ATE164257T1 - Vorrichtung zur steuerung von strahlung und ihre verwendungen - Google Patents

Vorrichtung zur steuerung von strahlung und ihre verwendungen

Info

Publication number
ATE164257T1
ATE164257T1 AT92900210T AT92900210T ATE164257T1 AT E164257 T1 ATE164257 T1 AT E164257T1 AT 92900210 T AT92900210 T AT 92900210T AT 92900210 T AT92900210 T AT 92900210T AT E164257 T1 ATE164257 T1 AT E164257T1
Authority
AT
Austria
Prior art keywords
radiation
channel
forming elements
beams
selective
Prior art date
Application number
AT92900210T
Other languages
English (en)
Inventor
Muradin A Kumakhov
Original Assignee
X Ray Optical Sys Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27541980&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE164257(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US07/678,208 external-priority patent/US5192869A/en
Priority claimed from US07/678,603 external-priority patent/US5175755A/en
Application filed by X Ray Optical Sys Inc filed Critical X Ray Optical Sys Inc
Application granted granted Critical
Publication of ATE164257T1 publication Critical patent/ATE164257T1/de

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70166—Capillary or channel elements, e.g. nested extreme ultraviolet [EUV] mirrors or shells, optical fibers or light guides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/068—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements specially adapted for particle beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation-Therapy Devices (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Discharge-Lamp Control Circuits And Pulse- Feed Circuits (AREA)
  • Measurement Of Radiation (AREA)
AT92900210T 1990-10-31 1991-10-31 Vorrichtung zur steuerung von strahlung und ihre verwendungen ATE164257T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US60745690A 1990-10-31 1990-10-31
US67820791A 1991-04-01 1991-04-01
US67843791A 1991-04-01 1991-04-01
US07/678,208 US5192869A (en) 1990-10-31 1991-04-01 Device for controlling beams of particles, X-ray and gamma quanta
US07/678,603 US5175755A (en) 1990-10-31 1991-04-01 Use of a kumakhov lens for x-ray lithography

Publications (1)

Publication Number Publication Date
ATE164257T1 true ATE164257T1 (de) 1998-04-15

Family

ID=27541980

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92900210T ATE164257T1 (de) 1990-10-31 1991-10-31 Vorrichtung zur steuerung von strahlung und ihre verwendungen

Country Status (6)

Country Link
EP (1) EP0555376B1 (de)
JP (1) JP3090471B2 (de)
AT (1) ATE164257T1 (de)
CA (1) CA2095222C (de)
DE (2) DE9117302U1 (de)
WO (1) WO1992008235A1 (de)

Families Citing this family (47)

