ATE441847T1 - Prüfvorrichtung mit terahertz-wellen - Google Patents

Prüfvorrichtung mit terahertz-wellen

Info

Publication number
ATE441847T1
ATE441847T1 AT06730341T AT06730341T ATE441847T1 AT E441847 T1 ATE441847 T1 AT E441847T1 AT 06730341 T AT06730341 T AT 06730341T AT 06730341 T AT06730341 T AT 06730341T AT E441847 T1 ATE441847 T1 AT E441847T1
Authority
AT
Austria
Prior art keywords
electromagnetic wave
inspection apparatus
test device
terahertz waves
substrate
Prior art date
Application number
AT06730341T
Other languages
German (de)
English (en)
Inventor
Takeaki Itsuji
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE441847T1 publication Critical patent/ATE441847T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT06730341T 2005-03-24 2006-03-22 Prüfvorrichtung mit terahertz-wellen ATE441847T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005087326 2005-03-24
JP2006006393 2006-03-22

Publications (1)

Publication Number Publication Date
ATE441847T1 true ATE441847T1 (de) 2009-09-15

Family

ID=36607347

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06730341T ATE441847T1 (de) 2005-03-24 2006-03-22 Prüfvorrichtung mit terahertz-wellen

Country Status (6)

Country Link
US (1) US7633299B2 (enExample)
EP (1) EP1864111B1 (enExample)
JP (1) JP4878180B2 (enExample)
AT (1) ATE441847T1 (enExample)
DE (1) DE602006008908D1 (enExample)
WO (1) WO2006101252A1 (enExample)

Families Citing this family (25)

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US8548415B2 (en) * 2004-12-16 2013-10-01 Northrop Grumman Systems Corporation Carbon nanotube devices and method of fabricating the same
JP4636917B2 (ja) * 2005-03-28 2011-02-23 キヤノン株式会社 検体保持用のデバイス、それを用いた検体検出装置及び検体検出方法
JP5006642B2 (ja) * 2006-05-31 2012-08-22 キヤノン株式会社 テラヘルツ波発振器
JP4398972B2 (ja) 2006-12-11 2010-01-13 株式会社東芝 電磁波センサ、撮像素子及び撮像装置
JP4977048B2 (ja) * 2007-02-01 2012-07-18 キヤノン株式会社 アンテナ素子
JP5186176B2 (ja) * 2007-10-19 2013-04-17 株式会社ジェーシービー 認証システム及び認証用可搬媒体
JP4807707B2 (ja) * 2007-11-30 2011-11-02 キヤノン株式会社 波形情報取得装置
JP4975000B2 (ja) * 2007-12-07 2012-07-11 キヤノン株式会社 電磁波発生素子、電磁波集積素子、及び電磁波検出装置
JP4975001B2 (ja) * 2007-12-28 2012-07-11 キヤノン株式会社 波形情報取得装置及び波形情報取得方法
JP5341488B2 (ja) 2008-01-18 2013-11-13 キヤノン株式会社 テラヘルツ波を測定するための装置及び方法
JP5328319B2 (ja) * 2008-01-29 2013-10-30 キヤノン株式会社 テラヘルツ波を用いた検査装置及び検査方法
JP5328265B2 (ja) * 2008-08-25 2013-10-30 キヤノン株式会社 テラヘルツ波発生素子、及びテラヘルツ波発生装置
US8113427B2 (en) * 2008-12-18 2012-02-14 Ncr Corporation Methods and apparatus for automated product identification in point of sale applications
JP5632599B2 (ja) 2009-09-07 2014-11-26 キヤノン株式会社 発振器
JP5735824B2 (ja) 2011-03-04 2015-06-17 キヤノン株式会社 情報取得装置及び情報取得方法
JP5799538B2 (ja) * 2011-03-18 2015-10-28 セイコーエプソン株式会社 テラヘルツ波発生装置、カメラ、イメージング装置、計測装置および光源装置
JP6214201B2 (ja) * 2013-05-02 2017-10-18 キヤノン株式会社 画像取得装置
DE102013213233A1 (de) * 2013-07-05 2015-01-08 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Herstellen eines Gehäuses mit einer Schirmung vor elektrischer und/oder magnetischer Strahlung und Gehäuse mit Schirmung vor elektrischer und/oder magnetischer Strahlung
JP2015087163A (ja) * 2013-10-29 2015-05-07 パイオニア株式会社 テラヘルツ波計測装置
CN104132894B (zh) * 2014-06-12 2017-01-11 清华大学 一种用于模拟太赫兹大气传播的实验装置及方法
KR20190056771A (ko) * 2017-11-17 2019-05-27 현대자동차주식회사 수밀 검사 장치 및 방법
JP7362409B2 (ja) 2019-10-17 2023-10-17 キヤノン株式会社 照明装置およびカメラシステム
WO2021124563A1 (ja) * 2019-12-20 2021-06-24 日本電信電話株式会社 誘電率測定方法、誘電率測定装置及び誘電率測定プログラム
CN113219223B (zh) * 2021-03-15 2022-02-01 北京航空航天大学 一种全封闭矩形太赫兹暗室
JP2023157737A (ja) 2022-04-15 2023-10-26 キヤノン株式会社 アンテナ装置、通信装置、及び、撮像システム

