WO2023157442A1 - エッチング方法 - Google Patents

エッチング方法 Download PDF

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Publication number
WO2023157442A1
WO2023157442A1 PCT/JP2022/045919 JP2022045919W WO2023157442A1 WO 2023157442 A1 WO2023157442 A1 WO 2023157442A1 JP 2022045919 W JP2022045919 W JP 2022045919W WO 2023157442 A1 WO2023157442 A1 WO 2023157442A1
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Prior art keywords
etching
atom
compound
gas
carbon atoms
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English (en)
French (fr)
Japanese (ja)
Inventor
淳 鈴木
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Resonac Corp
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Resonac Corp
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Priority to CN202280091493.7A priority Critical patent/CN118679553A/zh
Priority to EP22927328.9A priority patent/EP4481795A4/en
Priority to JP2024500976A priority patent/JPWO2023157442A1/ja
Priority to KR1020247027142A priority patent/KR20240148842A/ko
Priority to US18/839,049 priority patent/US20250154409A1/en
Publication of WO2023157442A1 publication Critical patent/WO2023157442A1/ja
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • H10P50/267—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas
    • H10P50/268—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas of silicon-containing layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • H10P50/269—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only pre- or post-treatments, e.g. anti-corrosion processes

Definitions

  • the present invention relates to an etching method.
  • the plasma etching used in manufacturing semiconductor devices is required to have a low side etch rate. That is, it is preferable that the etching target layer (for example, the silicon-containing layer) directly under the mask is not easily etched in the lateral direction during the etching of the high-aspect-ratio opening.
  • the high-temperature etching method does not generate particles easily, but the side etch rate is not sufficiently low.
  • a plasma etching method with a low side etch rate a low-temperature etching method in which etching is performed at a temperature of 0° C. or less is known (see Patent Document 1, for example).
  • the low-temperature etching method has a low side etch rate, it sometimes causes problems such as a low etching rate and a low etching selectivity. Details are given below. Impurities (for example, impurities derived from the manufacturing process of the etching gas) may be mixed in the etching gas, and the mixed impurities may condense during etching to reduce the etching rate and etching selectivity.
  • Impurities for example, impurities derived from the manufacturing process of the etching gas
  • Impurities may be mixed in the etching gas, and the mixed impurities may condense during etching to reduce the etching rate and etching selectivity.
  • An object of the present invention is to provide a low-temperature etching method in which bowing and etch stop are less likely to occur.
  • an etching step of etching the object to be etched by setting the temperature of a member to be etched having an object to be etched containing silicon to 0° C. or lower and bringing an etching gas containing an etching compound into contact with the object to be etched.
  • the etching gas has at least one atom selected from a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydrogen atom, and an oxygen atom in the molecule, and has a boiling point of 20° C. or higher under a pressure of 101 kPa.
  • An etching method that contains or does not contain high boiling point impurities that are compounds, and if the high boiling point impurities are contained, the total concentration of all the high boiling point impurities contained is 500 ppm by volume or less.
  • the etching compound has in its molecule at least one atom selected from a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and a hydrogen atom, and has a boiling point of 15°C or less under a pressure of 101 kPa.
  • the etching method according to any one of [1] to [3], which is a compound.
  • the etching compound is a compound having a fluorine atom in the molecule, and sulfur hexafluoride, nitrogen trifluoride, chlorine trifluoride, iodine heptafluoride, phosphorus trifluoride, silicon tetrafluoride, fluorine gas, trifluoroiodomethane, carbonyl fluoride, trifluoromethylhypofluoride, chain saturated perfluorocarbons having 1 to 3 carbon atoms, chain saturated hydrofluorocarbons having 1 to 3 carbon atoms, and 2 to 5 carbon atoms unsaturated perfluorocarbons, unsaturated hydrofluorocarbons having 2 to 4 carbon atoms, cyclic perfluorocarbons having 3 to 5 carbon atoms, and cyclic hydrofluorocarbons having 3 to 5 carbon atoms [4] The etching method described in .
  • the etching compound is a compound having a chlorine atom in the molecule, and is boron trichloride, chlorine gas, hydrogen chloride, chlorine trifluoride, a chain saturated chlorinated hydrocarbon having 1 to 3 carbon atoms, and The etching method according to [4], wherein at least one of unsaturated chlorinated hydrocarbons having 2 or 3 carbon atoms is used.
  • the etching compound is a compound having a bromine atom in the molecule, and is composed of hydrogen bromide, a chain saturated brominated hydrocarbon having 1 to 3 carbon atoms, and an unsaturated brominated hydrocarbon having 2 carbon atoms. The etching method according to [4], wherein at least one of them is used.
  • the etching compound is a compound having an iodine atom in the molecule and is at least one of iodine heptafluoride, hydrogen iodide, trifluoroiodomethane, and pentafluoroiodoethane. etching method.
  • the etching compound is a compound having a hydrogen atom in the molecule, and is a chain saturated hydrocarbon having 1 to 4 carbon atoms, an unsaturated hydrocarbon having 2 to 4 carbon atoms, and 3 or 4 carbon atoms.
  • the etching method according to [4] wherein at least one of the cyclic hydrocarbons of
  • bowing and etch stop are less likely to occur.
  • the temperature of a member to be etched having an etching target containing silicon is set to 0° C. or lower, and an etching gas containing an etching compound is brought into contact with the member to be etched to etch the etching target.
  • An etching step is provided.
  • the etching gas has at least one atom selected from a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydrogen atom, and an oxygen atom in its molecule, and has a boiling point of 20° C. or higher under a pressure of 101 kPa.
  • boiling points of high-boiling impurities and etching compounds are the boiling points under a pressure of 101 kPa (that is, the boiling points under atmospheric pressure), but in the following description, they may be simply referred to as "boiling points".
  • the etching gas containing the etching compound When the etching gas containing the etching compound is brought into contact with the member to be etched, the object to be etched containing silicon reacts with the etching compound in the etching gas, so that the etching of the object to be etched proceeds.
  • non-etching objects such as masks hardly react with the etching compound, so etching of the non-etching objects hardly progresses. Therefore, according to the etching method according to the present embodiment, it is possible to selectively etch the etching target compared to the non-etching target.
  • the etching method according to the present embodiment is a low-temperature etching method in which etching is performed at a temperature of 0° C. or less, etching can be performed with a low side etch rate.
  • the etching gas does not contain high-boiling-point impurities, or even if it does, the amount is very small. is less likely to occur. Therefore, the etching rate and the etching selectivity are high because problems due to condensation of high-boiling-point impurities are less likely to occur.
  • the etching method according to the present embodiment can be used for manufacturing semiconductor devices.
  • a semiconductor device can be manufactured by applying the etching method according to the present embodiment to a semiconductor substrate having a thin film made of a silicon compound to etch the thin film made of the silicon compound. Since the etching method according to the present embodiment has a high etching rate and etching selectivity, the productivity of semiconductor devices is high.
  • etching refers to processing the member to be etched into a predetermined shape (for example, a three-dimensional shape) by removing part or all of the object to be etched of the member to be etched (for example, the member to be etched is processing a film-like etching object made of a silicon compound to have a predetermined film thickness).
  • etching method For the etching method according to this embodiment, both plasma etching using plasma and plasmaless etching not using plasma can be used.
  • plasma etching include reactive ion etching (RIE: Reactive Ion Etching), inductively coupled plasma (ICP: Inductively Coupled Plasma) etching, capacitively coupled plasma (CCP: Capacitively Coupled Plasma) etching, electron cyclotron resonance (ECR : Electron Cyclotron Resonance) plasma etching and microwave plasma etching.
  • RIE reactive ion etching
  • ICP Inductively Coupled Plasma
  • CCP Capacitively Coupled Plasma
  • ECR Electron Cyclotron Resonance
  • plasma may be generated in a chamber in which the member to be etched is placed, or the plasma generation chamber and the chamber in which the member to be etched is placed may be separated (that is, remote plasma may be used). may be used). Etching using a remote plasma may etch silicon-containing etch targets with higher selectivity.
  • the etching compound contained in the etching gas is a compound that reacts with the etching object containing silicon to advance the etching of the etching object.
  • the type of the etching compound is not particularly limited as long as it is a compound that advances the etching of the object to be etched.
  • a compound having an atom in the molecule and a boiling point of 15° C. or less under a pressure of 101 kPa is preferred.
  • the boiling point of the etching compound under a pressure of 101 kPa is preferably 15° C. or lower, more preferably 10° C. or lower, and even more preferably 0° C. or lower. Examples of etching compounds are given below.
  • etching compounds having fluorine atoms in the molecule include sulfur hexafluoride ( SF6 ), nitrogen trifluoride ( NF3 ), chlorine trifluoride ( ClF3 ), iodine heptafluoride ( IF7 ), Phosphorus trifluoride (PF 3 ), silicon tetrafluoride (SiF 4 ), fluorine gas (F 2 ), trifluoroiodomethane (CF 3 I), carbonyl fluoride (COF 2 ), trifluoromethyl hypofluoride ( CF 3 OF), chain saturated perfluorocarbons having 1 to 3 carbon atoms, saturated chain hydrofluorocarbons having 1 to 3 carbon atoms, unsaturated perfluorocarbons having 2 to 5 carbon atoms, Examples include unsaturated hydrofluorocarbons, cyclic perfluorocarbons having 3 to 5 carbon atoms, and cyclic hydrofluorocarbons having 3 to 5 carbon atoms.
  • chain saturated perfluorocarbons having 1 to 3 carbon atoms include tetrafluoromethane (CF 4 ), hexafluoroethane (C 2 F 6 ), and octafluoropropane (C 3 F 8 ).
  • chain saturated hydrofluorocarbons having 1 to 3 carbon atoms include fluoromethane (CH 3 F), difluoromethane (CH 2 F 2 ), trifluoromethane (CHF 3 ), fluoroethane (C 2 H 5 F ), difluoroethane (C 2 H 4 F 2 ), trifluoroethane (C 2 H 3 F 3 ), tetrafluoroethane (C 2 H 2 F 4 ), pentafluoroethane (C 2 HF 5 ), fluoropropane (C 3H7F ) , difluoropropane ( C3H6F2 ) , trifluoropropane (C3H5F3 ) , tetrafluoropropane (C3H4F4 ) , pentafluoropropane ( C3H3F 5 ), hexafluoropropane (C 3 H 2 F 6 ), and heptafluorofluor
  • unsaturated perfluorocarbons having 2 to 5 carbon atoms include tetrafluoroethylene ( C2F4 ), difluoroacetylene ( C2F2 ), hexafluoropropylene ( C3F6 ), and tetrafluoropropyne .
  • C 3 F 4 tetrafluoroethylene
  • C 4 F 8 octafluorobutene
  • C 4 F 6 hexafluorobutyne
  • octafluoropentyne C 5 F 8 ).
  • unsaturated hydrofluorocarbons having 2 to 4 carbon atoms include fluoroethylene (C 2 H 3 F), difluoroethylene (C 2 H 2 F 2 ), trifluoroethylene (C 2 HF 3 ), and fluoropropylene.
  • cyclic perfluorocarbons having 3 to 5 carbon atoms include hexafluorocyclopropane (C 3 F 6 ), octafluorocyclobutane (C 4 F 8 ), and decafluorocyclopentane (C 5 F 10 ). .
  • cyclic hydrofluorocarbons having 3 to 5 carbon atoms include fluorocyclopropane (C 3 H 5 F), difluorocyclopropane (C 3 H 4 F 2 ), trifluorocyclopropane (C 3 H 3 F 3 ), tetrafluorocyclopropane (C 3 H 2 F 4 ), pentafluorocyclopropane (C 3 HF 5 ), heptafluorocyclobutane (C 4 HF 7 ).
  • hydrofluorocarbon means a compound in which a portion of the hydrogen atoms of a hydrocarbon are substituted with fluorine atoms.
  • etching compounds having a chlorine atom in the molecule include boron trichloride (BCl 3 ), chlorine gas (Cl 2 ), hydrogen chloride (HCl), chlorine trifluoride (ClF 3 ), and 1 to 3 carbon atoms. chain saturated chlorinated hydrocarbons and unsaturated chlorinated hydrocarbons having 2 or 3 carbon atoms.
  • chain saturated chlorinated hydrocarbons having 1 to 3 carbon atoms include chloromethane (CH 3 Cl), chlorodifluoromethane (CHClF 2 ), chlorofluoromethane (CH 2 ClF), dichlorofluoromethane (CHCl 2 F), chlorotrifluoromethane ( CClF3 ), dichlorodifluoromethane ( CCl2F2 ) , chloroethane ( C2H5Cl ) , chlorodifluoroethane ( C2H3ClF2 ) , chlorotetrafluoroethane ( C2HClF 4 ) , chloropentafluoroethane ( C2ClF5 ), dichlorotetrafluoroethane ( C2Cl2F4 ), chlorohexafluoropropane (C3HClF6 ) , chloroheptafluoropropane ( C3ClF7 )
  • unsaturated chlorinated hydrocarbons having 2 or 3 carbon atoms include chloroethylene (C 2 H 3 Cl), chlorofluoroethylene (C 2 H 2 ClF), chlorodifluoroethylene (C 2 HClF 2 ), chloro trifluoroethylene (C 2 ClF 3 ), chlorotrifluoropropylene (C 3 H 2 ClF 3 ), chlorotetrafluoropropylene (C 3 HClF 4 ), chloropentafluoropropylene (C 3 ClF 5 ).
  • etching compounds having a bromine atom in the molecule include hydrogen bromide (HBr), chain saturated brominated hydrocarbons having 1 to 3 carbon atoms, and unsaturated brominated hydrocarbons having 2 carbon atoms.
  • chain saturated brominated hydrocarbons having 1 to 3 carbon atoms include bromomethane (CH 3 Br), bromodifluoromethane (CHBrF 2 ), bromofluoromethane (CH 2 BrF), bromotrifluoromethane (CBrF 3 ), bromotetrafluoroethane (C 2 HBrF 4 ), bromopentafluoroethane (C 2 BrF 5 ), and bromoheptafluoropropane (C 3 BrF 7 ).
  • unsaturated brominated hydrocarbons having 2 carbon atoms include bromofluoroethylene ( C2H2BrF ), bromodifluoroethylene ( C2HBrF2 ), and bromotrifluoroethylene ( C2BrF3 ) .
  • etching compounds having an iodine atom in the molecule include iodine heptafluoride, hydrogen iodide (HI), trifluoroiodomethane, and pentafluoroiodoethane ( C2F5I ).
  • etching compounds having hydrogen atoms in the molecule include chain saturated hydrocarbons having 1 to 4 carbon atoms, unsaturated hydrocarbons having 2 to 4 carbon atoms, and cyclic hydrocarbons having 3 or 4 carbon atoms. mentioned. Specific examples of chain saturated hydrocarbons having 1 to 4 carbon atoms include methane (CH 4 ), ethane (C 2 H 6 ), propane (C 3 H 8 ), and butane (C 4 H 10 ). .
  • unsaturated hydrocarbons having 2 to 4 carbon atoms include ethylene (C 2 H 4 ), acetylene (C 2 H 2 ), propylene (C 3 H 6 ), propyne (C 3 H 4 ), and butene. ( C4H8 ) , butyne ( C4H6 ).
  • cyclic hydrocarbons having 3 or 4 carbon atoms include cyclopropane (C 3 H 6 ), cyclobutane (C 4 H 8 ), and cyclobutene (C 4 H 6 ).
  • These etching compounds may be used individually by 1 type, and may be used in combination of 2 or more type.
  • An etching gas is a gas containing the etching compound described above.
  • the etching gas may be a gas consisting only of the above etching compound, or may be a mixed gas containing the above etching compound and a diluent gas. Moreover, it may be a mixed gas containing the above etching compound, a diluent gas and an additive gas.
  • the type of diluent gas is not particularly limited as long as it is an inert gas. Examples include nitrogen gas (N 2 ), helium (He), neon (Ne), argon (Ar), krypton (Kr), and xenon (Xe).
  • the content of the diluent gas is preferably 90% by volume or less, more preferably 50% by volume or less, with respect to the total amount of the etching gas. Also, the content of the diluent gas is preferably 10% by volume or more with respect to the total amount of the etching gas. From the viewpoint of improving the etching rate, the content of the etching compound in the etching gas is preferably 5% by volume or more, more preferably 10% by volume or more, relative to the total amount of the etching gas. From the viewpoint of suppressing the amount of the etching compound used, it is preferably 90% by volume or less, more preferably 80% by volume or less, relative to the total amount of the etching gas.
  • the etching gas can be obtained by mixing a plurality of components (etching compound, diluent gas, etc.) that constitute the etching gas, but the mixing of the plurality of components may be performed either inside or outside the chamber. That is, a plurality of components constituting the etching gas may be independently introduced into the chamber and mixed in the chamber, or a plurality of components constituting the etching gas may be mixed to obtain the etching gas. etchant gas may be introduced into the chamber.
  • the etching gas may or may not contain high boiling point impurities, but if it does contain high boiling point impurities, the sum of the concentrations of all the high boiling point impurities contained is 500% with respect to the total amount of the gasified etching gas. Since the concentration is volume ppm or less, problems due to condensation of high-boiling-point impurities are unlikely to occur as described above, and the etching rate and etching selectivity are high.
  • the total concentration of all kinds of high boiling point impurities contained in the etching gas may be 0.01 volume ppm or more and 300 volume ppm or less.
  • each concentration of all kinds of high boiling point impurities contained in the etching gas may be 0.01 ppm by volume or more.
  • high-boiling-point impurities are defined as having in the molecule at least one atom selected from fluorine, chlorine, bromine, iodine, hydrogen, and oxygen atoms, and is a compound whose boiling point is 20° C. or higher.
  • the etching gas or etching compound may contain one or more high boiling impurities.
  • the concentration of high-boiling-point impurities contained in the etching gas or etching compound can be quantified by methods such as gas chromatography, infrared spectroscopy, ultraviolet-visible spectroscopy, and mass spectrometry.
  • does not contain high-boiling-point impurities means that it cannot be quantified by any of gas chromatography, infrared spectroscopy, and mass spectrometry.
  • Methods for removing high-boiling impurities from the etching gas or etching compound include, for example, a method of contacting with an adsorbent, a method of separating with a membrane, a method of separating by distillation, and the like.
  • an etching gas or an etching compound is enclosed in a stainless steel cylinder and held at a temperature below the boiling point of the etching compound under the pressure inside the cylinder (for example, the etching compound is difluoromethane
  • the high boiling point impurities are separated by extracting the gas phase part by the method described in the examples below while maintaining the temperature at -50 ° C. under the cylinder internal pressure slightly higher than 1 atm. can be done.
  • the etching gas is preferably subjected to etching.
  • the total concentration of high-boiling impurities with a boiling point of 20 ° C. or higher and lower than 60 ° C. must be 500 ppm by volume or less, preferably 50 ppm by volume or less, with respect to the total amount of the gasified etching gas. ppm or less is more preferable.
  • the total concentration of high-boiling impurities having a boiling point of 20° C. or more and less than 60° C. may be 0.01 ppm by volume or more.
  • dichloromethane (CH 2 Cl 2 , boiling point 40° C.), trichlorotrifluoroethane (C 2 Cl 3 F 3 , boiling point 47.7° C.), dichlorotrifluoroethane (C 2 HCl 2 F 3 , boiling point 27.8° C.), Dichlorofluoroethane (C 2 H 3 Cl 2 F, boiling point 32° C.), iodomethane (CH 3 I, boiling point 42.4° C.), nitrogen dioxide (NO 2 , boiling point 21.1° C.).
  • the total concentration of high-boiling impurities with a boiling point of 60° C. or more and less than 100° C. must be 500 ppm by volume or less with respect to the total amount of the gasified etching gas, preferably 50 ppm by volume or less. ppm or less is more preferable.
  • the total concentration of high-boiling impurities having a boiling point of 60° C. or more and less than 100° C. may be 0.01 volume ppm or more.
  • ethanol CH 3 CH 2 OH, boiling point 78° C.
  • isopropanol C 3 H 7 OH, boiling point 82.0° C.
  • 4° C. chloroform (CHCl 3 , boiling point 61.2° C.), tetrachlorodifluoroethane (C 2 Cl 4 F 2 , boiling point 92.8° C.)
  • benzene C 6 H 6 , boiling point 80° C.
  • cyclohexane C 6 H 12 , boiling point 81° C.
  • hexafluorobenzene C 6 F 6 , boiling point 80.5° C.
  • tetrachloroethylene C 2 Cl 4 , boiling point 87.2° C.
  • phosphorus trichloride PCl 3 , boiling point 74° C.
  • the total concentration of high-boiling impurities with a boiling point of 100° C. or more and less than 200° C. must be 500 ppm by volume or less, preferably 50 ppm by volume or less, with respect to the total amount of the gasified etching gas. ppm or less is more preferable.
  • the total concentration of high-boiling impurities having a boiling point of 100° C. or more and less than 200° C. may be 0.01 ppm by volume or more.
  • the types of high-boiling impurities having a boiling point of 100° C. or more and less than 200° C. are not particularly limited.
  • Carbon tetrabromide ( CBr4 , boiling point 190°C), tribromofluoromethane ( CBr3F , boiling point 108°C), iodine pentafluoride ( IF5 , boiling point 104°C), phosphorus tribromide ( PBr3 , boiling point 173°C) .2° C.).
  • the number of high boiling point impurities contained may be one or two or more.
  • Etching gases containing high-boiling impurities include, in particular, etching gases containing at least one of water, hydrogen fluoride, ethanol, isopropanol, chloroform, dichloromethane, cyclohexane, benzene, molecular iodine, and molecular bromine. can.
  • Some of the high-boiling impurities shown above as specific examples have isomers, and all isomers are included in the high-boiling impurities in the etching method according to the present embodiment.
  • the etching gas may contain a compound having a boiling point of less than 20° C. as an impurity.
  • the total concentration of impurities with a boiling point of less than 20° C. is preferably 1000 ppm by volume or less, more preferably 50 ppm by volume or less, and 1 ppm by volume or less with respect to the total amount of the gasified etching gas. is more preferred.
  • the total concentration of impurities with boiling points of less than 20° C. may be 0.01 ppm by volume or more.
  • the etching is performed with the temperature of the member to be etched set to 0° C. or lower. is more preferable. If etching is performed with the temperature of the member to be etched within the above range, etching can be performed with a lower side etch rate.
  • the temperature of the temperature condition is the temperature of the member to be etched, but the temperature of the stage supporting the member to be etched, which is installed in the chamber of the etching apparatus, can also be used.
  • the bias power that constitutes the potential difference between the plasma generated during etching and the member to be etched may be selected from 0 to 10000 W depending on the desired etching shape, and 0 to 1000 W when selective etching is performed. degree is preferred.
  • the pressure condition of the etching step in the etching method according to the present embodiment is not particularly limited, but is preferably 10 Pa or less, more preferably 5 Pa or less. If the pressure conditions are within the above range, it is easy to stably generate plasma. On the other hand, the pressure condition of the etching process is preferably 0.05 Pa or higher. If the pressure conditions are within the above range, a large number of ionized ions are generated and a sufficient plasma density can be easily obtained.
  • the flow rate of the etching gas may be appropriately set according to the volume of the chamber and the ability of the exhaust equipment to reduce the pressure in the chamber so that the pressure in the chamber is kept constant.
  • a member to be etched to be etched by the etching method according to the present embodiment has an etching target that is an etching target, but may further have a non-etching target that is not an etching target.
  • the member to be etched may be a member having a portion formed by the object to be etched and a portion formed by the object not to be etched, A member formed of a mixture of an etching target and a non-etching target may also be used.
  • the member to be etched may have an object other than the object to be etched and the object not to be etched.
  • the shape of the member to be etched is not particularly limited, and may be, for example, plate-like, foil-like, film-like, powder-like, or block-like. Examples of the member to be etched include the semiconductor substrate described above.
  • the object to be etched may be made of only a silicon-containing material, or may have a portion made only of a silicon-containing material and a portion made of another material. or a mixture of a silicon-containing material and other materials.
  • Materials containing silicon include, for example, silicon oxide, silicon nitride, polysilicon, and silicon germanium (SiGe). These silicon-containing materials may be used singly or in combination of two or more.
  • silicon oxides include silicon dioxide ( SiO2 ).
  • silicon nitride refers to a compound containing silicon and nitrogen in an arbitrary ratio, and an example thereof is Si 3 N 4 .
  • the purity of silicon nitride is not particularly limited, but is preferably 30% by mass or more, more preferably 60% by mass or more, and still more preferably 90% by mass or more.
  • the shape of the etching object is not particularly limited, and may be, for example, plate-like, foil-like, film-like, powder-like, or block-like.
  • the object to be etched may or may not have a shape such as a pattern or a hole.
  • Non-etching object does not substantially react with the etching compound, or the reaction with the etching compound is extremely slow, so that etching hardly progresses even if etching is performed by the etching method according to the present embodiment. is.
  • the non-etching target is not particularly limited as long as it has the above properties, but for example, photoresist, amorphous carbon, titanium nitride, metals such as copper, nickel, cobalt, and oxidation of these metals materials and nitrides. Among these, photoresist and amorphous carbon are more preferable from the viewpoint of handling and availability.
  • the non-etching target can be used as a resist or mask for suppressing etching of the etching target by the etching gas. Therefore, in the etching method according to the present embodiment, the patterned non-etching object is used as a resist or mask to process the etching object into a predetermined shape (for example, a film-like etching object possessed by the member to be etched). processing an object to have a predetermined film thickness), it can be suitably used for the manufacture of semiconductor devices. In addition, since the non-etching target is hardly etched, it is possible to suppress the etching of the portion of the semiconductor element that should not be etched, thereby preventing the loss of the characteristics of the semiconductor element due to the etching. can.
  • the etching apparatus of FIG. 1 is a plasma etching apparatus that performs etching using plasma. First, the etching apparatus shown in FIG. 1 will be described.
  • the etching apparatus of FIG. 1 supports a chamber 3 in which etching is performed, a plasma generator (not shown) that generates plasma inside the chamber 3, and a member 4 to be etched to be etched.
  • a stage 5 a cooling unit 6 for cooling the member 4 to be etched via the stage 5, a thermometer (not shown) for measuring the temperature of the member 4 to be etched, and a vacuum pump 8 for reducing the pressure inside the chamber 3.
  • a pressure gauge 7 for measuring the pressure inside the chamber 3 .
  • the type of plasma generation mechanism of the plasma generator is not particularly limited, and may be one in which a high-frequency voltage is applied to parallel plates, or one in which a high-frequency current is passed through a coil.
  • the stage 5 is connected to the high frequency power source of the plasma generator so that the stage 5 can be applied with a high frequency voltage.
  • the etching apparatus of FIG. 1 also includes an etching gas supply section that supplies an etching gas to the inside of the chamber 3 .
  • the etching gas supply unit includes an etching compound gas supply unit 1 that supplies an etching compound gas, a diluent gas supply unit 2 that supplies a diluent gas, a pipe connecting the etching compound gas supply unit 1 and the chamber 3, and a diluent. and a pipe connecting the gas supply unit 2 and the chamber 3 .
  • a facility for supplying an additive gas may be installed (not shown).
  • the gas such as the etching gas supplied into the chamber 3 can be discharged outside the chamber 3 through an exhaust pipe (not shown).
  • the inside of the chamber 3 is decompressed by the vacuum pump 8, and then the etching compound gas is sent out from the etching compound gas supply unit 1 to supply the etching compound through the pipe.
  • Gas may be supplied to the chamber 3 .
  • a mixed gas of an etching compound gas and a diluent gas such as an inert gas
  • the pressure inside the chamber 3 is reduced by the vacuum pump 8, and then the etching compound is supplied from the etching compound gas supply unit 1.
  • the diluent gas may be sent out from the diluent gas supply unit 2 while the gas is sent out.
  • the etching compound gas and the diluent gas are mixed in the chamber 3 to form an etching gas.
  • the etching method according to the present embodiment can be performed using a general plasma etching apparatus used in the semiconductor device manufacturing process, such as the etching apparatus shown in FIG. not.
  • a general plasma etching apparatus used in the semiconductor device manufacturing process
  • the structure of the temperature control mechanism of the chamber 3 should be able to control the temperature of the member 4 to be etched to an arbitrary temperature. or a configuration in which a cooling unit for cooling the stage 5 is provided directly on the stage 5 .
  • Etch compound gases containing various concentrations of high boiling impurities were prepared. An example of the preparation of the etching compound gas is described below.
  • difluoromethane gas 400 g was extracted from the upper outlet of cylinder A, where the gas phase portion was present, and transferred to cylinder B in a decompressed state. 100 g of difluoromethane remaining in cylinder A is designated as sample 1-1. After that, the difluoromethane gas remaining in the cylinder A was extracted from the upper outlet, and the concentrations of various impurities such as high-boiling impurities were measured by infrared spectroscopic analysis and gas chromatography. Table 1 shows the results. The concentrations of impurities were measured by infrared spectroscopy for hydrogen fluoride and water, and by gas chromatography for dichloromethane and trifluoromethane.
  • the temperature of the cylinder B is raised to ⁇ 50° C. to form a liquid phase portion and a gas phase portion, and 300 g of difluoromethane gas is extracted from the upper outlet where the gas phase portion of the cylinder B exists, Transferred to cylinder C under vacuum.
  • 100 g of difluoromethane remaining in cylinder B is designated as sample 1-2.
  • the difluoromethane gas remaining in the cylinder B was extracted from the upper outlet, and the concentrations of various impurities such as high-boiling impurities were measured by infrared spectroscopic analysis and gas chromatography. Table 1 shows the results.
  • the temperature of cylinder C is raised to ⁇ 50° C. to form a liquid phase portion and a gas phase portion, 200 g of difluoromethane gas is extracted from the upper outlet where the gas phase portion of cylinder C exists, and the pressure is reduced. Transferred to Cylinder D in state. 100 g of difluoromethane remaining in cylinder C is designated as sample 1-3. After that, the difluoromethane gas remaining in the cylinder C was extracted from the upper outlet, and the concentrations of various impurities such as high-boiling impurities were measured by infrared spectroscopic analysis and gas chromatography. Table 1 shows the results.
  • the temperature of cylinder D is raised to -50 ° C. to form a liquid phase portion and a gas phase portion, 100 g of difluoromethane gas is extracted from the upper outlet where the gas phase portion of cylinder D exists, and the pressure is reduced. Transferred to Cylinder E in state. 100 g of difluoromethane remaining in cylinder D is designated as sample 1-4. After that, the difluoromethane gas remaining in the cylinder D was extracted from the upper outlet, and the concentrations of various impurities such as high-boiling impurities were measured by infrared spectroscopic analysis and gas chromatography. Table 1 shows the results. Also, 100 g of difluoromethane in cylinder E is used as sample 1-5.
  • Difluoromethane gas was extracted from the upper outlet of the cylinder E where the gas phase portion exists, and the concentrations of various impurities such as high boiling point impurities were measured by infrared spectroscopic analysis and gas chromatography. Table 1 shows the results.
  • Preparation Example 2 The same operation as in Preparation Example 1 was performed except that chlorine gas (boiling point at a pressure of 101 kPa: ⁇ 34° C.) was used as the etching compound and the liquefaction temperature was ⁇ 30° C., and samples 2-1 to 2-1 were obtained. 2-5 were prepared. Then, the concentrations of various impurities such as high-boiling impurities contained in each sample were measured by infrared spectroscopy and gas chromatography. Table 2 shows the results. The concentrations of impurities were measured by infrared spectroscopy for hydrogen chloride and water, and by gas chromatography for dichloromethane and chloroform.
