ATE352865T1 - Vorrichtung zur wafervorbereitung - Google Patents

Vorrichtung zur wafervorbereitung

Info

Publication number
ATE352865T1
ATE352865T1 AT01924530T AT01924530T ATE352865T1 AT E352865 T1 ATE352865 T1 AT E352865T1 AT 01924530 T AT01924530 T AT 01924530T AT 01924530 T AT01924530 T AT 01924530T AT E352865 T1 ATE352865 T1 AT E352865T1
Authority
AT
Austria
Prior art keywords
wafer
disposed
drive
wafer preparation
roller
Prior art date
Application number
AT01924530T
Other languages
English (en)
Inventor
Oliver David Jones
David T Frost
John G Dewit
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/540,097 external-priority patent/US6328640B1/en
Priority claimed from US09/540,160 external-priority patent/US6427566B1/en
Priority claimed from US09/540,975 external-priority patent/US6368192B1/en
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of ATE352865T1 publication Critical patent/ATE352865T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT01924530T 2000-03-31 2001-03-29 Vorrichtung zur wafervorbereitung ATE352865T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/540,097 US6328640B1 (en) 2000-03-31 2000-03-31 Wafer preparation apparatus including rotatable wafer preparation assemblies
US09/540,160 US6427566B1 (en) 2000-03-31 2000-03-31 Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same
US09/540,975 US6368192B1 (en) 2000-03-31 2000-03-31 Wafer preparation apparatus including variable height wafer drive assembly

Publications (1)

Publication Number Publication Date
ATE352865T1 true ATE352865T1 (de) 2007-02-15

Family

ID=27415315

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01924530T ATE352865T1 (de) 2000-03-31 2001-03-29 Vorrichtung zur wafervorbereitung

Country Status (9)

Country Link
EP (1) EP1269522B1 (de)
JP (1) JP4846165B2 (de)
KR (1) KR100770186B1 (de)
CN (1) CN1225769C (de)
AT (1) ATE352865T1 (de)
AU (1) AU2001251178A1 (de)
DE (1) DE60126254T2 (de)
TW (1) TW492119B (de)
WO (1) WO2001075942A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100796553B1 (ko) * 2006-06-29 2008-01-21 두산메카텍 주식회사 웨이퍼 표면연마장비의 세정 브러쉬 승하강장치
US7962990B2 (en) * 2008-10-01 2011-06-21 Applied Materials, Inc. Brush box cleaner module with force control
US8458843B2 (en) * 2009-10-22 2013-06-11 Applied Materials, Inc. Apparatus and methods for brush and pad conditioning
TWI393204B (zh) * 2009-11-27 2013-04-11 Au Optronics Corp 製程機台
US9230846B2 (en) * 2010-06-07 2016-01-05 Veeco Instruments, Inc. Multi-wafer rotating disc reactor with inertial planetary drive
CN102074455B (zh) * 2010-09-03 2012-11-14 清华大学 用于晶圆的刷洗装置
CN103008301B (zh) * 2013-01-11 2016-01-20 常州市科沛达超声工程设备有限公司 晶圆片双面刷洗机
US10229842B2 (en) * 2013-07-26 2019-03-12 Applied Materials, Inc. Double sided buff module for post CMP cleaning
CN107931179B (zh) * 2017-11-15 2020-10-02 宜都同创光电科技有限公司 一种光学玻璃镜片洗前半自动擦油机
US12023779B2 (en) * 2021-07-14 2024-07-02 Applied Materials, Inc. Post-chemical mechanical polishing brush cleaning box
CN115995405A (zh) * 2021-10-19 2023-04-21 杭州众硅电子科技有限公司 一种多晶圆刷洗装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4208760A (en) * 1977-12-19 1980-06-24 Huestis Machine Corp. Apparatus and method for cleaning wafers
US5317778A (en) * 1991-07-31 1994-06-07 Shin-Etsu Handotai Co., Ltd. Automatic cleaning apparatus for wafers
JP3044277B2 (ja) * 1994-12-21 2000-05-22 信越半導体株式会社 ウェーハの洗浄及び洗浄乾燥装置
JP3278590B2 (ja) * 1996-08-23 2002-04-30 株式会社東芝 超音波洗浄装置及び超音波洗浄方法
US5924154A (en) * 1996-08-29 1999-07-20 Ontrak Systems, Inc. Brush assembly apparatus
US5933902A (en) * 1997-11-18 1999-08-10 Frey; Bernhard M. Wafer cleaning system
JPH11288911A (ja) * 1997-12-01 1999-10-19 Mitsubishi Materials Corp 半導体ウェーハ洗浄装置及び半導体ウェーハの製造方法
US6070284A (en) 1998-02-04 2000-06-06 Silikinetic Technology, Inc. Wafer cleaning method and system
JP4007677B2 (ja) * 1998-04-22 2007-11-14 信越半導体株式会社 ブラシ洗浄装置及びワーク洗浄システム

Also Published As

Publication number Publication date
EP1269522A1 (de) 2003-01-02
JP4846165B2 (ja) 2011-12-28
JP2003529929A (ja) 2003-10-07
CN1225769C (zh) 2005-11-02
KR100770186B1 (ko) 2007-10-25
DE60126254T2 (de) 2007-10-25
AU2001251178A1 (en) 2001-10-15
DE60126254D1 (de) 2007-03-15
CN1422438A (zh) 2003-06-04
TW492119B (en) 2002-06-21
WO2001075942A1 (en) 2001-10-11
KR20020087438A (ko) 2002-11-22
EP1269522B1 (de) 2007-01-24

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties