WO2023185538A1 - 一种锅底料和石英坩埚分离装置及分离方法 - Google Patents

一种锅底料和石英坩埚分离装置及分离方法 Download PDF

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Publication number
WO2023185538A1
WO2023185538A1 PCT/CN2023/082631 CN2023082631W WO2023185538A1 WO 2023185538 A1 WO2023185538 A1 WO 2023185538A1 CN 2023082631 W CN2023082631 W CN 2023082631W WO 2023185538 A1 WO2023185538 A1 WO 2023185538A1
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Prior art keywords
bottom material
pot bottom
quartz crucible
graphite
carbon
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PCT/CN2023/082631
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English (en)
French (fr)
Inventor
武皓洋
张卫东
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Tcl中环新能源科技股份有限公司
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Publication of WO2023185538A1 publication Critical patent/WO2023185538A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C30B15/12—Double crucible methods
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

Definitions

  • the present application belongs to the technical field of single crystal silicon rod manufacturing, and in particular relates to a device and separation method for separating pot bottom material and quartz crucible.
  • the pot bottom material includes the silicon material remaining during abnormal crystal pulling and the silicon material remaining after normal crystal pulling, which will solidify in the quartz crucible after the furnace is shut down; and because the cooled silicon material solidifies It will stick to the inner wall of the quartz crucible and is difficult to remove; at the same time, during the crystal pulling process, the quartz crucible will be set close to the peripheral graphite/carbon crucible due to thermal expansion, and the solidified pot bottom material will be separated from the quartz crucible in a timely manner. Things that need to be dealt with urgently after the furnace is shut down.
  • the existing separation method is that workers first use tools to pry the silicon material along the gaps in the bottom material of the pot, so that the silicon material that is easy to separate is separated from the quartz crucible; for the silicon material that cannot be pried open, the graphite/carbon crucible is then mechanically knocked.
  • the method directly vibrates the silicon material in the quartz crucible, so that the bottom material of the pot is shattered and separated from the quartz crucible.
  • this separation method will not only cause mechanical damage to the graphite/carbon crucible, but also cause cracks in the graphite/carbon crucible in severe cases, reducing the service life of the graphite/carbon crucible; at the same time, this tapping method also New non-silicon impurities will be introduced into the silicon material, seriously affecting the recycling and reuse of the silicon material.
  • the problem to be solved by this application is to provide a device and separation method for the pot bottom material and the quartz crucible, which solves the problem that when the pot bottom material and the quartz crucible are separated by tapping in the prior art, it is not only easy to damage the quartz crucible and the carbon The crucible will also introduce new impurities into the pot bottom material.
  • the technical solution adopted in the embodiment of the present application is to provide a device and separation method for the pot bottom material and the quartz crucible, which is used to separate the pot bottom material and the built-in graphite/carbon crucible.
  • the quartz crucible is separated, including a clamping part and an ejection part.
  • the clamping part includes a clamp assembly that can be used to clamp the outer wall of the graphite/carbon crucible; the ejection part includes an ejector rod; the ejector rod can be The clamping jaw assembly turns the pot bottom material and the graphite/carbon-carbon crucible placed in the quartz crucible together and pushes the graphite/carbon-carbon crucible upside down to push the pot bottom material and the quartz crucible to separate.
  • the clamping portion further includes:
  • a translation control for controlling translation of the gripper assembly
  • the translation control is fixed on a vertically arranged fixed frame, and the clamping jaw assembly can be controlled by the clamping arm to move horizontally away from or toward each other;
  • the rotation control is provided on the clamping arm, and controls the clamping jaw assembly to rotate and invert through a universal chain.
  • the translation control is fixed in the height direction of the fixed frame and moves along the length direction of the fixed frame;
  • One end of the rotation control is fixed on the translation control, and the other end is hingedly connected to an end of the clamping arm close to the clamp assembly.
  • the pan control includes:
  • Two clamping hydraulic cylinders are disposed offset along the height direction of the fixed frame, and the clamping hydraulic cylinders move in opposite directions;
  • Each clamping hydraulic cylinder is equipped with moving slide rails on both upper and lower sides;
  • clamping hydraulic cylinders on the same side are connected to the slide rails and vertically connected to the clamping arms respectively.
  • the rotary control is fixed on one of the clamping arms and includes a rotary hydraulic cylinder and a universal chain,
  • One end of the rotary hydraulic cylinder is fixed on the translation control, and the other end is hingedly provided on the end of the clamping arm close to the clamping jaw assembly;
  • the universal chain is disposed between the clamping arm and the jaw assembly and is controlled by the rotary hydraulic cylinder.
  • the clamping jaw assembly includes oppositely arranged chucks, the chucks have a V-shaped structure, and are further equipped with a resin pad inside the chucks;
  • the V-shaped angle of the chuck is a fixed value of 150°.
  • the extraction part further includes:
  • the frame beam is fixed across the placement platform and the ejector rod is vertically suspended;
  • the ejector rod can move downward along the height direction to reach the top or move upward to retract and shrink;
  • the lower end of the ejector rod is provided with an elastic pad that is in direct contact with the graphite/carbon crucible;
  • a tray for collecting pot bottom materials is also provided on the placing platform, and the tray is placed directly below the ejector rod and within the area enclosed by the frame beam.
  • the technical solution adopted in the embodiment of the present application also includes a method for separating the pot bottom material and the quartz crucible, Using the separation device, the steps include:
  • the ejector rod when the total weight of the pot bottom material is less than 100kg, the ejector rod is controlled to push the bottom of the graphite/carbon crucible once to separate the pot bottom material from the quartz crucible;
  • the method further includes: first controlling the quartz crucible and the graphite/carbon crucible to move away from the lifting part, and then controlling the quartz crucible and the graphite/carbon crucible to flip back to their original positions.
  • this application can safely and efficiently separate the crucible bottom material from the quartz crucible without causing any damage to the graphite/carbon crucible. It can also ensure the integrity of the pot bottom material separation and prolong the graphite crucible. /The service life of the carbon crucible; it can also prevent non-silicon impurities from entering the pot bottom material and ensure the purity of the pot bottom material; it not only has a fast separation speed, but also has good separation quality, and can also improve the subsequent processing efficiency of silicon materials.
  • Figure 1 is a schematic structural diagram of a pot bottom material and quartz crucible separation device according to an embodiment of the present application
  • Figure 2 is a side view of the clamping part according to an embodiment of the present application.
  • Figure 3 is a schematic structural diagram of a clamping jaw assembly according to an embodiment of the present application.
  • Figure 4 is a side view of the extraction part according to an embodiment of the present application.
  • Figure 5 is a side view of the extraction part of another embodiment of the present application.
  • This embodiment proposes a pot bottom material and quartz crucible separation device, as shown in Figure 1, used to separate the pot bottom material 40 from the quartz crucible 50 built in the graphite/carbon crucible 60, including a clamping part 10 and The lifting part 20, wherein the clamping part 10 includes a clamping jaw assembly 11 that can be used to clamp the outer wall of the graphite/carbon crucible 60; the lifting part 20 includes an ejector rod 21; the ejector rod 21 can be placed when the clamping jaw assembly 11 will be placed The bottom material 40 in the quartz crucible 50 and the graphite/carbon crucible 60 are turned over together.
  • This structure includes two independently arranged clamping parts 10 and top picking parts 20, which automatically clamp the closely connected quartz crucible 50 and graphite/carbon crucible 60, and automatically control the clamping jaw assembly 11 to move the quartz crucible 50 and graphite/carbon crucible 60.
  • the carbon crucible 60 is lifted off the ground, and then the quartz crucible 50 and the graphite/carbon crucible 60 are controlled to turn upside down and moved to the ejection part 20; then the ejector rod 21 is controlled to push the graphite/carbon crucible 60 from top to bottom.
  • the thrust is indirectly applied to the pot bottom material 40 through the quartz crucible 50, and then the pot bottom material 40 is automatically separated from the quartz crucible 50 due to the thrust of the quartz crucible 50 and its own gravity; in this process, not only can
  • the crucible bottom material 40 is separated from the quartz crucible 50 safely and efficiently without causing any damage to the graphite/carbon crucible 60. It also ensures the integrity of the separated pot bottom material 40 and prolongs the life of the graphite/carbon crucible.
  • the service life is 60%; and it can also prevent non-silicon impurities from entering the pot bottom material 40 to ensure the purity of the pot bottom material.
  • the clamping part 10 also includes a translation control 14 for controlling the translation of the clamping jaw assembly 11, and a rotation control 15 for controlling the flipping of the clamping jaw assembly 11; the translation control 14 is fixedly arranged in the vertical position.
  • the clamping jaw assembly 11 is arranged on the fixed frame 13 and controlled by the clamping arms 12 arranged oppositely to move horizontally in opposite directions to clamp or release the graphite/carbon crucible 60 .
  • the rotation control 15 is provided on one of the clamping arms 12, and is provided on the clamping jaw assembly 11 and the clamping arm 12.
  • the gimbal link 152 between the arms 12 controls the jaw assembly 11 to adjust the graphite/carbon crucible 60 for rotation and inversion.
  • the clamping part 10 is installed on the mobile trolley 30.
  • the mobile trolley 30 can flexibly control the clamping position and range.
  • the fixed frame 13 is fixed on the front end surface of the mobile trolley 30 and is vertical.
  • the front end of the mobile trolley 30, which is the position of the control fixed frame 13, can also move up and down in the vertical direction and forward and backward in the depth direction.
  • the translation control 14 is fixed in the height direction of the fixed frame 13 and moves along the length direction of the fixed frame 13 , that is, the translation control 14 and the fixed frame 13 are arranged vertically in parallel and move horizontally and laterally.
  • One end of the rotation control 15 is fixed on the stand of the translation control 14 , and the other end is hingedly connected to the end of the clamping arm 12 close to the clamping jaw assembly 11 .
  • the clamping jaw assembly 11 includes oppositely arranged chucks 111.
  • the chucks 111 have a V-shaped structure.
  • the V-shaped included angle of the chuck 111 is a fixed value.
  • the included angle ⁇ is 150°. Due to the graphite/ The outer diameter of the carbon crucible 60 is larger. Therefore, in order to increase the matching area between the chuck 111 and the graphite/carbon crucible 60, it is required that the angle ⁇ must be an obtuse angle and a fixed value.
  • the fixed value can ensure that during the clamping process The stability of the fit, and the angle ⁇ is 150°.
  • the resin pad 112 is The pad made of polyurethane can not only increase the friction between the chuck 111 and the graphite/carbon crucible 60, but also eliminate the mechanical damage to the graphite/carbon crucible 60 caused by the mechanical knocking method in the existing technology, and can also extend the time The service life of graphite/carbon carbon crucible 60; and it will not affect the quality of quartz crucible 50.
  • the translation control 14 includes two clamping hydraulic cylinders 141 that are offset along the height direction of the fixed frame 13 .
  • the two clamping hydraulic cylinders 141 move synchronously in opposite directions, and in each clamping hydraulic pressure
  • the upper and lower sides of the cylinder 141 are equipped with movable slide rails 142.
  • the clamping hydraulic cylinders 141 and slide rails 142 on all different sides are disposed up and down in a staggered manner, which reduces the configuration occupied area and prevents operational interference. That is, the upper and lower sides of the clamping hydraulic cylinder 141 on each side are provided with slide rails 142 that slide with the fixed frame 13 to ensure the stability and safety of the overall movement of the translation control 14 .
  • the outer ends of the clamping hydraulic cylinder 141 provided on the same side and the slide rails 142 on its upper and lower sides are connected together through vertical rods, and the other ends are connected with the sleeve or slideway fixed on the fixed frame 13, and
  • the clamping arm 12 on each side is arranged perpendicular to the stand connecting the clamping hydraulic cylinder 141 and the slide rails 142 on its upper and lower sides on the same side.
  • the clamping arm 12 is used to support and clamp the quartz crucible 50 and the graphite/carbon crucible 60, so it is required to be a mechanical arm made of high-strength steel with a certain width and thickness.
  • the clamping arms on both sides 12 has the same structure.
  • the rotary control 15 is fixed on the upper end surface of one of the clamping arms 12 and includes a rotary hydraulic cylinder 151 and a universal chain 152.
  • One end of the rotary hydraulic cylinder 141 is fixed on the stand in the translation control 14, and the other end is fixed on the stand in the translation control 14.
  • One end is hingedly provided at the end of the clamping arm 12 close to the chuck 111;
  • the universal chain 152 is disposed between the clamping arm 12 and the chuck 111 and is controlled by the rotating hydraulic cylinder 151.
  • the universal chain 152 is a universal shaft that can be used to control the rotation of the clamping jaw assembly 11. This is a common component in this field and is omitted here.
  • the ejection part 20 also includes a placement platform 22 for placing the graphite/carbon crucible 60, and a frame beam 23 for fixing the ejector rod 21; wherein the ejector rod 21 is placed vertically at the center of the placement platform 22 and is suspended in the air.
  • the ejector rod 21 is a hydraulically controlled structure.
  • the ejector rod 21 can move downward along the height direction or move upward to retract and shrink.
  • the lower end of the ejector rod 21 is provided with an elastic pad to facilitate direct contact with the outer end surface of the graphite/carbon crucible 60.
  • the pad is preferably a rubber pad, which has high buffering strength and does not have too much recoil force.
  • the frame beam 23 is fixedly arranged across the placement platform 22 and the ejector rod 21 is vertically suspended.
  • the structure is as shown in Figure 4-5; wherein, the beam 23 can be a "mouth"-shaped structure, placed in the middle of the width of the placement platform 22,
  • the ejector rod 21 is fixed at the center of the cross frame of the frame beam 23, as shown in Figure 4.
  • Another beam structure 23, as shown in Figure 5, includes two "mouth”-shaped structures arranged vertically and in parallel. The two "mouth”-shaped structures connect their four corners into one body through four beams, and then A cross beam is provided at a position in the width direction and the ejector rod 21 is fixed on the cross beam, and the ejector rod 21 can also be suspended.
  • a tray 24 for collecting pot bottom materials 40 is also provided on the upper end surface of the placing platform 22.
  • the tray 24 is placed directly below the punching rod 21 and is surrounded by the frame beam 23. within the region. Not only is there no contact with any external appliance during the entire process, no new non-silicon impurities will be introduced, but its integrity can also be ensured, thereby completing the separation of the pot bottom material 40 and the quartz crucible 50 .
  • clamping hydraulic cylinder 141 and the rotating hydraulic cylinder 151 are controlled by different peripheral hydraulic pumps, and all the clamping hydraulic cylinders 141 are controlled synchronously.
  • a method for separating pot bottom material and quartz crucible, using the above separation device, the steps include:
  • the pot bottom material 40 and the quartz crucible 50 built in the graphite/carbon crucible 60 are first taken out of the single crystal furnace and placed in a space that is convenient for clamping.
  • the outer wall of the graphite/carbon crucible 60 is clamped, and the pot bottom material 40 placed in the quartz crucible 50 and the graphite/carbon crucible 60 are controlled to be turned upside down together.
  • the clamping part 10 is first moved and parked next to the position of the quartz crucible 50 by moving the trolley 30, and then the orientation of the clamping part 10 is adjusted and the translation control 14 is controlled to make the clamping jaw assembly 11 clamp the graphite/carbon crucible 60 outer wall and clamp the setting.
  • the fixed frame 13 is controlled by the moving trolley 30 and the pot bottom material 40, the quartz crucible 50 and the graphite/carbon crucible 60 are driven by the clamping arm 12 to move vertically upward and to a height above the ground that is sufficient to flip over.
  • the moving trolley 30 is then controlled to drive the clamped graphite/carbon crucible 60 to the position of the top picking part 20.
  • the rotating hydraulic cylinder 151 is controlled to flip the graphite/carbon crucible 60 upside down, thereby causing the clamped graphite/carbon crucible 60 to be turned upside down.
  • the quartz crucible 50 attached to the graphite/carbon crucible 60 and the bottom material 40 close to the quartz crucible 50 are all upside down; then the clamping arm 12 is controlled by the trolley 30 to move the graphite/carbon crucible 60 and the quartz crucible 50 together Place it on the placing platform 22 of the ejection part 20 and located directly below the ejector rod 21, and make the tray 24 by the quartz crucible 50 to cover the opening, release the chuck 111, and retract the mobile trolley 30 away from the lifting part 20.
  • the ejector rod 21 is controlled to push the bottom of the graphite/carbon crucible 60 vertically downward to separate the bottom material 40 from the quartz crucible 50 .
  • the ejection rod 21 is controlled to push the bottom of the graphite/carbon crucible 60 once to separate the pot bottom material 40 from the quartz crucible 50;
  • the separation also includes first controlling the quartz crucible 50 and the graphite/carbon crucible 60 to move away from the top part 20 together, and then controlling the quartz crucible 50 and the graphite/carbon crucible 60 to flip back to the original position.
  • the mobile trolley 30 is controlled to drive the chuck 111 to clamp the outer wall of the graphite/carbon crucible 60, and then the graphite/carbon crucible 60 is moved back through the chuck 111, and then the quartz crucible 50 and the graphite are removed. /Carbon crucible 60 is removed from the top part 20 together, and the next step of operation is carried out smoothly.
  • the pot bottom material and quartz crucible separation device designed in this application can safely and efficiently separate the pot bottom material from the quartz crucible without causing any damage to the graphite/carbon crucible, and can also ensure the separation of the pot bottom material.
  • the integrity of the graphite/carbon crucible extends the service life of the graphite/carbon crucible; it can also prevent non-silicon impurities from entering the pot bottom material and ensure the purity of the pot bottom material; not only the separation speed is fast, but also the separation quality is good, and it can also improve the silicon The subsequent processing efficiency of the material.

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  • Engineering & Computer Science (AREA)
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Abstract

公开了一种锅底料和石英坩埚分离装置及分离方法，用于将锅底料与内置于石墨/碳碳坩埚中的石英坩埚分离，包括夹取部和顶取部，所述夹取部包括可用于夹取石墨/碳碳坩埚外壁的夹爪组件；所述顶取部包括冲顶杆；所述冲顶杆能够在所述夹爪组件将置于石英坩埚中的锅底料和石墨/碳碳坩埚一起翻转倒置时顶推石墨/碳碳坩埚以推动锅底料与石英坩埚分离。本申请可以安全高效地将埚底料与石英坩埚分离，且不会对石墨/碳碳坩埚带来任何损坏，还可保证锅底料分离的完整性，延长了石墨/碳碳坩埚的使用寿命；而且还可以防止非硅杂质进入锅底料中，保证锅底料的纯净度；不仅分离速度快，而且分离质量好，亦可提高硅料后续的处理效率。

Description

一种锅底料和石英坩埚分离装置及分离方法
本申请要求于2022年03月28日提交中国专利局、申请号为202210311823.0、发明名称为“一种锅底料和石英坩埚分离装置及分离方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请属于单晶硅棒制造技术领域，尤其是涉及一种锅底料和石英坩埚分离装置及分离方法。
背景技术
在单晶拉制时，锅底料包括非正常拉晶时剩余的硅料以及正常拉晶后剩余的硅料，在停炉后会在石英坩埚中凝固；而由于冷却后的硅料凝固后会贴敷在石英坩埚内壁上不易取出；同时在拉晶过程中石英坩埚由于受热膨胀会紧贴外设的石墨/碳碳坩埚设置，及时将凝固后的锅底料从石英坩埚中分离，是停炉后急需处理的事情。
现有分离方式是工人先通过工具沿锅底料的缝隙撬动硅料，以使便于拆分的硅料从石英坩埚上分离；对于不能撬开的硅料再采用机械敲打石墨/碳碳坩埚的方式间接震动石英坩埚中的硅料，以使锅底料震碎，与石英坩埚分离。但这种分离方式不仅会给石墨/碳碳坩埚产生机械伤害，严重时还会使石墨/碳碳坩埚出现损裂，降低石墨/碳碳坩埚的使用寿命；同时，这种敲击的方式还会引入新的非硅杂质进入硅料中，严重影响硅料的回收再利用。
技术问题
本申请要解决的问题是：提供一种锅底料和石英坩埚分离装置及分离方法，解决了现有技术中采用敲击的方式分离锅底料和石英坩埚时不仅容易损坏石英坩埚和碳碳坩埚，还会引入新杂质进入锅底料的技术问题。
技术解决方案
第一方面，为解决上述技术问题，本申请实施例采用的技术方案是提供了一种锅底料和石英坩埚分离装置及分离方法，用于将锅底料与内置于石墨/碳碳坩埚中的石英坩埚分离，包括夹取部和顶取部，所述夹取部包括可用于夹取石墨/碳碳坩埚外壁的夹爪组件；所述顶取部包括冲顶杆；所述冲顶杆能够在所述夹爪组件将置于石英坩埚中的锅底料和石墨/碳碳坩埚一起翻转倒置时顶推石墨/碳碳坩埚以推动锅底料与石英坩埚分离。
在一些实施例中，所述夹取部还包括：
用于控制所述夹爪组件平移的平移控件；
以及用于控制所述夹爪组件翻转的旋转控件；
所述平移控件固设于竖直设置的固定架上，可通过夹紧臂控制所述夹爪组件进行相背或相向的水平移动；
所述旋转控件设于所述夹紧臂上，并通过万向链控制所述夹爪组件进行旋转倒置。
在一些实施例中，所述平移控件固设于所述固定架的高度方向并沿所述固定架的长度方向移动；
所述旋转控件一端固设于所述平移控件上，另一端与所述夹紧臂靠近所述夹爪组件的一端铰接设置。
在一些实施例中，所述平移控件包括：
沿所述固定架高度方向错位设置的两个夹紧液压缸，所述夹紧液压缸反向移动；
在每个所述夹紧液压缸上下两侧均配设有移动滑轨；
同侧设置的所述夹紧液压缸和所述滑轨连接设置，并分别与所述夹紧臂垂直连接设置。
在一些实施例中，所述旋转控件固设于其中一个所述夹紧臂上，包括旋转液压缸和万向链，
所述旋转液压缸一端固设于所述平移控件上，另一端铰接设置在所述夹紧臂靠近所述夹爪组件一端；
所述万向链设于所述夹紧臂和所述夹爪组件之间并被所述旋转液压缸控制。
在一些实施例中，所述夹爪组件包括相对设置的夹盘，所述夹盘为V型结构，并在所述夹盘内侧还配设有树脂垫；
所述夹盘的V型夹角为固定值，为150°。
在一些实施例中，所述顶取部还包括：
用于放置石墨/碳碳坩埚的放置台；
以及用于固定所述冲顶杆的架梁；
所述架梁横跨所述放置台固定并使所述冲顶杆竖直悬吊设置；
所述冲顶杆可沿高度方向下行冲顶或上行回撤收缩；
所述冲顶杆的下端设有直接与石墨/碳碳坩埚接触的弹性垫；
在所述放置台上还设有用于收集锅底料的托盘，所述托盘被置于所述冲顶杆的正下方且位于所述架梁所围成的区域范围内。
第二方面，本申请实施例采用的技术方案还包括一种锅底料和石英坩埚的分离方法， 采用所述的分离装置，步骤包括：
取出带有锅底料并内置于石墨/碳碳坩埚的石英坩埚；
夹取石墨/碳碳坩埚外壁，并控制置于石英坩埚中的锅底料和石墨/碳碳坩埚一起翻转倒置；
竖直朝下顶推石墨/碳碳坩埚的底部，使锅底料与石英坩埚分离。
在一些实施例中，当锅底料的总重量小于100kg时，控制所述冲顶杆一次顶推石墨/碳碳坩埚底部，使锅底料与石英坩埚分离；
当锅底料的总重量不小于100kg时，至少连续两次顶推石墨/碳碳坩埚底部，使锅底料与石英坩埚分离。
在一些实施例中，分离完毕后，还包括：先控制石英坩埚和石墨/碳碳坩埚一起远离所述顶取部，再控制石英坩埚和石墨/碳碳坩埚翻转返回原位。
有益效果
相较于现有技术，本申请可以安全高效地将埚底料与石英坩埚分离，且不会对石墨/碳碳坩埚带来任何损坏，还可保证锅底料分离的完整性，延长了石墨/碳碳坩埚的使用寿命；而且还可以防止非硅杂质进入锅底料中，保证锅底料的纯净度；不仅分离速度快，而且分离质量好，亦可提高硅料后续的处理效率。
附图说明
图1是本申请一实施例的一种锅底料和石英坩埚分离装置的结构示意图；
图2是本申请一实施例的夹取部的侧视图；
图3是本申请一实施例的夹爪组件的结构示意图；
图4是本申请一实施例的顶取部的侧视图；
图5是本申请另一实施例的顶取部的侧视图。
图中：
10、夹取部                11、夹爪组件           111、夹盘
112、树脂垫               12、夹紧臂             13、固定架
14、平移控件              141、夹紧液压缸        142、滑轨
15、旋转控件              151、旋转液压缸        152、万向链
20、顶取部                21、冲顶杆             22、放置台
23、架梁                  24、托盘               30、移动小车
40、锅底料                50、石英坩埚           60、石墨/碳碳坩埚
本发明的实施方式
本申请提供一种锅底料和石英坩埚分离装置及分离方法。下面结合实施例和附图对本申请作进一步说明：
在本申请实施例的描述中，需要理解的是，术语“顶部”、“底部”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。在本申请的描述中，需要说明的是，除非另有明确的规定和限定，术语“设置”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以通过具体情况理解上述术语在本申请中的具体含义。
本实施例提出一种锅底料和石英坩埚分离装置，如图1所示，用于将锅底料40与内置于石墨/碳碳坩埚60中的石英坩埚50分离，包括夹取部10和顶取部20，其中，夹取部10包括可用于夹取石墨/碳碳坩埚60外壁的夹爪组件11；顶取部20包括冲顶杆21；冲顶杆21能够在夹爪组件11将置于石英坩埚50中的锅底料40和石墨/碳碳坩埚60一起翻转倒置时顶推石墨/碳碳坩埚60以推动锅底料40与石英坩埚50分离。本结构包括两个独立设置的夹取部10和顶取部20，自动夹取紧贴连接的石英坩埚50和石墨/碳碳坩埚60，并自动控制夹爪组件11将石英坩埚50和石墨/碳碳坩埚60夹起离地，再控制石英坩埚50和石墨/碳碳坩埚60翻转倒置，并移送至顶取部20；再控制冲顶杆21从上往下顶推石墨/碳碳坩埚60的底部，间接将推力通过石英坩埚50作用到锅底料40上，进而锅底料40受石英坩埚50的推力和其自身重力的原因，自动与石英坩埚50分离；在这一过程中，不仅可安全高效地将埚底料40与石英坩埚50分离，且不会对石墨/碳碳坩埚60带来任何损坏，亦可保证分离的锅底料40的完整性，还延长了石墨/碳碳坩埚60的使用寿命；而且还可以防止非硅杂质进入锅底料40中，保证锅底料的纯净度。
具体地，如图2所示，夹取部10还包括用于控制夹爪组件11平移的平移控件14，以及用于控制夹爪组件11翻转的旋转控件15；平移控件14固定设置在竖直设置的固定架13上，并通过相对设置的夹紧臂12控制夹爪组件11进行相背或相向的水平移动，以夹取或松开石墨/碳碳坩埚60。旋转控件15设于其中的一个夹紧臂12上，并通过设置在夹爪组件11和夹紧 臂12之间的万向链152控制夹爪组件11以调整石墨/碳碳坩埚60进行旋转倒置。
为了提高夹取部10的灵敏性，将夹取部10安装在移动小车30上，移动小车30可灵活控制夹取位置和范围，其中，固定架13固定在移动小车30的前端面且竖直设置，且移动小车30的前端即控制固定架13的位置上还可沿竖直方向上下移动和沿纵深方向前后移动。平移控件14固设于固定架13的高度方向并沿固定架13的长度方向移动，也就是平移控件14与固定架13并行竖直设置且水平横向移动。旋转控件15一端固设于平移控件14的立架上，另一端与夹紧臂12靠近夹爪组件11的一端铰接连接。
如图3所示，夹爪组件11包括相对设置的夹盘111，夹盘111为V型结构，夹盘111的V型夹角为固定值，夹角θ的角度为150°，由于石墨/碳碳坩埚60的外径较大，故为了提高夹盘111与石墨/碳碳坩埚60配合的面积，要求夹角θ的角度必须是钝角且为定值，定值可以保证在夹取过程中配合的稳定性，且该夹角θ的角度为150°。同时为了防止夹盘111的夹紧力过大会损伤石墨/碳碳坩埚60的外壁，要求在夹盘111的内侧面上配设有均由弹性的树脂垫112，优选地，该树脂垫112为聚氨酯制成的垫，不仅可增加夹盘111与石墨/碳碳坩埚60之间的摩擦力，同时消除了现有技术中机械敲打的方法对石墨/碳碳坩埚60的机械伤害，还可延长石墨/碳碳坩埚60的使用寿命；而且还不会影响石英坩埚50的质量。
进一步的，如图1所示，平移控件14包括沿固定架13高度方向错位设置的两个夹紧液压缸141，两个夹紧液压缸141为同步反向移动，并在每个夹紧液压缸141上下两侧均配设有移动滑轨142，所有不同侧的夹紧液压缸141和滑轨142均错位上下设置，在减小配置占用面积的同时还可防止出现运行干涉。也就是，每一侧的夹紧液压缸141的上方和下方均设有与固定架13滑动配合的滑轨142，以保证平移控件14整体移动的稳定性和安全性。
同侧设置的夹紧液压缸141和其上下两侧的滑轨142的外端部通过立杆连接在一起，另一端均与固设于固定架13上的套筒或滑道配合连接，且每一侧的夹紧臂12垂直于与其同侧的连接夹紧液压缸141和其上下两侧的滑轨142的立架设置。
进一步的，夹紧臂12用于支撑和夹紧石英坩埚50和石墨/碳碳坩埚60，故要求其是具一定宽度和厚度的高强度的钢材制成的机械臂，两侧的夹紧臂12的结构相同。
进一步的，旋转控件15固设于其中一个夹紧臂12的上端面上，包括旋转液压缸151和万向链152，旋转液压缸141的一端固设于平移控件14中的立架上，另一端铰接设置在夹紧臂12靠近夹盘111的一端；万向链152设于夹紧臂12和夹盘111之间并被旋转液压缸151控制。其中，万向链152为可用于控制夹爪组件11旋转的万向轴，此为本领域的常用组件，在此省略。
顶取部20还包括用于放置石墨/碳碳坩埚60的放置台22、以及用于固定冲顶杆21的架梁23；其中，冲顶杆21竖直放置在放置台22的正中心位置且悬空设置，冲顶杆21为液压控制的结构，冲顶杆21可沿高度方向下行冲顶或上行回撤收缩，其下端部设有弹性垫，便于直接与石墨/碳碳坩埚60的外端面直接接触，弹性垫优选为橡胶垫，缓冲强度大且不至于有太大的反冲力。架梁23横跨放置台22固定设置并使冲顶杆21竖直悬吊设置。
对于不同架梁23结构的顶取部20的侧视图，结构如图4-5所示；其中，架梁23可以为一个“口”字形的结构，放置在放置台22的宽度中间位置处，冲顶杆21固定在架梁23的横架的中心位置处，如图4所示。另一种架梁结构23如图5所示，包括两个竖直并行设置的“口”字形结构，这两个“口”字形结构通过四个梁将其四个角连接为一体，再在宽度方向的位置上设置一横梁并将冲顶杆21固定在该横梁上，进而亦可以把冲顶杆21悬吊设置。
进一步的，为了便于收集锅底料40，在放置台22的上端面还设有用于收集锅底料40的托盘24，托盘24被置于冲顶杆21的正下方且位于架梁23所围成的区域范围内。不仅全程无任何外接器具接触，不会引出新的非硅杂质，而且还能保证其完整性，从而完成锅底料40与石英坩埚50的分离。
在这一过程中，夹紧液压缸141的和旋转液压缸151均是通过不同的外设的液压泵控制，且所有夹紧液压缸141是同步控制。
一种锅底料和石英坩埚的分离方法，采用如上所述的分离装置，步骤包括：
取出带有锅底料40并内置于石墨/碳碳坩埚60的石英坩埚50；
具体地，在分离之前，先将锅底料40与内置于石墨/碳碳坩埚60中的石英坩埚50从单晶炉中取出并放置于便于夹取的空间内。
进一步的，再夹取石墨/碳碳坩埚60的外壁，并控制置于石英坩埚50中的锅底料40和石墨/碳碳坩埚60一起翻转倒置。
具体地，先通过移动小车30将夹取部10移动停靠到石英坩埚50所在的位置旁边，再调整夹取部10的朝向并控制平移控件14使夹爪组件11夹取石墨/碳碳坩埚60的外壁面并夹紧设定。通过移动小车30控制固定架13并通过夹紧臂12一同带动锅底料40、石英坩埚50和石墨/碳碳坩埚60移动竖直向上移动，并离地足以翻转的位置高度。再控制移动小车30带动被夹取的石墨/碳碳坩埚60移动至顶取部20所在位置，待靠近顶取部20后控制旋转液压缸151使石墨/碳碳坩埚60翻转倒置，从而使紧贴石墨/碳碳坩埚60的石英坩埚50以及紧贴石英坩埚50的锅底料40都是朝下倒置的；再通过小车30控制夹紧臂12将石墨/碳碳坩埚60和石英坩埚50一同放置在顶取部20的放置台22上并位于冲顶杆21的正下方，且使托盘24被石英坩埚50 的开口所覆盖，再松开夹盘111，回撤移动小车30，远离顶取部20。
进一步的，控制冲顶杆21竖直朝下顶推石墨/碳碳坩埚60的底部，使锅底料40与石英坩埚50分离。
具体地，再控制冲顶杆21并轻推冲顶杆21顶推石墨/碳碳坩埚60，给石墨/碳碳坩埚60一个向下的推力，使推力作用到石墨坩埚50中再顶推锅底料40，由于锅底料40与石英坩埚50的粘接力远小于石英坩埚50与石墨/碳碳坩埚60的粘接力，故锅底料40受其重力及向下推力的双重作用下，极易与石英坩埚50分开，分开后的锅底料40完全被托盘24收集。
在冲顶的过程中，当锅底料40的总重量小于100kg时，控制冲顶杆21一次顶推石墨/碳碳坩埚60的底部，使锅底料40与石英坩埚50分离；
当锅底料40的总重量不小于100kg时，至少连续两次顶推石墨/碳碳坩埚60的底部，使锅底料40与石英坩埚50分离。
当然，也可以根据冲顶杆21上的液压缸的推力而定，在此不具体限制。
进一步的，分离完毕后，还包括先控制石英坩埚50和石墨/碳碳坩埚60一起远离顶取部20，再控制石英坩埚50和石墨/碳碳坩埚60翻转返回原位。
待分离完成后，再控制移动小车30带动夹盘111将夹取石墨/碳碳坩埚60的外壁，再通过夹盘111将石墨/碳碳坩埚60后撤移走，再将石英坩埚50和石墨/碳碳坩埚60一同移出顶取部20，待平稳进行下一步的操作。
采用本申请设计的一种锅底料和石英坩埚分离装置，可以安全高效地将埚底料与石英坩埚分离，且不会对石墨/碳碳坩埚带来任何损坏，还可保证锅底料分离的完整性，延长了石墨/碳碳坩埚的使用寿命；而且还可以防止非硅杂质进入锅底料中，保证锅底料的纯净度；不仅分离速度快，而且分离质量好，亦可提高硅料后续的处理效率。
以上对本申请的实施例进行了详细说明，但所述内容仅为本申请的较佳实施例，不能被认为用于限定本申请的实施范围。凡依本申请申请范围所作的均等变化与改进等，均应仍归属于本申请的专利涵盖范围之内。

Claims (20)

  1. 一种锅底料和石英坩埚分离装置，用于将锅底料与内置于石墨/碳碳坩埚中的石英坩埚分离，其特征在于，包括夹取部和顶取部，所述夹取部包括可用于夹取石墨/碳碳坩埚外壁的夹爪组件；所述顶取部包括冲顶杆；所述冲顶杆能够在所述夹爪组件将置于石英坩埚中的锅底料和石墨/碳碳坩埚一起翻转倒置时顶推石墨/碳碳坩埚以推动锅底料与石英坩埚分离。
  2. 根据权利要求1所述的一种锅底料和石英坩埚分离装置，其特征在于，所述夹取部还包括：
    用于控制所述夹爪组件平移的平移控件；
    以及用于控制所述夹爪组件翻转的旋转控件；
    所述平移控件固设于竖直设置的固定架上，可通过夹紧臂控制所述夹爪组件进行相背或相向的水平移动；
    所述旋转控件设于所述夹紧臂上，并通过万向链控制所述夹爪组件进行旋转倒置。
  3. 根据权利要求2所述的一种锅底料和石英坩埚分离装置，其特征在于，所述夹取部被固设于移动小车上，所述移动小车可以带动所述夹取部沿竖直方向上下移动和沿纵深方向前后移动；且所述顶取部与所述夹取部独立设置。
  4. 根据权利要求2-3任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，所述平移控件固设于所述固定架的高度方向并沿所述固定架的长度方向移动；
    所述旋转控件一端固设于所述平移控件上，另一端与所述夹紧臂靠近所述夹爪组件的一端铰接设置。
  5. 根据权利要求2-4任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，平移控件与固定架并行竖直设置且水平横向移动。
  6. 根据权利要求2-5任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，所述平移控件包括：
    沿所述固定架高度方向错位设置的两个夹紧液压缸，所述夹紧液压缸反向移动；
    在每个所述夹紧液压缸上下两侧均配设有移动滑轨；
    同侧设置的所述夹紧液压缸和所述滑轨连接设置，并分别与所述夹紧臂垂直连接设置。
  7. 根据权利要求6所述的一种锅底料和石英坩埚分离装置，其特征在于，所有不同侧的夹紧液压缸和滑轨均错位上下设置；同侧设置的夹紧液压缸和其上下两侧的滑轨的外端 部通过立杆连接在一起，另一端均与固设于固定架上的套筒或滑道配合连接，且每一侧的夹紧臂垂直于与其同侧的连接夹紧液压缸和其上下两侧的滑轨的立架设置。
  8. 根据权利要求2-7任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，所述夹紧臂用于支撑和夹紧石英坩埚和石墨/碳碳坩埚。
  9. 根据权利要求2-8任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，所述旋转控件固设于其中一个所述夹紧臂上，包括旋转液压缸和万向链，
    所述旋转液压缸一端固设于所述平移控件上，另一端铰接设置在所述夹紧臂靠近所述夹爪组件一端；
    所述万向链设于所述夹紧臂和所述夹爪组件之间并被所述旋转液压缸控制。
  10. 根据权利要求1-9任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，所述夹爪组件包括相对设置的夹盘，所述夹盘为V型结构，并在所述夹盘内侧还配设有树脂垫；
    所述夹盘的V型夹角是钝角且为定值。
  11. 根据权利要求10所述的一种锅底料和石英坩埚分离装置，其特征在于，所述夹盘的V型夹角为150°。
  12. 根据权利要求1-11任一项所述的一种锅底料和石英坩埚分离装置，其特征在于，所述顶取部还包括：
    用于放置石墨/碳碳坩埚的放置台；
    以及用于固定所述冲顶杆的架梁；
    所述架梁横跨所述放置台固定并使所述冲顶杆竖直悬吊设置；
    所述冲顶杆可沿高度方向下行冲顶或上行回撤收缩；
    所述冲顶杆的下端设有直接与石墨/碳碳坩埚接触的弹性垫。
  13. 根据权利要求12所述的一种锅底料和石英坩埚分离装置，其特征在于，在所述放置台上还设有用于收集锅底料的托盘，所述托盘被置于所述冲顶杆的正下方且位于所述架梁所围成的区域范围内。
  14. 根据权利要求12所述的一种锅底料和石英坩埚分离装置，其特征在于，所述架梁为一个“口”字形的结构，放置在放置台的宽度中间位置处，所述冲顶杆固定在架梁的横架的中心位置处。
  15. 根据权利要求12所述的一种锅底料和石英坩埚分离装置，其特征在于，所述架梁包括两个竖直并行设置的“口”字形结构，两个“口”字形结构通过四个梁将其四个角连 接为一体，再在宽度方向的位置上设置一横梁并将冲顶杆21固定在该横梁上，以把冲顶杆21悬吊设置。
  16. 一种锅底料和石英坩埚的分离方法，其特征在于，采用如权利要求1-15任一项所述的分离装置，步骤包括：
    取出带有锅底料并内置于石墨/碳碳坩埚的石英坩埚；
    夹取石墨/碳碳坩埚外壁，并控制置于石英坩埚中的锅底料和石墨/碳碳坩埚一起翻转倒置；
    竖直朝下顶推石墨/碳碳坩埚的底部，使锅底料与石英坩埚分离。
  17. 根据权利要求16所述的一种锅底料和石英坩埚的分离方法，其特征在于，在分离之前，先将锅底料与内置于石墨/碳碳坩埚中的石英坩埚从单晶炉中取出并放置于便于夹取的空间内。
  18. 根据权利要求16-17任一项所述的一种锅底料和石英坩埚的分离方法，其特征在于，当锅底料的总重量小于100kg时，控制所述冲顶杆一次顶推石墨/碳碳坩埚底部，使锅底料与石英坩埚分离；
    当锅底料的总重量不小于100kg时，至少连续两次顶推石墨/碳碳坩埚底部，使锅底料与石英坩埚分离。
  19. 根据权利要求16-18任一项所述的一种锅底料和石英坩埚的分离方法，其特征在于，分离完毕后，还包括：先控制石英坩埚和石墨/碳碳坩埚一起远离所述顶取部，再控制石英坩埚和石墨/碳碳坩埚翻转返回原位。
  20. 根据权利要求16-19任一项所述的一种锅底料和石英坩埚的分离方法，其特征在于，待分离完成后，再控制移动小车带动夹盘将夹取石墨/碳碳坩埚的外壁，再通过夹盘将石墨/碳碳坩埚后撤移走，再将石英坩埚和石墨/碳碳坩埚一同移出顶取部，待平稳进行下一步的操作。
PCT/CN2023/082631 2022-03-28 2023-03-20 一种锅底料和石英坩埚分离装置及分离方法 WO2023185538A1 (zh)

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