ATE360815T1 - Quartzkristall sensorzelle - Google Patents

Quartzkristall sensorzelle

Info

Publication number
ATE360815T1
ATE360815T1 AT01962898T AT01962898T ATE360815T1 AT E360815 T1 ATE360815 T1 AT E360815T1 AT 01962898 T AT01962898 T AT 01962898T AT 01962898 T AT01962898 T AT 01962898T AT E360815 T1 ATE360815 T1 AT E360815T1
Authority
AT
Austria
Prior art keywords
quartz crystal
sensor
crystal sensor
well
sensor cell
Prior art date
Application number
AT01962898T
Other languages
English (en)
Inventor
Frank Paul
Karl Pavey
Richard C Payne
Original Assignee
Akubio Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0019340A external-priority patent/GB0019340D0/en
Priority claimed from GB0019336A external-priority patent/GB0019336D0/en
Application filed by Akubio Ltd filed Critical Akubio Ltd
Application granted granted Critical
Publication of ATE360815T1 publication Critical patent/ATE360815T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Measuring Cells (AREA)
  • Glass Compositions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Seal Device For Vehicle (AREA)
AT01962898T 2000-08-08 2001-08-02 Quartzkristall sensorzelle ATE360815T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0019340A GB0019340D0 (en) 2000-08-08 2000-08-08 Novel device
GB0019336A GB0019336D0 (en) 2000-08-08 2000-08-08 Novel device

Publications (1)

Publication Number Publication Date
ATE360815T1 true ATE360815T1 (de) 2007-05-15

Family

ID=26244807

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01962898T ATE360815T1 (de) 2000-08-08 2001-08-02 Quartzkristall sensorzelle

Country Status (8)

Country Link
US (1) US7055377B2 (de)
EP (2) EP1811292A1 (de)
JP (1) JP4794112B2 (de)
AT (1) ATE360815T1 (de)
AU (2) AU2001283977B2 (de)
DE (1) DE60128110T2 (de)
RU (1) RU2242750C2 (de)
WO (1) WO2002012873A2 (de)

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SE0300375D0 (sv) * 2003-02-12 2003-02-12 Attana Ab Piezoelectric resonator
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DE102004041595A1 (de) 2004-04-30 2005-12-01 Markus Gruber Messzelle sowie Verfahren zum Herstellen einer Messzelle und Messvorrichtung zur Aufnahme einer derartigen Messzelle
JP2006162538A (ja) * 2004-12-10 2006-06-22 Seiko Instruments Inc 微量質量測定装置
CN101084427B (zh) * 2004-12-15 2011-07-20 日本电波工业株式会社 石英传感器和感知装置
EP1830169B1 (de) * 2004-12-15 2014-02-12 Nihon Dempa Kogyo Co., Ltd. Quarzsensor und wahrnehmungsvorrichtung
EP1830170A4 (de) * 2004-12-15 2012-04-11 Nihon Dempa Kogyo Co Komponentenmessvorrichtung
JP4134025B2 (ja) * 2004-12-28 2008-08-13 日本電波工業株式会社 感知装置
US7980149B2 (en) 2005-04-01 2011-07-19 Inverness Medical Switzerland Gmbh Docking mechanism for a sensor cartridge
GB0506710D0 (en) 2005-04-01 2005-05-11 Akubio Ltd Cartridge for a fluid sample analyser
US7648844B2 (en) * 2005-05-02 2010-01-19 Bioscale, Inc. Method and apparatus for detection of analyte using an acoustic device
US7300631B2 (en) * 2005-05-02 2007-11-27 Bioscale, Inc. Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles
US7749445B2 (en) * 2005-05-02 2010-07-06 Bioscale, Inc. Method and apparatus for analyzing bioprocess fluids
US7611908B2 (en) * 2005-05-02 2009-11-03 Bioscale, Inc. Method and apparatus for therapeutic drug monitoring using an acoustic device
US7845230B2 (en) 2005-08-03 2010-12-07 Nihon Dempa Kogyo Co., Ltd. Concentration sensor and concentration detector
DE102006015512B4 (de) * 2006-03-31 2010-01-21 Andreas Hettich Gmbh & Co. Kg Vorrichtung aus einer Messkammer und einem über einen Schnellverschluss in die Messkammer integrierbaren Resonator für die Flüssigkeitssensorik
JP4772563B2 (ja) * 2006-03-31 2011-09-14 日本製紙株式会社 異物の沈積度合を測定する方法
JP4299325B2 (ja) * 2006-08-30 2009-07-22 日本電波工業株式会社 水晶センサ及び感知装置
GB0619008D0 (en) * 2006-09-27 2006-11-08 Akubio Ltd Cartridge for a fluid sample analyser
GB0708346D0 (en) * 2007-04-30 2007-06-06 Attana Ab Sensor
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
WO2009033056A1 (en) * 2007-09-06 2009-03-12 Bioscale, Inc. Reusable detection surfaces and methods of using same
US7802466B2 (en) * 2007-11-28 2010-09-28 Sierra Sensors Gmbh Oscillating sensor and fluid sample analysis using an oscillating sensor
US8397762B2 (en) * 2008-02-04 2013-03-19 Bioscale, Inc. Fluidic system with improved flow characteristics
GB0803257D0 (en) 2008-02-22 2008-04-02 Univ Leeds Apparatus for inspection of a fliuid and method
ES2629101T3 (es) * 2008-05-05 2017-08-07 Kistler Holding Ag Célula de carga
FR2931549B1 (fr) * 2008-05-20 2017-12-08 Commissariat Energie Atomique Dispositif pour la detection gravimetrique de particules en milieu fluide, comprenant un oscillateur traverse par une veine fluidique, procede de realisation et methode de mise en oeuvre du dispositif
FR2931550B1 (fr) * 2008-05-20 2012-12-07 Commissariat Energie Atomique Dispositif pour la detection gravimetrique de particules en milieu fluide comprenant un oscillateur entre deux canaux fluidiques, procede de realisation et methode de mise en oeuvre du dispositif
AT504958B1 (de) * 2008-05-29 2009-08-15 Avl List Gmbh Piezoelektrische sensoreinrichtung
CN101957297B (zh) * 2009-07-16 2012-04-18 河南科瑞科技有限公司 一种石英晶体传感器检测池
JP2011137639A (ja) * 2009-12-25 2011-07-14 Ulvac Japan Ltd フロースルーセル及びこれを使用した測定装置
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
US9086338B2 (en) * 2010-06-25 2015-07-21 Nihon Dempa Kogyo Co., Ltd. Sensing device
CN102135525B (zh) * 2010-12-31 2012-12-05 重庆工商大学 压电调制与传感单细胞力学分析装置及方法
DE102013200935A1 (de) * 2013-01-22 2014-07-24 Robert Bosch Gmbh Brennstoffeinspritzanlage mit einer Brennstoff führenden Komponente, einem Brennstoffeinspritzventil und einem Verbindungselement
WO2014123519A1 (en) * 2013-02-06 2014-08-14 Empire Technology Development Llc Devices, systems, and methods for detecting odorants
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
US20150323441A1 (en) * 2014-05-07 2015-11-12 Jason W. Lachance High Pressure Utilization of Quartz Crystal Microbalance
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
EP3384280B1 (de) * 2015-11-30 2023-10-11 Robert Bosch GmbH Umgebungssensorvorrichtung aus nanostrukturiertem nickeloxid und gehäuse zur verkapselung der vorrichtung
US10110198B1 (en) 2015-12-17 2018-10-23 Hrl Laboratories, Llc Integrated quartz MEMS tuning fork resonator/oscillator
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
CN110550942B (zh) * 2019-09-16 2022-03-08 陕西理工大学 纳米孪晶二氧化硅压电材料的制备方法
US20240361275A1 (en) * 2023-04-25 2024-10-31 Championx Llc Laboratory scale deposition measurement with flush mounted crystal and free-floating liquid-facing crystal surface of a quartz crystal microbalance assembly
US20240402128A1 (en) * 2023-05-30 2024-12-05 Inficon Inc. Qcm sensor

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Also Published As

Publication number Publication date
RU2242750C2 (ru) 2004-12-20
US7055377B2 (en) 2006-06-06
WO2002012873A2 (en) 2002-02-14
US20040016297A1 (en) 2004-01-29
DE60128110D1 (de) 2007-06-06
AU8397701A (en) 2002-02-18
JP4794112B2 (ja) 2011-10-19
WO2002012873A3 (en) 2002-05-02
JP2004506194A (ja) 2004-02-26
EP1314023A2 (de) 2003-05-28
EP1811292A1 (de) 2007-07-25
AU2001283977B2 (en) 2005-03-10
DE60128110T2 (de) 2008-01-10
EP1314023B1 (de) 2007-04-25

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties