JPS52127292A - Analyzer - Google Patents

Analyzer

Info

Publication number
JPS52127292A
JPS52127292A JP4245976A JP4245976A JPS52127292A JP S52127292 A JPS52127292 A JP S52127292A JP 4245976 A JP4245976 A JP 4245976A JP 4245976 A JP4245976 A JP 4245976A JP S52127292 A JPS52127292 A JP S52127292A
Authority
JP
Japan
Prior art keywords
signal
intensity
analyzer
normalizing
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4245976A
Other languages
Japanese (ja)
Inventor
Sadao Nomura
Hideo Todokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4245976A priority Critical patent/JPS52127292A/en
Publication of JPS52127292A publication Critical patent/JPS52127292A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To provide analysis results with accuracy irrespective of variations in the irradiation current, by detecting a signal proportional to the intensity of primary beams irradiated on the specimen, and normalizing the intensity of the detected signal to set up an analysis signal.
JP4245976A 1976-04-16 1976-04-16 Analyzer Pending JPS52127292A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4245976A JPS52127292A (en) 1976-04-16 1976-04-16 Analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4245976A JPS52127292A (en) 1976-04-16 1976-04-16 Analyzer

Publications (1)

Publication Number Publication Date
JPS52127292A true JPS52127292A (en) 1977-10-25

Family

ID=12636646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4245976A Pending JPS52127292A (en) 1976-04-16 1976-04-16 Analyzer

Country Status (1)

Country Link
JP (1) JPS52127292A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820181A (en) * 1987-04-13 1989-04-11 Yazaki Corporation Watertight connector
JP2001307672A (en) * 2000-04-21 2001-11-02 Hitachi Ltd Element analyzing apparatus and scanning transmission electron microscope and element analyzing method
US6476389B1 (en) 1999-03-25 2002-11-05 Fuji Photo Optical Co., Ltd. X-ray analyzer having an absorption current calculating section
US6933501B2 (en) 2001-11-02 2005-08-23 Hitachi, Ltd. Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
JP2009109246A (en) * 2007-10-26 2009-05-21 Sharp Corp Film thickness measuring method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820181A (en) * 1987-04-13 1989-04-11 Yazaki Corporation Watertight connector
US6476389B1 (en) 1999-03-25 2002-11-05 Fuji Photo Optical Co., Ltd. X-ray analyzer having an absorption current calculating section
GB2348288B (en) * 1999-03-25 2003-10-01 Fuji Photo Optical Co Ltd X-ray analyzer and analyzing method using the same
JP2001307672A (en) * 2000-04-21 2001-11-02 Hitachi Ltd Element analyzing apparatus and scanning transmission electron microscope and element analyzing method
US6933501B2 (en) 2001-11-02 2005-08-23 Hitachi, Ltd. Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
JP2009109246A (en) * 2007-10-26 2009-05-21 Sharp Corp Film thickness measuring method

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