AT516575A3 - Backvorrichtung für einen Wafer, der mit einer ein Lösungsmittel enthaltenden Beschichtung beschichtet ist - Google Patents

Backvorrichtung für einen Wafer, der mit einer ein Lösungsmittel enthaltenden Beschichtung beschichtet ist

Info

Publication number
AT516575A3
AT516575A3 ATA50893/2015A AT508932015A AT516575A3 AT 516575 A3 AT516575 A3 AT 516575A3 AT 508932015 A AT508932015 A AT 508932015A AT 516575 A3 AT516575 A3 AT 516575A3
Authority
AT
Austria
Prior art keywords
wafer
solvent
purge gas
coating containing
baking apparatus
Prior art date
Application number
ATA50893/2015A
Other languages
English (en)
Other versions
AT516575B1 (de
AT516575A2 (de
Original Assignee
Suss Microtec Lithography Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suss Microtec Lithography Gmbh filed Critical Suss Microtec Lithography Gmbh
Publication of AT516575A2 publication Critical patent/AT516575A2/de
Publication of AT516575A3 publication Critical patent/AT516575A3/de
Application granted granted Critical
Publication of AT516575B1 publication Critical patent/AT516575B1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Especially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B3/00—Hearth-type furnaces, e.g. of reverberatory type; Tank furnaces
    • F27B3/02—Hearth-type furnaces, e.g. of reverberatory type; Tank furnaces of single-chamber fixed-hearth type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/0084—Charging; Manipulation of SC or SC wafers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/02—Supplying steam, vapour, gases, or liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

Es wird eine Backvorrichtung (10) für einen Wafer (14) beschrieben, der mit einer ein Lösungsmittel enthaltenden Beschichtung (15) beschichtet ist, wobei die Backvorrichtung eine Backkammer (16), einen Träger (12) für den Wafer (14), einen Einlass (30) für ein Spülgas und eine Ausleitung (40) für das Spülgas aufweist, das mit aus der Beschichtung (15) verdampftem Lösungsmittel beladen ist. Der Einlass ist als Diffusionselement (30) ausgebildet, das über dem Wafer (14) angeordnet ist, damit das Spülgas gleichmäßig über im Wesentlichen die gesamte Oberfläche des Wafers (14) eingeleitet wird, und die Ausleitung ist als Ausleitungsring (40) ausgebildet, der das Diffusionselement (30) radial umgibt und an einer Decke (22) der Backkammer (16) angeordnet ist.
ATA50893/2015A 2014-11-25 2015-10-20 Backvorrichtung für einen Wafer, der mit einer ein Lösungsmittel enthaltenden Beschichtung beschichtet ist AT516575B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014117228.0A DE102014117228B4 (de) 2014-11-25 2014-11-25 Backvorrichtung für einen Wafer, der mit einer ein Lösungsmittel enthaltenden Beschichtung beschichtet ist

Publications (3)

Publication Number Publication Date
AT516575A2 AT516575A2 (de) 2016-06-15
AT516575A3 true AT516575A3 (de) 2017-11-15
AT516575B1 AT516575B1 (de) 2022-07-15

Family

ID=55914101

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA50893/2015A AT516575B1 (de) 2014-11-25 2015-10-20 Backvorrichtung für einen Wafer, der mit einer ein Lösungsmittel enthaltenden Beschichtung beschichtet ist

Country Status (7)

Country Link
US (1) US10825701B2 (de)
JP (1) JP6900146B2 (de)
KR (1) KR102256154B1 (de)
CN (1) CN105618352A (de)
AT (1) AT516575B1 (de)
DE (1) DE102014117228B4 (de)
TW (1) TWI713472B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180000928A (ko) * 2016-06-24 2018-01-04 세메스 주식회사 가열 처리 유닛, 이를 갖는 베이크 장치 및 이를 이용한 기판 처리 방법
JP6872328B2 (ja) * 2016-09-06 2021-05-19 株式会社Ｓｃｒｅｅｎホールディングス 減圧乾燥装置、減圧乾燥システム、減圧乾燥方法
JP6829053B2 (ja) * 2016-11-09 2021-02-10 コマツ産機株式会社 マシンルーム
CN107362953A (zh) * 2017-09-01 2017-11-21 深圳市华星光电半导体显示技术有限公司 光阻烘烤设备
US11779871B2 (en) * 2018-12-21 2023-10-10 Xia Tai Xin Semiconductor (Qing Dao) Ltd. Exhaust module for wafer baking apparatus and wafer processing system having the same
CN109830451B (zh) * 2019-01-23 2021-07-23 武汉华星光电半导体显示技术有限公司 基板干燥装置
CN113249707A (zh) * 2021-04-21 2021-08-13 拓荆科技股份有限公司 一种薄膜沉积装置和薄膜沉积方法

Citations (7)

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US5595602A (en) * 1995-08-14 1997-01-21 Motorola, Inc. Diffuser for uniform gas distribution in semiconductor processing and method for using the same
WO1999056307A1 (en) * 1998-04-28 1999-11-04 Applied Materials, Inc. Improved heater for use in substrate processing apparatus to deposit tungsten
US20050244759A1 (en) * 2004-04-30 2005-11-03 Myoung-Kuy Lee Bake apparatus for use in spin-coating equipment
US20060151462A1 (en) * 2004-12-30 2006-07-13 Samsung Electronics Co., Ltd. Semiconductor wafer baking apparatus
KR100763698B1 (ko) * 2006-07-20 2007-10-04 동부일렉트로닉스 주식회사 반도체 소자 제조를 위한 베이크 유닛
US20110092075A1 (en) * 2009-10-16 2011-04-21 Kunihiko Suzuki Manufacturing apparatus and method for semiconductor device
US20130078816A1 (en) * 2011-09-27 2013-03-28 Hitachi Kokusai Electric Inc. Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium

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Publication number Priority date Publication date Assignee Title
US5595602A (en) * 1995-08-14 1997-01-21 Motorola, Inc. Diffuser for uniform gas distribution in semiconductor processing and method for using the same
WO1999056307A1 (en) * 1998-04-28 1999-11-04 Applied Materials, Inc. Improved heater for use in substrate processing apparatus to deposit tungsten
US20050244759A1 (en) * 2004-04-30 2005-11-03 Myoung-Kuy Lee Bake apparatus for use in spin-coating equipment
US20060151462A1 (en) * 2004-12-30 2006-07-13 Samsung Electronics Co., Ltd. Semiconductor wafer baking apparatus
KR100763698B1 (ko) * 2006-07-20 2007-10-04 동부일렉트로닉스 주식회사 반도체 소자 제조를 위한 베이크 유닛
US20110092075A1 (en) * 2009-10-16 2011-04-21 Kunihiko Suzuki Manufacturing apparatus and method for semiconductor device
US20130078816A1 (en) * 2011-09-27 2013-03-28 Hitachi Kokusai Electric Inc. Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium

Also Published As

Publication number Publication date
KR102256154B1 (ko) 2021-05-26
TW201631286A (zh) 2016-09-01
AT516575B1 (de) 2022-07-15
US10825701B2 (en) 2020-11-03
JP6900146B2 (ja) 2021-07-07
KR20160062702A (ko) 2016-06-02
TWI713472B (zh) 2020-12-21
US20160148823A1 (en) 2016-05-26
CN105618352A (zh) 2016-06-01
DE102014117228A1 (de) 2016-05-25
AT516575A2 (de) 2016-06-15
DE102014117228B4 (de) 2022-10-20
JP2016119452A (ja) 2016-06-30

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