  • Preparation Example 3 The same operation as in Preparation Example 1 was performed except that hydrogen bromide (boiling point at a pressure of 101 kPa: -66 ° C.) was used as an etching compound and the liquefaction temperature was -60 ° C., and sample 3-1 ⁇ 3-5 were prepared. Then, the concentrations of various impurities such as high-boiling impurities contained in each sample were measured by infrared spectroscopy, gas chromatography, and mass spectrometry. Table 3 shows the results. The concentration of impurities was measured by infrared spectroscopy for water, gas chromatography for carbon dioxide, and mass spectrometry for bromine molecules.
  • Preparation Example 5 The same operation as in Preparation Example 1 was performed except that propylene (boiling point at a pressure of 101 kPa: -48 ° C.) was used as an etching compound and the liquefaction temperature was -45 ° C., Samples 5-1 to 5-5. -5 was prepared. Then, the concentrations of various impurities such as high-boiling impurities contained in each sample were measured by infrared spectroscopy and gas chromatography. Table 5 shows the results. The concentrations of impurities were measured by infrared spectroscopy for water, and by gas chromatography for benzene, cyclohexane, and ethane.
  • Example 1 A silicon nitride film with a thickness of 1000 nm was formed on the surface of a semiconductor wafer, and a resist film with a thickness of 500 nm was further formed thereon. A hole having a diameter of 200 nm was formed in the resist film by performing exposure and development, and this was used as a test sample. Then, the specimen was etched using an etching gas. As an etching device, an ICP etching device RIE-230iP manufactured by Samco Corporation was used.
  • an etching gas was prepared by introducing difluoromethane of sample 1-5 at a flow rate of 10 mL/min and argon at a flow rate of 40 mL/min into the chamber independently of each other and mixing them in the chamber.
  • a high frequency voltage of 500 W was applied to convert the etching gas into plasma in the chamber.
  • the test piece in the chamber was etched for 1 minute under etching conditions of a pressure of 3 Pa, a temperature of the test piece of ⁇ 50° C., and a bias power of 100 W.
  • the temperature of the specimen was set to 20° C., and argon was introduced into the chamber at a flow rate of 40 mL/min to purge the surface of the specimen.
  • Example 2 Etching of the specimen was carried out in the same manner as in Example 1, except that the temperature of the specimen was -5°C.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching progressed normally at an etching rate of 80 nm/min without bowing and etch stop.
  • Example 3 A specimen was etched in the same manner as in Example 1, except that the difluoromethane of Sample 1-4 was used instead of the difluoromethane of Sample 1-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching progressed normally at an etching rate of 87 nm/min without bowing or etch stop.
  • Example 4 A specimen was etched in the same manner as in Example 1, except that the difluoromethane of Sample 1-3 was used instead of the difluoromethane of Sample 1-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching progressed normally at an etching rate of 91 nm/min without bowing and etch stop.
  • Example 1 A specimen was etched in the same manner as in Example 1, except that the difluoromethane of Sample 1-2 was used instead of the difluoromethane of Sample 1-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, bowing was observed in the silicon nitride film immediately below the resist film to increase the diameter of the hole, confirming that etching in the lateral direction had progressed. The etching rate was 83 nm/min.
  • Example 2 The same procedure as in Example 1 was performed except that the difluoromethane of Sample 1-1 was used instead of the difluoromethane of Sample 1-5 to etch the specimen.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, bowing was observed in the silicon nitride film immediately below the resist film to increase the diameter of the hole, confirming that etching in the lateral direction had progressed. Also, the etching rate was 33 nm/min, and the occurrence of etch stop was confirmed.
  • Example 4 Etching of the specimen was performed in the same manner as in Example 1, except that the temperature of the specimen was set to 25°C.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, bowing was observed in the silicon nitride film immediately below the resist film to increase the diameter of the hole, confirming that etching in the lateral direction had progressed. The etching rate was 74 nm/min.
  • Example 5 Example 1 except that a polysilicon film with a thickness of 1000 nm was formed instead of the silicon nitride film with a thickness of 1000 nm, and chlorine gas of sample 2-5 was used instead of difluoromethane of sample 1-5. Etching of the specimen was performed by performing the same operation. Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching progressed normally at an etching rate of 121 nm/min without bowing and etch stop.
  • Example 6 The specimen was etched in the same manner as in Example 5, except that the chlorine gas of sample 2-4 was used instead of the chlorine gas of sample 2-5. Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching proceeded normally at an etching rate of 118 nm/min without occurrence of bowing and etch stop.
  • Example 7 The specimen was etched in the same manner as in Example 5, except that the chlorine gas of sample 2-3 was used instead of the chlorine gas of sample 2-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching proceeded normally at an etching rate of 119 nm/min without bowing or etch stop.
  • Example 5 The specimen was etched in the same manner as in Example 5, except that the chlorine gas of sample 2-2 was used instead of the chlorine gas of sample 2-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, the etching rate was 47 nm/min, and the occurrence of etch stop was confirmed.
  • Example 6 The specimen was etched in the same manner as in Example 5, except that the chlorine gas of sample 2-1 was used instead of the chlorine gas of sample 2-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, the etching rate was 32 nm/min, and the occurrence of etch stop was confirmed.
