JPS5292786A - Ion microanalyzer - Google Patents

Ion microanalyzer

Info

Publication number
JPS5292786A
JPS5292786A JP854276A JP854276A JPS5292786A JP S5292786 A JPS5292786 A JP S5292786A JP 854276 A JP854276 A JP 854276A JP 854276 A JP854276 A JP 854276A JP S5292786 A JPS5292786 A JP S5292786A
Authority
JP
Japan
Prior art keywords
ion microanalyzer
microanalyzer
ion
boudnary
obtian
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP854276A
Other languages
Japanese (ja)
Inventor
Tadatetsu Hattori
Atsushi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP854276A priority Critical patent/JPS5292786A/en
Publication of JPS5292786A publication Critical patent/JPS5292786A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To eliminate th e influences at the etching boudnary, in case the concentration analysis in the depth direction is accomplished by a simple and in expensive circuity, so as to obtian a highly accurate measurement results while shortening the measurement time.
JP854276A 1976-01-30 1976-01-30 Ion microanalyzer Pending JPS5292786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP854276A JPS5292786A (en) 1976-01-30 1976-01-30 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP854276A JPS5292786A (en) 1976-01-30 1976-01-30 Ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS5292786A true JPS5292786A (en) 1977-08-04

Family

ID=11696024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP854276A Pending JPS5292786A (en) 1976-01-30 1976-01-30 Ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS5292786A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660337A (en) * 1979-10-23 1981-05-25 Nippon Steel Corp Fluorescent x-ray analysis method
JPS61218057A (en) * 1985-03-25 1986-09-27 Hitachi Ltd Ion microanalyzer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660337A (en) * 1979-10-23 1981-05-25 Nippon Steel Corp Fluorescent x-ray analysis method
JPS6338660B2 (en) * 1979-10-23 1988-08-01 Nippon Steel Corp
JPS61218057A (en) * 1985-03-25 1986-09-27 Hitachi Ltd Ion microanalyzer
JPH0527938B2 (en) * 1985-03-25 1993-04-22 Hitachi Ltd

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