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US5623145A (en) 1995-02-15 1997-04-22 Lucent Technologies Inc. Method and apparatus for terahertz imaging
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US6448553B1 (en) * 1999-04-26 2002-09-10 Canon Kabushiki Kaisha Signal detector to be used with scanning probe and atomic force microscope
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GB2371618B (en) * 2001-01-30 2004-11-17 Teraprobe Ltd A probe, apparatus and method for examining a sample
JP3477496B2 (ja) 2001-02-27 2003-12-10 独立行政法人通信総合研究所 電磁波検出装置および検出方法
JP2002310882A (ja) * 2001-04-17 2002-10-23 Canon Inc 走査型プローブによる信号検出装置、該装置によるプローブ顕微鏡、及び走査型プローブによる信号検出方法、該方法を用いてサンプル表面を観察する観察方法
US6846454B2 (en) * 2001-12-24 2005-01-25 Agilent Technologies, Inc. Fluid exit in reaction chambers
JP4588947B2 (ja) * 2001-12-28 2010-12-01 日本電波工業株式会社 コプレーナライン型の高周波発振器
US6815683B2 (en) * 2002-05-31 2004-11-09 New Jersey Institute Of Technology Terahertz imaging system and method
JP3764711B2 (ja) * 2002-08-27 2006-04-12 株式会社東芝 管状バイオ検知システム
JP3877661B2 (ja) * 2002-08-29 2007-02-07 三洋電機株式会社 マイクロ化学分析装置
JP4183546B2 (ja) * 2003-04-11 2008-11-19 独立行政法人理化学研究所 テラヘルツ波光学系
US7230244B2 (en) * 2003-05-16 2007-06-12 Sarnoff Corporation Method and apparatus for the detection of terahertz radiation absorption
KR100787988B1 (ko) * 2003-06-25 2007-12-24 캐논 가부시끼가이샤 고주파 전기 신호 제어 장치 및 센싱 시스템
JP3950820B2 (ja) * 2003-06-25 2007-08-01 キヤノン株式会社 高周波電気信号制御装置及びセンシングシステム
JP4533044B2 (ja) * 2003-08-27 2010-08-25 キヤノン株式会社 センサ
JP4136858B2 (ja) * 2003-09-12 2008-08-20 キヤノン株式会社 位置検出装置、及び情報入力装置
JP4217646B2 (ja) * 2004-03-26 2009-02-04 キヤノン株式会社 認証方法及び認証装置
JP5166024B2 (ja) * 2004-05-26 2013-03-21 ピコメトリクス、エルエルシー 荷物及び人を検査するための反射及び透過モードのテラヘルツ画像化
JP3913253B2 (ja) * 2004-07-30 2007-05-09 キヤノン株式会社 光半導体装置およびその製造方法
JP2006121643A (ja) * 2004-09-21 2006-05-11 Canon Inc 平面アンテナ
JP4898472B2 (ja) * 2006-04-11 2012-03-14 キヤノン株式会社 検査装置

Also Published As

Publication number Publication date
EP1864111B1 (en) 2009-09-02
JP4878180B2 (ja) 2012-02-15
JP2006300925A (ja) 2006-11-02
DE602006008908D1 (de) 2009-10-15
US20090009190A1 (en) 2009-01-08
US7633299B2 (en) 2009-12-15
WO2006101252A1 (en) 2006-09-28
EP1864111A1 (en) 2007-12-12

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