ATE22935T1 - Verfahren zum regenerieren einer ammoniakalischen aetzloesung. - Google Patents
Verfahren zum regenerieren einer ammoniakalischen aetzloesung.Info
- Publication number
- ATE22935T1 ATE22935T1 AT81106058T AT81106058T ATE22935T1 AT E22935 T1 ATE22935 T1 AT E22935T1 AT 81106058 T AT81106058 T AT 81106058T AT 81106058 T AT81106058 T AT 81106058T AT E22935 T1 ATE22935 T1 AT E22935T1
- Authority
- AT
- Austria
- Prior art keywords
- etching
- etching solution
- solution
- cathode
- addition
- Prior art date
Links
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title abstract 3
- 229910021529 ammonia Inorganic materials 0.000 title 1
- 239000003518 caustics Substances 0.000 title 1
- 230000001172 regenerating effect Effects 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical class [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 2
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- 239000002245 particle Substances 0.000 abstract 2
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 abstract 1
- 235000011130 ammonium sulphate Nutrition 0.000 abstract 1
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract 1
- 239000001569 carbon dioxide Substances 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005868 electrolysis reaction Methods 0.000 abstract 1
- 238000001914 filtration Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 238000011084 recovery Methods 0.000 abstract 1
- 239000000725 suspension Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Physical Water Treatments (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19803031567 DE3031567A1 (de) | 1980-08-21 | 1980-08-21 | Verfahren zum regenerieren einer ammoniakalischen aetzloesung |
| EP81106058A EP0046522B1 (de) | 1980-08-21 | 1981-08-03 | Verfahren zum Regenerieren einer ammoniakalischen Ätzlösung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE22935T1 true ATE22935T1 (de) | 1986-11-15 |
Family
ID=6110120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT81106058T ATE22935T1 (de) | 1980-08-21 | 1981-08-03 | Verfahren zum regenerieren einer ammoniakalischen aetzloesung. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4385969A (enrdf_load_html_response) |
| EP (1) | EP0046522B1 (enrdf_load_html_response) |
| JP (1) | JPS5773183A (enrdf_load_html_response) |
| AT (1) | ATE22935T1 (enrdf_load_html_response) |
| AU (1) | AU548856B2 (enrdf_load_html_response) |
| CA (1) | CA1175323A (enrdf_load_html_response) |
| DE (1) | DE3031567A1 (enrdf_load_html_response) |
| DK (1) | DK158156C (enrdf_load_html_response) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2133806B (en) * | 1983-01-20 | 1986-06-04 | Electricity Council | Regenerating solutions for etching copper |
| DE3348401C2 (en) * | 1983-02-16 | 1993-08-26 | Siemens Ag, 8000 Muenchen, De | Electrolyte regeneration of ammoniacal etching soln. |
| DE3305319A1 (de) * | 1983-02-16 | 1984-08-16 | Siemens AG, 1000 Berlin und 8000 München | Elektrolytisches vollregenerierverfahren einer ammoniakalischen aetzloesung |
| DE3340343A1 (de) * | 1983-04-13 | 1984-10-18 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und anlage zum regenerieren einer ammoniakalischen aetzloesung |
| EP0122963B1 (de) * | 1983-04-13 | 1988-06-01 | Forschungszentrum Jülich Gmbh | Anlage zum Regenerieren einer ammoniakalischen Ätzlösung |
| DE3324450A1 (de) * | 1983-07-07 | 1985-01-17 | ELO-CHEM Ätztechnik GmbH, 7758 Meersburg | Ammoniumsulfathaltige aetzloesung sowie verfahren zur regeneration der aetzloesung |
| DE3340342A1 (de) * | 1983-11-08 | 1985-05-15 | ELO-CHEM Ätztechnik GmbH, 7758 Meersburg | Verfahren und anlage zum regenerieren einer ammoniakalischen aetzloesung |
| US4490224A (en) * | 1984-04-16 | 1984-12-25 | Lancy International, Inc. | Process for reconditioning a used ammoniacal copper etching solution containing copper solute |
| FR2567914B1 (fr) * | 1984-07-19 | 1989-04-07 | Univ Languedoc | Procede de recuperation de cations metalliques en continu a partir de solutions diluees et appareil pour sa mise en oeuvre |
| DE3539886A1 (de) * | 1985-11-11 | 1987-05-14 | Hoellmueller Maschbau H | Verfahren und vorrichtung zum aetzen eines zumindest teilweise aus metall, vorzugsweise kupfer, bestehenden aetzguts |
| US6760931B1 (en) | 2002-08-02 | 2004-07-13 | Roy W. Mattson, Jr. | Non-electric sanitation water vessel system |
| US7146659B2 (en) | 2002-08-02 | 2006-12-12 | Mattson Jr Roy W | Hydromassage antimicrobial whirlpool bathtub |
| US20090106888A1 (en) * | 2002-08-02 | 2009-04-30 | Roy W. Mattson, Jr. | Safety device |
| DE102006051952A1 (de) * | 2006-11-01 | 2008-05-08 | Merck Patent Gmbh | Partikelhaltige Ätzpasten für Siliziumoberflächen und -schichten |
| CN108149249A (zh) * | 2017-07-05 | 2018-06-12 | 叶涛 | 一种线路板碱性蚀刻废液的蒸氨回收循环工艺 |
| WO2022022461A1 (zh) * | 2020-07-28 | 2022-02-03 | 叶涛 | 碱性蚀刻废液再生回用的方法及其设备 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL111200C (enrdf_load_html_response) * | 1958-07-31 | 1964-12-15 | ||
| US3944487A (en) * | 1974-02-06 | 1976-03-16 | Thiokol Corporation | Catalytic filtering-incinerating process and device for waste water |
| DE2714075C2 (de) * | 1977-03-30 | 1980-04-17 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Verfahren zur Oxidation von in wäßriger Lösung oxidierbaren Schadstoffen |
| DE2850564C2 (de) * | 1978-11-22 | 1982-12-23 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und Vorrichtung zum Regenerieren einer Kupfer(II)-Chlorid und/oder Eisen(III)-Chlorid enthaltenden Ätzlösung in einer Elektrolysezelle |
| DE2917597A1 (de) * | 1979-04-30 | 1980-11-13 | Siemens Ag | Verfahren zur regenerierung ammoniakalischer aetzloesungen zum aetzen von metallischem kupfer |
-
1980
- 1980-08-21 DE DE19803031567 patent/DE3031567A1/de active Granted
-
1981
- 1981-07-27 US US06/287,492 patent/US4385969A/en not_active Expired - Fee Related
- 1981-08-03 EP EP81106058A patent/EP0046522B1/de not_active Expired
- 1981-08-03 AT AT81106058T patent/ATE22935T1/de not_active IP Right Cessation
- 1981-08-11 AU AU73975/81A patent/AU548856B2/en not_active Ceased
- 1981-08-17 CA CA000383975A patent/CA1175323A/en not_active Expired
- 1981-08-20 DK DK368981A patent/DK158156C/da not_active IP Right Cessation
- 1981-08-21 JP JP56130397A patent/JPS5773183A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3031567C2 (enrdf_load_html_response) | 1987-09-03 |
| US4385969A (en) | 1983-05-31 |
| DK158156B (da) | 1990-04-02 |
| DE3031567A1 (de) | 1982-04-29 |
| EP0046522A1 (de) | 1982-03-03 |
| AU7397581A (en) | 1982-02-25 |
| CA1175323A (en) | 1984-10-02 |
| DK158156C (da) | 1990-09-03 |
| DK368981A (da) | 1982-02-22 |
| JPH0329868B2 (enrdf_load_html_response) | 1991-04-25 |
| EP0046522B1 (de) | 1986-10-15 |
| JPS5773183A (en) | 1982-05-07 |
| AU548856B2 (en) | 1986-01-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| REN | Ceased due to non-payment of the annual fee |