ATE137811T1 - Verfahren zur herstellung von dünnen ueberzügen aus anorganischen oxiden kontrollierter stöchiometrie - Google Patents
Verfahren zur herstellung von dünnen ueberzügen aus anorganischen oxiden kontrollierter stöchiometrieInfo
- Publication number
- ATE137811T1 ATE137811T1 AT93912066T AT93912066T ATE137811T1 AT E137811 T1 ATE137811 T1 AT E137811T1 AT 93912066 T AT93912066 T AT 93912066T AT 93912066 T AT93912066 T AT 93912066T AT E137811 T1 ATE137811 T1 AT E137811T1
- Authority
- AT
- Austria
- Prior art keywords
- inorganic oxides
- producing thin
- thin coatings
- controlled stoichiometry
- oxides
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 229910052809 inorganic oxide Inorganic materials 0.000 title 1
- 239000010409 thin film Substances 0.000 abstract 3
- 239000004020 conductor Substances 0.000 abstract 1
- 238000011065 in-situ storage Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002887 superconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/087—Oxides of copper or solid solutions thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
- Y10S505/731—Sputter coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
- Y10S505/732—Evaporative coating with superconducting material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Glass Compositions (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Manufacturing Of Electric Cables (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US85062192A | 1992-03-13 | 1992-03-13 | |
| US98413492A | 1992-12-09 | 1992-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE137811T1 true ATE137811T1 (de) | 1996-05-15 |
Family
ID=27126941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT93912066T ATE137811T1 (de) | 1992-03-13 | 1993-03-10 | Verfahren zur herstellung von dünnen ueberzügen aus anorganischen oxiden kontrollierter stöchiometrie |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US5389606A (de) |
| EP (1) | EP0630422B1 (de) |
| JP (1) | JP3451352B2 (de) |
| KR (1) | KR100276539B1 (de) |
| AT (1) | ATE137811T1 (de) |
| CA (1) | CA2131791A1 (de) |
| DE (1) | DE69302572T2 (de) |
| DK (1) | DK0630422T3 (de) |
| ES (1) | ES2087740T3 (de) |
| GR (1) | GR3020559T3 (de) |
| HK (1) | HK180596A (de) |
| SG (1) | SG76474A1 (de) |
| WO (1) | WO1993018200A1 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5892243A (en) * | 1996-12-06 | 1999-04-06 | Trw Inc. | High-temperature SSNS and SNS Josephson junction and method of making junction |
| JP3385889B2 (ja) * | 1996-12-25 | 2003-03-10 | 株式会社日立製作所 | 強誘電体メモリ素子及びその製造方法 |
| US6120857A (en) * | 1998-05-18 | 2000-09-19 | The Regents Of The University Of California | Low work function surface layers produced by laser ablation using short-wavelength photons |
| US6129898A (en) * | 1998-08-17 | 2000-10-10 | Ford Global Technologies, Inc. | NOx trap catalyst for lean burn engines |
| US7439208B2 (en) * | 2003-12-01 | 2008-10-21 | Superconductor Technologies, Inc. | Growth of in-situ thin films by reactive evaporation |
| US20100279124A1 (en) * | 2008-10-31 | 2010-11-04 | Leybold Optics Gmbh | Hafnium or zirconium oxide Coating |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH075435B2 (ja) * | 1987-03-31 | 1995-01-25 | 住友電気工業株式会社 | 超電導薄膜の製造方法及び装置 |
| DE3726016A1 (de) * | 1987-08-05 | 1989-02-16 | Siemens Ag | Verfahren zur herstellung eines schichtartigen aufbaus aus einem oxidkeramischen supralteitermaterial |
| DE3734069A1 (de) * | 1987-10-08 | 1989-04-20 | Siemens Ag | Verfahren zur abscheidung von schichten aus einem oxidkeramischen supraleitermaterial auf einem substrat |
| DE3827069A1 (de) * | 1987-11-21 | 1989-06-08 | Asea Brown Boveri | Verfahren zur herstellung eines supraleiters |
| DE3822502C1 (de) * | 1988-07-03 | 1989-08-24 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De | |
| JPH02212351A (ja) * | 1989-02-10 | 1990-08-23 | Mitsubishi Metal Corp | 超電導セラミックス膜形成用ターゲット材 |
| DE4006489A1 (de) * | 1990-03-02 | 1991-09-05 | Hoechst Ag | Vorrichtung zum herstellen duenner schichten aus metallmischoxiden aus organischen metallverbindungen auf einem substrat |
-
1993
- 1993-03-10 SG SG1996008311A patent/SG76474A1/en unknown
- 1993-03-10 JP JP51598293A patent/JP3451352B2/ja not_active Expired - Fee Related
- 1993-03-10 EP EP93912066A patent/EP0630422B1/de not_active Expired - Lifetime
- 1993-03-10 DE DE69302572T patent/DE69302572T2/de not_active Expired - Fee Related
- 1993-03-10 CA CA002131791A patent/CA2131791A1/en not_active Abandoned
- 1993-03-10 AT AT93912066T patent/ATE137811T1/de not_active IP Right Cessation
- 1993-03-10 KR KR1019940703183A patent/KR100276539B1/ko not_active IP Right Cessation
- 1993-03-10 DK DK93912066.3T patent/DK0630422T3/da active
- 1993-03-10 ES ES93912066T patent/ES2087740T3/es not_active Expired - Lifetime
- 1993-03-10 WO PCT/US1993/002162 patent/WO1993018200A1/en active IP Right Grant
- 1993-11-12 US US08/151,236 patent/US5389606A/en not_active Expired - Fee Related
-
1996
- 1996-07-17 GR GR960401928T patent/GR3020559T3/el unknown
- 1996-09-26 HK HK180596A patent/HK180596A/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07505114A (ja) | 1995-06-08 |
| SG76474A1 (en) | 2000-11-21 |
| EP0630422A1 (de) | 1994-12-28 |
| WO1993018200A1 (en) | 1993-09-16 |
| EP0630422B1 (de) | 1996-05-08 |
| DE69302572T2 (de) | 1996-12-05 |
| KR100276539B1 (ko) | 2000-12-15 |
| KR950700436A (ko) | 1995-01-16 |
| US5389606A (en) | 1995-02-14 |
| ES2087740T3 (es) | 1996-07-16 |
| GR3020559T3 (en) | 1996-10-31 |
| JP3451352B2 (ja) | 2003-09-29 |
| DE69302572D1 (de) | 1996-06-13 |
| CA2131791A1 (en) | 1993-09-16 |
| HK180596A (en) | 1996-10-04 |
| DK0630422T3 (da) | 1996-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification | ||
| REN | Ceased due to non-payment of the annual fee |