DE69129117T2 - Vorrichtung zur steuerung von strahlung und ihre verwendungen - Google Patents

Vorrichtung zur steuerung von strahlung und ihre verwendungen

Info

Publication number
DE69129117T2
DE69129117T2 DE69129117T DE69129117T DE69129117T2 DE 69129117 T2 DE69129117 T2 DE 69129117T2 DE 69129117 T DE69129117 T DE 69129117T DE 69129117 T DE69129117 T DE 69129117T DE 69129117 T2 DE69129117 T2 DE 69129117T2
Authority
DE
Germany
Prior art keywords
radiation
channel
forming elements
beams
selective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69129117T
Other languages
English (en)
Other versions
DE69129117D1 (de
Inventor
Muradin Kumakhov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
X Ray Optical Systems Inc
Original Assignee
X Ray Optical Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27541980&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69129117(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US07/678,603 external-priority patent/US5175755A/en
Priority claimed from US07/678,208 external-priority patent/US5192869A/en
Application filed by X Ray Optical Systems Inc filed Critical X Ray Optical Systems Inc
Application granted granted Critical
Publication of DE69129117D1 publication Critical patent/DE69129117D1/de
Publication of DE69129117T2 publication Critical patent/DE69129117T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70166—Capillary or channel elements, e.g. nested extreme ultraviolet [EUV] mirrors or shells, optical fibers or light guides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/068—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements specially adapted for particle beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation-Therapy Devices (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Discharge-Lamp Control Circuits And Pulse- Feed Circuits (AREA)
  • Measurement Of Radiation (AREA)
DE69129117T 1990-10-31 1991-10-31 Vorrichtung zur steuerung von strahlung und ihre verwendungen Revoked DE69129117T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US60745690A 1990-10-31 1990-10-31
US67843791A 1991-04-01 1991-04-01
US67820791A 1991-04-01 1991-04-01
US07/678,603 US5175755A (en) 1990-10-31 1991-04-01 Use of a kumakhov lens for x-ray lithography
US07/678,208 US5192869A (en) 1990-10-31 1991-04-01 Device for controlling beams of particles, X-ray and gamma quanta
PCT/US1991/008167 WO1992008235A1 (en) 1990-10-31 1991-10-31 Device for controlling beams of particles, x-ray and gamma quanta and uses thereof

Publications (2)

Publication Number Publication Date
DE69129117D1 DE69129117D1 (de) 1998-04-23
DE69129117T2 true DE69129117T2 (de) 1998-08-06

Family

ID=27541980

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69129117T Revoked DE69129117T2 (de) 1990-10-31 1991-10-31 Vorrichtung zur steuerung von strahlung und ihre verwendungen
DE9117302U Expired - Lifetime DE9117302U1 (de) 1990-10-31 1991-10-31 Vorrichtung zum Steuern von Strahlen von Teilchen, Röntgen- und Gammastrahlen und Anwendungen davon

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE9117302U Expired - Lifetime DE9117302U1 (de) 1990-10-31 1991-10-31 Vorrichtung zum Steuern von Strahlen von Teilchen, Röntgen- und Gammastrahlen und Anwendungen davon

Country Status (6)

Country Link
EP (1) EP0555376B1 (de)
JP (1) JP3090471B2 (de)
AT (1) ATE164257T1 (de)
CA (1) CA2095222C (de)
DE (2) DE69129117T2 (de)
WO (1) WO1992008235A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10125870B4 (de) * 2001-05-26 2006-09-14 Lutz Dr. Kipp Optisches Element zur Abbildung von Objekten und/oder zur Fokussierung von elektromagnetischen Strahlen oder Strahlen von Elementarteilchen und dessen Verwendung

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2694504B1 (fr) * 1992-08-04 1994-09-16 Joel Kerjean Procédé et appareil pour le traitement de lésions par rayonnement à haute énergie.
DE4408057B4 (de) * 1994-03-07 2008-12-24 Ifg-Institute For Scientific Instruments Gmbh Vorrichtung zur Röntgenfluoreszenzspektroskopie und deren Verwendung
US6271534B1 (en) 1994-07-08 2001-08-07 Muradin Abubekirovich Kumakhov Device for producing the image of an object using a flux of neutral or charged particles, and an integrated lens for converting such flux of neutral or charged particles
EP0723272B1 (de) * 1994-07-08 2001-04-25 Muradin Abubekirovich Kumakhov Verfahren zur führung von neutral- und ladungsträgerstrahlen und eine vorrichtung zur durchführung des verfahrens
US5745547A (en) * 1995-08-04 1998-04-28 X-Ray Optical Systems, Inc. Multiple channel optic
AU6688496A (en) * 1995-08-04 1997-03-05 X-Ray Optical Systems, Inc. Multiple channel optic
DE19536822A1 (de) * 1995-09-20 1997-04-10 Ifg Inst Fuer Geraetebau Gmbh Verfahren und Vorrichtung zur Röntgenenergiefilterung
US6333967B1 (en) 1996-07-19 2001-12-25 Rigaku Corporation X-ray generator
US5869841A (en) * 1996-12-10 1999-02-09 University Of Chicago 3-dimensional imaging system using crystal diffraction lenses
US6094471A (en) * 1998-04-22 2000-07-25 Smithsonian Astrophysical Observatory X-ray diagnostic system
JP3712531B2 (ja) * 1998-06-10 2005-11-02 株式会社リガク Ｘａｆｓ測定方法及びｘａｆｓ測定装置
EP1044457B1 (de) * 1998-10-21 2004-09-29 Koninklijke Philips Electronics N.V. Röntgenquelle enthaltende röntgen-bestrahlungsvorrichtung mit einem kapillaren optischen system
RU2164361C1 (ru) * 1999-10-18 2001-03-20 Кумахов Мурадин Абубекирович Линза для управления излучением в виде потока нейтральных или заряженных частиц, способ изготовления таких линз и содержащее такие линзы аналитическое устройство, устройство для лучевой терапии и устройства для контактной и проекционной литографии
RU2180439C2 (ru) * 2000-02-11 2002-03-10 Кумахов Мурадин Абубекирович Способ получения изображения внутренней структуры объекта с использованием рентгеновского излучения и устройство для его осуществления
DE10056508C2 (de) * 2000-09-14 2003-02-27 Schneider Elektrotechnik Gmbh Vorrichtung zur Erzeugung eines gerichteten Röntgenlichtstrahlenbündels mit hoher Intensität
KR20020031665A (ko) * 2000-10-23 2002-05-03 추후보정 마이크로형광 ｘ선 분석기
JP2002148222A (ja) * 2000-10-25 2002-05-22 Jordan Valley Applied Radiation Ltd Ｘ線螢光分析器
RU2187160C1 (ru) * 2000-12-29 2002-08-10 Кумахов Мурадин Абубекирович Устройство для рентгеновской литографии
AU2002315331A1 (en) * 2001-06-19 2003-01-02 X-Ray Optical Systems, Inc. Wavelength dispersive xrf system using focusing optic for excitation and a focusing monochromator for collection
EP1428554A4 (de) * 2001-09-19 2008-05-14 Muradin Abubekirovich Kumakhov Röntgentherapiegerät
US7317192B2 (en) 2003-06-02 2008-01-08 Fox Chase Cancer Center High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers
JP2005257349A (ja) * 2004-03-10 2005-09-22 Sii Nanotechnology Inc 超伝導ｘ線分析装置
JP2006126045A (ja) * 2004-10-29 2006-05-18 Rigaku Industrial Co ポリキャピラリ
JP4724885B2 (ja) * 2005-10-25 2011-07-13 独立行政法人産業技術総合研究所 Ｘ線ビームの走査方法及び装置
US20100158189A1 (en) * 2007-05-15 2010-06-24 Hamamatsu Foundation For Science And Technology Promotion Mossbauer spectrometer
US7720197B2 (en) * 2008-05-30 2010-05-18 Rigaku Innovative Technologies, Inc. High intensity x-ray beam system
US8587768B2 (en) * 2010-04-05 2013-11-19 Media Lario S.R.L. EUV collector system with enhanced EUV radiation collection
JP2013528804A (ja) * 2010-05-19 2013-07-11 シルヴァー，エリック，エイチ ハイブリッドｘ線光学機器および方法
JP5684032B2 (ja) * 2011-04-08 2015-03-11 株式会社日立製作所 荷電粒子線分析装置および分析方法
EP2740127B1 (de) * 2011-08-06 2017-11-29 Rigaku Innovative Technologies, Inc. Nanoröhrchenbasierte vorrichtung zum lenken von röntgenphotonen und neutronen
US8604417B2 (en) * 2011-08-26 2013-12-10 Baker Hughes Incorporated Targetless pulsed neutron generator using beam-beam interaction
US9390984B2 (en) 2011-10-11 2016-07-12 Bruker Jv Israel Ltd. X-ray inspection of bumps on a semiconductor substrate
JP6016386B2 (ja) * 2012-03-09 2016-10-26 キヤノン株式会社 Ｘ線光学装置
JP6108671B2 (ja) * 2012-03-13 2017-04-05 キヤノン株式会社 放射線撮影装置
RU2502144C1 (ru) * 2012-04-12 2013-12-20 ОАО "Научно-производственное предприятие "Салют" Способ изготовления многокапиллярного коллиматора для атомно-лучевой трубки
RU2529648C2 (ru) * 2012-12-03 2014-09-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ и устройство для радиационного измерения плотности твердых тел
US9389192B2 (en) 2013-03-24 2016-07-12 Bruker Jv Israel Ltd. Estimation of XRF intensity from an array of micro-bumps
DE102013225425B4 (de) * 2013-12-10 2023-08-17 Siemens Healthcare Gmbh Röntgeneinrichtung und Verfahren zur Angleichung des von einem Röntgenstrahler in einem Strahlenbündel erzeugten Intensitätsprofils
US9632043B2 (en) 2014-05-13 2017-04-25 Bruker Jv Israel Ltd. Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF
RU2566390C1 (ru) * 2014-08-25 2015-10-27 Акционерное общество "Научно-исследовательский институт полимерных материалов" Способ гамма-сцинтилляционного контроля
US9829448B2 (en) 2014-10-30 2017-11-28 Bruker Jv Israel Ltd. Measurement of small features using XRF
CN106772549B (zh) * 2017-01-06 2023-07-25 中国工程物理研究院核物理与化学研究所 一种点状放射源照射器
JP7280516B2 (ja) * 2020-09-30 2023-05-24 パルステック工業株式会社 Ｘ線回折測定装置
CN112259275B (zh) * 2020-10-19 2022-02-11 中国核动力研究设计院 一种电磁屏蔽环境下通信系统及通信方法
CN113203757B (zh) * 2021-05-07 2024-03-22 北京市辐射中心 一种全光x射线显微成像系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2051917A5 (de) * 1969-07-01 1971-04-09 Commissariat Energie Atomique
GB1474955A (en) * 1973-07-23 1977-05-25 Republic Steel Corp Radioactive beam detection
DD240091A1 (de) * 1985-08-07 1986-10-15 Akad Wissenschaften Ddr Lochkamera fuer enrgiereiche quantenstrahlung
WO1988001428A1 (en) * 1986-08-15 1988-02-25 Commonwealth Scientific And Industrial Research Or Instrumentation for conditioning x-ray or neutron beams

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10125870B4 (de) * 2001-05-26 2006-09-14 Lutz Dr. Kipp Optisches Element zur Abbildung von Objekten und/oder zur Fokussierung von elektromagnetischen Strahlen oder Strahlen von Elementarteilchen und dessen Verwendung

Also Published As

Publication number Publication date
DE9117302U1 (de) 1999-10-21
EP0555376A1 (de) 1993-08-18
ATE164257T1 (de) 1998-04-15
EP0555376B1 (de) 1998-03-18
JPH07504491A (ja) 1995-05-18
CA2095222C (en) 2002-09-10
DE69129117D1 (de) 1998-04-23
WO1992008235A1 (en) 1992-05-14
JP3090471B2 (ja) 2000-09-18
CA2095222A1 (en) 1992-05-01

Similar Documents

Publication Publication Date Title
DE69129117T2 (de) Vorrichtung zur steuerung von strahlung und ihre verwendungen
EP1169713B1 (de) Linsensystem für röntgenstrahlen
ES2119358T3 (es) Sinterizacion por laser de haz multiple.
DE3785763D1 (de) Instrumente zur konditionierung von roentgen- oder neutronenstrahlen.
DE69319010D1 (de) Gerät für Röntgenstrahlentherapie
ATE488011T1 (de) Optische vorrichtung aus einer vielzahl von gekrümmten optischen kristallen zum fokussieren von röntgenstrahlen
DE58901620D1 (de) Plasma-roentgenroehre, insbesondere zur roentgen-vorionisierung von gaslasern, verfahren zur erzeugung von roentgenstrahlung mit einer solchen roentgenroehre und verwendung letzterer.
IT8220815A0 (it) Strumento e procedimento per la focalizzazione di raggi x, raggi gamma e neutroni.
DE69129942D1 (de) Kollimatoranordnung für gammastrahlung
DE69318381T2 (de) Strahlungsbündel-Kollimatorvorrichtung
DE50213149D1 (de) Anordnung für röntgenanalytische anwendungen
US3418467A (en) Method of generating an x-ray beam composed of a plurality of wavelengths
FR2372618A1 (fr) Dispositif de collimation pour rayons penetrants et application a la tomographie axiale
Bessonov et al. A method of polarized positron beam production
MacDonald et al. Medical applications of polycapillary x-ray optics
JPS5372489A (en) X-ray tube and x-ray source unit
ATE492022T1 (de) Beugungs-röntgenelement
SU853675A2 (ru) Коллиматор
Arkadiev et al. Concentration of synchrotron radiation with capillary arrays
Zentrum MEDAPP: Fission neutron beam for science, medicine, and industry
ES2073404T3 (es) Control de procesos pirogenicos.
GB1529831A (en) Radiography
Gupta Optimization of beam transmission through two-slit collimating systems
RU94012491A (ru) Способ измерения абсолютного значения плотности тела
Chapman et al. X-ray optics using capillary arrays

Legal Events

Date Code Title Description
8363 Opposition against the patent
8310 Action for declaration of annulment
8314 Invalidation rejected
8331 Complete revocation