FR2337941A1 - Procede de fabrication d'un oxyde hybride - Google Patents

Procede de fabrication d'un oxyde hybride

Info

Publication number
FR2337941A1
FR2337941A1 FR7700611A FR7700611A FR2337941A1 FR 2337941 A1 FR2337941 A1 FR 2337941A1 FR 7700611 A FR7700611 A FR 7700611A FR 7700611 A FR7700611 A FR 7700611A FR 2337941 A1 FR2337941 A1 FR 2337941A1
Authority
FR
France
Prior art keywords
manufacturing
hybrid oxide
hybrid
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7700611A
Other languages
English (en)
Other versions
FR2337941B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of FR2337941A1 publication Critical patent/FR2337941A1/fr
Application granted granted Critical
Publication of FR2337941B1 publication Critical patent/FR2337941B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
    • H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
    • H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicon Compounds (AREA)
FR7700611A 1976-01-12 1977-01-11 Procede de fabrication d'un oxyde hybride Granted FR2337941A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64845576A 1976-01-12 1976-01-12

Publications (2)

Publication Number Publication Date
FR2337941A1 true FR2337941A1 (fr) 1977-08-05
FR2337941B1 FR2337941B1 (fr) 1982-05-28

Family

ID=24600841

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7700611A Granted FR2337941A1 (fr) 1976-01-12 1977-01-11 Procede de fabrication d'un oxyde hybride

Country Status (9)

Country Link
JP (1) JPS5286070A (fr)
AU (1) AU502350B2 (fr)
DE (1) DE2700094A1 (fr)
FR (1) FR2337941A1 (fr)
GB (1) GB1513640A (fr)
IN (1) IN145547B (fr)
IT (1) IT1064328B (fr)
SE (1) SE7614145L (fr)
YU (1) YU301876A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0274779A1 (fr) * 1986-12-08 1988-07-20 Koninklijke Philips Electronics N.V. Procédé de fabrication d'un dispositif semi-conducteur comportant un substrat semi-conducteur comportant des régions d'oxyde de champ à sa surface

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188162A (ja) * 1982-04-28 1983-11-02 Agency Of Ind Science & Technol ゲ−ト絶縁膜の形成方法
DE3425531A1 (de) * 1984-07-11 1986-01-16 Siemens AG, 1000 Berlin und 8000 München Verfahren zum verfliessenlassen von dotierten sio(pfeil abwaerts)2(pfeil abwaerts)-schichten bei der herstellung von integrierten mos-halbleiterschaltungen
JPS61193456A (ja) * 1985-02-21 1986-08-27 Toshiba Corp 半導体素子の製造方法
JP3310386B2 (ja) * 1993-05-25 2002-08-05 忠弘 大見 絶縁酸化膜の形成方法及び半導体装置
EP1014432A1 (fr) * 1998-12-23 2000-06-28 Infineon Technologies North America Corp. Procédé de fabrication d'un oxyde de grille pour métal-oxyde-semiconducteur

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2014382A1 (fr) * 1968-06-28 1970-04-17 Motorola Inc
FR2088302A1 (fr) * 1970-05-04 1972-01-07 Rca Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2014382A1 (fr) * 1968-06-28 1970-04-17 Motorola Inc
FR2088302A1 (fr) * 1970-05-04 1972-01-07 Rca Corp

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NV1046/71 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0274779A1 (fr) * 1986-12-08 1988-07-20 Koninklijke Philips Electronics N.V. Procédé de fabrication d'un dispositif semi-conducteur comportant un substrat semi-conducteur comportant des régions d'oxyde de champ à sa surface

Also Published As

Publication number Publication date
SE7614145L (sv) 1977-07-13
FR2337941B1 (fr) 1982-05-28
JPS5615573B2 (fr) 1981-04-10
IN145547B (fr) 1978-11-04
GB1513640A (en) 1978-06-07
JPS5286070A (en) 1977-07-16
AU2108877A (en) 1978-07-13
IT1064328B (it) 1985-02-18
DE2700094A1 (de) 1977-07-21
YU301876A (en) 1982-06-30
AU502350B2 (en) 1979-07-19

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Legal Events

Date Code Title Description
ST Notification of lapse