YU301876A - Method of producing hybrid oxide for semiconductor devices - Google Patents
Method of producing hybrid oxide for semiconductor devicesInfo
- Publication number
- YU301876A YU301876A YU03018/76A YU301876A YU301876A YU 301876 A YU301876 A YU 301876A YU 03018/76 A YU03018/76 A YU 03018/76A YU 301876 A YU301876 A YU 301876A YU 301876 A YU301876 A YU 301876A
- Authority
- YU
- Yugoslavia
- Prior art keywords
- semiconductor devices
- producing hybrid
- hybrid oxide
- oxide
- producing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64845576A | 1976-01-12 | 1976-01-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
YU301876A true YU301876A (en) | 1982-06-30 |
Family
ID=24600841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
YU03018/76A YU301876A (en) | 1976-01-12 | 1976-12-10 | Method of producing hybrid oxide for semiconductor devices |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS5286070A (en) |
AU (1) | AU502350B2 (en) |
DE (1) | DE2700094A1 (en) |
FR (1) | FR2337941A1 (en) |
GB (1) | GB1513640A (en) |
IN (1) | IN145547B (en) |
IT (1) | IT1064328B (en) |
SE (1) | SE7614145L (en) |
YU (1) | YU301876A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58188162A (en) * | 1982-04-28 | 1983-11-02 | Agency Of Ind Science & Technol | Formation of gate insulation film |
DE3425531A1 (en) * | 1984-07-11 | 1986-01-16 | Siemens AG, 1000 Berlin und 8000 München | Process for making doped SiO2 layers fuse in fabricating integrated MOS semiconductor circuits |
JPS61193456A (en) * | 1985-02-21 | 1986-08-27 | Toshiba Corp | Manufacture of semiconductor element |
NL8603111A (en) * | 1986-12-08 | 1988-07-01 | Philips Nv | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE APPLYING A SILICONE SURFACE ON ITS SURFACE WITH FIELD OXIDE AREAS. |
JP3310386B2 (en) * | 1993-05-25 | 2002-08-05 | 忠弘 大見 | Method of forming insulating oxide film and semiconductor device |
EP1014432A1 (en) * | 1998-12-23 | 2000-06-28 | Infineon Technologies North America Corp. | Method for forming the gate oxide of metal-oxide-semiconductor devices |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2014382B1 (en) * | 1968-06-28 | 1974-03-15 | Motorola Inc | |
JPS4913909B1 (en) * | 1970-05-04 | 1974-04-03 |
-
1976
- 1976-11-16 IN IN2053/CAL/76A patent/IN145547B/en unknown
- 1976-11-30 IT IT29962/76A patent/IT1064328B/en active
- 1976-12-10 YU YU03018/76A patent/YU301876A/en unknown
- 1976-12-16 SE SE7614145A patent/SE7614145L/en not_active Application Discontinuation
- 1976-12-23 GB GB53813/76A patent/GB1513640A/en not_active Expired
-
1977
- 1977-01-04 DE DE19772700094 patent/DE2700094A1/en not_active Withdrawn
- 1977-01-06 AU AU21088/77A patent/AU502350B2/en not_active Expired
- 1977-01-11 JP JP226777A patent/JPS5286070A/en active Granted
- 1977-01-11 FR FR7700611A patent/FR2337941A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
AU2108877A (en) | 1978-07-13 |
DE2700094A1 (en) | 1977-07-21 |
JPS5615573B2 (en) | 1981-04-10 |
FR2337941A1 (en) | 1977-08-05 |
IN145547B (en) | 1978-11-04 |
JPS5286070A (en) | 1977-07-16 |
IT1064328B (en) | 1985-02-18 |
AU502350B2 (en) | 1979-07-19 |
GB1513640A (en) | 1978-06-07 |
FR2337941B1 (en) | 1982-05-28 |
SE7614145L (en) | 1977-07-13 |
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