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FR2694504B1 (fr) * 1992-08-04 1994-09-16 Joel Kerjean Procédé et appareil pour le traitement de lésions par rayonnement à haute énergie.
DE4408057B4 (de) * 1994-03-07 2008-12-24 Ifg-Institute For Scientific Instruments Gmbh Vorrichtung zur Röntgenfluoreszenzspektroskopie und deren Verwendung
WO1996002058A1 (fr) * 1994-07-08 1996-01-25 Muradin Abubekirovich Kumakhov Procede de guidage de faisceaux de particules neutres et chargees et son dispositif de mise en ×uvre
US6271534B1 (en) 1994-07-08 2001-08-07 Muradin Abubekirovich Kumakhov Device for producing the image of an object using a flux of neutral or charged particles, and an integrated lens for converting such flux of neutral or charged particles
WO1997006534A1 (en) * 1995-08-04 1997-02-20 X-Ray Optical Systems, Inc. Multiple channel optic
US5745547A (en) * 1995-08-04 1998-04-28 X-Ray Optical Systems, Inc. Multiple channel optic
DE19536822A1 (de) * 1995-09-20 1997-04-10 Ifg Inst Fuer Geraetebau Gmbh Verfahren und Vorrichtung zur Röntgenenergiefilterung
US6333967B1 (en) 1996-07-19 2001-12-25 Rigaku Corporation X-ray generator
US5869841A (en) * 1996-12-10 1999-02-09 University Of Chicago 3-dimensional imaging system using crystal diffraction lenses
US6094471A (en) * 1998-04-22 2000-07-25 Smithsonian Astrophysical Observatory X-ray diagnostic system
JP3712531B2 (ja) * 1998-06-10 2005-11-02 株式会社リガク Ｘａｆｓ測定方法及びｘａｆｓ測定装置
EP1044457B1 (de) * 1998-10-21 2004-09-29 Koninklijke Philips Electronics N.V. Röntgenquelle enthaltende röntgen-bestrahlungsvorrichtung mit einem kapillaren optischen system
RU2164361C1 (ru) 1999-10-18 2001-03-20 Кумахов Мурадин Абубекирович Линза для управления излучением в виде потока нейтральных или заряженных частиц, способ изготовления таких линз и содержащее такие линзы аналитическое устройство, устройство для лучевой терапии и устройства для контактной и проекционной литографии
RU2180439C2 (ru) * 2000-02-11 2002-03-10 Кумахов Мурадин Абубекирович Способ получения изображения внутренней структуры объекта с использованием рентгеновского излучения и устройство для его осуществления
DE10056508C2 (de) * 2000-09-14 2003-02-27 Schneider Elektrotechnik Gmbh Vorrichtung zur Erzeugung eines gerichteten Röntgenlichtstrahlenbündels mit hoher Intensität
KR20020031665A (ko) * 2000-10-23 2002-05-03 추후보정 마이크로형광 ｘ선 분석기
JP2002148222A (ja) * 2000-10-25 2002-05-22 Jordan Valley Applied Radiation Ltd Ｘ線螢光分析器
RU2187160C1 (ru) * 2000-12-29 2002-08-10 Кумахов Мурадин Абубекирович Устройство для рентгеновской литографии
DE10125870B4 (de) * 2001-05-26 2006-09-14 Lutz Dr. Kipp Optisches Element zur Abbildung von Objekten und/oder zur Fokussierung von elektromagnetischen Strahlen oder Strahlen von Elementarteilchen und dessen Verwendung
RU2339974C2 (ru) * 2001-06-19 2008-11-27 Икс-Рэй Оптикал Системз, Инк. Волновая дисперсивная рентгенофлуоресцентная система с использованием фокусирующей оптики для возбуждения и фокусирующий монохроматор для собирания
JP2004522558A (ja) * 2001-09-19 2004-07-29 ムラジン アブベキロビッチ クマホフ， Ｘ線治療のためのデバイス
CA2525777A1 (en) 2003-06-02 2004-12-16 Fox Chase Cancer Center High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers
JP2005257349A (ja) * 2004-03-10 2005-09-22 Sii Nanotechnology Inc 超伝導ｘ線分析装置
JP2006126045A (ja) * 2004-10-29 2006-05-18 Rigaku Industrial Co ポリキャピラリ
JP4724885B2 (ja) * 2005-10-25 2011-07-13 独立行政法人産業技術総合研究所 Ｘ線ビームの走査方法及び装置
WO2008143101A1 (ja) * 2007-05-15 2008-11-27 Hamamatsu Foundation For Science And Technology Promotion メスバウア分光測定装置
US7720197B2 (en) * 2008-05-30 2010-05-18 Rigaku Innovative Technologies, Inc. High intensity x-ray beam system
US8587768B2 (en) 2010-04-05 2013-11-19 Media Lario S.R.L. EUV collector system with enhanced EUV radiation collection
JP2013528804A (ja) * 2010-05-19 2013-07-11 シルヴァー，エリック，エイチ ハイブリッドｘ線光学機器および方法
JP5684032B2 (ja) * 2011-04-08 2015-03-11 株式会社日立製作所 荷電粒子線分析装置および分析方法
EP2740127B1 (de) * 2011-08-06 2017-11-29 Rigaku Innovative Technologies, Inc. Nanoröhrchenbasierte vorrichtung zum lenken von röntgenphotonen und neutronen
US8604417B2 (en) * 2011-08-26 2013-12-10 Baker Hughes Incorporated Targetless pulsed neutron generator using beam-beam interaction
US9390984B2 (en) 2011-10-11 2016-07-12 Bruker Jv Israel Ltd. X-ray inspection of bumps on a semiconductor substrate
JP6016386B2 (ja) * 2012-03-09 2016-10-26 キヤノン株式会社 Ｘ線光学装置
JP6108671B2 (ja) * 2012-03-13 2017-04-05 キヤノン株式会社 放射線撮影装置
RU2502144C1 (ru) * 2012-04-12 2013-12-20 ОАО "Научно-производственное предприятие "Салют" Способ изготовления многокапиллярного коллиматора для атомно-лучевой трубки
RU2529648C2 (ru) * 2012-12-03 2014-09-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ и устройство для радиационного измерения плотности твердых тел
US9389192B2 (en) 2013-03-24 2016-07-12 Bruker Jv Israel Ltd. Estimation of XRF intensity from an array of micro-bumps
DE102013225425B4 (de) * 2013-12-10 2023-08-17 Siemens Healthcare Gmbh Röntgeneinrichtung und Verfahren zur Angleichung des von einem Röntgenstrahler in einem Strahlenbündel erzeugten Intensitätsprofils
US9632043B2 (en) 2014-05-13 2017-04-25 Bruker Jv Israel Ltd. Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF
RU2566390C1 (ru) * 2014-08-25 2015-10-27 Акционерное общество "Научно-исследовательский институт полимерных материалов" Способ гамма-сцинтилляционного контроля
US9829448B2 (en) 2014-10-30 2017-11-28 Bruker Jv Israel Ltd. Measurement of small features using XRF
CN106772549B (zh) * 2017-01-06 2023-07-25 中国工程物理研究院核物理与化学研究所 一种点状放射源照射器
JP7280516B2 (ja) * 2020-09-30 2023-05-24 パルステック工業株式会社 Ｘ線回折測定装置
CN112259275B (zh) * 2020-10-19 2022-02-11 中国核动力研究设计院 一种电磁屏蔽环境下通信系统及通信方法
CN113203757B (zh) * 2021-05-07 2024-03-22 北京市辐射中心 一种全光x射线显微成像系统
WO2024154237A1 (ja) * 2023-01-17 2024-07-25 浜松ホトニクス株式会社 放射線ビーム走査光学系及び検査装置

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FR2051917A5 (de) * 1969-07-01 1971-04-09 Commissariat Energie Atomique
CA1037163A (en) * 1973-07-23 1978-08-22 Republic Steel Corporation Apparatus for collimation of radiation signals for long distance transmission and method of construction therefor
DD240091A1 (de) * 1985-08-07 1986-10-15 Akad Wissenschaften Ddr Lochkamera fuer enrgiereiche quantenstrahlung
WO1988001428A1 (en) * 1986-08-15 1988-02-25 Commonwealth Scientific And Industrial Research Or Instrumentation for conditioning x-ray or neutron beams

Also Published As

Publication number Publication date
WO1992008235A1 (en) 1992-05-14
EP0555376A1 (de) 1993-08-18
CA2095222A1 (en) 1992-05-01
JPH07504491A (ja) 1995-05-18
EP0555376B1 (de) 1998-03-18
DE69129117D1 (de) 1998-04-23
CA2095222C (en) 2002-09-10
DE69129117T2 (de) 1998-08-06
JP3090471B2 (ja) 2000-09-18
DE9117302U1 (de) 1999-10-21

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