 (en) 2001-05-30 2002-05-30 Precision substrate storage container and retaining member therefor

Publications (1)

Publication Number Publication Date
ATE473517T1 true ATE473517T1 (de) 2010-07-15

Family

ID=19004998

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02730786T ATE473517T1 (de) 2001-05-30 2002-05-30 Präzisions-substratspeicherbehälter und halteglied dafür

Country Status (8)

Country Link
US (1) US7017749B2 (de)
EP (1) EP1394850B1 (de)
JP (1) JP3938293B2 (de)
KR (1) KR100890884B1 (de)
AT (1) ATE473517T1 (de)
DE (1) DE60236931D1 (de)
TW (1) TWI272690B (de)
WO (1) WO2002097879A1 (de)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4133407B2 (ja) 2003-02-13 2008-08-13 ミライアル株式会社 薄板収納容器
TWI283038B (en) 2002-12-02 2007-06-21 Miraial Co Ltd Thin plate storage container
JP4146718B2 (ja) 2002-12-27 2008-09-10 ミライアル株式会社 薄板支持容器
JP4681221B2 (ja) * 2003-12-02 2011-05-11 ミライアル株式会社 薄板支持容器
CN1951164B (zh) * 2004-05-13 2010-06-16 松下电器产业株式会社 元件供给板收容体及元件供给装置
JP4667769B2 (ja) 2004-06-11 2011-04-13 信越ポリマー株式会社 基板収納容器
US20060042998A1 (en) * 2004-08-24 2006-03-02 Haggard Clifton C Cushion for packing disks such as semiconductor wafers
WO2006035894A1 (ja) * 2004-09-29 2006-04-06 Hoya Corporation 薄膜付基板の支持部材、薄膜付基板の収納容器、マスクブランク収納体、転写マスク収納体、及び薄膜付基板の輸送方法
US7523830B2 (en) * 2004-11-23 2009-04-28 Entegris, Inc. Wafer container with secondary wafer restraint system
JP2006269771A (ja) * 2005-03-24 2006-10-05 Miraial Kk 気密容器
JP4584023B2 (ja) * 2005-05-17 2010-11-17 信越ポリマー株式会社 基板収納容器及びその製造方法
KR100693937B1 (ko) * 2005-10-13 2007-03-12 정자훈 멀티미디어 기능 강의대용 커버개폐레일장치
JP4827500B2 (ja) * 2005-11-16 2011-11-30 信越ポリマー株式会社 梱包体
US8528738B2 (en) * 2006-06-13 2013-09-10 Entegris, Inc. Reusable resilient cushion for wafer container
KR101472145B1 (ko) * 2006-11-07 2014-12-12 신에츠 폴리머 가부시키가이샤 기판 수납 용기
US20080157455A1 (en) * 2006-12-29 2008-07-03 Applied Materials, Inc. Compliant substrate holding assembly
US7967146B2 (en) * 2007-08-08 2011-06-28 E.Pak International, Inc. Container
TWM356220U (en) 2007-08-08 2009-05-01 E Pak International Inc Container
WO2009060782A1 (ja) 2007-11-09 2009-05-14 Shin-Etsu Polymer Co., Ltd. リテーナ及び基板収納容器
JP4764865B2 (ja) * 2007-11-13 2011-09-07 信越ポリマー株式会社 リテーナ及び基板収納容器
JP4852023B2 (ja) * 2007-11-19 2012-01-11 信越ポリマー株式会社 リテーナ及び基板収納容器
USD639154S1 (en) 2007-11-21 2011-06-07 E.Pak International, Inc. Container
JP5153399B2 (ja) * 2008-03-19 2013-02-27 三洋電機株式会社 基板ケース及び処理方法
EP2270847A4 (de) 2008-04-25 2012-12-19 Shinetsu Polymer Co Halter und substratspeicherungsbehälter mit diesem halter
JP5160298B2 (ja) * 2008-05-08 2013-03-13 信越ポリマー株式会社 基板収納容器
JP2009283537A (ja) * 2008-05-20 2009-12-03 Shin Etsu Polymer Co Ltd 基板収納容器
JP5279372B2 (ja) * 2008-07-07 2013-09-04 信越ポリマー株式会社 処理治具用の収納ケース
TWI337162B (en) * 2008-07-31 2011-02-11 Gudeng Prec Industral Co Ltd A wafer container with constraints
TWI384577B (zh) * 2008-07-31 2013-02-01 家登精密工業股份有限公司 門上凹陷區域兩旁配置有晶圓限制件模組之前開式晶圓盒
US7971722B2 (en) * 2008-08-08 2011-07-05 Gudeng Precision Industral Co, Ltd Wafer container with restrainer
TWI400766B (zh) * 2008-08-27 2013-07-01 家登精密工業股份有限公司 具一體成形晶圓限制件模組之前開式晶圓盒
TWI343353B (en) * 2008-11-04 2011-06-11 Gudeng Prec Industral Co Ltd A wafer container having the snap-fitting constraint module
WO2010054130A1 (en) * 2008-11-05 2010-05-14 Tosoh Quartz, Inc. High strength camfer on quartzware
JP2011018771A (ja) * 2009-07-09 2011-01-27 Shin Etsu Polymer Co Ltd 基板収納容器
CN102883973B (zh) 2010-03-11 2016-02-24 恩特格林斯公司 薄晶片运载器
JP5441797B2 (ja) * 2010-04-05 2014-03-12 信越ポリマー株式会社 リテーナ及び基板収納容器
JP5483351B2 (ja) * 2010-06-17 2014-05-07 信越ポリマー株式会社 基板収納容器
KR20130126620A (ko) * 2010-10-19 2013-11-20 엔테그리스, 아이엔씨. 웨이퍼 쿠션을 구비한 전면 개방형 웨이퍼 컨테이너
KR101411367B1 (ko) 2012-01-17 2014-06-27 비아이 이엠티 주식회사 웨이퍼 카세트용 쿠션
US9099514B2 (en) 2012-03-21 2015-08-04 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer holder with tapered region
KR102093202B1 (ko) * 2012-04-09 2020-03-25 엔테그리스, 아이엔씨. 웨이퍼 운송장치
CN104471696B (zh) 2012-05-04 2018-06-26 恩特格里斯公司 具有安装在门上的运输缓冲垫的晶片容器
WO2014057573A1 (ja) * 2012-10-12 2014-04-17 ミライアル株式会社 蓋体側基板支持部の汚染を抑制する基板収納容器
WO2014057572A1 (ja) * 2012-10-12 2014-04-17 ミライアル株式会社 基板収納容器
TWM453240U (zh) * 2013-01-10 2013-05-11 家登精密工業股份有限公司 具有保護套的限制件
US9304690B2 (en) 2014-05-07 2016-04-05 HGST Netherlands B.V. System and method for peer-to-peer PCIe storage transfers
JP6391333B2 (ja) * 2014-07-10 2018-09-19 ミライアル株式会社 基板収納容器及びリテーナ
KR20160033910A (ko) * 2014-09-19 2016-03-29 삼성전자주식회사 리테이너 및 이를 포함하는 웨이퍼 캐리어
JP6430195B2 (ja) * 2014-09-29 2018-11-28 株式会社Ｓｃｒｅｅｎホールディングス 基板収納容器
CN107210251B (zh) * 2014-12-18 2020-11-03 恩特格里斯公司 具有冲击状态保护的晶片容器
JP6369687B2 (ja) * 2015-01-07 2018-08-08 信越ポリマー株式会社 基板収納容器
JP2016149492A (ja) * 2015-02-13 2016-08-18 ミライアル株式会社 基板収納容器
TWM510539U (zh) * 2015-03-13 2015-10-11 安堤格里斯公司 使用於膜架傳送裝置的修改彈簧墊
WO2016154536A1 (en) * 2015-03-25 2016-09-29 Entegris, Inc. Wafer container with cross-slotting protection
KR102374961B1 (ko) * 2015-04-10 2022-03-15 신에츠 폴리머 가부시키가이샤 기판 수납 용기
US11222800B2 (en) * 2017-08-09 2022-01-11 Mtraial Co., Ltd. Substrate storage container
CN107521807B (zh) * 2017-08-31 2019-02-05 重庆旭永科技发展有限公司 一种多用托盘
KR20220035198A (ko) * 2019-07-19 2022-03-21 엔테그리스, 아이엔씨. 웨이퍼 쿠션
JP7313975B2 (ja) * 2019-08-27 2023-07-25 信越ポリマー株式会社 基板収納容器
CN115605412A (zh) * 2020-05-19 2023-01-13 未来儿股份有限公司（Jp） 基板收纳容器
JP7719170B2 (ja) * 2021-04-06 2025-08-05 信越ポリマー株式会社 基板収納容器
US20260026299A1 (en) * 2022-05-31 2026-01-22 Miraial Co., Ltd. Substrate storing container and lid-body-side substrate support part
CN121100400A (zh) * 2023-06-09 2025-12-09 未来儿股份有限公司 基板收纳容器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4061228A (en) * 1976-12-20 1977-12-06 Fluoroware, Inc. Shipping container for substrates
US5253755A (en) * 1991-03-20 1993-10-19 Fluoroware, Inc. Cushioned cover for disk container
US5273159A (en) * 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
US5555981A (en) * 1992-05-26 1996-09-17 Empak, Inc. Wafer suspension box
JP2908985B2 (ja) 1994-07-19 1999-06-23 信越ポリマー株式会社 ウェーハ収納容器のウェーハ抑え
JPH08204356A (ja) * 1995-01-27 1996-08-09 Mitsubishi Electric Corp 電子機器筺体の防水構造
JP2779143B2 (ja) * 1995-03-17 1998-07-23 信越ポリマー株式会社 半導体ウェーハ収納容器
JP3968142B2 (ja) * 1997-02-20 2007-08-29 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 包装容器における半導体ウェハの支持溝構造
US6267245B1 (en) * 1998-07-10 2001-07-31 Fluoroware, Inc. Cushioned wafer container
DE69935835T2 (de) * 1998-10-30 2007-12-27 Bridgestone Corp. Abgedichtete Deckel und deren Herstellungsverfahren
JP3556519B2 (ja) * 1999-04-30 2004-08-18 信越ポリマー株式会社 基板収納容器の識別構造及び基板収納容器の識別方法

Also Published As

Publication number Publication date
EP1394850A1 (de) 2004-03-03
KR100890884B1 (ko) 2009-03-31
JP2002353301A (ja) 2002-12-06
EP1394850B1 (de) 2010-07-07
JP3938293B2 (ja) 2007-06-27
TWI272690B (en) 2007-02-01
KR20030022279A (ko) 2003-03-15
WO2002097879A1 (en) 2002-12-05
US20030221985A1 (en) 2003-12-04
DE60236931D1 (de) 2010-08-19
EP1394850A4 (de) 2006-03-08
US7017749B2 (en) 2006-03-28

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Legal Events

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