DE602006008908D1 - Prüfvorrichtung mit terahertz-wellen - Google Patents

Prüfvorrichtung mit terahertz-wellen

Info

Publication number
DE602006008908D1
DE602006008908D1 DE200660008908 DE602006008908T DE602006008908D1 DE 602006008908 D1 DE602006008908 D1 DE 602006008908D1 DE 200660008908 DE200660008908 DE 200660008908 DE 602006008908 T DE602006008908 T DE 602006008908T DE 602006008908 D1 DE602006008908 D1 DE 602006008908D1
Authority
DE
Germany
Prior art keywords
electromagnetic wave
inspection apparatus
test unit
terahertz waves
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200660008908
Other languages
English (en)
Inventor
Takeaki Itsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602006008908D1 publication Critical patent/DE602006008908D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE200660008908 2005-03-24 2006-03-22 Prüfvorrichtung mit terahertz-wellen Active DE602006008908D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005087326 2005-03-24
PCT/JP2006/306393 WO2006101252A1 (en) 2005-03-24 2006-03-22 Inspection apparatus using terahertz waves

Publications (1)

Publication Number Publication Date
DE602006008908D1 true DE602006008908D1 (de) 2009-10-15

Family

ID=36607347

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200660008908 Active DE602006008908D1 (de) 2005-03-24 2006-03-22 Prüfvorrichtung mit terahertz-wellen

Country Status (6)

Country Link
US (1) US7633299B2 (de)
EP (1) EP1864111B1 (de)
JP (1) JP4878180B2 (de)
AT (1) ATE441847T1 (de)
DE (1) DE602006008908D1 (de)
WO (1) WO2006101252A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8548415B2 (en) * 2004-12-16 2013-10-01 Northrop Grumman Systems Corporation Carbon nanotube devices and method of fabricating the same
JP4636917B2 (ja) * 2005-03-28 2011-02-23 キヤノン株式会社 検体保持用のデバイス、それを用いた検体検出装置及び検体検出方法
JP5006642B2 (ja) * 2006-05-31 2012-08-22 キヤノン株式会社 テラヘルツ波発振器
JP4398972B2 (ja) 2006-12-11 2010-01-13 株式会社東芝 電磁波センサ、撮像素子及び撮像装置
JP4977048B2 (ja) * 2007-02-01 2012-07-18 キヤノン株式会社 アンテナ素子
JP5186176B2 (ja) * 2007-10-19 2013-04-17 株式会社ジェーシービー 認証システム及び認証用可搬媒体
JP4807707B2 (ja) * 2007-11-30 2011-11-02 キヤノン株式会社 波形情報取得装置
JP4975000B2 (ja) * 2007-12-07 2012-07-11 キヤノン株式会社 電磁波発生素子、電磁波集積素子、及び電磁波検出装置
JP4975001B2 (ja) * 2007-12-28 2012-07-11 キヤノン株式会社 波形情報取得装置及び波形情報取得方法
JP5341488B2 (ja) 2008-01-18 2013-11-13 キヤノン株式会社 テラヘルツ波を測定するための装置及び方法
JP5328319B2 (ja) * 2008-01-29 2013-10-30 キヤノン株式会社 テラヘルツ波を用いた検査装置及び検査方法
JP5328265B2 (ja) * 2008-08-25 2013-10-30 キヤノン株式会社 テラヘルツ波発生素子、及びテラヘルツ波発生装置
US8113427B2 (en) * 2008-12-18 2012-02-14 Ncr Corporation Methods and apparatus for automated product identification in point of sale applications
JP5632599B2 (ja) 2009-09-07 2014-11-26 キヤノン株式会社 発振器
JP5735824B2 (ja) 2011-03-04 2015-06-17 キヤノン株式会社 情報取得装置及び情報取得方法
JP5799538B2 (ja) * 2011-03-18 2015-10-28 セイコーエプソン株式会社 テラヘルツ波発生装置、カメラ、イメージング装置、計測装置および光源装置
JP6214201B2 (ja) * 2013-05-02 2017-10-18 キヤノン株式会社 画像取得装置
DE102013213233A1 (de) * 2013-07-05 2015-01-08 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Herstellen eines Gehäuses mit einer Schirmung vor elektrischer und/oder magnetischer Strahlung und Gehäuse mit Schirmung vor elektrischer und/oder magnetischer Strahlung
JP2015087163A (ja) * 2013-10-29 2015-05-07 パイオニア株式会社 テラヘルツ波計測装置
CN104132894B (zh) * 2014-06-12 2017-01-11 清华大学 一种用于模拟太赫兹大气传播的实验装置及方法
KR20190056771A (ko) * 2017-11-17 2019-05-27 현대자동차주식회사 수밀 검사 장치 및 방법
JP7362409B2 (ja) 2019-10-17 2023-10-17 キヤノン株式会社 照明装置およびカメラシステム
JP7211538B2 (ja) * 2019-12-20 2023-01-24 日本電信電話株式会社 誘電率測定方法、誘電率測定装置及び誘電率測定プログラム
CN113219223B (zh) * 2021-03-15 2022-02-01 北京航空航天大学 一种全封闭矩形太赫兹暗室

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618421A (ja) 1992-06-30 1994-01-25 Toshiba Corp 溶液成分センサ
US5623145A (en) 1995-02-15 1997-04-22 Lucent Technologies Inc. Method and apparatus for terahertz imaging
DE29711571U1 (de) * 1997-07-02 1998-11-05 Tews Elektronik Feuchte- und Dichtesensor
US6448553B1 (en) 1999-04-26 2002-09-10 Canon Kabushiki Kaisha Signal detector to be used with scanning probe and atomic force microscope
GB2360842B (en) * 2000-03-31 2002-06-26 Toshiba Res Europ Ltd An apparatus and method for investigating a sample
GB2371618B (en) * 2001-01-30 2004-11-17 Teraprobe Ltd A probe, apparatus and method for examining a sample
JP3477496B2 (ja) 2001-02-27 2003-12-10 独立行政法人通信総合研究所 電磁波検出装置および検出方法
JP2002310882A (ja) 2001-04-17 2002-10-23 Canon Inc 走査型プローブによる信号検出装置、該装置によるプローブ顕微鏡、及び走査型プローブによる信号検出方法、該方法を用いてサンプル表面を観察する観察方法
US6846454B2 (en) * 2001-12-24 2005-01-25 Agilent Technologies, Inc. Fluid exit in reaction chambers
JP4588947B2 (ja) * 2001-12-28 2010-12-01 日本電波工業株式会社 コプレーナライン型の高周波発振器
US6815683B2 (en) * 2002-05-31 2004-11-09 New Jersey Institute Of Technology Terahertz imaging system and method
JP3764711B2 (ja) * 2002-08-27 2006-04-12 株式会社東芝 管状バイオ検知システム
JP3877661B2 (ja) * 2002-08-29 2007-02-07 三洋電機株式会社 マイクロ化学分析装置
JP4183546B2 (ja) * 2003-04-11 2008-11-19 独立行政法人理化学研究所 テラヘルツ波光学系
US7230244B2 (en) 2003-05-16 2007-06-12 Sarnoff Corporation Method and apparatus for the detection of terahertz radiation absorption
JP3950820B2 (ja) * 2003-06-25 2007-08-01 キヤノン株式会社 高周波電気信号制御装置及びセンシングシステム
KR100787988B1 (ko) 2003-06-25 2007-12-24 캐논 가부시끼가이샤 고주파 전기 신호 제어 장치 및 센싱 시스템
JP4533044B2 (ja) * 2003-08-27 2010-08-25 キヤノン株式会社 センサ
JP4136858B2 (ja) 2003-09-12 2008-08-20 キヤノン株式会社 位置検出装置、及び情報入力装置
JP4217646B2 (ja) 2004-03-26 2009-02-04 キヤノン株式会社 認証方法及び認証装置
KR101332068B1 (ko) * 2004-05-26 2013-11-22 피코메트릭스 엘엘씨 반사 및 전송 모드에서의 수화물 및 승객 검사용테라헤르쯔 영상
JP3913253B2 (ja) 2004-07-30 2007-05-09 キヤノン株式会社 光半導体装置およびその製造方法
JP2006121643A (ja) 2004-09-21 2006-05-11 Canon Inc 平面アンテナ
JP4898472B2 (ja) 2006-04-11 2012-03-14 キヤノン株式会社 検査装置

Also Published As

Publication number Publication date
JP4878180B2 (ja) 2012-02-15
WO2006101252A1 (en) 2006-09-28
ATE441847T1 (de) 2009-09-15
EP1864111B1 (de) 2009-09-02
US7633299B2 (en) 2009-12-15
US20090009190A1 (en) 2009-01-08
JP2006300925A (ja) 2006-11-02
EP1864111A1 (de) 2007-12-12

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