YU301876A - Method of producing hybrid oxide for semiconductor devices - Google Patents

Method of producing hybrid oxide for semiconductor devices

Info

Publication number
YU301876A
YU301876A YU03018/76A YU301876A YU301876A YU 301876 A YU301876 A YU 301876A YU 03018/76 A YU03018/76 A YU 03018/76A YU 301876 A YU301876 A YU 301876A YU 301876 A YU301876 A YU 301876A
Authority
YU
Yugoslavia
Prior art keywords
semiconductor devices
producing hybrid
hybrid oxide
oxide
producing
Prior art date
Application number
YU03018/76A
Other languages
English (en)
Inventor
S H Cohen
J J Fabula
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of YU301876A publication Critical patent/YU301876A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
    • H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
    • H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicon Compounds (AREA)
YU03018/76A 1976-01-12 1976-12-10 Method of producing hybrid oxide for semiconductor devices YU301876A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64845576A 1976-01-12 1976-01-12

Publications (1)

Publication Number Publication Date
YU301876A true YU301876A (en) 1982-06-30

Family

ID=24600841

Family Applications (1)

Application Number Title Priority Date Filing Date
YU03018/76A YU301876A (en) 1976-01-12 1976-12-10 Method of producing hybrid oxide for semiconductor devices

Country Status (9)

Country Link
JP (1) JPS5286070A (xx)
AU (1) AU502350B2 (xx)
DE (1) DE2700094A1 (xx)
FR (1) FR2337941A1 (xx)
GB (1) GB1513640A (xx)
IN (1) IN145547B (xx)
IT (1) IT1064328B (xx)
SE (1) SE7614145L (xx)
YU (1) YU301876A (xx)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188162A (ja) * 1982-04-28 1983-11-02 Agency Of Ind Science & Technol ゲ−ト絶縁膜の形成方法
DE3425531A1 (de) * 1984-07-11 1986-01-16 Siemens AG, 1000 Berlin und 8000 München Verfahren zum verfliessenlassen von dotierten sio(pfeil abwaerts)2(pfeil abwaerts)-schichten bei der herstellung von integrierten mos-halbleiterschaltungen
JPS61193456A (ja) * 1985-02-21 1986-08-27 Toshiba Corp 半導体素子の製造方法
NL8603111A (nl) * 1986-12-08 1988-07-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting waarbij een siliciumplak aan zijn oppervlak wordt voorzien van veldoxidegebieden.
JP3310386B2 (ja) * 1993-05-25 2002-08-05 忠弘 大見 絶縁酸化膜の形成方法及び半導体装置
EP1014432A1 (en) * 1998-12-23 2000-06-28 Infineon Technologies North America Corp. Method for forming the gate oxide of metal-oxide-semiconductor devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2014382B1 (xx) * 1968-06-28 1974-03-15 Motorola Inc
JPS4913909B1 (xx) * 1970-05-04 1974-04-03

Also Published As

Publication number Publication date
SE7614145L (sv) 1977-07-13
GB1513640A (en) 1978-06-07
IT1064328B (it) 1985-02-18
FR2337941A1 (fr) 1977-08-05
IN145547B (xx) 1978-11-04
AU2108877A (en) 1978-07-13
FR2337941B1 (xx) 1982-05-28
JPS5286070A (en) 1977-07-16
JPS5615573B2 (xx) 1981-04-10
DE2700094A1 (de) 1977-07-21
AU502350B2 (en) 1979-07-19

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