ATE222215T1 - Verfahren zur reinigung von perfluorierten produkten - Google Patents

Verfahren zur reinigung von perfluorierten produkten

Info

Publication number
ATE222215T1
ATE222215T1 AT98958520T AT98958520T ATE222215T1 AT E222215 T1 ATE222215 T1 AT E222215T1 AT 98958520 T AT98958520 T AT 98958520T AT 98958520 T AT98958520 T AT 98958520T AT E222215 T1 ATE222215 T1 AT E222215T1
Authority
AT
Austria
Prior art keywords
cleaning
products
nitrogen trifluoride
separated
entraining agents
Prior art date
Application number
AT98958520T
Other languages
German (de)
English (en)
Inventor
Barry Asher Mahler
Ralph Newton Miller
Chein-Ping Chai Kao
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/189,322 external-priority patent/US6458249B2/en
Application filed by Du Pont filed Critical Du Pont
Application granted granted Critical
Publication of ATE222215T1 publication Critical patent/ATE222215T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C19/00—Acyclic saturated compounds containing halogen atoms
    • C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/34—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping with one or more auxiliary substances
    • B01D3/36—Azeotropic distillation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • C01B21/0837—Purification
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/38—Separation; Purification; Stabilisation; Use of additives
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
AT98958520T 1997-11-10 1998-11-10 Verfahren zur reinigung von perfluorierten produkten ATE222215T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US6499397P 1997-11-10 1997-11-10
US8614698P 1998-05-20 1998-05-20
US09/189,322 US6458249B2 (en) 1997-11-10 1998-11-09 Process for purifying perfluorinated products
PCT/US1998/023965 WO1999024358A1 (en) 1997-11-10 1998-11-10 Process for purifying perfluorinated products

Publications (1)

Publication Number Publication Date
ATE222215T1 true ATE222215T1 (de) 2002-08-15

Family

ID=27370715

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98958520T ATE222215T1 (de) 1997-11-10 1998-11-10 Verfahren zur reinigung von perfluorierten produkten

Country Status (9)

Country Link
EP (1) EP1030818B1 (enExample)
JP (1) JP2001522774A (enExample)
KR (1) KR100588025B1 (enExample)
CN (4) CN1252011C (enExample)
AT (1) ATE222215T1 (enExample)
AU (1) AU1455099A (enExample)
CA (1) CA2306800A1 (enExample)
DE (1) DE69807254T2 (enExample)
RU (1) RU2206498C2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016829A1 (en) * 2003-04-14 2005-01-27 Miller Ralph Newton Distillation process for reducing the concentration of dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride
RU2248321C1 (ru) * 2004-03-16 2005-03-20 Общество с ограниченной ответственностью "НьюКем" Способ очистки трифторида азота от тетрафторметана
CN1328160C (zh) * 2005-07-27 2007-07-25 中国船舶重工集团公司第七一八研究所 三氟化氮气体的纯化方法
KR100703875B1 (ko) * 2005-09-07 2007-04-04 주식회사 소디프신소재 삼불화질소의 정제방법
TW200808649A (en) * 2006-05-31 2008-02-16 Du Pont Process for purifying perfluorinated products
CN101920944A (zh) * 2010-08-30 2010-12-22 天津市泰源工业气体有限公司 一种萃取精馏分离三氟化氮与四氟化碳制备高纯三氟化氮的技术
CN102516018A (zh) * 2011-12-16 2012-06-27 天津市泰亨气体有限公司 一种制备高纯四氟化碳的方法
KR101514801B1 (ko) * 2013-06-25 2015-04-24 (주)파인텍 과불화화합물의 분리 및 재활용시스템
JP6798468B2 (ja) * 2017-10-23 2020-12-09 ダイキン工業株式会社 ヘキサフルオロブタジエンの製造方法
ES2937914T3 (es) * 2019-01-23 2023-04-03 Weiss Technik Gmbh Refrigerante
CN112279234B (zh) * 2019-07-23 2023-08-08 中化近代环保化工(西安)有限公司 碳酰氟与二氧化碳的共沸组合物
CN114288702A (zh) * 2021-12-24 2022-04-08 天津海嘉斯迪新材料合伙企业(有限合伙) 一种三氟化氮气体中氧化亚氮的回收系统及方法
CN114191829A (zh) * 2021-12-31 2022-03-18 天津海嘉斯迪新材料合伙企业(有限合伙) 一种三氟化氮粗品中氧化亚氮的去除方法和系统
CN114538391B (zh) * 2022-03-01 2023-11-03 中船(邯郸)派瑞特种气体股份有限公司 一种从nf3废气中回收高纯n2o的装置及其回收方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63306383A (ja) * 1987-06-04 1988-12-14 三井東圧化学株式会社 フッ化窒素の精製方法
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5637285A (en) * 1996-01-30 1997-06-10 Air Products And Chemicals, Inc. Process for nitrogen trifluoride synthesis

Also Published As

Publication number Publication date
KR100588025B1 (ko) 2006-06-13
CN1219739C (zh) 2005-09-21
CA2306800A1 (en) 1999-05-20
CN1515488A (zh) 2004-07-28
CN1137043C (zh) 2004-02-04
CN1278779A (zh) 2001-01-03
CN1252011C (zh) 2006-04-19
JP2001522774A (ja) 2001-11-20
KR20010031951A (ko) 2001-04-16
AU1455099A (en) 1999-05-31
CN1246216C (zh) 2006-03-22
DE69807254T2 (de) 2003-04-10
EP1030818B1 (en) 2002-08-14
EP1030818A1 (en) 2000-08-30
CN1515527A (zh) 2004-07-28
CN1515529A (zh) 2004-07-28
RU2206498C2 (ru) 2003-06-20
DE69807254D1 (de) 2002-09-19

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Legal Events

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