DE3376853D1 - Apparatus for regenerating an ammoniacal etching solution - Google Patents
Apparatus for regenerating an ammoniacal etching solutionInfo
- Publication number
- DE3376853D1 DE3376853D1 DE8383111152T DE3376853T DE3376853D1 DE 3376853 D1 DE3376853 D1 DE 3376853D1 DE 8383111152 T DE8383111152 T DE 8383111152T DE 3376853 T DE3376853 T DE 3376853T DE 3376853 D1 DE3376853 D1 DE 3376853D1
- Authority
- DE
- Germany
- Prior art keywords
- etching solution
- oxygen
- line
- etching
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Weting (AREA)
Abstract
1. Equipment for regenerating an ammoniacal etching solution which contains catalyst particles for reoxidation with supply of oxygen, having a feed line for etching solution taken from an etching chamber to a filter which is impermeable to catalyst particles in the etching solution, and a return line, connected to the filter, for etching solution, containing catalyst particles, to the etching chamber, and having an electrolytic cell, in which a connecting line, connected to the filter, for catalyst particle-free etching solution obtainable as the filtrate ends and which has an outlet, connectable to the etching chamber, for etching solution which has been deplected of metal ions, characterized in that a liquid-jet pump (10) is inserted into the return line (9), the working medium of the pump being the etching solution and the suction branch (11) of the pump being connected to an oxygen line (12) which carries oxygen or an oxygen-containing gas mixture and which can be fed with oxygen generated at the anode (17) of the electrolytic cell (13), and that teh oxygen line (12) is connected to the gas space above the electrolyte in the electrolytic cell (13) and passes to the suction branch (11) via a condenser (42) for precipitating water vapour from the gas mixture carried in the oxygen line (12), and that a condensate line (44) discharging condensate produced on the condenser (42) ends in washing chamber (2) downstream of the etching chamber (1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE8383111152T DE3376853D1 (en) | 1983-04-13 | 1983-11-08 | Apparatus for regenerating an ammoniacal etching solution |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3313293 | 1983-04-13 | ||
DE8383111152T DE3376853D1 (en) | 1983-04-13 | 1983-11-08 | Apparatus for regenerating an ammoniacal etching solution |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3376853D1 true DE3376853D1 (en) | 1988-07-07 |
Family
ID=6196226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383111152T Expired DE3376853D1 (en) | 1983-04-13 | 1983-11-08 | Apparatus for regenerating an ammoniacal etching solution |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0122963B1 (en) |
JP (1) | JPS6013083A (en) |
AT (1) | ATE34781T1 (en) |
DE (1) | DE3376853D1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2449164A1 (en) * | 1979-02-14 | 1980-09-12 | Sogreah | ARTIFICIAL BLOCK FOR MARITIME AND RIVER STRUCTURES |
DE3345050A1 (en) * | 1983-12-13 | 1985-06-20 | Walter 7758 Meersburg Holzer | METHOD FOR THE ENVIRONMENTALLY FRIENDLY ASSEMBLY OF CIRCUIT BOARDS AND DEVICE FOR EXERCISING THE WORKING METHOD |
AU608969B2 (en) * | 1989-04-21 | 1991-04-18 | Ming-Hsing Lee | Process for etching copper with ammoniacal etchant solution and reconditioning the used etchant solution |
US5248398A (en) * | 1990-11-16 | 1993-09-28 | Macdermid, Incorporated | Process for direct electrolytic regeneration of chloride-based ammoniacal copper etchant bath |
US5085730A (en) * | 1990-11-16 | 1992-02-04 | Macdermid, Incorporated | Process for regenerating ammoniacal chloride etchants |
US20140251797A1 (en) * | 2011-10-08 | 2014-09-11 | Christoph Herkle | Etching device for the electrolytic etching of copper |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2008766B2 (en) * | 1970-02-23 | 1971-07-29 | Licentia Patent Verwaltungs GmbH, 6000 Frankfurt | Regenerating cupric chloride etching - solution enriched with cuprous chloride |
US3705061A (en) * | 1971-03-19 | 1972-12-05 | Southern California Chem Co In | Continuous redox process for dissolving copper |
DE2216269A1 (en) * | 1972-04-05 | 1973-10-18 | Hoellmueller Maschbau H | METHOD OF ETCHING COPPER AND COPPER ALLOYS |
US3785950A (en) * | 1972-05-19 | 1974-01-15 | E Newton | Regeneration of spent etchant |
DE2641905C2 (en) * | 1976-09-17 | 1986-03-20 | Geb. Bakulina Galina Aleksandrovna Batova | Process for the regeneration of used etching solutions |
DE3031567A1 (en) * | 1980-08-21 | 1982-04-29 | Elochem Ätztechnik GmbH, 7758 Meersburg | METHOD FOR REGENERATING AN AMMONIA ACAL SOLUTION |
-
1983
- 1983-11-08 AT AT83111152T patent/ATE34781T1/en active
- 1983-11-08 DE DE8383111152T patent/DE3376853D1/en not_active Expired
- 1983-11-08 EP EP83111152A patent/EP0122963B1/en not_active Expired
-
1984
- 1984-04-13 JP JP59073102A patent/JPS6013083A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
ATE34781T1 (en) | 1988-06-15 |
EP0122963B1 (en) | 1988-06-01 |
EP0122963A1 (en) | 1984-10-31 |
JPH0429745B2 (en) | 1992-05-19 |
JPS6013083A (en) | 1985-01-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FORSCHUNGSZENTRUM JUELICH GMBH, 5170 JUELICH, DE |
|
8339 | Ceased/non-payment of the annual fee |