EP1597614B1 - Hochpräziser spiegel und verfahren zu seiner herstellung - Google Patents

Hochpräziser spiegel und verfahren zu seiner herstellung Download PDF

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Publication number
EP1597614B1
EP1597614B1 EP04714156A EP04714156A EP1597614B1 EP 1597614 B1 EP1597614 B1 EP 1597614B1 EP 04714156 A EP04714156 A EP 04714156A EP 04714156 A EP04714156 A EP 04714156A EP 1597614 B1 EP1597614 B1 EP 1597614B1
Authority
EP
European Patent Office
Prior art keywords
layer
mirror
finish
substrate
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04714156A
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English (en)
French (fr)
Other versions
EP1597614A1 (de
Inventor
John P. Schaefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
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Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of EP1597614A1 publication Critical patent/EP1597614A1/de
Application granted granted Critical
Publication of EP1597614B1 publication Critical patent/EP1597614B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

Claims (9)

  1. Spiegel (10) mit:
    einem Substrat (12), das eine Präzisionsoberfläche (13) aufweist, die mittels Einpunkt-Diamantdrehtechnik gebildet ist;
    einer Dünnfilm-Abschlussschicht (16), die über der Präzisionsoberfläche (13) des Substrats (12) abgeschieden ist und an einer dem Substrat (12) gegenüberliegenden Seite eine Oberfläche (17) aufweist, die poliert ist, um eine Güte der Oberfläche (17) zu verbessern; und
    einer reflektierenden Schicht (21), die äußerlich der Oberfläche (17) der Abschlussschicht (16) bereitgestellt ist.
  2. Spiegel (10) nach Anspruch 1, wobei die Abschlussschicht (16) ausreichend dünn ausgebildet ist, so dass der Spiegel (10) als Reaktion auf Temperaturänderungen im Wesentlichen frei von Biegung durch Unterschiede der thermischen Ausdehnungskoeffizienten des Substrates (12) und der Abschlussschicht (16) ist.
  3. Spiegel (10) nach Anspruch 1, wobei die Abschlussschicht (16), nachdem sie poliert worden ist, eine Dicke von ungefähr 4500 Ångström aufweist.
  4. Spiegel (10) nach Anspruch 1, wobei die Abschlussschicht (16) Silizium ist.
  5. Spiegel (10) nach Anspruch 1, wobei die Abschlussschicht (16) Nickel-Chrom ist.
  6. Spiegel (10) nach Anspruch 1 oder 5, ferner mit einer Dünnfilm-Zwischenschicht (76), die zwischen dem Substrat (12) und der Abschlussschicht (16) angeordnet ist.
  7. Spiegel (10) nach Anspruch 6, wobei die Zwischenschicht (76) Silizium ist.
  8. Spiegel (10) nach Anspruch 1, wobei die polierte Oberfläche (17) der Abschlussschicht (16) eine Oberflächengüte von ungefähr 10 bis 25 Ångström quadratische Rauheit (RMS) aufweist.
  9. Spiegel (10) nach Anspruch 1, wobei eine reflektierende Oberfläche der reflektierenden Schicht (21) eine Oberflächengüte von ungefähr 10 bis 25 Ångström quadratische Rauheit (RMS) aufweist.
EP04714156A 2003-02-24 2004-02-24 Hochpräziser spiegel und verfahren zu seiner herstellung Expired - Lifetime EP1597614B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US373448 2003-02-24
US10/373,448 US6921177B2 (en) 2003-02-24 2003-02-24 High precision mirror, and a method of making it
PCT/US2004/005494 WO2004077114A1 (en) 2003-02-24 2004-02-24 High precision mirror, and a method of making it

Publications (2)

Publication Number Publication Date
EP1597614A1 EP1597614A1 (de) 2005-11-23
EP1597614B1 true EP1597614B1 (de) 2010-08-04

Family

ID=32868709

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04714156A Expired - Lifetime EP1597614B1 (de) 2003-02-24 2004-02-24 Hochpräziser spiegel und verfahren zu seiner herstellung

Country Status (11)

Country Link
US (1) US6921177B2 (de)
EP (1) EP1597614B1 (de)
JP (1) JP4664277B2 (de)
KR (1) KR100755582B1 (de)
AT (1) ATE476676T1 (de)
AU (1) AU2004214919B2 (de)
CA (1) CA2500309C (de)
DE (1) DE602004028443D1 (de)
IL (1) IL167673A (de)
TW (1) TWI288247B (de)
WO (1) WO2004077114A1 (de)

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US8062096B2 (en) * 2005-06-30 2011-11-22 Cabot Microelectronics Corporation Use of CMP for aluminum mirror and solar cell fabrication
US7641350B2 (en) * 2005-11-28 2010-01-05 Jds Uniphase Corporation Front surface mirror for providing white color uniformity for polarized systems with a large range of incidence angles
DE102006011973B4 (de) * 2006-03-15 2011-04-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Spiegel mit einer Silberschicht
WO2009024181A1 (en) * 2007-08-20 2009-02-26 Optosic Ag Method of manufacturing and processing silicon carbide scanning mirrors
DE102009039400A1 (de) * 2009-08-31 2011-03-03 Carl Zeiss Laser Optics Gmbh Reflektives optisches Element zur Verwendung in einem EUV-System
DE102009040785A1 (de) * 2009-09-09 2011-03-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Substrat aus einer Aluminium-Silizium-Legierung oder kristallinem Silizium, Metallspiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung
US8398251B2 (en) * 2009-11-04 2013-03-19 Raytheon Canada Limited Method and apparatus for fabricating a precision optical surface
DE102010039927A1 (de) * 2010-08-30 2012-03-01 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
DE102011002953A1 (de) * 2011-01-21 2012-07-26 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
US9575223B2 (en) * 2011-05-13 2017-02-21 Raytheon Company Magnesium mirrors and methods of manufacture thereof
US9488760B2 (en) 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
US9971073B2 (en) 2014-04-14 2018-05-15 Corning Incorporated Enhanced performance metallic based optical mirror substrates
US20160097885A1 (en) 2014-10-03 2016-04-07 Corning Incorporated Mirror substrates with highly finishable corrosion-resistant coating
KR20160061548A (ko) * 2014-11-21 2016-06-01 삼성디스플레이 주식회사 어레이 테스트 모듈레이터 및 이를 포함하는 박막트랜지스터 기판 검사 장치
DE102015218702A1 (de) * 2015-09-29 2017-03-30 Dr. Johannes Heidenhain Gmbh Optisches Schichtsystem
US20170269265A1 (en) * 2016-03-18 2017-09-21 Corning Incorporated Graphite substrates for reflective optics
US10816702B2 (en) * 2016-03-18 2020-10-27 Corning Incorporated Reflective optical element with high stiffness substrate
CN108468029B (zh) * 2018-02-12 2020-01-21 中国科学院国家天文台南京天文光学技术研究所 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法
WO2019215243A1 (de) 2018-05-09 2019-11-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Spiegelträger für einen optischen spiegel aus einem verbundwerkstoff und verfahren zu dessen herstellung
US20200009701A1 (en) * 2018-07-09 2020-01-09 Arizona Board Of Regents On Behalf Of The University Of Arizona Polishing protocol for zirconium diboride based ceramics to be implemented into optical systems
US20200132894A1 (en) * 2018-10-31 2020-04-30 Corning Incorporated Support for reflective optical element
US11385383B2 (en) 2018-11-13 2022-07-12 Raytheon Company Coating stress mitigation through front surface coating manipulation on ultra-high reflectors or other optical devices
US11619764B2 (en) 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US11698477B2 (en) * 2020-07-15 2023-07-11 Raytheon Company Visible quality additive manufactured aluminum mirror finishing
US20220019001A1 (en) * 2020-07-15 2022-01-20 Raytheon Company Visible quality mirror finishing

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US5933278A (en) * 1997-06-30 1999-08-03 Polaroid Corporation Monolithic multi-faceted mirror for combining multiple beams from different light sources by reflection
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Also Published As

Publication number Publication date
CA2500309C (en) 2010-08-24
US6921177B2 (en) 2005-07-26
ATE476676T1 (de) 2010-08-15
TW200428022A (en) 2004-12-16
IL167673A (en) 2009-12-24
EP1597614A1 (de) 2005-11-23
AU2004214919B2 (en) 2006-12-21
AU2004214919A1 (en) 2004-09-10
CA2500309A1 (en) 2004-09-10
DE602004028443D1 (de) 2010-09-16
JP4664277B2 (ja) 2011-04-06
KR20050110638A (ko) 2005-11-23
JP2006518883A (ja) 2006-08-17
WO2004077114A1 (en) 2004-09-10
US20040165296A1 (en) 2004-08-26
TWI288247B (en) 2007-10-11
KR100755582B1 (ko) 2007-09-06

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