ATE360815T1 - Quartzkristall sensorzelle - Google Patents
Quartzkristall sensorzelleInfo
- Publication number
- ATE360815T1 ATE360815T1 AT01962898T AT01962898T ATE360815T1 AT E360815 T1 ATE360815 T1 AT E360815T1 AT 01962898 T AT01962898 T AT 01962898T AT 01962898 T AT01962898 T AT 01962898T AT E360815 T1 ATE360815 T1 AT E360815T1
- Authority
- AT
- Austria
- Prior art keywords
- quartz crystal
- sensor
- crystal sensor
- well
- sensor cell
- Prior art date
Links
- 230000002093 peripheral effect Effects 0.000 abstract 3
- 239000013078 crystal Substances 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/222—Constructional or flow details for analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Glass Compositions (AREA)
- Seal Device For Vehicle (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0019336A GB0019336D0 (en) | 2000-08-08 | 2000-08-08 | Novel device |
GB0019340A GB0019340D0 (en) | 2000-08-08 | 2000-08-08 | Novel device |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE360815T1 true ATE360815T1 (de) | 2007-05-15 |
Family
ID=26244807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01962898T ATE360815T1 (de) | 2000-08-08 | 2001-08-02 | Quartzkristall sensorzelle |
Country Status (8)
Country | Link |
---|---|
US (1) | US7055377B2 (de) |
EP (2) | EP1811292A1 (de) |
JP (1) | JP4794112B2 (de) |
AT (1) | ATE360815T1 (de) |
AU (2) | AU8397701A (de) |
DE (1) | DE60128110T2 (de) |
RU (1) | RU2242750C2 (de) |
WO (1) | WO2002012873A2 (de) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1675531B (zh) * | 2002-06-19 | 2010-05-26 | 瑞典生物传感器应用股份公司 | 用于检测溶液中的几种单独分析物的系统、设备和方法以及其中使用的一次性流动池 |
SE0203772D0 (sv) * | 2002-12-19 | 2002-12-19 | Attana Ab | Piezoelectric sensor arrangement |
JP2004245613A (ja) * | 2003-02-12 | 2004-09-02 | Japan Science & Technology Agency | フロ−セル型qcm装置および試料測定方法 |
SE0300375D0 (sv) * | 2003-02-12 | 2003-02-12 | Attana Ab | Piezoelectric resonator |
US8766745B1 (en) | 2007-07-25 | 2014-07-01 | Hrl Laboratories, Llc | Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same |
JP4266740B2 (ja) * | 2003-07-28 | 2009-05-20 | 株式会社ソディック | コアレス交流リニアモータ |
DE102004041595A1 (de) | 2004-04-30 | 2005-12-01 | Markus Gruber | Messzelle sowie Verfahren zum Herstellen einer Messzelle und Messvorrichtung zur Aufnahme einer derartigen Messzelle |
JP2006162538A (ja) * | 2004-12-10 | 2006-06-22 | Seiko Instruments Inc | 微量質量測定装置 |
CN101080624B (zh) | 2004-12-15 | 2011-06-08 | 日本电波工业株式会社 | 石英传感器和感知装置 |
WO2006064954A1 (ja) * | 2004-12-15 | 2006-06-22 | Nihon Dempa Kogyo Co., Ltd | 水晶センサ及び感知装置 |
WO2006064952A1 (ja) * | 2004-12-15 | 2006-06-22 | Nihon Dempa Kogyo Co., Ltd | 成分測定装置 |
JP4134025B2 (ja) * | 2004-12-28 | 2008-08-13 | 日本電波工業株式会社 | 感知装置 |
US7980149B2 (en) | 2005-04-01 | 2011-07-19 | Inverness Medical Switzerland Gmbh | Docking mechanism for a sensor cartridge |
GB0506710D0 (en) * | 2005-04-01 | 2005-05-11 | Akubio Ltd | Cartridge for a fluid sample analyser |
US7611908B2 (en) * | 2005-05-02 | 2009-11-03 | Bioscale, Inc. | Method and apparatus for therapeutic drug monitoring using an acoustic device |
US7648844B2 (en) * | 2005-05-02 | 2010-01-19 | Bioscale, Inc. | Method and apparatus for detection of analyte using an acoustic device |
US7749445B2 (en) * | 2005-05-02 | 2010-07-06 | Bioscale, Inc. | Method and apparatus for analyzing bioprocess fluids |
US7300631B2 (en) * | 2005-05-02 | 2007-11-27 | Bioscale, Inc. | Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles |
EP1912053A1 (de) | 2005-08-03 | 2008-04-16 | Nihon Dempa Kogyo Co., Ltd. | Konzentrationssensor und konzentrationsnachweisvorrichtung |
DE102006015512B4 (de) | 2006-03-31 | 2010-01-21 | Andreas Hettich Gmbh & Co. Kg | Vorrichtung aus einer Messkammer und einem über einen Schnellverschluss in die Messkammer integrierbaren Resonator für die Flüssigkeitssensorik |
JP4772563B2 (ja) * | 2006-03-31 | 2011-09-14 | 日本製紙株式会社 | 異物の沈積度合を測定する方法 |
JP4299325B2 (ja) * | 2006-08-30 | 2009-07-22 | 日本電波工業株式会社 | 水晶センサ及び感知装置 |
GB0619008D0 (en) * | 2006-09-27 | 2006-11-08 | Akubio Ltd | Cartridge for a fluid sample analyser |
GB0708346D0 (en) * | 2007-04-30 | 2007-06-06 | Attana Ab | Sensor |
US10266398B1 (en) | 2007-07-25 | 2019-04-23 | Hrl Laboratories, Llc | ALD metal coatings for high Q MEMS structures |
WO2009033056A1 (en) * | 2007-09-06 | 2009-03-12 | Bioscale, Inc. | Reusable detection surfaces and methods of using same |
US7802466B2 (en) | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
US8397762B2 (en) * | 2008-02-04 | 2013-03-19 | Bioscale, Inc. | Fluidic system with improved flow characteristics |
GB0803257D0 (en) | 2008-02-22 | 2008-04-02 | Univ Leeds | Apparatus for inspection of a fliuid and method |
ES2629101T3 (es) * | 2008-05-05 | 2017-08-07 | Kistler Holding Ag | Célula de carga |
FR2931550B1 (fr) * | 2008-05-20 | 2012-12-07 | Commissariat Energie Atomique | Dispositif pour la detection gravimetrique de particules en milieu fluide comprenant un oscillateur entre deux canaux fluidiques, procede de realisation et methode de mise en oeuvre du dispositif |
FR2931549B1 (fr) * | 2008-05-20 | 2017-12-08 | Commissariat A L'energie Atomique | Dispositif pour la detection gravimetrique de particules en milieu fluide, comprenant un oscillateur traverse par une veine fluidique, procede de realisation et methode de mise en oeuvre du dispositif |
AT504958B1 (de) * | 2008-05-29 | 2009-08-15 | Avl List Gmbh | Piezoelektrische sensoreinrichtung |
CN101957297B (zh) * | 2009-07-16 | 2012-04-18 | 河南科瑞科技有限公司 | 一种石英晶体传感器检测池 |
JP2011137639A (ja) * | 2009-12-25 | 2011-07-14 | Ulvac Japan Ltd | フロースルーセル及びこれを使用した測定装置 |
US8912711B1 (en) | 2010-06-22 | 2014-12-16 | Hrl Laboratories, Llc | Thermal stress resistant resonator, and a method for fabricating same |
US9086338B2 (en) * | 2010-06-25 | 2015-07-21 | Nihon Dempa Kogyo Co., Ltd. | Sensing device |
CN102135525B (zh) * | 2010-12-31 | 2012-12-05 | 重庆工商大学 | 压电调制与传感单细胞力学分析装置及方法 |
DE102013200935A1 (de) * | 2013-01-22 | 2014-07-24 | Robert Bosch Gmbh | Brennstoffeinspritzanlage mit einer Brennstoff führenden Komponente, einem Brennstoffeinspritzventil und einem Verbindungselement |
WO2014123519A1 (en) * | 2013-02-06 | 2014-08-14 | Empire Technology Development Llc | Devices, systems, and methods for detecting odorants |
US9599470B1 (en) | 2013-09-11 | 2017-03-21 | Hrl Laboratories, Llc | Dielectric high Q MEMS shell gyroscope structure |
US9977097B1 (en) | 2014-02-21 | 2018-05-22 | Hrl Laboratories, Llc | Micro-scale piezoelectric resonating magnetometer |
US9991863B1 (en) | 2014-04-08 | 2018-06-05 | Hrl Laboratories, Llc | Rounded and curved integrated tethers for quartz resonators |
EP3140646A1 (de) * | 2014-05-07 | 2017-03-15 | Exxonmobil Upstream Research Company | Hochdruckanwendung von quarzkristallmikrobalance |
US10308505B1 (en) | 2014-08-11 | 2019-06-04 | Hrl Laboratories, Llc | Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
US10031191B1 (en) | 2015-01-16 | 2018-07-24 | Hrl Laboratories, Llc | Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors |
US10670547B2 (en) * | 2015-11-30 | 2020-06-02 | Robert Bosch Gmbh | Nanostructured nickel oxide environmental sensor device and a package for encapsulating the device |
US10110198B1 (en) | 2015-12-17 | 2018-10-23 | Hrl Laboratories, Llc | Integrated quartz MEMS tuning fork resonator/oscillator |
US10175307B1 (en) | 2016-01-15 | 2019-01-08 | Hrl Laboratories, Llc | FM demodulation system for quartz MEMS magnetometer |
CN110550942B (zh) * | 2019-09-16 | 2022-03-08 | 陕西理工大学 | 纳米孪晶二氧化硅压电材料的制备方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55137353U (de) * | 1979-03-23 | 1980-09-30 | ||
JPS5642499A (en) * | 1979-05-15 | 1981-04-20 | Nippon Ceramic Kk | Ultrasonic-wave transducer |
CH662421A5 (de) * | 1983-07-13 | 1987-09-30 | Suisse Horlogerie Rech Lab | Piezoelektrischer kontaminationsdetektor. |
US5021701A (en) * | 1988-10-20 | 1991-06-04 | Tdk Corporation | Piezoelectric vibrator mounting system for a nebulizer |
JPH0534349A (ja) * | 1991-07-30 | 1993-02-09 | Oki Electric Ind Co Ltd | 食中毒性細菌の検出方法及びこれに用いるセンサ |
US5201215A (en) * | 1991-10-17 | 1993-04-13 | The United States Of America As Represented By The United States Department Of Energy | Method for simultaneous measurement of mass loading and fluid property changes using a quartz crystal microbalance |
JP3179178B2 (ja) * | 1992-04-16 | 2001-06-25 | セイコーインスツルメンツ株式会社 | 水晶振動子セル |
DE4334834A1 (de) * | 1993-10-13 | 1995-04-20 | Andrzej Dr Ing Grzegorzewski | Biosensor zum Messen von Viskositäts- und/oder Dichteänderungen |
US5455475A (en) * | 1993-11-01 | 1995-10-03 | Marquette University | Piezoelectric resonant sensor using the acoustoelectric effect |
DE4404309A1 (de) * | 1994-02-11 | 1995-08-17 | Polster Schlageter Klaus | Verfahren und Einrichtung zur Untersuchung und Messung von Wässern und Flüssigkeiten auf Abscheidung und/oder Auflösung von Stoffen bei Temperatur- und/oder Druckänderung |
JPH0875629A (ja) * | 1994-09-09 | 1996-03-22 | Nippon Steel Corp | 流体中吸着物量連続測定素子及び材料層コーティング方法 |
JP2748246B2 (ja) * | 1995-11-14 | 1998-05-06 | デベロップメント センター フォー バイオテクノロジー | カートリッジ状の圧電センサチップ |
JPH09304259A (ja) * | 1996-05-09 | 1997-11-28 | Yuasa Corp | 水晶式濃度センサー |
DE19734706A1 (de) * | 1997-08-11 | 1999-02-18 | Fraunhofer Ges Forschung | Piezoelektrischer Resonator, Verfahren zur Herstellung des Resonators sowie dessen Einsatz als Sensorelement zum Erfassen der Konzentration eines in einem Fluid enthaltenen Stoffes und/oder der Bestimmung physikalischer Eigenschaften des Fluids |
WO1999028735A1 (en) * | 1997-12-02 | 1999-06-10 | Smith Allan L | Apparatus and method for simultaneous measurement of mass and heat flow changes |
GB9823410D0 (en) * | 1998-10-26 | 1998-12-23 | Smithkline Beecham Plc | Novel device |
EP1058109A4 (de) * | 1998-11-02 | 2007-08-22 | Meidensha Electric Mfg Co Ltd | Qcd detektor |
JP3700559B2 (ja) * | 1999-12-16 | 2005-09-28 | 株式会社村田製作所 | 圧電音響部品およびその製造方法 |
-
2001
- 2001-08-02 AU AU8397701A patent/AU8397701A/xx active Pending
- 2001-08-02 WO PCT/EP2001/008922 patent/WO2002012873A2/en active IP Right Grant
- 2001-08-02 EP EP07007685A patent/EP1811292A1/de not_active Withdrawn
- 2001-08-02 RU RU2003106392/28A patent/RU2242750C2/ru not_active IP Right Cessation
- 2001-08-02 AT AT01962898T patent/ATE360815T1/de not_active IP Right Cessation
- 2001-08-02 US US10/344,022 patent/US7055377B2/en not_active Expired - Lifetime
- 2001-08-02 AU AU2001283977A patent/AU2001283977B2/en not_active Ceased
- 2001-08-02 DE DE60128110T patent/DE60128110T2/de not_active Expired - Lifetime
- 2001-08-02 JP JP2002517507A patent/JP4794112B2/ja not_active Expired - Lifetime
- 2001-08-02 EP EP01962898A patent/EP1314023B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
RU2242750C2 (ru) | 2004-12-20 |
DE60128110T2 (de) | 2008-01-10 |
WO2002012873A3 (en) | 2002-05-02 |
EP1811292A1 (de) | 2007-07-25 |
AU2001283977B2 (en) | 2005-03-10 |
JP2004506194A (ja) | 2004-02-26 |
WO2002012873A2 (en) | 2002-02-14 |
AU8397701A (en) | 2002-02-18 |
DE60128110D1 (de) | 2007-06-06 |
EP1314023A2 (de) | 2003-05-28 |
JP4794112B2 (ja) | 2011-10-19 |
US7055377B2 (en) | 2006-06-06 |
EP1314023B1 (de) | 2007-04-25 |
US20040016297A1 (en) | 2004-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |