ATE156198T1 - Verfahren zum herstellen verbesserter cvd kupferfilme - Google Patents

Verfahren zum herstellen verbesserter cvd kupferfilme

Info

Publication number
ATE156198T1
ATE156198T1 AT94107352T AT94107352T ATE156198T1 AT E156198 T1 ATE156198 T1 AT E156198T1 AT 94107352 T AT94107352 T AT 94107352T AT 94107352 T AT94107352 T AT 94107352T AT E156198 T1 ATE156198 T1 AT E156198T1
Authority
AT
Austria
Prior art keywords
introducing
fluoroaryl
alkyl
copper film
producing improved
Prior art date
Application number
AT94107352T
Other languages
English (en)
Inventor
John Anthony Thomas Norman
Arthur Kenneth Hochberg
David Allen Roberts
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of ATE156198T1 publication Critical patent/ATE156198T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
AT94107352T 1993-05-18 1994-05-11 Verfahren zum herstellen verbesserter cvd kupferfilme ATE156198T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/064,185 US5322712A (en) 1993-05-18 1993-05-18 Process for improved quality of CVD copper films

Publications (1)

Publication Number Publication Date
ATE156198T1 true ATE156198T1 (de) 1997-08-15

Family

ID=22054156

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94107352T ATE156198T1 (de) 1993-05-18 1994-05-11 Verfahren zum herstellen verbesserter cvd kupferfilme

Country Status (9)

Country Link
US (2) US5322712A (de)
EP (1) EP0630988B1 (de)
JP (1) JP2641700B2 (de)
KR (1) KR960011246B1 (de)
AT (1) ATE156198T1 (de)
DE (1) DE69404564T2 (de)
DK (1) DK0630988T3 (de)
SG (1) SG46145A1 (de)
TW (1) TW238341B (de)