  • Example 8 Example except that a polysilicon film with a thickness of 1000 nm was formed instead of the silicon nitride film with a thickness of 1000 nm, and hydrogen bromide of sample 3-5 was used instead of difluoromethane of sample 1-5. The same operation as in 1 was performed to etch the specimen. Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching progressed normally at an etching rate of 63 nm/min without bowing or etch stop.
  • Example 9 The specimen was etched in the same manner as in Example 8, except that the hydrogen bromide sample 3-4 was used instead of the hydrogen bromide sample 3-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching proceeded normally at an etching rate of 67 nm/min without bowing or etch stop.
  • Example 10 The specimen was etched in the same manner as in Example 8, except that the hydrogen bromide sample 3-3 was used instead of the hydrogen bromide sample 3-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching progressed normally at an etching rate of 64 nm/min without bowing or etch stop.
  • Example 7 Etching of the specimen was carried out in the same manner as in Example 8, except that the hydrogen bromide of sample 3-2 was used instead of the hydrogen bromide of sample 3-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, the etching rate was 28 nm/min, and the occurrence of etch stop was confirmed.
  • Example 8 The specimen was etched in the same manner as in Example 8, except that the hydrogen bromide sample 3-1 was used instead of the hydrogen bromide sample 3-5.
  • Table 6 shows the etching rate of the polysilicon film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, the etching rate was 21 nm/min, and the occurrence of etch stop was confirmed.
  • Example 11 Except that a silicon oxide film with a thickness of 1000 nm was formed instead of the silicon nitride film with a thickness of 1000 nm, and trifluoroiodomethane of sample 4-5 was used instead of difluoromethane of sample 1-5.
  • Table 6 shows the etching rate of the silicon oxide film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching progressed normally at an etching rate of 71 nm/min without bowing or etch stop.
  • Example 12 Etching of the specimen was carried out in the same manner as in Example 11, except that the trifluoroiodomethane of sample 4-4 was used instead of the trifluoroiodomethane of sample 4-5.
  • Table 6 shows the etching rate of the silicon oxide film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching proceeded normally at an etching rate of 74 nm/min without bowing or etch stop.
  • Example 13 The same operation as in Example 11 was performed except that the trifluoroiodomethane of Sample 4-3 was used instead of the trifluoroiodomethane of 4-5 to etch the specimen.
  • Table 6 shows the etching rate of the silicon oxide film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that etching progressed normally at an etching rate of 81 nm/min without bowing or etch stop.
  • Example 9 The same procedure as in Example 11 was performed except that the trifluoroiodomethane of Sample 4-2 was used instead of the trifluoroiodomethane of 4-5 to etch the specimen.
  • Table 6 shows the etching rate of the silicon oxide film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, bowing was observed in the silicon oxide film immediately below the resist film to increase the diameter of the hole, confirming that etching in the lateral direction had progressed. Also, the etching rate was 33 nm/min, and the occurrence of etch stop was confirmed.
  • Example 10 The same operation as in Example 11 was performed except that the trifluoroiodomethane of sample 4-1 was used instead of the trifluoroiodomethane of 4-5 to etch the specimen.
  • Table 6 shows the etching rate of the silicon oxide film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, bowing was observed in the silicon oxide film immediately below the resist film to increase the diameter of the hole, confirming that etching in the lateral direction had progressed. Also, the etching rate was 18 nm/min, and the occurrence of etch stop was confirmed.
  • Example 14 The same operation as in Example 1 was performed except that a mixture of propylene of sample 5-5 and tetrafluoromethane with a purity of 99.99% by volume was used instead of difluoromethane of sample 1-5. Etching the body. Specifically, propylene of sample 5-5 was introduced into the chamber at a flow rate of 10 mL/min, tetrafluoromethane at a flow rate of 10 mL/min, and argon at a flow rate of 30 mL/min, respectively, and mixed in the chamber. An etching gas was prepared. Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching proceeded normally at an etching rate of 137 nm/min without bowing or etch stop.
  • Example 15 A specimen was etched in the same manner as in Example 14, except that the propylene of Sample 5-4 was used instead of the propylene of Sample 5-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching progressed normally at an etching rate of 133 nm/min without bowing and etch stop.
  • Example 16 A specimen was etched in the same manner as in Example 14, except that the propylene of Sample 5-3 was used instead of the propylene of Sample 5-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, it was confirmed that the etching proceeded normally at an etching rate of 134 nm/min without bowing or etch stop.
  • Example 11 A specimen was etched in the same manner as in Example 14 except that the propylene of Sample 5-2 was used instead of the propylene of Sample 5-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, the etching rate was 42 nm/min, and the occurrence of etch stop was confirmed.
  • Example 12 A specimen was etched in the same manner as in Example 14, except that the propylene of Sample 5-1 was used instead of the propylene of Sample 5-5.
  • Table 6 shows the etching rate of the silicon nitride film and the result of confirming whether or not bowing and etch stop occurred. As shown in Table 6, the etching rate was 39 nm/min, and the occurrence of etch stop was confirmed.

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WO2026075112A1 (ja) * 2024-10-02 2026-04-09 セントラル硝子株式会社 エッチング方法、半導体デバイスの製造方法及びエッチング装置

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WO2026075112A1 (ja) * 2024-10-02 2026-04-09 セントラル硝子株式会社 エッチング方法、半導体デバイスの製造方法及びエッチング装置

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