ATE353269T1 - Verfahren zur epiready-oberflächen-behandlung auf sic-dünnschichten - Google Patents

Verfahren zur epiready-oberflächen-behandlung auf sic-dünnschichten

Info

Publication number
ATE353269T1
ATE353269T1 AT04767750T AT04767750T ATE353269T1 AT E353269 T1 ATE353269 T1 AT E353269T1 AT 04767750 T AT04767750 T AT 04767750T AT 04767750 T AT04767750 T AT 04767750T AT E353269 T1 ATE353269 T1 AT E353269T1
Authority
AT
Austria
Prior art keywords
surface treatment
thin layers
sic thin
epiready
epiready surface
Prior art date
Application number
AT04767750T
Other languages
English (en)
Inventor
Claire Richtarch
Original Assignee
Soitec Silicon On Insulator
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec Silicon On Insulator filed Critical Soitec Silicon On Insulator
Application granted granted Critical
Publication of ATE353269T1 publication Critical patent/ATE353269T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02378—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02428—Structure
    • H01L21/0243—Surface structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02529—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/0254—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02658—Pretreatments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/1608—Silicon carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/931—Silicon carbide semiconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Surface Treatment Of Glass (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
AT04767750T 2003-07-23 2004-07-22 Verfahren zur epiready-oberflächen-behandlung auf sic-dünnschichten ATE353269T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0308969A FR2857895B1 (fr) 2003-07-23 2003-07-23 Procede de preparation de surface epiready sur films minces de sic

Publications (1)

Publication Number Publication Date
ATE353269T1 true ATE353269T1 (de) 2007-02-15

Family

ID=33561010

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04767750T ATE353269T1 (de) 2003-07-23 2004-07-22 Verfahren zur epiready-oberflächen-behandlung auf sic-dünnschichten

Country Status (9)

Country Link
US (1) US7060620B2 (de)
EP (1) EP1646478B9 (de)
JP (1) JP4414433B2 (de)
KR (1) KR100792057B1 (de)
CN (1) CN100496893C (de)
AT (1) ATE353269T1 (de)
DE (1) DE602004004658T4 (de)
FR (1) FR2857895B1 (de)
WO (1) WO2005009684A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3881562B2 (ja) * 2002-02-22 2007-02-14 三井造船株式会社 ＳｉＣモニタウェハ製造方法
US20080261401A1 (en) * 2004-04-08 2008-10-23 Ii-Vi Incorporated Chemical-Mechanical Polishing of Sic Surfaces Using Hydrogen Peroxide or Ozonated Water Solutions in Combination with Colloidal Abrasive
US7459702B2 (en) * 2004-10-26 2008-12-02 Jayant Neogi Apparatus and method for polishing gemstones and the like
FR2884647B1 (fr) * 2005-04-15 2008-02-22 Soitec Silicon On Insulator Traitement de plaques de semi-conducteurs
US7528040B2 (en) * 2005-05-24 2009-05-05 Cree, Inc. Methods of fabricating silicon carbide devices having smooth channels
DE102005024073A1 (de) * 2005-05-25 2006-11-30 Siltronic Ag Halbleiter-Schichtstruktur und Verfahren zur Herstellung einer Halbleiter-Schichtstruktur
JP5277722B2 (ja) * 2008-05-21 2013-08-28 新日鐵住金株式会社 炭化珪素単結晶ウェハ表面の研磨方法
EP2172967A1 (de) 2008-08-04 2010-04-07 Siltronic AG Verfahren zur Herstellung von Siliciumcarbid
FR2954585B1 (fr) * 2009-12-23 2012-03-02 Soitec Silicon Insulator Technologies Procede de realisation d'une heterostructure avec minimisation de contrainte
JP5772635B2 (ja) * 2012-02-02 2015-09-02 三菱電機株式会社 炭化珪素単結晶基板の製造方法
JP5990444B2 (ja) * 2012-11-01 2016-09-14 昭和電工株式会社 炭化珪素半導体装置の製造方法
US10993466B2 (en) 2015-04-24 2021-05-04 International Flavors & Fragrances Inc. Delivery systems and methods of preparing the same
EP3512625B1 (de) 2016-09-16 2023-04-26 International Flavors & Fragrances Inc. Mit viskositätskontrollmittel stabilisierte mikrokapselzusammensetzungen
CN117202986A (zh) 2021-04-16 2023-12-08 国际香精香料公司 水凝胶封装物及其制造方法
WO2024026225A1 (en) 2022-07-26 2024-02-01 International Flavors & Fragrances Inc. Robust flavor emulsions

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5895583A (en) * 1996-11-20 1999-04-20 Northrop Grumman Corporation Method of preparing silicon carbide wafers for epitaxial growth
US5877070A (en) * 1997-05-31 1999-03-02 Max-Planck Society Method for the transfer of thin layers of monocrystalline material to a desirable substrate
JP3085272B2 (ja) * 1997-12-19 2000-09-04 富士電機株式会社 炭化けい素半導体装置の熱酸化膜形成方法
JP3762144B2 (ja) * 1998-06-18 2006-04-05 キヤノン株式会社 Ｓｏｉ基板の作製方法
JP3975047B2 (ja) * 2000-04-21 2007-09-12 泰弘 谷 研磨方法
WO2002005315A2 (en) * 2000-07-10 2002-01-17 Epion Corporation System and method for improving thin films by gas cluster ion be am processing
JP3881562B2 (ja) * 2002-02-22 2007-02-14 三井造船株式会社 ＳｉＣモニタウェハ製造方法
FR2843061B1 (fr) 2002-08-02 2004-09-24 Soitec Silicon On Insulator Procede de polissage de tranche de materiau

Also Published As

Publication number Publication date
KR100792057B1 (ko) 2008-01-04
US7060620B2 (en) 2006-06-13
EP1646478B1 (de) 2007-02-07
DE602004004658T4 (de) 2008-08-21
KR20060033806A (ko) 2006-04-19
JP4414433B2 (ja) 2010-02-10
FR2857895A1 (fr) 2005-01-28
DE602004004658D1 (de) 2007-03-22
DE602004004658T2 (de) 2007-11-22
JP2006528423A (ja) 2006-12-14
CN1826210A (zh) 2006-08-30
CN100496893C (zh) 2009-06-10
WO2005009684A1 (fr) 2005-02-03
US20050020084A1 (en) 2005-01-27
EP1646478A1 (de) 2006-04-19
FR2857895B1 (fr) 2007-01-26
EP1646478B9 (de) 2008-07-16

Similar Documents

Publication Publication Date Title
ATE353269T1 (de) Verfahren zur epiready-oberflächen-behandlung auf sic-dünnschichten
ATE400405T1 (de) Verfahren zur herstellung eines schleifgegenstands
DE60331423D1 (de) Teilverfahren für substrat aus zerbrechlichem material und das verfahren verwendende teilvorrichtung
DE60011163D1 (de) Glassubstrat für magnetische Medien, und Verfahren zur Herstellung desselben
EP2000259A3 (de) Substrathaltevorrichtung, Poliervorrichtung und Polierverfahren
DE60003015D1 (de) Schleifartikel, verfahren zur herstellung desselben, und schleifvorrichtung
TWI268535B (en) Substrate heating apparatus and manufacturing method for the same
DE602005025976D1 (de) Herstellungsverfahren für ein siliziumcarbidhalbleiterbauelement
DE60127179D1 (de) Schleifartikel zur modifizierung einer halbleiterscheibe
AU2002360612A1 (en) Apparatus and methods for controlling wafer temperature in chemical mechanical polishing
EP1363322A3 (de) GaN-einkristallines Substrat, epitaktisches Nitrid-Typ-Halbleitersubstrat, Nitrid-Typ-Halbleitervorrichtung und Verfahren zu deren Herstellung
ATE178298T1 (de) Schleifkorn und verfahren zur herstellung desselben
ATE465514T1 (de) Herstellungsverfahren für eine bruchzone in einem substrat durch koimplantation
EP1785512A4 (de) Siliziumcarbid-einkristallwafer und herstellungsverfahren dafür
MY125775A (en) Method for treating substrates for microelectronics and substrates obtained by said method.
DE50201295D1 (de) Bauteil aus quarzglas sowie verfahren zur herstellung desselben
DE602004028443D1 (de) Hochpräziser spiegel und verfahren zu seiner herstellung
DE50100014D1 (de) Halbleiterscheibe aus Silicium und Verfahren zur Herstellung der Halbleiterscheibe
EP1577943A3 (de) Halbleitersubstrat und Herstellungsverfahren dafür, und Halbleiter-Bauelement
DE602004031530D1 (de) Master-form zur duplikation einer feinstruktur und herstellungsverfahren dafür
SG151235A1 (en) Glass substrate for magnetic disc and manufacturing method thereof
DE602004031609D1 (de) S einen hydrierten amorphen kohlenstoff, und verfahren zur abscheidung eines derartigen überzugs
WO2003060980A3 (en) Methods for planarization of group viii metal-containing surfaces using oxidizing gases
DE60106972D1 (de) Verfahren zur herstellung von verstärkten waferpolierkissen und diese verfahren implementierende vorrichtungen
DE60045745D1 (de) Klebende verbundbeschichtung für diamant und diamant enthaltende werkstoffe und verfahren zur herstellung dieser beschichtung

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties