ATE268954T1 - Justierbare halterung für ein optisches element in einem gaslaser - Google Patents

Justierbare halterung für ein optisches element in einem gaslaser

Info

Publication number
ATE268954T1
ATE268954T1 AT01104173T AT01104173T ATE268954T1 AT E268954 T1 ATE268954 T1 AT E268954T1 AT 01104173 T AT01104173 T AT 01104173T AT 01104173 T AT01104173 T AT 01104173T AT E268954 T1 ATE268954 T1 AT E268954T1
Authority
AT
Austria
Prior art keywords
laser
optical element
optical axis
tube
aperture
Prior art date
Application number
AT01104173T
Other languages
English (en)
Inventor
Hans Kodeda
Helmut Frowein
Claus Strowitzki
Alexander Hohla
Original Assignee
Tuilaser Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tuilaser Ag filed Critical Tuilaser Ag
Application granted granted Critical
Publication of ATE268954T1 publication Critical patent/ATE268954T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
AT01104173T 2000-02-22 2001-02-21 Justierbare halterung für ein optisches element in einem gaslaser ATE268954T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/511,648 US6493375B1 (en) 2000-02-22 2000-02-22 Adjustable mounting unit for an optical element of a gas laser

Publications (1)

Publication Number Publication Date
ATE268954T1 true ATE268954T1 (de) 2004-06-15

Family

ID=24035810

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01104173T ATE268954T1 (de) 2000-02-22 2001-02-21 Justierbare halterung für ein optisches element in einem gaslaser

Country Status (4)

Country Link
US (1) US6493375B1 (de)
EP (1) EP1130699B1 (de)
AT (1) ATE268954T1 (de)
DE (1) DE60103675T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6804284B1 (en) * 2000-02-22 2004-10-12 Tuilaser Ag Optical element holding and extraction device
US9502850B2 (en) * 2013-03-26 2016-11-22 Mitsubishi Electric Corporation Gas laser device
CN104966981B (zh) * 2015-07-14 2018-03-13 京东方科技集团股份有限公司 激光器
US11670490B2 (en) * 2017-09-29 2023-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit fabrication system with adjustable gas injector
US10840066B2 (en) 2018-06-13 2020-11-17 Taiwan Semiconductor Manufacturing Co., Ltd. Adjustable fastening device for plasma gas injectors
CN113422278B (zh) * 2021-06-04 2022-03-25 滨州学院 一种高倍频效率的绿激光器
CN115602393B (zh) * 2022-10-11 2024-08-30 国网宁夏电力有限公司 一种提高盆式绝缘子沿面闪络电压的方法及铝高压电极

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US3753144A (en) 1971-10-18 1973-08-14 W Kearns Gas laser structure
DE2255048A1 (de) 1972-11-10 1974-05-09 Isco Optische Werke Gmbh Kunststoff-fassung fuer objektive mit veraenderbarer brennweite
US3886474A (en) 1973-04-30 1975-05-27 Coherent Radiation Gas laser having an integral optical resonator with external stabilizing means
US4423510A (en) 1979-08-17 1983-12-27 Westinghouse Electric Corp. Laser tube design incorporating low inductance capacitor
US4448385A (en) 1981-05-12 1984-05-15 Honeywell Inc. Stable alignment mechanism for laser mirrors
DE3130399A1 (de) 1981-07-31 1983-02-17 Siemens AG, 1000 Berlin und 8000 München Optischer sender (laser) mit einer justiervorrichtung fuer einen reflektorspiegel des laserresonators
JPS5861843A (ja) 1981-09-12 1983-04-13 Senichi Masuda 極短パルス高電圧発生装置
DE3212928C2 (de) 1982-04-07 1984-01-26 Lambda Physik GmbH, 3400 Göttingen Entladungsgepumpter Laser
EP0166028A3 (de) 1984-06-25 1987-04-22 Siemens Aktiengesellschaft Justiereinrichtung für einen Reflektorspiegel eines Laserresonators
US4686685A (en) * 1985-06-06 1987-08-11 Laser Corporation Of America Gas laser having thermally stable optical mount
DE3541744A1 (de) 1985-11-26 1987-05-27 Heraeus Gmbh W C Gaslaser
JP2512137Y2 (ja) 1986-03-28 1996-09-25 日本電気株式会社 ガスレ−ザ発振器
DE3718467A1 (de) 1987-06-02 1988-12-15 Siemens Ag Justiereinrichtung fuer ein optisches element
US4891818A (en) 1987-08-31 1990-01-02 Acculase, Inc. Rare gas-halogen excimer laser
US5473162A (en) 1987-10-26 1995-12-05 Baylor University Infrared emission detection of a gas
JPH02250383A (ja) 1989-03-24 1990-10-08 Mitsubishi Heavy Ind Ltd 部分反射鏡角度調整装置
EP0456875A1 (de) 1990-05-18 1991-11-21 Siemens Aktiengesellschaft Wellenleiterlaser
JPH05152643A (ja) 1991-07-10 1993-06-18 Mitsubishi Electric Corp レーザ発振装置
DE4128776A1 (de) 1991-08-29 1993-03-04 Siemens Ag Spiegelfassung fuer laser
JPH0567823A (ja) 1991-09-05 1993-03-19 Nec Corp 放電励起パルスガスレーザ装置
US5373523A (en) 1992-10-15 1994-12-13 Kabushiki Kaisha Komatsu Seisakusho Excimer laser apparatus
US5319663A (en) 1992-12-18 1994-06-07 Lumonics Inc. Dust precipitation in a gas laser
JPH06237034A (ja) 1993-02-10 1994-08-23 Nec Corp 放電励起ガスレーザ装置
US5591317A (en) 1994-02-16 1997-01-07 Pitts, Jr.; M. Michael Electrostatic device for water treatment
US5438587A (en) 1994-03-31 1995-08-01 Spectranetics Preionizer for laser assembly
US5748663A (en) 1994-06-08 1998-05-05 Qsource, Inc. Retangular discharge gas laser
US5585641A (en) 1995-05-23 1996-12-17 The Regents Of The University Of California Large area, surface discharge pumped, vacuum ultraviolet light source
US5857775A (en) 1995-09-05 1999-01-12 Tyco Group S.A.R.L. Thermometer probe having a watertight seal
US5729564A (en) 1996-07-31 1998-03-17 Visx, Incorporated Electrostatic precipitator for a gas discharge laser
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JP3932207B2 (ja) 1997-03-14 2007-06-20 デマリア エレクトロオプティックス システムズ アイエヌシー 無線周波数励起導波レーザ
US6018537A (en) 1997-07-18 2000-01-25 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate F2 laser
DE29715466U1 (de) 1997-08-28 1997-10-23 TUI Laser GmbH, 82166 Gräfelfing Resonatoranordnung für einen Laser
DE29716875U1 (de) 1997-09-19 1997-11-20 TUI Laser AG, 82166 Gräfelfing Excimerlaser
US6151346A (en) 1997-12-15 2000-11-21 Cymer, Inc. High pulse rate pulse power system with fast rise time and low current
US6208674B1 (en) 1998-09-18 2001-03-27 Cymer, Inc. Laser chamber with fully integrated electrode feedthrough main insulator
US6359922B1 (en) 1999-10-20 2002-03-19 Cymer, Inc. Single chamber gas discharge laser with line narrowed seed beam
US6363094B1 (en) 2000-06-09 2002-03-26 Cymer, Inc. Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects

Also Published As

Publication number Publication date
EP1130699A2 (de) 2001-09-05
US6493375B1 (en) 2002-12-10
EP1130699A3 (de) 2002-05-22
DE60103675D1 (de) 2004-07-15
DE60103675T2 (de) 2005-06-16
EP1130699B1 (de) 2004-06-09

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties