ATE291731T1 - Schichtdickenmessung mittels inelastischer elektronenstreuung - Google Patents

Schichtdickenmessung mittels inelastischer elektronenstreuung

Info

Publication number
ATE291731T1
ATE291731T1 AT00943069T AT00943069T ATE291731T1 AT E291731 T1 ATE291731 T1 AT E291731T1 AT 00943069 T AT00943069 T AT 00943069T AT 00943069 T AT00943069 T AT 00943069T AT E291731 T1 ATE291731 T1 AT E291731T1
Authority
AT
Austria
Prior art keywords
thickness
substrate
test
electrons
layer thickness
Prior art date
Application number
AT00943069T
Other languages
German (de)
English (en)
Inventor
Leonid A Vasilyev
Charles E Bryson Iii
Robert Linder
Sergey Borodyansky
Yachko Dmitri Ki
Original Assignee
Fei Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fei Co filed Critical Fei Co
Application granted granted Critical
Publication of ATE291731T1 publication Critical patent/ATE291731T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
AT00943069T 1999-07-09 2000-06-22 Schichtdickenmessung mittels inelastischer elektronenstreuung ATE291731T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/350,701 US6399944B1 (en) 1999-07-09 1999-07-09 Measurement of film thickness by inelastic electron scattering
PCT/US2000/017234 WO2001004574A1 (en) 1999-07-09 2000-06-22 Measurement of film thickness by inelastic electron scattering

Publications (1)

Publication Number Publication Date
ATE291731T1 true ATE291731T1 (de) 2005-04-15

Family

ID=23377837

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00943069T ATE291731T1 (de) 1999-07-09 2000-06-22 Schichtdickenmessung mittels inelastischer elektronenstreuung

Country Status (8)

Country Link
US (1) US6399944B1 (enExample)
EP (1) EP1192416B1 (enExample)
JP (1) JP2003504609A (enExample)
AT (1) ATE291731T1 (enExample)
AU (1) AU5759400A (enExample)
DE (1) DE60018932T2 (enExample)
TW (1) TW457362B (enExample)
WO (1) WO2001004574A1 (enExample)

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EP1843126B1 (en) * 2005-01-07 2009-12-09 SII NanoTechnology Inc. Method and apparatus for measuring thin film sample
US7231324B2 (en) * 2005-04-29 2007-06-12 Revera Incorporated Techniques for analyzing data generated by instruments
US7420163B2 (en) * 2005-04-29 2008-09-02 Revera Incorporated Determining layer thickness using photoelectron spectroscopy
US7411188B2 (en) * 2005-07-11 2008-08-12 Revera Incorporated Method and system for non-destructive distribution profiling of an element in a film
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US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US8581602B2 (en) * 2009-09-02 2013-11-12 Systems And Materials Research Corporation Method and apparatus for nondestructive measuring of a coating thickness on a curved surface
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
WO2011162411A1 (ja) * 2010-06-25 2011-12-29 日本電気株式会社 ２次元薄膜原子構造の層数決定方法および２次元薄膜原子構造の層数決定装置
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US8853078B2 (en) 2011-01-30 2014-10-07 Fei Company Method of depositing material
US9090973B2 (en) 2011-01-31 2015-07-28 Fei Company Beam-induced deposition of low-resistivity material
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
JP6095678B2 (ja) 2011-11-11 2017-03-15 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 薬剤パッケージ用の不動態化、ｐＨ保護又は滑性皮膜、被覆プロセス及び装置
US8658973B2 (en) * 2012-06-12 2014-02-25 Kla-Tencor Corporation Auger elemental identification algorithm
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KR101241007B1 (ko) * 2012-10-26 2013-03-11 나노씨엠에스(주) 엑스선을 이용한 박막층의 두께 측정 방법 및 장치
JP6509734B2 (ja) 2012-11-01 2019-05-08 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 皮膜検査方法
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
WO2014085346A1 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Hollow body with inside coating
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US20160015898A1 (en) 2013-03-01 2016-01-21 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
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CN103713002B (zh) * 2013-12-27 2016-04-27 昆明贵研催化剂有限责任公司 一种测定汽车尾气催化剂涂层厚度的方法
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Also Published As

Publication number Publication date
AU5759400A (en) 2001-01-30
JP2003504609A (ja) 2003-02-04
EP1192416B1 (en) 2005-03-23
DE60018932D1 (de) 2005-04-28
TW457362B (en) 2001-10-01
WO2001004574A1 (en) 2001-01-18
DE60018932T2 (de) 2006-03-30
US6399944B1 (en) 2002-06-04
EP1192416A1 (en) 2002-04-03

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