ATE441087T1 - Optische rastersonde - Google Patents

Optische rastersonde

Info

Publication number
ATE441087T1
ATE441087T1 AT07728571T AT07728571T ATE441087T1 AT E441087 T1 ATE441087 T1 AT E441087T1 AT 07728571 T AT07728571 T AT 07728571T AT 07728571 T AT07728571 T AT 07728571T AT E441087 T1 ATE441087 T1 AT E441087T1
Authority
AT
Austria
Prior art keywords
aperture
stripe
light
scanning probe
optical scanning
Prior art date
Application number
AT07728571T
Other languages
English (en)
Inventor
Stephen James Crampton
Peter Champ
Original Assignee
3D Scanners Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3D Scanners Ltd filed Critical 3D Scanners Ltd
Application granted granted Critical
Publication of ATE441087T1 publication Critical patent/ATE441087T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518Projection by scanning of the object

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Image Input (AREA)
  • Studio Devices (AREA)
  • Optical Communication System (AREA)
  • Laser Surgery Devices (AREA)
  • Lenses (AREA)
AT07728571T 2006-04-27 2007-04-26 Optische rastersonde ATE441087T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US79545906P 2006-04-27 2006-04-27
EP06252270 2006-04-27
PCT/EP2007/054116 WO2007125081A1 (en) 2006-04-27 2007-04-26 Optical scanning probe

Publications (1)

Publication Number Publication Date
ATE441087T1 true ATE441087T1 (de) 2009-09-15

Family

ID=38230005

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07728571T ATE441087T1 (de) 2006-04-27 2007-04-26 Optische rastersonde

Country Status (6)

Country Link
US (2) US8117668B2 (de)
EP (2) EP2096403B1 (de)
JP (2) JP5028475B2 (de)
AT (1) ATE441087T1 (de)
DE (1) DE602007002185D1 (de)
WO (1) WO2007125081A1 (de)

Families Citing this family (109)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7693325B2 (en) 2004-01-14 2010-04-06 Hexagon Metrology, Inc. Transprojection of geometry data
DE102006031580A1 (de) 2006-07-03 2008-01-17 Faro Technologies, Inc., Lake Mary Verfahren und Vorrichtung zum dreidimensionalen Erfassen eines Raumbereichs
WO2009024756A1 (en) 2007-08-17 2009-02-26 Renishaw Plc Non-contact measurement apparatus and method
EP2259012A4 (de) * 2008-03-19 2016-08-17 Yaskawa Denki Seisakusho Kk Formmessvorrichtung und roboter damit
US8220335B2 (en) * 2008-05-16 2012-07-17 Lockheed Martin Corporation Accurate image acquisition for structured-light system for optical shape and positional measurements
US7908757B2 (en) 2008-10-16 2011-03-22 Hexagon Metrology, Inc. Articulating measuring arm with laser scanner
ITBA20080043A1 (it) * 2008-10-17 2010-04-17 Esim Srl Elettrica Societa Impia Nti Meridional Sistema opera
EP2362936B1 (de) * 2008-10-28 2012-10-17 3Shape A/S Scanner mit rückkopplungsregelung
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
DE102009010465B3 (de) 2009-02-13 2010-05-27 Faro Technologies, Inc., Lake Mary Laserscanner
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
DE102009015920B4 (de) 2009-03-25 2014-11-20 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US8082673B2 (en) 2009-11-06 2011-12-27 Hexagon Metrology Ab Systems and methods for control and calibration of a CMM
DE102009035337A1 (de) 2009-07-22 2011-01-27 Faro Technologies, Inc., Lake Mary Verfahren zum optischen Abtasten und Vermessen eines Objekts
GB0915904D0 (en) 2009-09-11 2009-10-14 Renishaw Plc Non-contact object inspection
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
DE102009055988B3 (de) 2009-11-20 2011-03-17 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102009057101A1 (de) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
DE102009055989B4 (de) 2009-11-20 2017-02-16 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
US8630314B2 (en) 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
EP2348330A1 (de) * 2010-01-13 2011-07-27 Siemens Aktiengesellschaft Liniensensor
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
GB2490612A (en) 2010-01-20 2012-11-07 Faro Tech Inc Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
DE112011100290T5 (de) 2010-01-20 2013-02-28 Faro Technologies Inc. Koordinatenmessgerät mit einem beleuchteten Sondenende und Betriebsverfahren
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8638446B2 (en) 2010-01-20 2014-01-28 Faro Technologies, Inc. Laser scanner or laser tracker having a projector
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
GB2515693B (en) 2010-01-20 2015-02-11 Faro Tech Inc Coordinate measurement machines with removable accessories
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US8358359B2 (en) * 2010-01-21 2013-01-22 Microsoft Corporation Reducing motion-related artifacts in rolling shutter video information
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
DE102010020925B4 (de) 2010-05-10 2014-02-27 Faro Technologies, Inc. Verfahren zum optischen Abtasten und Vermessen einer Umgebung
DE102010032725B4 (de) 2010-07-26 2012-04-26 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102010032726B3 (de) 2010-07-26 2011-11-24 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102010032723B3 (de) * 2010-07-26 2011-11-24 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
DE102010033561B3 (de) 2010-07-29 2011-12-15 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
GB2483481A (en) * 2010-09-09 2012-03-14 Phase Vision Ltd Method and apparatus of measuring the shape of an object
JP5515039B2 (ja) * 2010-10-22 2014-06-11 株式会社ミツトヨ 画像測定装置
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
TW201228786A (en) * 2011-01-13 2012-07-16 Hon Hai Prec Ind Co Ltd Mechanical arm movement controlling system and method
DE112012001082B4 (de) 2011-03-03 2015-12-03 Faro Technologies Inc. Verfahren zum Messen von Zielen
KR20140022858A (ko) * 2011-04-01 2014-02-25 가부시키가이샤 니콘 형상 측정 장치, 형상 측정 방법, 및 구조물의 제조 방법
JP5869281B2 (ja) 2011-04-11 2016-02-24 株式会社ミツトヨ 光学式プローブ
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
CN103649673A (zh) 2011-04-15 2014-03-19 法罗技术股份有限公司 激光跟踪器中的增强的位置检测器
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
JP2012225701A (ja) 2011-04-18 2012-11-15 Mitsutoyo Corp 形状測定装置
JP2012225700A (ja) 2011-04-18 2012-11-15 Mitsutoyo Corp 形状測定装置
CN103620341B (zh) * 2011-06-20 2016-01-20 株式会社安川电机 3维形状测量装置和机器人系统
EP2574877B1 (de) 2011-09-30 2017-11-08 Mitutoyo Corporation Optische Sonde
DE102012100609A1 (de) 2012-01-25 2013-07-25 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9638507B2 (en) 2012-01-27 2017-05-02 Faro Technologies, Inc. Measurement machine utilizing a barcode to identify an inspection plan for an object
US8675208B2 (en) * 2012-05-10 2014-03-18 Cognex Corporation Laser profiling attachment for a vision system camera
US8937725B2 (en) 2012-06-14 2015-01-20 Nikon Corporation Measurement assembly including a metrology system and a pointer that directs the metrology system
WO2014006545A1 (en) * 2012-07-04 2014-01-09 Creaform Inc. 3-d scanning and positioning system
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
JP6267700B2 (ja) 2012-07-18 2018-01-24 クレアフォーム・インコーポレイテッドCreaform Inc. 3d走査および位置決めのインターフェース
DE102012107544B3 (de) 2012-08-17 2013-05-23 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
GB2522142A (en) 2012-09-14 2015-07-15 Faro Tech Inc Laser scanner with dynamical adjustment of angular scan velocity
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
DE102012109481A1 (de) 2012-10-05 2014-04-10 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US10368053B2 (en) * 2012-11-14 2019-07-30 Qualcomm Incorporated Structured light active depth sensing systems combining multiple images to compensate for differences in reflectivity and/or absorption
JP5775864B2 (ja) * 2012-12-12 2015-09-09 京セラドキュメントソリューションズ株式会社 スキャナー装置及び画像形成装置
JP2014163690A (ja) 2013-02-21 2014-09-08 Mitsutoyo Corp 形状測定装置
JP6128902B2 (ja) 2013-03-08 2017-05-17 株式会社ミツトヨ 形状測定装置
US9041914B2 (en) 2013-03-15 2015-05-26 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
JP6176957B2 (ja) 2013-03-18 2017-08-09 株式会社ミツトヨ 形状測定装置
US9952038B2 (en) 2013-03-27 2018-04-24 Nikon Corporation Shape measurement device, structure production system, shape measurement method, structure production method, and shape measurement program
DE102013105753B3 (de) 2013-06-04 2014-10-02 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum automatischen Aufnehmen eines Sensorkopfs und Koordinatenmessgerät
JP2015114309A (ja) * 2013-12-16 2015-06-22 株式会社オプトン 計測装置
JP2015141372A (ja) 2014-01-30 2015-08-03 株式会社ミツトヨ 照射装置、照射方法、測定装置、及び測定方法
US9759540B2 (en) 2014-06-11 2017-09-12 Hexagon Metrology, Inc. Articulating CMM probe
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
WO2016044658A1 (en) 2014-09-19 2016-03-24 Hexagon Metrology, Inc. Multi-mode portable coordinate measuring machine
KR102614323B1 (ko) 2015-04-01 2023-12-14 바야비전 리미티드 수동 및 능동 측정을 이용한 장면의 3차원 지도 생성
EP3165874B1 (de) 2015-11-04 2020-08-19 Hexagon Technology Center GmbH Verfahren und vorrichtung für triangulationsbasierte abstandsmessung
EP3165873B1 (de) 2015-11-04 2020-03-04 Hexagon Technology Center GmbH Lasermodul mit einem mikrolinsenarray
EP3165872B1 (de) 2015-11-04 2020-04-15 Hexagon Technology Center GmbH Kompensation der lichtintensität entlang einer lichtlinie, die eine bessere messqualität sichert
DE102015122844A1 (de) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D-Messvorrichtung mit Batteriepack
EP3258211B1 (de) 2016-06-17 2023-12-13 Hexagon Technology Center GmbH Bestimmung von reflektionseigenschaften eines objektes in bezug auf eine bestimmte optische messung
WO2018002683A1 (en) * 2016-06-30 2018-01-04 Centre De Pyrolyse Du Charbon De Marienau Device for measuring a shape of a wall portion of an oven, such as a coke oven
WO2018213872A1 (en) 2017-05-22 2018-11-29 The Bionics Institute Of Australia "systems and methods for monitoring neural activity"
EP3496806B1 (de) 2016-08-08 2022-07-06 Deep Brain Stimulation Technologies Pty. Ltd. Systeme und verfahren zur überwachung der nervenaktivität
CN107121886A (zh) * 2017-06-20 2017-09-01 深圳奥比中光科技有限公司 3d成像电子设备
EP3783304B1 (de) 2017-06-22 2024-07-03 Hexagon Technology Center GmbH Kalibrierung eines triangulationssensors
JP7024285B2 (ja) * 2017-09-26 2022-02-24 オムロン株式会社 変位計測装置、システム、および変位計測方法
JP7179844B2 (ja) * 2017-11-13 2022-11-29 ヘキサゴン メトロロジー,インコーポレイテッド 光学スキャニング装置の熱管理
CN107782735A (zh) * 2017-11-14 2018-03-09 伟创力电子技术(苏州)有限公司 一种用于检测产品外观的检测机
KR101922924B1 (ko) * 2018-01-26 2018-11-28 박영일 바코드리더기
KR101949635B1 (ko) * 2018-01-26 2019-02-18 박영일 이동식 선형빔 출력구조를 갖는 3d 스캐너장치
DE102018005506B4 (de) 2018-07-12 2021-03-18 Wenzel Group GmbH & Co. KG Optisches Sensorsystem für ein Koordinatenmessgerät, Verfahren zum Erfassen eines Messpunkts auf einer Oberfläche eines Messobjekts sowie Koordinatenmessgerät
DE102018211913B4 (de) 2018-07-17 2022-10-13 Carl Zeiss Industrielle Messtechnik Gmbh Vorrichtung und Verfahren zum Erfassen einer Objektoberfläche mittels elektromagnetischer Strahlung
EP3812698A3 (de) * 2019-10-22 2021-07-07 Faro Technologies, Inc. Photosensorverarbeitung für verbesserte zeilenabtastleistung
DE102020204829B4 (de) 2020-04-16 2025-01-30 Kuka Deutschland Gmbh Modellieren von Objekten mittels robotergeführter Kameras
US11567179B2 (en) 2020-07-21 2023-01-31 Leddartech Inc. Beam-steering device particularly for LIDAR systems
EP4185892A4 (de) 2020-07-21 2024-08-28 Leddartech Inc. Strahllenkungsvorrichtungen und verfahren für lidar-anwendungen
US11402510B2 (en) 2020-07-21 2022-08-02 Leddartech Inc. Systems and methods for wide-angle LiDAR using non-uniform magnification optics

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1032892A (en) 1974-11-13 1978-06-13 Gow Enterprises Ltd. Module electrode assembly for electrolytic cells
JPS56100306A (en) 1980-01-14 1981-08-12 Fuji Photo Optical Co Ltd Analyzer for sectional shape of substance
JPS6218192A (ja) * 1985-07-17 1987-01-27 Fuji Photo Film Co Ltd 電子スチルカメラ
JPS6288906A (ja) * 1985-10-15 1987-04-23 Fujitsu Ltd 立体形状の測定方法
US5193120A (en) * 1991-02-27 1993-03-09 Mechanical Technology Incorporated Machine vision three dimensional profiling system
FR2693003A1 (fr) * 1992-06-30 1993-12-31 Peugeot Dispositif opto-électronique de numérisation de formes tridimensionnelles d'un objet.
US5402582A (en) 1993-02-23 1995-04-04 Faro Technologies Inc. Three dimensional coordinate measuring apparatus
US6535794B1 (en) 1993-02-23 2003-03-18 Faro Technologoies Inc. Method of generating an error map for calibration of a robot or multi-axis machining center
JPH06300539A (ja) * 1993-04-16 1994-10-28 Kubota Corp 三次元形状計測装置
GB9515311D0 (en) 1995-07-26 1995-09-20 3D Scanners Ltd Stripe scanners and methods of scanning
US5829148A (en) * 1996-04-23 1998-11-03 Eaton; Homer L. Spatial measuring device
DE19639999C2 (de) 1996-09-18 1998-08-20 Omeca Messtechnik Gmbh Verfahren und Vorrichtung für die 3D-Messung
JP3767201B2 (ja) 1998-09-18 2006-04-19 オムロン株式会社 光式センサ
JP2002286414A (ja) * 2001-03-22 2002-10-03 Konica Corp 光学変位計
JP4803568B2 (ja) * 2001-03-30 2011-10-26 ルネサスエレクトロニクス株式会社 半導体集積回路の検査装置および検査方法
US7298415B2 (en) * 2001-07-13 2007-11-20 Xenogen Corporation Structured light imaging apparatus
JP2003107389A (ja) * 2001-10-01 2003-04-09 Minolta Co Ltd スキャナ駆動装置、スキャナ及び三次元計測装置
JP2003189163A (ja) * 2001-12-18 2003-07-04 Ricoh Co Ltd 撮像装置
JP3613708B2 (ja) 2001-12-27 2005-01-26 川崎重工業株式会社 断面形状計測装置
EP1504276B1 (de) * 2002-05-03 2012-08-08 Donnelly Corporation Objektdetektionssystem für ein fahrzeug
GB2417090A (en) 2003-04-28 2006-02-15 Stephen James Crampton CMM arm with exoskeleton
DE10333493A1 (de) 2003-07-22 2005-02-10 FRIEMEL, Jörg Streifenprojektor für ein dreidimensionales Objektvermessungssystem
JP2005069771A (ja) * 2003-08-21 2005-03-17 Brother Ind Ltd 3次元形状検出装置、及び、撮像装置
JP4392833B2 (ja) * 2004-06-14 2010-01-06 三井造船株式会社 3次元画像情報取得装置
JP2007285778A (ja) * 2006-04-13 2007-11-01 Roland Dg Corp 距離測定方法および表面形状測定装置
JP2010175448A (ja) * 2009-01-30 2010-08-12 Kowa Co 光学撮像装置

Also Published As

Publication number Publication date
DE602007002185D1 (de) 2009-10-08
EP2010863A1 (de) 2009-01-07
US8353059B2 (en) 2013-01-08
WO2007125081A1 (en) 2007-11-08
JP2012168182A (ja) 2012-09-06
EP2096403B1 (de) 2011-01-26
US20120026510A1 (en) 2012-02-02
JP2009534969A (ja) 2009-09-24
JP5028475B2 (ja) 2012-09-19
US20090205088A1 (en) 2009-08-13
US8117668B2 (en) 2012-02-14
JP5280559B2 (ja) 2013-09-04
EP2010863B1 (de) 2009-08-26
EP2096403A1 (de) 2009-09-02

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