ATE243855T1 - Integrierter strahlformer und seine verwendung - Google Patents

Integrierter strahlformer und seine verwendung

Info

Publication number
ATE243855T1
ATE243855T1 AT98944470T AT98944470T ATE243855T1 AT E243855 T1 ATE243855 T1 AT E243855T1 AT 98944470 T AT98944470 T AT 98944470T AT 98944470 T AT98944470 T AT 98944470T AT E243855 T1 ATE243855 T1 AT E243855T1
Authority
AT
Austria
Prior art keywords
light beam
optical element
divergence
substrate
elements
Prior art date
Application number
AT98944470T
Other languages
German (de)
English (en)
Inventor
Michael R Feldman
Alan D Kathman
W Hudson Welch
Robert Tekolste
Original Assignee
Digital Optics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Digital Optics Corp filed Critical Digital Optics Corp
Application granted granted Critical
Publication of ATE243855T1 publication Critical patent/ATE243855T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1353—Diffractive elements, e.g. holograms or gratings
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1362—Mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1398—Means for shaping the cross-section of the beam, e.g. into circular or elliptical cross-section
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02255—Out-coupling of light using beam deflecting elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Head (AREA)
  • Lasers (AREA)
  • Radiation-Therapy Devices (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
AT98944470T 1997-08-27 1998-08-21 Integrierter strahlformer und seine verwendung ATE243855T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/917,865 US6128134A (en) 1997-08-27 1997-08-27 Integrated beam shaper and use thereof
PCT/US1998/017295 WO1999010765A1 (en) 1997-08-27 1998-08-21 Integrated beam shaper and use thereof

Publications (1)

Publication Number Publication Date
ATE243855T1 true ATE243855T1 (de) 2003-07-15

Family

ID=25439437

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98944470T ATE243855T1 (de) 1997-08-27 1998-08-21 Integrierter strahlformer und seine verwendung

Country Status (10)

Country Link
US (1) US6128134A (https=)
EP (1) EP1008008B1 (https=)
JP (1) JP4221513B2 (https=)
KR (1) KR20010023457A (https=)
CN (1) CN1276064A (https=)
AT (1) ATE243855T1 (https=)
AU (1) AU9200598A (https=)
CA (1) CA2302528A1 (https=)
DE (1) DE69815860T2 (https=)
WO (1) WO1999010765A1 (https=)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6235141B1 (en) 1996-09-27 2001-05-22 Digital Optics Corporation Method of mass producing and packaging integrated optical subsystems
US6096155A (en) 1996-09-27 2000-08-01 Digital Optics Corporation Method of dicing wafer level integrated multiple optical elements
US20040114035A1 (en) * 1998-03-24 2004-06-17 Timothy White Focusing panel illumination method and apparatus
US6195485B1 (en) * 1998-10-26 2001-02-27 The Regents Of The University Of California Direct-coupled multimode WDM optical data links with monolithically-integrated multiple-channel VCSEL and photodetector
JP2000276760A (ja) * 1999-03-25 2000-10-06 Sanyo Electric Co Ltd 光ピックアップ
US6368890B1 (en) * 1999-05-05 2002-04-09 Mitel Semiconductor Ab Top contact VCSEL with monitor
US6633433B2 (en) * 1999-06-11 2003-10-14 Symbol Technologies, Inc. Beam shaping for optical scanners
US7227817B1 (en) 1999-12-07 2007-06-05 Dphi Acquisitions, Inc. Low profile optical head
US7079472B2 (en) * 1999-06-23 2006-07-18 Dphi Acquisitions, Inc. Beamshaper for optical head
US6276806B1 (en) * 1999-08-24 2001-08-21 Lionel John Skillicorn Micro-etalon and associated methods
US6407870B1 (en) * 1999-10-28 2002-06-18 Ihar Hurevich Optical beam shaper and method for spatial redistribution of inhomogeneous beam
EP1210723B1 (en) * 2000-01-21 2009-03-18 Fei Company Shaped and low density focused ion beams
TW591631B (en) * 2000-07-04 2004-06-11 Alps Electric Co Ltd Composite optical component and composite optical unit thereof
FI116918B (fi) 2000-12-13 2006-03-31 Modines Ltd Oy Säteenmuokkaaja
US6977386B2 (en) * 2001-01-19 2005-12-20 Fei Company Angular aperture shaped beam system and method
US6487022B1 (en) * 2001-08-24 2002-11-26 Terabeam Corporation Transmitter using uniform intensity transmission for a wireless optical communication system
US6898010B2 (en) * 2001-09-13 2005-05-24 Matsushita Electric Industrial Co., Ltd. Beam-shaping device, optical disc device, and fabrication method of beam-shaping device
TWI238389B (en) * 2001-11-21 2005-08-21 Ind Tech Res Inst High density micro-optical pickup head
US6939058B2 (en) * 2002-02-12 2005-09-06 Microalign Technologies, Inc. Optical module for high-speed bidirectional transceiver
TWI295413B (en) * 2002-11-13 2008-04-01 Asml Netherlands Bv Lithographic apparatus and method to determine beam size and divergence.
JP2004246279A (ja) * 2003-02-17 2004-09-02 Seiko Epson Corp 光モジュール及びその製造方法、光通信装置、光電気混載集積回路、回路基板、電子機器
US20070110361A1 (en) * 2003-08-26 2007-05-17 Digital Optics Corporation Wafer level integration of multiple optical elements
CN101107501B (zh) * 2005-03-04 2011-07-27 松下电器产业株式会社 激光加热装置及激光加热方法
DE102006017293A1 (de) * 2005-12-30 2007-07-05 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung einer optisch pumpbaren Halbleitervorrichtung
US7686223B2 (en) 2007-08-31 2010-03-30 Symbol Technologies, Inc. Selectable aiming pattern for an imaging-based bar code reader
US7580602B2 (en) * 2007-09-17 2009-08-25 Seagate Technology Llc Beam apodization for a planar solid immersion mirror
US20090154872A1 (en) * 2007-12-18 2009-06-18 Sherrer David S Electronic device package and method of formation
JP2014059222A (ja) * 2012-09-18 2014-04-03 Denso Corp 光レーダ装置
US9269603B2 (en) * 2013-05-09 2016-02-23 Globalfoundries Inc. Temporary liquid thermal interface material for surface tension adhesion and thermal control
RU2606702C1 (ru) * 2015-07-02 2017-01-10 Акционерное общество "Концерн радиостроения "Вега" Способ изменения направления и уменьшения расходимости излучения полупроводникового вертикально излучающего лазера
JP7258842B2 (ja) * 2017-07-13 2023-04-17 コーニンクレッカ フィリップス エヌ ヴェ 回折光学素子を用いたレーザ発生器
US12158570B2 (en) 2019-08-14 2024-12-03 Nlight, Inc. High brightness fiber coupled diode lasers with circularized beams
IL284740B2 (en) 2021-07-08 2023-05-01 Elbit Systems Electro Optics Elop Ltd Optical correction component for coherent beam combining systems and coherent beam combining methods and systems using an optical correction component

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4497534A (en) * 1983-02-28 1985-02-05 International Business Machines Corporation Holographic optical head
JPS6035701A (ja) * 1983-08-06 1985-02-23 Canon Inc ホログラム素子の作成方法
US4679911A (en) * 1985-04-01 1987-07-14 The University Of Rochester Optical apparatus using liquid crystals for shaping the spatial intensity of optical beams having designated wavelengths
JPS6418103A (en) * 1987-07-14 1989-01-20 Murakami Kaimeido Kk Colored mirror
US5161059A (en) * 1987-09-21 1992-11-03 Massachusetts Institute Of Technology High-efficiency, multilevel, diffractive optical elements
US4813762A (en) * 1988-02-11 1989-03-21 Massachusetts Institute Of Technology Coherent beam combining of lasers using microlenses and diffractive coupling
US5237451A (en) * 1989-11-17 1993-08-17 Minnesota Mining And Manufacturing Company Beam shaping system using diffraction
US5056881A (en) * 1990-04-12 1991-10-15 Amp Incorporated Collimated laser diode
US5061025A (en) * 1990-04-13 1991-10-29 Eastman Kodak Company Hologon scanner with beam shaping stationary diffraction grating
US5111343A (en) * 1990-05-29 1992-05-05 Eastman Kodak Company Gradient filter
US5229883A (en) * 1991-10-28 1993-07-20 Mcdonnell Douglas Corporation Hybrid binary optics collimation fill optics
US5237434A (en) * 1991-11-05 1993-08-17 Mcnc Microelectronic module having optical and electrical interconnects
US5214535A (en) * 1991-12-17 1993-05-25 Xerox Corporation Lens cover assembly for binary diffractive optic lenses
US5499262A (en) * 1992-03-18 1996-03-12 Rohm Co., Ltd. Semiconductor laser light source unit
US5465265A (en) * 1992-06-24 1995-11-07 Fuji Xerox Co., Ltd. Multi-beam laser light source and multi-beam semiconductor laser array
US5410468A (en) * 1992-06-26 1995-04-25 Matsushita Electric Industrial Co., Ltd. Optical pick-up apparatus
US5504350A (en) * 1992-08-12 1996-04-02 Spectra-Physics Scanning Systems, Inc. Lens configuration
US5422746A (en) * 1992-09-11 1995-06-06 Board Of Trustees Of The Leland Stanford Jr. University Single and multiple element holographic devices for high-efficiency beam correction
JP3484543B2 (ja) * 1993-03-24 2004-01-06 富士通株式会社 光結合部材の製造方法及び光装置
US5748658A (en) * 1993-10-22 1998-05-05 Matsushita Electric Industrial Co., Ltd. Semiconductor laser device and optical pickup head
US5606434A (en) * 1994-06-30 1997-02-25 University Of North Carolina Achromatic optical system including diffractive optical element
JPH08124204A (ja) * 1994-10-24 1996-05-17 Sanyo Electric Co Ltd 光ピックアップ装置
KR100373801B1 (ko) * 1994-07-29 2003-05-09 산요 덴키 가부시키가이샤 반도체레이저장치및이를이용한광픽업장치
US5790730A (en) * 1994-11-10 1998-08-04 Kravitz; Stanley H. Package for integrated optic circuit and method
JPH08235663A (ja) * 1995-02-24 1996-09-13 Sony Corp 光学素子
EP0767953A2 (en) * 1995-03-29 1997-04-16 Koninklijke Philips Electronics N.V. Optical unit comprising a radiation source, a detector and a grating, and scanning device including the optical unit
US5568574A (en) * 1995-06-12 1996-10-22 University Of Southern California Modulator-based photonic chip-to-chip interconnections for dense three-dimensional multichip module integration
KR0179138B1 (ko) * 1995-12-01 1999-04-15 구자홍 대물렌즈

Also Published As

Publication number Publication date
EP1008008A1 (en) 2000-06-14
DE69815860D1 (de) 2003-07-31
US6128134A (en) 2000-10-03
CA2302528A1 (en) 1999-03-04
DE69815860T2 (de) 2004-05-19
EP1008008B1 (en) 2003-06-25
CN1276064A (zh) 2000-12-06
KR20010023457A (ko) 2001-03-26
JP2001514395A (ja) 2001-09-11
JP4221513B2 (ja) 2009-02-12
WO1999010765A1 (en) 1999-03-04
AU9200598A (en) 1999-03-16

Similar Documents

Publication Publication Date Title
ATE243855T1 (de) Integrierter strahlformer und seine verwendung
EP0343856A3 (en) Alignment of lithographic system
WO2002099500A3 (en) Correction of birefringence in cubic crystalline projection lenses and optical systems
CN100485424C (zh) 衍射光栅元件及其制造方法和设计方法
MX2023014126A (es) Lentes oftalmicos para reducir la progresion de miopia y metodos basados en laser para formar las mismas.
KR20080042832A (ko) 셀을 가지는 광학 부품
CA2135246A1 (en) Laser ablation method for making a light pattern generator on a transparent substrate
CA2170233A1 (en) Method of Forming Refractive Index Distribution in Light Transmission Path, and Optical Filter and Method of Using the Same
KR100379246B1 (ko) 두께에 따라 빔의 세기 분포 조절이 용이한 연속 중성밀도필터
JP4974889B2 (ja) 眼科用レンズの製造方法及び該方法の実施に好適な光学部品
EP1326112A3 (en) Laser array and method of making same
CN102628804A (zh) 透射率测定装置和透射率测定方法
TW200604580A (en) Refractive index modulated diffraction-type optical element and projector including the same
IE810559L (en) Amending a photomask
ATE446849T1 (de) Verfahren zur herstellung von beugungsstrukturen in sicherheitsdokumenten
EP0892936B1 (en) Arrangement relating to beam emission
JPS55149911A (en) Packaging method of thick film optical integrated circuit
US6447959B1 (en) Amplitude mask for writing long-period gratings
JPS5754939A (en) Optical mask and its manufacture
JPS6057818A (ja) レ−ザ−光用ビ−ムエクスパンダ
ES2208077B2 (es) Elemento difractivo multifocal y metodo de fabricacion.
JPS57176004A (en) Manufacture of optical element
Faklis et al. Effects of diffraction efficiency on the performance of diffractive relay optics
JPS5581301A (en) Making method of total reflecting optical member
JPH0560912A (ja) 玉虫色の生成方法

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties