DE69815860T2 - Integrierter strahlformer und seine verwendung - Google Patents
Integrierter strahlformer und seine verwendung Download PDFInfo
- Publication number
- DE69815860T2 DE69815860T2 DE69815860T DE69815860T DE69815860T2 DE 69815860 T2 DE69815860 T2 DE 69815860T2 DE 69815860 T DE69815860 T DE 69815860T DE 69815860 T DE69815860 T DE 69815860T DE 69815860 T2 DE69815860 T2 DE 69815860T2
- Authority
- DE
- Germany
- Prior art keywords
- optical element
- light source
- transparent substrate
- integrated
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 133
- 239000000758 substrate Substances 0.000 claims abstract description 102
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- 238000007493 shaping process Methods 0.000 claims description 9
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- 239000000990 laser dye Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 19
- 230000008569 process Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 57
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- 239000002184 metal Substances 0.000 description 8
- 239000004593 Epoxy Substances 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 7
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- 238000013461 design Methods 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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- 238000000206 photolithography Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 2
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- 238000010168 coupling process Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
- G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1353—Diffractive elements, e.g. holograms or gratings
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1362—Mirrors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1398—Means for shaping the cross-section of the beam, e.g. into circular or elliptical cross-section
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02255—Out-coupling of light using beam deflecting elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Head (AREA)
- Lasers (AREA)
- Radiation-Therapy Devices (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/917,865 US6128134A (en) | 1997-08-27 | 1997-08-27 | Integrated beam shaper and use thereof |
| US917865 | 1997-08-27 | ||
| PCT/US1998/017295 WO1999010765A1 (en) | 1997-08-27 | 1998-08-21 | Integrated beam shaper and use thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69815860D1 DE69815860D1 (de) | 2003-07-31 |
| DE69815860T2 true DE69815860T2 (de) | 2004-05-19 |
Family
ID=25439437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69815860T Expired - Fee Related DE69815860T2 (de) | 1997-08-27 | 1998-08-21 | Integrierter strahlformer und seine verwendung |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6128134A (https=) |
| EP (1) | EP1008008B1 (https=) |
| JP (1) | JP4221513B2 (https=) |
| KR (1) | KR20010023457A (https=) |
| CN (1) | CN1276064A (https=) |
| AT (1) | ATE243855T1 (https=) |
| AU (1) | AU9200598A (https=) |
| CA (1) | CA2302528A1 (https=) |
| DE (1) | DE69815860T2 (https=) |
| WO (1) | WO1999010765A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006017293A1 (de) * | 2005-12-30 | 2007-07-05 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer optisch pumpbaren Halbleitervorrichtung |
Families Citing this family (32)
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| US6235141B1 (en) | 1996-09-27 | 2001-05-22 | Digital Optics Corporation | Method of mass producing and packaging integrated optical subsystems |
| US6096155A (en) | 1996-09-27 | 2000-08-01 | Digital Optics Corporation | Method of dicing wafer level integrated multiple optical elements |
| US20040114035A1 (en) * | 1998-03-24 | 2004-06-17 | Timothy White | Focusing panel illumination method and apparatus |
| US6195485B1 (en) * | 1998-10-26 | 2001-02-27 | The Regents Of The University Of California | Direct-coupled multimode WDM optical data links with monolithically-integrated multiple-channel VCSEL and photodetector |
| JP2000276760A (ja) * | 1999-03-25 | 2000-10-06 | Sanyo Electric Co Ltd | 光ピックアップ |
| US6368890B1 (en) * | 1999-05-05 | 2002-04-09 | Mitel Semiconductor Ab | Top contact VCSEL with monitor |
| US6633433B2 (en) * | 1999-06-11 | 2003-10-14 | Symbol Technologies, Inc. | Beam shaping for optical scanners |
| US7227817B1 (en) | 1999-12-07 | 2007-06-05 | Dphi Acquisitions, Inc. | Low profile optical head |
| US7079472B2 (en) * | 1999-06-23 | 2006-07-18 | Dphi Acquisitions, Inc. | Beamshaper for optical head |
| US6276806B1 (en) * | 1999-08-24 | 2001-08-21 | Lionel John Skillicorn | Micro-etalon and associated methods |
| US6407870B1 (en) * | 1999-10-28 | 2002-06-18 | Ihar Hurevich | Optical beam shaper and method for spatial redistribution of inhomogeneous beam |
| EP1210723B1 (en) * | 2000-01-21 | 2009-03-18 | Fei Company | Shaped and low density focused ion beams |
| TW591631B (en) * | 2000-07-04 | 2004-06-11 | Alps Electric Co Ltd | Composite optical component and composite optical unit thereof |
| FI116918B (fi) | 2000-12-13 | 2006-03-31 | Modines Ltd Oy | Säteenmuokkaaja |
| US6977386B2 (en) * | 2001-01-19 | 2005-12-20 | Fei Company | Angular aperture shaped beam system and method |
| US6487022B1 (en) * | 2001-08-24 | 2002-11-26 | Terabeam Corporation | Transmitter using uniform intensity transmission for a wireless optical communication system |
| US6898010B2 (en) * | 2001-09-13 | 2005-05-24 | Matsushita Electric Industrial Co., Ltd. | Beam-shaping device, optical disc device, and fabrication method of beam-shaping device |
| TWI238389B (en) * | 2001-11-21 | 2005-08-21 | Ind Tech Res Inst | High density micro-optical pickup head |
| US6939058B2 (en) * | 2002-02-12 | 2005-09-06 | Microalign Technologies, Inc. | Optical module for high-speed bidirectional transceiver |
| TWI295413B (en) * | 2002-11-13 | 2008-04-01 | Asml Netherlands Bv | Lithographic apparatus and method to determine beam size and divergence. |
| JP2004246279A (ja) * | 2003-02-17 | 2004-09-02 | Seiko Epson Corp | 光モジュール及びその製造方法、光通信装置、光電気混載集積回路、回路基板、電子機器 |
| US20070110361A1 (en) * | 2003-08-26 | 2007-05-17 | Digital Optics Corporation | Wafer level integration of multiple optical elements |
| CN101107501B (zh) * | 2005-03-04 | 2011-07-27 | 松下电器产业株式会社 | 激光加热装置及激光加热方法 |
| US7686223B2 (en) | 2007-08-31 | 2010-03-30 | Symbol Technologies, Inc. | Selectable aiming pattern for an imaging-based bar code reader |
| US7580602B2 (en) * | 2007-09-17 | 2009-08-25 | Seagate Technology Llc | Beam apodization for a planar solid immersion mirror |
| US20090154872A1 (en) * | 2007-12-18 | 2009-06-18 | Sherrer David S | Electronic device package and method of formation |
| JP2014059222A (ja) * | 2012-09-18 | 2014-04-03 | Denso Corp | 光レーダ装置 |
| US9269603B2 (en) * | 2013-05-09 | 2016-02-23 | Globalfoundries Inc. | Temporary liquid thermal interface material for surface tension adhesion and thermal control |
| RU2606702C1 (ru) * | 2015-07-02 | 2017-01-10 | Акционерное общество "Концерн радиостроения "Вега" | Способ изменения направления и уменьшения расходимости излучения полупроводникового вертикально излучающего лазера |
| JP7258842B2 (ja) * | 2017-07-13 | 2023-04-17 | コーニンクレッカ フィリップス エヌ ヴェ | 回折光学素子を用いたレーザ発生器 |
| US12158570B2 (en) | 2019-08-14 | 2024-12-03 | Nlight, Inc. | High brightness fiber coupled diode lasers with circularized beams |
| IL284740B2 (en) | 2021-07-08 | 2023-05-01 | Elbit Systems Electro Optics Elop Ltd | Optical correction component for coherent beam combining systems and coherent beam combining methods and systems using an optical correction component |
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| US5061025A (en) * | 1990-04-13 | 1991-10-29 | Eastman Kodak Company | Hologon scanner with beam shaping stationary diffraction grating |
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| US5606434A (en) * | 1994-06-30 | 1997-02-25 | University Of North Carolina | Achromatic optical system including diffractive optical element |
| JPH08124204A (ja) * | 1994-10-24 | 1996-05-17 | Sanyo Electric Co Ltd | 光ピックアップ装置 |
| KR100373801B1 (ko) * | 1994-07-29 | 2003-05-09 | 산요 덴키 가부시키가이샤 | 반도체레이저장치및이를이용한광픽업장치 |
| US5790730A (en) * | 1994-11-10 | 1998-08-04 | Kravitz; Stanley H. | Package for integrated optic circuit and method |
| JPH08235663A (ja) * | 1995-02-24 | 1996-09-13 | Sony Corp | 光学素子 |
| EP0767953A2 (en) * | 1995-03-29 | 1997-04-16 | Koninklijke Philips Electronics N.V. | Optical unit comprising a radiation source, a detector and a grating, and scanning device including the optical unit |
| US5568574A (en) * | 1995-06-12 | 1996-10-22 | University Of Southern California | Modulator-based photonic chip-to-chip interconnections for dense three-dimensional multichip module integration |
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-
1997
- 1997-08-27 US US08/917,865 patent/US6128134A/en not_active Expired - Lifetime
-
1998
- 1998-08-21 CN CN98809733A patent/CN1276064A/zh active Pending
- 1998-08-21 DE DE69815860T patent/DE69815860T2/de not_active Expired - Fee Related
- 1998-08-21 EP EP98944470A patent/EP1008008B1/en not_active Expired - Lifetime
- 1998-08-21 WO PCT/US1998/017295 patent/WO1999010765A1/en not_active Ceased
- 1998-08-21 KR KR1020007002100A patent/KR20010023457A/ko not_active Withdrawn
- 1998-08-21 JP JP2000508026A patent/JP4221513B2/ja not_active Expired - Fee Related
- 1998-08-21 AU AU92005/98A patent/AU9200598A/en not_active Abandoned
- 1998-08-21 AT AT98944470T patent/ATE243855T1/de not_active IP Right Cessation
- 1998-08-21 CA CA002302528A patent/CA2302528A1/en not_active Abandoned
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006017293A1 (de) * | 2005-12-30 | 2007-07-05 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer optisch pumpbaren Halbleitervorrichtung |
| US8076166B2 (en) | 2005-12-30 | 2011-12-13 | Osram Opto Semiconductors Gmbh | Method for fabricating an optically pumped semiconductor apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1008008A1 (en) | 2000-06-14 |
| DE69815860D1 (de) | 2003-07-31 |
| US6128134A (en) | 2000-10-03 |
| CA2302528A1 (en) | 1999-03-04 |
| ATE243855T1 (de) | 2003-07-15 |
| EP1008008B1 (en) | 2003-06-25 |
| CN1276064A (zh) | 2000-12-06 |
| KR20010023457A (ko) | 2001-03-26 |
| JP2001514395A (ja) | 2001-09-11 |
| JP4221513B2 (ja) | 2009-02-12 |
| WO1999010765A1 (en) | 1999-03-04 |
| AU9200598A (en) | 1999-03-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |