DE602004028443D1 - Hochpräziser spiegel und verfahren zu seiner herstellung - Google Patents

Hochpräziser spiegel und verfahren zu seiner herstellung

Info

Publication number
DE602004028443D1
DE602004028443D1 DE602004028443T DE602004028443T DE602004028443D1 DE 602004028443 D1 DE602004028443 D1 DE 602004028443D1 DE 602004028443 T DE602004028443 T DE 602004028443T DE 602004028443 T DE602004028443 T DE 602004028443T DE 602004028443 D1 DE602004028443 D1 DE 602004028443D1
Authority
DE
Germany
Prior art keywords
substrate
production
high precision
finish layer
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004028443T
Other languages
English (en)
Inventor
John P Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of DE602004028443D1 publication Critical patent/DE602004028443D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
  • Glass Compositions (AREA)
DE602004028443T 2003-02-24 2004-02-24 Hochpräziser spiegel und verfahren zu seiner herstellung Expired - Lifetime DE602004028443D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/373,448 US6921177B2 (en) 2003-02-24 2003-02-24 High precision mirror, and a method of making it
PCT/US2004/005494 WO2004077114A1 (en) 2003-02-24 2004-02-24 High precision mirror, and a method of making it

Publications (1)

Publication Number Publication Date
DE602004028443D1 true DE602004028443D1 (de) 2010-09-16

Family

ID=32868709

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004028443T Expired - Lifetime DE602004028443D1 (de) 2003-02-24 2004-02-24 Hochpräziser spiegel und verfahren zu seiner herstellung

Country Status (11)

Country Link
US (1) US6921177B2 (de)
EP (1) EP1597614B1 (de)
JP (1) JP4664277B2 (de)
KR (1) KR100755582B1 (de)
AT (1) ATE476676T1 (de)
AU (1) AU2004214919B2 (de)
CA (1) CA2500309C (de)
DE (1) DE602004028443D1 (de)
IL (1) IL167673A (de)
TW (1) TWI288247B (de)
WO (1) WO2004077114A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070121104A1 (en) * 2003-04-18 2007-05-31 Hendrix James L Techniques for reducing optical noise in metrology systems
US8062096B2 (en) * 2005-06-30 2011-11-22 Cabot Microelectronics Corporation Use of CMP for aluminum mirror and solar cell fabrication
US7641350B2 (en) * 2005-11-28 2010-01-05 Jds Uniphase Corporation Front surface mirror for providing white color uniformity for polarized systems with a large range of incidence angles
DE102006011973B4 (de) * 2006-03-15 2011-04-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Spiegel mit einer Silberschicht
WO2009024181A1 (en) * 2007-08-20 2009-02-26 Optosic Ag Method of manufacturing and processing silicon carbide scanning mirrors
DE102009039400A1 (de) * 2009-08-31 2011-03-03 Carl Zeiss Laser Optics Gmbh Reflektives optisches Element zur Verwendung in einem EUV-System
DE102009040785A1 (de) * 2009-09-09 2011-03-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Substrat aus einer Aluminium-Silizium-Legierung oder kristallinem Silizium, Metallspiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung
US8398251B2 (en) * 2009-11-04 2013-03-19 Raytheon Canada Limited Method and apparatus for fabricating a precision optical surface
DE102010039927A1 (de) * 2010-08-30 2012-03-01 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
DE102011002953A1 (de) * 2011-01-21 2012-07-26 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
US9575223B2 (en) * 2011-05-13 2017-02-21 Raytheon Company Magnesium mirrors and methods of manufacture thereof
US9488760B2 (en) 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
US9971073B2 (en) * 2014-04-14 2018-05-15 Corning Incorporated Enhanced performance metallic based optical mirror substrates
US20160097885A1 (en) 2014-10-03 2016-04-07 Corning Incorporated Mirror substrates with highly finishable corrosion-resistant coating
KR20160061548A (ko) * 2014-11-21 2016-06-01 삼성디스플레이 주식회사 어레이 테스트 모듈레이터 및 이를 포함하는 박막트랜지스터 기판 검사 장치
DE102015218702A1 (de) * 2015-09-29 2017-03-30 Dr. Johannes Heidenhain Gmbh Optisches Schichtsystem
US20170269265A1 (en) * 2016-03-18 2017-09-21 Corning Incorporated Graphite substrates for reflective optics
US10816702B2 (en) * 2016-03-18 2020-10-27 Corning Incorporated Reflective optical element with high stiffness substrate
CN108468029B (zh) * 2018-02-12 2020-01-21 中国科学院国家天文台南京天文光学技术研究所 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法
US11971605B2 (en) 2018-05-09 2024-04-30 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Mirror support for a composite optical mirror and method for its production
US20200009701A1 (en) * 2018-07-09 2020-01-09 Arizona Board Of Regents On Behalf Of The University Of Arizona Polishing protocol for zirconium diboride based ceramics to be implemented into optical systems
US20200132894A1 (en) * 2018-10-31 2020-04-30 Corning Incorporated Support for reflective optical element
US11385383B2 (en) * 2018-11-13 2022-07-12 Raytheon Company Coating stress mitigation through front surface coating manipulation on ultra-high reflectors or other optical devices
US11619764B2 (en) * 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US11698477B2 (en) * 2020-07-15 2023-07-11 Raytheon Company Visible quality additive manufactured aluminum mirror finishing
US12066591B2 (en) * 2020-07-15 2024-08-20 Raytheon Company Visible quality mirror finishing

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US3947302A (en) * 1973-08-29 1976-03-30 Mcdonnell Douglas Corporation Method of producing a spectral line rejection mirror
US4865451A (en) * 1986-12-22 1989-09-12 Ahonen Robert G Silicon substrate mirror assembly for lasers
US4814232A (en) * 1987-03-25 1989-03-21 United Technologies Corporation Method for depositing laser mirror coatings
ZA912915B (en) 1990-05-10 1992-04-29 Boc Group Inc Novel monolithic front surface mirror
JPH07191207A (ja) * 1993-11-17 1995-07-28 Asahi Optical Co Ltd 反射型複合光学素子
JPH07168008A (ja) * 1993-12-13 1995-07-04 Nikon Corp Ａｇ表面鏡
JPH0868897A (ja) * 1994-08-29 1996-03-12 Nikon Corp 反射鏡およびその製造方法
ATE217366T1 (de) * 1996-08-15 2002-05-15 Alcan Tech & Man Ag Reflektor mit resistenter oberfläche
JPH10339799A (ja) * 1997-06-06 1998-12-22 Nikon Corp 反射鏡及びその製造方法
US5912777A (en) * 1997-06-26 1999-06-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High temperature solar reflector, its preparation and use
US5933278A (en) * 1997-06-30 1999-08-03 Polaroid Corporation Monolithic multi-faceted mirror for combining multiple beams from different light sources by reflection
JP2000019312A (ja) * 1998-07-01 2000-01-21 Konica Corp 反射ミラー
JP2000241612A (ja) * 1999-02-23 2000-09-08 Nikon Corp 反射鏡
US6078425A (en) * 1999-06-09 2000-06-20 The Regents Of The University Of California Durable silver coating for mirrors
JP4482971B2 (ja) * 1999-09-08 2010-06-16 株式会社ニコン 反射鏡
US6587263B1 (en) * 2000-03-31 2003-07-01 Lockheed Martin Corporation Optical solar reflectors
CA2313438C (en) * 2000-07-06 2003-03-11 B-Con Engineering Inc. High quality optical surface and method of producing same
DE10125554C2 (de) * 2001-05-23 2003-06-18 Astrium Gmbh Ultraleichter und ultrasteifer vollkeramischer Reflektor und Verfahren zur Herstellung sowie Verwendung eines solchen Reflektors
JP2002357709A (ja) * 2001-06-01 2002-12-13 Canon Inc 高反射性銀鏡及び反射型光学部品
US6598985B2 (en) * 2001-06-11 2003-07-29 Nanogear Optical mirror system with multi-axis rotational control
US6994444B2 (en) * 2002-06-14 2006-02-07 Asml Holding N.V. Method and apparatus for managing actinic intensity transients in a lithography mirror

Also Published As

Publication number Publication date
WO2004077114A1 (en) 2004-09-10
JP2006518883A (ja) 2006-08-17
EP1597614A1 (de) 2005-11-23
CA2500309C (en) 2010-08-24
KR100755582B1 (ko) 2007-09-06
TWI288247B (en) 2007-10-11
CA2500309A1 (en) 2004-09-10
US20040165296A1 (en) 2004-08-26
US6921177B2 (en) 2005-07-26
JP4664277B2 (ja) 2011-04-06
AU2004214919A1 (en) 2004-09-10
AU2004214919B2 (en) 2006-12-21
ATE476676T1 (de) 2010-08-15
IL167673A (en) 2009-12-24
TW200428022A (en) 2004-12-16
EP1597614B1 (de) 2010-08-04
KR20050110638A (ko) 2005-11-23

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