ATE419550T1 - Optisches bauteil mit submikrometer-hohlräumen - Google Patents

Optisches bauteil mit submikrometer-hohlräumen

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Publication number
ATE419550T1
ATE419550T1 AT03700802T AT03700802T ATE419550T1 AT E419550 T1 ATE419550 T1 AT E419550T1 AT 03700802 T AT03700802 T AT 03700802T AT 03700802 T AT03700802 T AT 03700802T AT E419550 T1 ATE419550 T1 AT E419550T1
Authority
AT
Austria
Prior art keywords
microchannels
microstructures
optical component
substrate
coating
Prior art date
Application number
AT03700802T
Other languages
English (en)
Inventor
Johannes Edlinger
Claus Heine-Kempkens
Othmar Zueger
Original Assignee
Oc Oerlikon Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oc Oerlikon Balzers Ag filed Critical Oc Oerlikon Balzers Ag
Application granted granted Critical
Publication of ATE419550T1 publication Critical patent/ATE419550T1/de

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/0012—Settling tanks making use of filters, e.g. by floating layers of particulate material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027—Metallic material
    • B01D39/2051—Metallic foam
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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    • B81—MICROSTRUCTURAL TECHNOLOGY
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    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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    • C—CHEMISTRY; METALLURGY
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
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    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
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AT03700802T 2002-02-12 2003-02-12 Optisches bauteil mit submikrometer-hohlräumen ATE419550T1 (de)

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Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1474710B1 (de) * 2002-02-12 2008-12-31 OC Oerlikon Balzers AG Optisches bauteil mit submikrometer-hohlräumen
US6785050B2 (en) * 2002-05-09 2004-08-31 Moxtek, Inc. Corrosion resistant wire-grid polarizer and method of fabrication
JP2004271828A (ja) * 2003-03-07 2004-09-30 Mitsubishi Electric Corp 光学素子およびその製造方法
DE10341596B4 (de) * 2003-09-05 2009-01-29 Carl Zeiss Polarisationsstrahlteiler
DE10343720A1 (de) * 2003-09-12 2005-04-28 Zeiss Carl Jena Gmbh Polarisationsstrahlteiler auf Basis eines hochfrequenten Gitters
JP2006003447A (ja) * 2004-06-15 2006-01-05 Sony Corp 偏光分離素子及びその製造方法
US7471866B2 (en) * 2004-06-29 2008-12-30 Her Majesty The Queen In Right Of Canada As Represented By The Minister Of Industry, Through The Communications Research Centre Canada Waveguiding structures with embedded microchannels and method for fabrication thereof
JP2006126338A (ja) * 2004-10-27 2006-05-18 Nippon Sheet Glass Co Ltd 偏光子およびその製造方法
US7570424B2 (en) 2004-12-06 2009-08-04 Moxtek, Inc. Multilayer wire-grid polarizer
US7961393B2 (en) 2004-12-06 2011-06-14 Moxtek, Inc. Selectively absorptive wire-grid polarizer
US7800823B2 (en) 2004-12-06 2010-09-21 Moxtek, Inc. Polarization device to polarize and further control light
KR101228486B1 (ko) * 2004-12-16 2013-01-31 도레이 카부시키가이샤 편광판, 그 제조방법 및 그것을 이용한 액정 표시 장치
WO2007108773A1 (en) * 2006-03-23 2007-09-27 Agengy For Science, Technology And Research Device for analyzing the status of a particle
US20070267057A1 (en) * 2006-05-17 2007-11-22 Haluzak Charles C Optical device and method of forming the same
US8000210B2 (en) * 2006-06-07 2011-08-16 Konica Minolta Holdings, Inc. Quarter-wave plate, and optical pickup device
CN102692662B (zh) * 2006-08-30 2015-06-24 佳能电子株式会社 光学滤光器以及摄像装置
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
JP4842763B2 (ja) * 2006-10-23 2011-12-21 株式会社リコー 光学素子および光学装置
JP5403862B2 (ja) * 2006-11-28 2014-01-29 チェイル インダストリーズ インコーポレイテッド 微細金属パターンの製造方法
CN101622557A (zh) * 2007-01-12 2010-01-06 东丽株式会社 偏振片和使用该偏振片的液晶显示装置
JP4488033B2 (ja) 2007-02-06 2010-06-23 ソニー株式会社 偏光素子及び液晶プロジェクター
US7789515B2 (en) 2007-05-17 2010-09-07 Moxtek, Inc. Projection device with a folded optical path and wire-grid polarizer
JP5045249B2 (ja) * 2007-06-01 2012-10-10 セイコーエプソン株式会社 偏光素子の製造方法
JP4412372B2 (ja) 2007-09-12 2010-02-10 セイコーエプソン株式会社 偏光素子の製造方法
JP5045327B2 (ja) * 2007-09-18 2012-10-10 セイコーエプソン株式会社 偏光素子及びその製造方法、液層装置、電子機器
JP4412388B2 (ja) * 2007-10-31 2010-02-10 セイコーエプソン株式会社 光学素子、液晶装置及び電子機器
KR100962064B1 (ko) 2007-11-19 2010-06-08 미래나노텍(주) 박막 탑 레이어를 갖는 와이어 그리드 편광판 및 그 제조방법
JP5139830B2 (ja) * 2008-02-12 2013-02-06 旭化成イーマテリアルズ株式会社 ワイヤグリッド型偏光素子
EP2261704A4 (de) * 2008-04-03 2012-10-10 Asahi Glass Co Ltd Drahtgitterpolarisierer und verfahren zu seiner herstellung
WO2009125751A1 (ja) * 2008-04-08 2009-10-15 旭硝子株式会社 ワイヤグリッド型偏光子の製造方法
WO2010005059A1 (ja) * 2008-07-10 2010-01-14 旭硝子株式会社 ワイヤグリッド型偏光子およびその製造方法
US20120075699A1 (en) * 2008-10-29 2012-03-29 Mark Alan Davis Segmented film deposition
JP2010204626A (ja) 2009-02-05 2010-09-16 Asahi Glass Co Ltd ワイヤグリッド型偏光子およびその製造方法
FR2942047B1 (fr) * 2009-02-09 2011-06-17 Commissariat Energie Atomique Structure et procede d'alignement d'une fibre optique et d'un guide d'ondes submicronique
JP5402101B2 (ja) * 2009-03-06 2014-01-29 セイコーエプソン株式会社 偏光素子、投射型表示装置、液晶装置、電子機器
KR101610376B1 (ko) * 2009-04-10 2016-04-08 엘지이노텍 주식회사 와이어 그리드 편광자, 이를 포함하는 액정 표시 장치 및 와이어 그리드 편광자의 제조 방법
US8248696B2 (en) 2009-06-25 2012-08-21 Moxtek, Inc. Nano fractal diffuser
JP2010049280A (ja) * 2009-11-25 2010-03-04 Seiko Epson Corp 偏光素子の製造方法
JP2011141468A (ja) * 2010-01-08 2011-07-21 Seiko Epson Corp 偏光素子、偏光素子の製造方法、電子機器
JP5672702B2 (ja) * 2010-01-08 2015-02-18 セイコーエプソン株式会社 偏光素子、偏光素子の製造方法、電子機器
JP2010160504A (ja) * 2010-02-24 2010-07-22 Seiko Epson Corp プロジェクタ
JP2012002971A (ja) 2010-06-16 2012-01-05 Seiko Epson Corp 偏光素子及びその製造方法、液晶装置、電子機器
MY183366A (en) * 2010-07-15 2021-02-18 Commw Scient Ind Res Org Surface treatment
EP2601546A4 (de) * 2010-08-05 2014-11-12 3M Innovative Properties Co Mehrschichtiger film mit matter oberflächenschicht und artikel
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
WO2012162880A1 (zh) * 2011-05-31 2012-12-06 苏州苏大维格光电科技股份有限公司 一种反射式彩色滤光片
US8922890B2 (en) 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
JP6198045B2 (ja) * 2012-08-31 2017-09-20 パナソニックＩｐマネジメント株式会社 液晶表示装置
JP5929860B2 (ja) * 2013-09-24 2016-06-08 ウシオ電機株式会社 グリッド偏光素子製造方法
US9354374B2 (en) 2013-10-24 2016-05-31 Moxtek, Inc. Polarizer with wire pair over rib
EP3063570B1 (de) * 2013-10-29 2021-03-17 CSEM Centre Suisse D'electronique Et De Microtechnique SA Kopplungsstruktur für ein optisches gitter
JP5929881B2 (ja) * 2013-12-11 2016-06-08 ウシオ電機株式会社 グリッド偏光素子
JP5929886B2 (ja) * 2013-12-24 2016-06-08 ウシオ電機株式会社 グリッド偏光素子
WO2016056277A1 (ja) * 2014-10-10 2016-04-14 Ｊｘ日鉱日石エネルギー株式会社 光学位相差部材、光学位相差部材を備える複合光学部材、及び光学位相差部材の製造方法
US10054717B2 (en) 2015-04-03 2018-08-21 Moxtek, Inc. Oxidation and moisture barrier layers for wire grid polarizer
US9995864B2 (en) 2015-04-03 2018-06-12 Moxtek, Inc. Wire grid polarizer with silane protective coating
US10534120B2 (en) 2015-04-03 2020-01-14 Moxtek, Inc. Wire grid polarizer with protected wires
US9703028B2 (en) 2015-04-03 2017-07-11 Moxtek, Inc. Wire grid polarizer with phosphonate protective coating
US10444410B2 (en) 2016-08-16 2019-10-15 Moxtek, Inc. Overcoat wire grid polarizer having conformal coat layer with oxidation barrier and moisture barrier
US10408983B2 (en) 2016-08-16 2019-09-10 Moxtek, Inc. Durable, high performance wire grid polarizer having permeable junction between top protection layer
US10571614B2 (en) 2016-08-16 2020-02-25 Moxek, Inc. Wire grid polarizer heat sink having specified reflective layer, absorptive layer, and heat-dissipation layer
CN109804281A (zh) * 2016-11-22 2019-05-24 莫克斯泰克公司 外涂线栅偏振器
WO2018105586A1 (ja) * 2016-12-06 2018-06-14 Ｓｃｉｖａｘ株式会社 光学部材および当該光学部材を用いた液晶パネル、並びにそれらの製造方法
CN108802878B (zh) * 2017-04-27 2021-02-26 清华大学 松树状金属纳米光栅
FI128376B (en) 2017-06-02 2020-04-15 Dispelix Oy Process for the preparation of a diffractive grating with varying efficiency and a diffraction grating
TWI641878B (zh) * 2017-09-22 2018-11-21 友達光電股份有限公司 線柵偏光器以及使用此線柵偏光器的顯示面板
JP6484373B1 (ja) * 2018-06-26 2019-03-13 デクセリアルズ株式会社 偏光板及びこれを備える光学機器
CN108873140B (zh) * 2018-07-25 2020-12-29 Tcl华星光电技术有限公司 金属线栅偏光片的制作方法及金属线栅偏光片
CN112912160A (zh) * 2018-08-31 2021-06-04 浩康生物系统公司 超快颗粒分选
TW202014740A (zh) * 2018-10-01 2020-04-16 友達光電股份有限公司 偏光基板及其製造方法
JP7175390B2 (ja) * 2018-10-03 2022-11-18 モックステック・インコーポレーテッド 耐久性のある高性能ワイヤグリッド偏光子
CN109590036B (zh) * 2018-12-17 2024-04-19 苏州汶颢微流控技术股份有限公司 一种elisa芯片及其使用方法
TWI835950B (zh) 2018-12-17 2024-03-21 美商應用材料股份有限公司 用於封裝的pvd定向沉積
JP7443781B2 (ja) * 2020-01-18 2024-03-06 ウシオ電機株式会社 透過型回折格子素子及び光を波長に応じた向きに進ませる方法
WO2021233968A1 (en) * 2020-05-22 2021-11-25 Interdigital Ce Patent Holdings, Sas High color uniformity double material diffraction grating comprising step-like cavities
JP2023529613A (ja) * 2020-06-03 2023-07-11 アプライド マテリアルズ インコーポレイテッド 導波路格子の勾配封入
CA3197714A1 (en) * 2020-10-08 2022-04-14 University Of South Australia Microfluidic device and method for analysis of a particulate sample

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278103A (en) * 1993-02-26 1994-01-11 Lsi Logic Corporation Method for the controlled formation of voids in doped glass dielectric films
US6454945B1 (en) * 1995-06-16 2002-09-24 University Of Washington Microfabricated devices and methods
US6709869B2 (en) * 1995-12-18 2004-03-23 Tecan Trading Ag Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system
US6376781B1 (en) * 1996-05-03 2002-04-23 Micron Technology, Inc. Low resistance contacts fabricated in high aspect ratio openings by resputtering
GB2320129B (en) 1996-06-24 2001-09-26 United Microelectronics Corp Method of fabricating an aluminium plug for contact with a semiconductor device
US5880018A (en) * 1996-10-07 1999-03-09 Motorola Inc. Method for manufacturing a low dielectric constant inter-level integrated circuit structure
US6303464B1 (en) * 1996-12-30 2001-10-16 Intel Corporation Method and structure for reducing interconnect system capacitance through enclosed voids in a dielectric layer
US6632399B1 (en) * 1998-05-22 2003-10-14 Tecan Trading Ag Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system for performing biological fluid assays
JP3654553B2 (ja) * 1997-06-19 2005-06-02 株式会社リコー 光学素子
US6288840B1 (en) * 1999-06-22 2001-09-11 Moxtek Imbedded wire grid polarizer for the visible spectrum
US6706519B1 (en) * 1999-06-22 2004-03-16 Tecan Trading Ag Devices and methods for the performance of miniaturized in vitro amplification assays
US6122103A (en) * 1999-06-22 2000-09-19 Moxtech Broadband wire grid polarizer for the visible spectrum
US6875619B2 (en) * 1999-11-12 2005-04-05 Motorola, Inc. Microfluidic devices comprising biochannels
US6210540B1 (en) 2000-03-03 2001-04-03 Optical Coating Laboratory, Inc. Method and apparatus for depositing thin films on vertical surfaces
EP1410045A2 (de) * 2000-11-22 2004-04-21 Burstein Technologies, Inc. Vorrichtung und verfahren zur abscheidung von agglomeraten und diversen partikeln
US6949377B2 (en) * 2001-03-05 2005-09-27 Ho Winston Z Chemiluminescence-based microfluidic biochip
JP2002328222A (ja) * 2001-04-26 2002-11-15 Nippon Sheet Glass Co Ltd 偏光素子及びその製造方法
KR100878103B1 (ko) 2001-05-04 2009-01-14 도쿄엘렉트론가부시키가이샤 순차적 증착 및 에칭에 의한 이온화된 ｐｖｄ
AU2002337653A1 (en) * 2001-07-25 2003-02-17 The Trustees Of Princeton University Nanochannel arrays and their preparation and use for high throughput macromolecular analysis
EP1474710B1 (de) * 2002-02-12 2008-12-31 OC Oerlikon Balzers AG Optisches bauteil mit submikrometer-hohlräumen

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JP2005517973A (ja) 2005-06-16
AU2003202404A8 (en) 2003-09-04
EP1474710A2 (de) 2004-11-10
WO2003069381A3 (en) 2003-11-13
US7507467B2 (en) 2009-03-24
US20050208211A1 (en) 2005-09-22
US7026046B2 (en) 2006-04-11
US6884500B2 (en) 2005-04-26
KR20040093704A (ko) 2004-11-08
US20080152892A1 (en) 2008-06-26
WO2003069381A2 (en) 2003-08-21
US20030180024A1 (en) 2003-09-25
DE60325555D1 (de) 2009-02-12
EP2031425A1 (de) 2009-03-04
EP1474710B1 (de) 2008-12-31
KR100960183B1 (ko) 2010-05-27
US7371329B2 (en) 2008-05-13
AU2003202404A1 (en) 2003-09-04
TW200304551A (en) 2003-10-01
TWI266899B (en) 2006-11-21
CN1781036A (zh) 2006-05-31
US20060147679A1 (en) 2006-07-06
CN100592112C (zh) 2010-02-24

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