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  • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
  • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
  • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
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  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
  • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
  • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
  • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
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  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
  • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
  • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
  • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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  • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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  • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
  • C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
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  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
  • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
  • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
  • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
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  • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
  • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
  • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
  • C04B2235/3418—Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
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  • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
  • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
  • C04B2235/54—Particle size related information
  • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
  • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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  • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
  • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
  • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
  • C04B2235/54—Particle size related information
  • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
  • C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
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  • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
  • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
  • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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  • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
  • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
  • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
  • C04B2235/9646—Optical properties
  • C04B2235/9661—Colour

Definitions

• This disclosure relates to ceramic sintered bodies.
• Ceramic sintered bodies are known that are used for mounting substrates, components for exposure processing equipment, light shielding materials, heat absorbing materials, etc.
• Such ceramic sintered bodies are, for example, black in color and have a composite oxide that contains multiple metal elements.
• a ceramic sintered body contains 90% by mass or more of Al in terms of Al2O3 , 0.4% by mass or more and 2.5% by mass or less of Si in terms of SiO2 , 3.0% by mass or more and 3.7% by mass or less of Mn in terms of MnO2 , 1.1% by mass or more and 1.7% by mass or less of Ti in terms of TiO2 , 1.1% by mass or more and 1.7% by mass or less of Fe in terms of Fe2O3, and 0.05% by mass or more and 0.3% by mass or less of MgO, and has a ⁇ E calculated based on a * , b * , and L * of 0 to 36.
• the above-mentioned ceramic sintered body for example, had poor bending strength, leaving room for improvement.
• the ceramic sintered body of the present disclosure contains Al, Si, Mn, Ti, Fe, and Mg.
• the ceramic sintered body of the present disclosure contains multiple metal oxides.
• the ceramic sintered body of the present disclosure exhibits a black color.
• the ceramic sintered body of the present disclosure has a ⁇ E calculated based on a * , b * , and L * of 36 or less.
• a * , b * , and L * are values based on the CIE1976 (L * a * b * ) color space in accordance with JIZ Z 8781-4 2013.
• a * , b * , and L * can be measured at a wavelength of 400 nm to 700 nm using a spectrophotometer, for example, a CM-700d manufactured by Konica Minolta.
• the field of view of the measurement may be 10°.
• the main light source may be D65, and the illumination diameter may be measured under measurement conditions such as an aperture diameter of ⁇ 6 mm (SAV), SCE (specular reflection light removal), and measurement after white calibration.
• the reflectance may be measured, for example, using a CM-2600d manufactured by Konica Minolta, under conditions of SCE (specular reflection light removal), and wavelength: 360 nm to 740 nm.
• a * , b * , and L * can be adjusted by the composition of the metal oxide contained in the ceramic sintered body of the present disclosure, as well as the firing temperature and firing time.
• the ceramic sintered body of the present disclosure contains 90 mass% or more of Al in terms of Al2O3 .
• the ceramic sintered body of the present disclosure may contain 90 mass% or more and 95 mass% or less of Al.
• the content of Al may be adjusted according to the content of other components described later.
• the ceramic sintered body of the present disclosure contains 0.4 mass% or more and 2.5 mass% or less of Si in terms of SiO2 . This makes it easier to obtain a sufficient density suitable for the application, and makes it easier to obtain a ceramic sintered body having excellent bending strength.
• the ceramic sintered body of the present disclosure may contain 0.9 mass% or more and 2.0 mass% or less of Si in terms of SiO2 . With such a composition, it is easy to obtain a ceramic sintered body with particularly high strength.
• the ceramic sintered body of the present disclosure contains 3.0% by mass or more and 3.7% by mass or less of Mn in terms of MnO2 . This makes it easier to obtain a ceramic sintered body having a ⁇ E of 36 or less. It also makes it easier to obtain an insulating ceramic sintered body having a * and b * of -2.0 or more and 2.0 or less, L * of 0 or more and 36 or less, excellent bending strength, and high volume resistivity.
• the ceramic sintered body of the present disclosure contains 1.1% by mass or more and 1.7% by mass or less of Ti in terms of TiO2 . This makes it easier to obtain a ceramic sintered body having a ⁇ E of 36 or less. It also makes it easier to obtain a ceramic sintered body having a * and b * of -2.0 or more and 2.0 or less, L * of 0 or more and 36 or less, and excellent bending strength.
• the ceramic sintered body of the present disclosure also contains 1.1% by mass or more and 1.7% by mass or less of Mn calculated as Fe2O3 . This makes it easier to obtain a ceramic sintered body having a ⁇ E of 36 or less. It also makes it easier to obtain an insulating ceramic sintered body having a * and b * of -2.0 or more and 2.0 or less, an L * of 0 or more and 36 or less, excellent bending strength, and high volume resistivity.
• the ceramic sintered body of the present disclosure also contains 0.05% by mass or more and 0.3% by mass or less of Mg, calculated as MgO. This makes the ceramic sintered body of the present disclosure less susceptible to grain growth and more likely to have excellent bending strength.
• the ceramic sintered body of the present disclosure may have a Mn content calculated as MnO2 that is 2 to 5 times the Fe content calculated as Fe2O3 .
• Mn is dispersed at the grain boundaries of the alumina matrix, which makes it easier to absorb the low to medium wavelength regions of visible light, thereby increasing the reflection of visible light in the relatively long wavelength region. Therefore, the ceramic sintered body of the present disclosure is easier to reflect, for example, infrared light.
• the Mn content calculated as MnO2 is 2.5 times or more the Fe content calculated as Fe2O3 , the above effect is remarkable.
• the ceramic sintered body of the present disclosure may have a volume resistivity of 10 9 ⁇ m or more and a three-point bending strength of 310 MPa or more, thereby providing a ceramic sintered body suitable for applications requiring relatively high insulation resistance and physical strength.
• the ceramic sintered body of the present disclosure may have a * and b * in the range of ⁇ 1.5 to 1.5, thereby obtaining a ceramic sintered body that is particularly suitable for applications requiring a black color.
• the ceramic sintered body of the present disclosure may have a sum of the Mn content calculated as MnO2 and the Fe content calculated as Fe2O3 of 4.5 mass% or more and 6.9 mass% or less, whereby a * and b * tend to be close to 0, the ceramic sintered body tends to have excellent bending strength, and an insulating ceramic sintered body with high volume resistivity is easily obtained.
• Each metal element contained in the ceramic sintered body of the present disclosure can be quantified using an X-ray fluorescence analyzer (XRF).
• XRF X-ray fluorescence analyzer
• the content of each metal element obtained by the measurement is converted into a metal oxide to be the content of each metal element.
• Al is converted into Al 2 O 3 , Si into SiO 2 , Mn into MnO 2 , Ti into TiO 2 , Fe into Fe 2 O 3 , and Mg into MgO.
• the ceramic sintered body contains other metal elements, it is sufficient to convert them into representative metal oxides of each element.
• the ceramic sintered body of the present disclosure may not contain Co and Cr.
• the ceramic sintered body of the present disclosure can be provided at low cost because it does not use expensive Co and Cr.
• not containing Co and Cr means that the content of Co and Cr is below the detection limit of an X-ray fluorescence analyzer (XRF).
• Particulate or powdered Al 2 O 3 , Fe 2 O 3 and MnO 2 are mixed, and TiO 2 , SiO 2 and MgO are added as sintering aids.
• the particle size of each raw material powder may be, for example, 0.1 ⁇ m to 5 ⁇ m.
• Water and an arbitrary binder are added, mixed and stirred, and a molded body of a desired shape is produced using the obtained slurry, which is then fired in an oxidizing atmosphere to obtain the ceramic sintered body of the present disclosure.
• a known method such as press molding can be used to produce the molded body.
• the firing temperature during firing may be, for example, 1350°C or higher and 1550°C or lower.
• the firing time may be, for example, about 2 hours.
• the firing atmosphere may be air.
• the ceramic sintered body of the present disclosure can be used as a component for exposure processing equipment, a light shielding material, a heat absorbing material, etc., by taking advantage of its black color.
• the ceramic sintered body of the present disclosure can be used as a mounting board, a structural component, or a functional component for industrial machinery and equipment by taking advantage of its excellent mechanical properties and electrical properties.
• the ceramic sintered body of the present disclosure can be used as thread guide components, sliding components for fishing tackle, and decorative components by taking advantage of its black color and excellent mechanical properties.
• Ceramic sintered bodies with different compositions were prepared, and the mechanical strength (three-point bending strength), volume resistivity, a * , b * , and L * were measured.
• ⁇ E was calculated based on the obtained a * , b * , and L * .
• ⁇ E was calculated based on the following relational formula (Formula 1). a * , b * , and L * were measured on the sintered surface unless otherwise specified.
• Al 2 O 3 powder, SiO 2 powder, MnO 2 powder, TiO 2 powder, Fe 2 O 3 powder, and MgO powder were prepared.
• the sintered ceramics were weighed so that the mass ratios of Al oxide (Al 2 O 3 ), Si oxide (SiO 2 ), Mn oxide (MnO 2 ), Ti oxide (TiO 2 ), Fe oxide (Fe 2 O 3 ), and Mg oxide (MgO) were the values shown in Table 1.
• the weighed powders were then mixed and molded to obtain a compact of the desired shape.
• the compacts were fired in a firing furnace in an air (oxidizing) atmosphere to obtain sintered bodies for each sample.
• each sample was measured using XRD to confirm the presence of aluminum oxide (alumina).
• Each sample was then mirror-polished and then measured for Al, Si, Mn, Ti, Fe and Mg using XRF to determine the content of each element.
• the determined element content was then converted into the content of each oxide, and the content of each element shown in Table 1 was calculated.
• the three-point bending strength of the obtained sintered body was also measured in accordance with JIS R 1601-2008, and the results are shown in Table 1.
• the ceramic sintered body of the present disclosure has a relatively high insulation resistance and physical strength.
• the ceramic sintered body of the present disclosure had a ⁇ E of 36 or less.
• a * and b * were from 0 to 2.0, L * was from 0 to 36, and the color was black.
• the a * , b * , L * , and ⁇ E of Sample No. 22 are values obtained by measuring the baked surface in the same manner as in Table 1.
• the a * , b * , L * , and ⁇ E of Sample No. 23 are values obtained by measuring the mirror-finished surface, i.e., the mirror surface.
• L * and ⁇ E tended to be smaller than those of the baked surface.
• a * and b * tended to be larger than those of the baked surface. Note that the effect of the firing temperature on the strength of the ceramic sintered body of the present disclosure was small.
• the ceramic sintered body of the present disclosure showed a reflectance of 15% or less. In addition, the ceramic sintered body of the present disclosure showed a reflectance of 12% or less on the mirror surface. In addition, in the ceramic sintered body of the present disclosure, when the baked surface and the mirror surface are compared, the mirror surface tended to have a lower reflectance.
• the ceramic sintered body of the present disclosure can be used as a member for an exposure processing device, a light shielding material, a heat absorbing material, etc., by utilizing the black color of the ceramic sintered body of the present disclosure. It can also be used as a mounting board, a structural part of an industrial machine device, or a functional part by utilizing the excellent mechanical properties and electrical properties of the ceramic sintered body of the present disclosure. It can also be used as a thread guide part, a sliding member for fishing tackle, or a decorative member by utilizing the black color and excellent mechanical properties of the ceramic sintered body of the present disclosure.

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• 2023
  • 2023-11-28 TW TW112146110A patent/TWI882549B/zh active
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