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US5314541A (en) * 1991-05-28 1994-05-24 Tokyo Electron Limited Reduced pressure processing system and reduced pressure processing method
JP3488735B2 (ja) * 1994-03-03 2004-01-19 三菱電機株式会社 半導体装置
JP2622671B2 (ja) * 1995-03-07 1997-06-18 株式会社トリケミカル研究所 銅のβ−ジケトネート錯体の製造方法
US5744192A (en) * 1996-11-08 1998-04-28 Sharp Microelectronics Technology, Inc. Method of using water vapor to increase the conductivity of cooper desposited with cu(hfac)TMVS
US6090960A (en) * 1997-01-07 2000-07-18 Sharp Laboratories Of America, Inc. Precursor with (methoxy) (methyl) silylolefin ligand to deposit copper and method same
US5767301A (en) * 1997-01-21 1998-06-16 Sharp Microelectronics Technology, Inc. Precursor with (alkyloxy)(alkyl)-silylolefin ligand to deposit copper
US6130161A (en) * 1997-05-30 2000-10-10 International Business Machines Corporation Method of forming copper interconnections with enhanced electromigration resistance and reduced defect sensitivity
US6069068A (en) 1997-05-30 2000-05-30 International Business Machines Corporation Sub-quarter-micron copper interconnections with improved electromigration resistance and reduced defect sensitivity
EP0890979A1 (de) 1997-07-11 1999-01-13 EM Microelectronic-Marin SA Methode zur Optimierung eines Abscheide- und Ätzverfahrens als Funktion der Struktur des abzuscheidenden un zu ätzenden polykristallinen Films
US6171661B1 (en) * 1998-02-25 2001-01-09 Applied Materials, Inc. Deposition of copper with increased adhesion
JP4304547B2 (ja) * 1998-03-20 2009-07-29 キヤノンアネルバ株式会社 枚葉式ｃｖｄ装置および枚葉式ｃｖｄ方法
JP2002530520A (ja) * 1998-08-03 2002-09-17 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド ミクロ電子工学素子構造体の製造のための銅前駆組成物及びその形成プロセス
KR100566905B1 (ko) * 1998-09-11 2006-07-03 에이에스엠지니텍코리아 주식회사 표면 촉매를 이용한 화학 증착방법_
US7012292B1 (en) * 1998-11-25 2006-03-14 Advanced Technology Materials, Inc Oxidative top electrode deposition process, and microelectronic device structure
US6046364A (en) * 1998-12-07 2000-04-04 Air Products And Chemicals, Inc. Regeneration of metal CVD precursors
DE10080457T1 (de) 1999-02-12 2001-04-26 Gelest Inc CVD-Abscheidung von Wolframnitrid
US6337148B1 (en) 1999-05-25 2002-01-08 Advanced Technology Materials, Inc. Copper source reagent compositions, and method of making and using same for microelectronic device structures
US6110530A (en) 1999-06-25 2000-08-29 Applied Materials, Inc. CVD method of depositing copper films by using improved organocopper precursor blend
US6291347B1 (en) * 1999-10-08 2001-09-18 Texas Instruments Incorporated Method and system for constructing semiconductor devices
JP3925780B2 (ja) 1999-12-15 2007-06-06 エー・エス・エムジニテックコリア株式会社 触媒及び化学気相蒸着法を用いて銅配線及び薄膜を形成する方法
US6589329B1 (en) 2000-03-09 2003-07-08 Advanced Technology Materials, Inc. Composition and process for production of copper circuitry in microelectronic device structures
US6417369B1 (en) 2000-03-13 2002-07-09 Advanced Technology Materials, Inc. Pyrazolate copper complexes, and MOCVD of copper using same
JP3494363B2 (ja) * 2000-03-17 2004-02-09 セントラル硝子株式会社 １，１，１，５，５，５−ヘキサフルオロアセチルアセトンの製造方法
US6440494B1 (en) * 2000-04-05 2002-08-27 Tokyo Electron Limited In-situ source synthesis for metal CVD
KR100403454B1 (ko) * 2000-06-20 2003-11-01 주식회사 하이닉스반도체 반도체 소자의 금속 배선 형성 방법
US7084080B2 (en) * 2001-03-30 2006-08-01 Advanced Technology Materials, Inc. Silicon source reagent compositions, and method of making and using same for microelectronic device structure
US6576292B2 (en) 2001-08-13 2003-06-10 Sharp Laboratories Of America, Inc. Method of forming highly adhesive copper thin films on metal nitride substrates via CVD
US6509268B1 (en) 2001-08-27 2003-01-21 Sharp Laboratories Of America, Inc. Thermal densification in the early stages of copper MOCVD for depositing high quality Cu films with good adhesion and trench filling characteristics
US6576538B2 (en) * 2001-08-30 2003-06-10 Micron Technology, Inc. Technique for high efficiency metalorganic chemical vapor deposition
US20030064153A1 (en) * 2001-10-01 2003-04-03 Rajendra Solanki Method of depositing a metallic film on a substrate
JP2003188115A (ja) * 2001-12-17 2003-07-04 Shin Meiwa Ind Co Ltd 半導体配線形成方法及び装置、半導体デバイス製造方法及び装置、並びにウエハ
US20040009665A1 (en) * 2002-06-04 2004-01-15 Applied Materials, Inc. Deposition of copper films
US7150789B2 (en) 2002-07-29 2006-12-19 Micron Technology, Inc. Atomic layer deposition methods
EP1563117B1 (de) * 2002-11-15 2010-01-06 President And Fellows Of Harvard College Atomlagenabscheidung (ald) mit hilfe von metallamidinaten
US9029189B2 (en) * 2003-11-14 2015-05-12 President And Fellows Of Harvard College Bicyclic guanidines, metal complexes thereof and their use in vapor deposition
US6838573B1 (en) 2004-01-30 2005-01-04 Air Products And Chemicals, Inc. Copper CVD precursors with enhanced adhesion properties
US7166732B2 (en) * 2004-06-16 2007-01-23 Advanced Technology Materials, Inc. Copper (I) compounds useful as deposition precursors of copper thin films
US20060102895A1 (en) * 2004-11-16 2006-05-18 Hendrix Bryan C Precursor compositions for forming tantalum-containing films, and tantalum-containing barrier films and copper-metallized semiconductor device structures
US9312557B2 (en) * 2005-05-11 2016-04-12 Schlumberger Technology Corporation Fuel cell apparatus and method for downhole power systems
WO2007142700A1 (en) * 2006-06-02 2007-12-13 Advanced Technology Materials, Inc. Copper (i) amidinates and guanidinates for forming copper thin films
GB0616125D0 (en) * 2006-08-14 2006-09-20 Radiation Watch Ltd Etch process
TW200825200A (en) * 2006-12-05 2008-06-16 Advanced Tech Materials Metal aminotroponiminates, bis-oxazolinates and guanidinates
WO2008085426A1 (en) * 2006-12-28 2008-07-17 Air Products And Chemicals, Inc. Volatile liquid copper precursors for thin film applications
US7750173B2 (en) * 2007-01-18 2010-07-06 Advanced Technology Materials, Inc. Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films
US8951615B2 (en) 2011-02-16 2015-02-10 Uchicago Argonne, Llc Doping control by ALD surface functionalization

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308804A (ja) * 1988-06-06 1989-12-13 Mitsubishi Metal Corp 膜状超電導体の製造方法
KR940002439B1 (ko) * 1990-03-09 1994-03-24 니뽄 덴신 덴와 가부시끼가이샤 금속 박막 성장방법 및 장치
JPH03261609A (ja) * 1990-03-13 1991-11-21 Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai Ｍｏｃｖｄ法による酸化物超電導体の合成方法
US5094701A (en) * 1990-03-30 1992-03-10 Air Products And Chemicals, Inc. Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same
US5098516A (en) * 1990-12-31 1992-03-24 Air Products And Chemicals, Inc. Processes for the chemical vapor deposition of copper and etching of copper
US5085731A (en) * 1991-02-04 1992-02-04 Air Products And Chemicals, Inc. Volatile liquid precursors for the chemical vapor deposition of copper

Also Published As

Publication number Publication date
JPH0748672A (ja) 1995-02-21
DE69404564D1 (de) 1997-09-04
EP0630988A1 (de) 1994-12-28
SG46145A1 (en) 1998-02-20
DK0630988T3 (da) 1997-09-01
KR960011246B1 (ko) 1996-08-21
EP0630988B1 (de) 1997-07-30
DE69404564T2 (de) 1997-12-04
TW238341B (en) 1995-01-11
USRE35614E (en) 1997-09-23
JP2641700B2 (ja) 1997-08-20
US5322712A (en) 1994-06-21

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