WO2023153703A1 - 전기 전도성 접촉핀 - Google Patents

전기 전도성 접촉핀 Download PDF

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Publication number
WO2023153703A1
WO2023153703A1 PCT/KR2023/001434 KR2023001434W WO2023153703A1 WO 2023153703 A1 WO2023153703 A1 WO 2023153703A1 KR 2023001434 W KR2023001434 W KR 2023001434W WO 2023153703 A1 WO2023153703 A1 WO 2023153703A1
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WO
WIPO (PCT)
Prior art keywords
electrically conductive
conductive contact
contact pin
connection
deformation preventing
Prior art date
Application number
PCT/KR2023/001434
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English (en)
French (fr)
Korean (ko)
Inventor
안범모
박승호
홍창희
Original Assignee
(주)포인트엔지니어링
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Application filed by (주)포인트엔지니어링 filed Critical (주)포인트엔지니어링
Publication of WO2023153703A1 publication Critical patent/WO2023153703A1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects

Definitions

  • the present invention relates to electrically conductive contact pins.
  • test object semiconductor wafer or semiconductor package
  • inspection device equipped with a plurality of electrically conductive contact pins
  • the electrically conductive contact pins are connected to the corresponding external terminals (solder balls or bumps, etc.) on the test object.
  • Examples of testing devices include, but are not limited to, probe cards or test sockets.
  • test sockets include a pogo type test socket and a rubber type test socket.
  • An electrically conductive contact pin (hereinafter referred to as 'pogo type socket pin') used in a pogo type test socket includes a pin unit and a barrel accommodating the pin unit.
  • a spring member between the plungers at both ends of the pin, it is possible to apply necessary contact pressure and absorb shock at the contact position.
  • a gap In order for the pin to slide within the barrel, a gap must exist between the outer surface of the pin and the inner surface of the barrel.
  • these pogo-type socket pins are manufactured separately from the barrel and pin and then combine them, it is impossible to precisely manage the gap, such that the outer surface of the pin is separated from the inner surface of the barrel more than necessary.
  • the pin portion has a sharp tip portion in order to increase the contact effect with the external terminal of the test object.
  • the pointed tip portion generates a press-fitting mark or groove on the external terminal of the test object after the test. Due to the loss of the contact shape of the external terminal, errors in vision inspection occur and reliability of the external terminal is deteriorated in a subsequent process such as soldering.
  • the electrically conductive contact pin (hereinafter referred to as 'rubber type socket pin') used in the rubber type test socket has a structure in which conductive microballs are placed inside a rubber material, silicon rubber, When stress is applied by raising the semiconductor package and closing the socket, the conductive microballs made of gold strongly press each other and the conductivity increases, making them electrically connected.
  • this rubber-type socket pin has a problem in that contact stability is secured only when it is pressed with an excessive pressing force.
  • the pitch of external terminals of an object to be inspected is becoming more narrow.
  • a molding material in which conductive particles are distributed in a fluid elastic material is prepared, the molding material is inserted into a predetermined mold, and then a magnetic field is applied in the thickness direction to move the conductive particles in the thickness direction. Since it is manufactured by arranging the magnetic field, when the distance between the magnetic fields is narrowed, the conductive particles are irregularly oriented and the signal flows in the plane direction. Therefore, existing rubber-type socket pins have limitations in responding to the narrow pitch technology trend.
  • pogo-type socket pin is used after separately manufacturing the barrel and the pin, it is difficult to manufacture them in a small size. Therefore, existing pogo-type socket pins also have limitations in responding to the narrow pitch technology trend.
  • Patent Document 1 Republic of Korea Registration No. 10-0659944 Patent Registration
  • Patent Document 2 Republic of Korea Registration No. 10-0952712 Patent Publication
  • the present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide an electrically conductive contact pin and an inspection device with improved inspection reliability for an inspection object.
  • Another object of the present invention is to prevent the electrically conductive contact pin from being damaged due to excessive buckling deformation in the left and right directions due to an eccentric pressing force.
  • an electrically conductive contact pin includes a first connection portion; a second connection; a support extending in the longitudinal direction; an elastic part connected to at least one of the first connection part and the second connection part and elastically deformable along the longitudinal direction; and an anti-deformation part extending in a longitudinal direction between the support part and the elastic part, wherein when a pressing force for compressing the elastic part acts eccentrically, the anti-deformation part comes into contact with the support part and is supported by the support part.
  • buckling deformation in the left and right directions of the elastic part is prevented.
  • the deformation preventing portion is positioned inside the support portion in the width direction to overlap at least a portion of the support portion.
  • the deformation preventing portion extends downward from both sides of the elastic portion.
  • the deformation preventing portion may include a first deformation preventing portion located on one side of the elastic portion; and a second deformation preventing portion opposite to the first deformation preventing portion and positioned on the other side of the elastic portion, wherein the first deformation preventing portion and the second deformation preventing portion extend downward from both sides of the elastic portion, respectively. It is connected to the elastic part.
  • the first connection part includes an upwardly protruding part extending upward from both sides of the elastic part.
  • the deformation preventing portion extends downward from an end of the first connection portion in the width direction, and at least a portion thereof is located inside the support portion in the width direction and overlaps at least a portion of the support portion.
  • the deformation preventing portion may include a first deformation preventing portion located on one side of the elastic portion; and a second deformation preventing portion opposite to the first deformation preventing portion and positioned on the other side of the elastic portion, wherein the first deformation preventing portion and the second deformation preventing portion are respectively positioned at an end portion of the first connection portion in the width direction. It extends downward and is connected to the first connection part.
  • the support portion includes a connecting portion provided on the inside of the support portion and extending in the width direction.
  • a first locking portion provided at one end of the support portion; includes.
  • the second connection unit may include a connection body unit; an inclined leg portion extending in one direction from both sides of the connection body portion; and a second catching portion provided at one end of the inclined leg portion.
  • connection unit may include a connection body unit; and a connection cavity formed in the connection body part.
  • the support portion a first holding portion provided at one end; and a second catching portion provided at the other end.
  • a plurality of metal layers are formed by being stacked in the thickness direction of the electrically conductive contact pin.
  • a fine trench provided on the side surface is included.
  • the first connection portion may include a contact portion; and a contact cavity formed in the base portion.
  • the electrically conductive contact pin of the present invention can improve inspection reliability.
  • the electrically conductive contact pin of the present invention prevents excessive buckling deformation of the upper end of the electrically conductive contact pin in the left and right directions through the deformation preventing portion when an eccentric pressing force is applied, thereby preventing breakage due to buckling deformation.
  • FIG. 1 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 2 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • Figure 3 is a perspective view of an installation member according to a preferred embodiment of the present invention.
  • FIG. 4 shows an electrically conductive contact pin according to a first preferred embodiment of the present invention installed on an installation member
  • Figure 5 is a diagram showing the inspection of the inspection target using the inspection device according to a preferred embodiment of the present invention.
  • Fig. 6 shows a state in which an electrically conductive contact pin according to a first preferred embodiment of the present invention receives an eccentric pressing force
  • FIG. 7 is a diagram representing a current path of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIG. 8A to 8D are diagrams for explaining a method of manufacturing an electrically conductive contact pin according to a first preferred embodiment of the present invention, wherein FIG. 8A is a plan view of a mold in which an internal space is formed, and FIG. 8B is a view A-A of FIG. 8A 'A cross-sectional view, Figure 8c is a plan view showing that the electroplating process is performed on the inner space, Figure 8d is a cross-sectional view A-A' of Figure 8c.
  • FIG. 9 is a side view of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIG. 10 is a plan view of an electrically conductive contact pin according to a second preferred embodiment of the present invention.
  • FIG. 11 is a plan view of an electrically conductive contact pin according to a third preferred embodiment of the present invention.
  • Embodiments described in this specification will be described with reference to sectional views and/or perspective views, which are ideal exemplary views of the present invention. Films and thicknesses of regions shown in these drawings are exaggerated for effective description of technical content.
  • the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes.
  • Technical terms used in this specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise.
  • the electrically conductive contact pins 100a, 100b, and 100c are provided in the test device 10 and are used to electrically and physically contact the test object 400 to transmit electrical signals.
  • the inspection device 10 may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket.
  • the test device 10 includes an installation member 200 having electrically conductive contact pins 100a, 100b and 100c and a through hole 210 accommodating the electrically conductive contact pins 100a, 100b and 100c.
  • the installation member 200 may be, for example, a guide plate GP having a guide hole GH.
  • the electrically conductive contact pins 100a, 100b, and 100c may be probe pins provided in a probe card or socket pins provided in a test socket.
  • a socket pin is exemplified and described as an example of the electrically conductive contact pins 100a, 100b, and 100c, but the electrically conductive contact pin 100a according to a preferred embodiment of the present invention is not limited thereto. All pins for checking whether the inspection object 400 is defective are included.
  • the width direction of the electrically conductive contact pins 100a, 100b, and 100c described below is the ⁇ x direction indicated in the drawing, and the length direction of the electrically conductive contact pins 100a, 100b, and 100c is the ⁇ y direction indicated in the drawing,
  • the thickness direction of the electrically conductive contact pins 100a, 100b, and 100c is the ⁇ z direction indicated in the drawing.
  • the electrically conductive contact pins 100a, 100b, and 100c have an overall length dimension L in a longitudinal direction, and an overall thickness dimension H in a thickness direction ( ⁇ z direction) perpendicular to the longitudinal direction ( ⁇ y direction). , and has an overall width dimension (W) in a width direction ( ⁇ x direction) perpendicular to the length direction ( ⁇ y direction).
  • an electrically conductive contact pin (100a, hereinafter referred to as 'electrically conductive contact pin of the first embodiment') according to a first preferred embodiment of the present invention will be described with reference to FIGS. 1 to 9.
  • FIG. 1 is a plan view of an electrically conductive contact pin 100a of the first embodiment
  • FIG. 2 is a perspective view of the electrically conductive contact pin 100a of the first embodiment
  • FIG. 3 is an installation member according to a preferred embodiment of the present invention ( 200)
  • FIG. 4 is a view showing that the electrically conductive contact pin 100a of the first embodiment is installed on the installation member 200
  • FIG. 5 shows the inspection device 10 according to a preferred embodiment of the present invention.
  • FIG. 6 is a diagram showing a state in which an electrically conductive contact pin 100a receives an eccentric pressing force according to the first embodiment
  • FIG. 8A to 8D are diagrams illustrating a method of manufacturing the electrically conductive contact pins 100a according to the first embodiment
  • FIG. 8A is a plan view of a mold in which an internal space is formed.
  • 8B is a cross-sectional view A-A′ of FIG. 8A
  • FIG. 8C is a plan view illustrating that an electroplating process is performed on an internal space
  • FIG. 8D is a cross-sectional view A-A′ of FIG. 8C
  • FIG. It is an enlarged view of a part of the side surface of the electrically conductive contact pin 100a according to one embodiment.
  • the electrically conductive contact pin 100a of the first embodiment includes a first connection part 110, a second connection part 120, and a support part 130 extending in the longitudinal direction ( ⁇ y direction). ), and between the elastic part 150 connected to at least one of the first connection part 110 and the second connection part 120 and elastically deformable along the longitudinal direction ( ⁇ y direction), and the support part 130 and the elastic part It includes a deformation preventing part 160 extending in the longitudinal direction ( ⁇ y direction) from
  • the first connection part 110, the second connection part 120, the support part 130, the elastic part 150, and the deformation prevention part 160 are integrally provided.
  • the first connection part 110, the second connection part 120, the support part 130, the elastic part 150, and the deformation preventing part 160 are manufactured at once using a plating process.
  • the electrically conductive contact pins 100a of the first embodiment are formed by filling the inner space 1100 with a metal material by electroplating using the mold 1000 having the inner space 1100 . Accordingly, the first connection part 110, the second connection part 120, the support part 130, the elastic part 150, and the deformation preventing part 160 are connected to each other and manufactured as an integral part.
  • the electrically conductive contact pins 100a of the first embodiment have a first connection part 110 and a second connection part 120.
  • the support part 130, the elastic part 150, and the deformation preventing part 160 are manufactured at once using a plating process, so that there is a structural difference in that they are integrally provided.
  • the electrically conductive contact pins 100a of the first embodiment have the same shape in each cross section in the thickness direction ( ⁇ z direction) in the thickness direction. In other words, the same shape on the x-y plane is formed extending in the thickness direction ( ⁇ z direction).
  • the electrically conductive contact pin 100a of the first embodiment is provided by stacking a plurality of metal layers in its thickness direction ( ⁇ z direction).
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102 .
  • the first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), or nickel (Ni). , manganese (Mn), tungsten (W), phosphorus (Ph) or alloys thereof, or palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy or nickel-phosphorus (NiPh) alloy, nickel-manganese (NiMn ), a nickel-cobalt (NiCo) or a nickel-tungsten (NiW) alloy.
  • the second metal layer 102 is a metal having relatively high electrical conductivity compared to the first metal layer 101, and is preferably formed of a metal selected from among copper (Cu), silver (Ag), gold (Au), or alloys thereof. It can be. However, it is not limited thereto.
  • the first metal layer 101 is provided on the lower and upper surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101 .
  • the electrically conductive contact pin 100a is provided by alternately stacking the first metal layer 101, the second metal layer 102, and the first metal layer 101 in the order of its thickness direction ( ⁇ z direction),
  • the number of layers to be stacked may consist of three or more layers.
  • the first connection part 110 includes a contact part 110a and an upwardly protruding part 111 that come into contact with the test object 400 .
  • the contact portion 110a is a portion in contact with the connection terminal 410 of the test object 400 .
  • the contact portion 110a is formed to extend in the width direction ( ⁇ x direction).
  • a lower surface of one end of the contact portion 110a in the width direction ( ⁇ x direction) is connected to the elastic portion 150 .
  • the upwardly protruding portion 111 extends upward from both sides of any one straight portion 153 of the straight portion 153 of the elastic portion 150 including a plurality of straight portions 153 and curved portions 154 and is provided. .
  • one of the straight parts 153 functions as a connecting part 140 connecting the elastic part 150 and the upwardly protruding part 111 .
  • the upwardly protruding portion 111 extends in the longitudinal direction ( ⁇ y direction) from the elastic portion (specifically, the straight portion 153 serving as the connecting portion 140) to a position corresponding to the first connection portion 110.
  • the upwardly protruding portion 111 includes a contact protrusion 110c provided at a position corresponding to the first connection portion 110 .
  • the contact protrusion 110c is provided on the upper end of the upwardly protruding portion 111 and protrudes outward in the width direction ( ⁇ x direction).
  • An upper surface of the contact protrusion 110c is inclined downward in the width direction ( ⁇ x direction). Accordingly, the upwardly protruding portion 111 has an upper surface inclined downward in the width direction ( ⁇ x direction).
  • the upwardly protruding portion 111 may contact the connection terminal 410 through its upper surface and contact the upper end of the support portion 130 by the pressing force of the connection terminal 410 to form a current path.
  • the first connection part 110 is connected to the elastic part 150 and can move vertically ( ⁇ y direction) elastically by contact pressure.
  • the connection terminal 410 of the test object 400 is in contact with the upper surface of the first connection portion 110 and gradually releases the elastic portion 150 connected to the first connection portion 110 side. It comes into contact with the upper surface of the upwardly protruding portion 111 while being compressed and deformed.
  • the connection terminal 410 continues to move downward (-y direction) while compressing and deforming the elastic part 150 .
  • the contact protrusion 110c of the upwardly protruding portion 111 contacts the upper end of the support portion 130 to form a current path.
  • the upwardly protruding portion 111 comes into contact with the upper end of the support portion 130 through the contact protrusion portion 110c. It is supported by the upper end at 130. Due to this, the upwardly protruding portion 111 can prevent excessive buckling deformation in the left and right directions of the electrically conductive contact pin 100a of the first embodiment.
  • the elastic part 150 has the same cross-sectional shape in the thickness direction of the electrically conductive contact pin 100a of the first embodiment in all thickness sections. This is possible because the electrically conductive contact pins 100a of the first embodiment are fabricated through a plating process.
  • the elastic part 150 has a shape in which a plate-like plate having an actual width t is repeatedly bent in an S shape, and the actual width t of the plate-like plate is generally constant.
  • the elastic part 150 is formed by alternately contacting a plurality of straight parts 153 and a plurality of curved parts 154 .
  • the straight portion 153 connects the curved portion 154 adjacent to the left and right.
  • the curved part 154 connects the straight part 153 adjacent to the top and bottom.
  • the curved portion 154 is provided in an arc shape.
  • a straight portion 153 is disposed at the center of the elastic portion 150 and a curved portion 154 is disposed at an outer portion of the elastic portion 150 .
  • the straight portions 153 are provided in parallel in the width direction ( ⁇ x direction) so that the curved portion 154 is more easily deformed according to the contact pressure.
  • the straight portion 153 is provided inside the support portion 130 and extends in the width direction ( ⁇ x direction). Accordingly, at least one of the straight portions 153 functions as a connecting portion 140 .
  • the connecting portion 140 serves to connect the upwardly protruding portion 111 and the elastic portion 150 and to connect the deformation preventing portion 160 and the elastic portion 150 .
  • Both sides of the connecting portion 140 are provided with a thin portion 141.
  • the electrically conductive contact pin 100a of the first embodiment has a thin portion 141 extending in width by a predetermined amount in the width direction ( ⁇ x direction) at both sides of the connection portion 140 . Accordingly, the thin portion 141 is provided at both ends of the connection portion 140, and the upwardly protruding portion 111 extends upward from the thin portion 141 provided on both sides of the connection portion 140.
  • the deformation preventing portion 160 extends downward from the thin portion 141 provided on both sides of the connecting portion 140 .
  • the outer surface of the thin portion 141 in the width direction ( ⁇ x direction) has a convex shape and is formed to protrude more than the peripheral portion in the width direction ( ⁇ x direction) by a predetermined amount.
  • One of the upwardly protruding parts 111 is in contact with the upper end of the support part 130 by the eccentric pressing force and is supported by the support part 130, and one of the deformation preventing parts 160 is on the inner surface of the support part 130.
  • the thin part 141 can prevent the connection part of the connecting part 140, the upwardly protruding part 111, and the deformation preventing part 160 from being easily damaged.
  • the support part 130 is formed to extend in the longitudinal direction ( ⁇ y direction) and is provided outside the width direction ( ⁇ x direction) of the first connection part 110 connected to the elastic part 150 . In a state in which the elastic part 150 is not compressed, the support part 130 and the upwardly protruding part 111 of the first connection part 110 are spaced apart from each other.
  • the support part 130 includes a first support part 130a located on one side of the first connection part 110 and a second support part 130b located on the other side of the first connection part 110 .
  • the support part 130 has a first hanging part SP1 at one end.
  • the first hanging part SP1 is formed to protrude outward in the width direction ( ⁇ x direction).
  • the first hanging part SP1 is one end of the support part 130 that is close to the first connection part 110 provided on the upper part of the elastic part 150 in the longitudinal direction ( ⁇ y direction) with respect to the elastic part 150. are provided in In other words, the first hooking part SP1 is provided to protrude outward in the width direction ( ⁇ x direction) at the upper end of the support part 130 .
  • the support portion 130 is formed by bending inward in the width direction ( ⁇ x direction) of the electrically conductive contact pin 100a toward the other end (lower end).
  • the support part 130 is provided at the other end of the first width changing part 131a that reduces the distance between the support parts 130 in the width direction ( ⁇ x direction) and below the first width changing part 131a. It includes a second width deformation portion 131b which is inclined inwardly in the width direction ( ⁇ x direction) towards the end.
  • the support part 130 includes a width-changing connection part 132 connecting the first and second width-changing parts 131a and 131b between the first width-changing part 131a and the second width-changing part 131b.
  • the support part 130 includes a stopper part 133 concave inward in the width direction ( ⁇ x direction) by the first width changing part 131a.
  • the electrically conductive contact pin 100a of the first embodiment may limit the downward movement of the deformation preventing portion 160 according to the compressive deformation of the elastic portion 150 through the stopper portion 133 .
  • the stopper part 133 of the support part 130 may serve as a stopper limiting the descent of the deformation preventing part 160 .
  • An end of the second width changing portion 131b of the support portion 130 is connected to the second connection portion 120 .
  • the second connector 120 is in contact with the pad 310 of the circuit board.
  • the second connection part 120 includes a connection body part 120a, an inclined leg part 120b extending in one direction from both sides of the connection body part 120a, and a second catch provided at one end of the inclined leg part 120b. It includes part SP2.
  • connection body portion 120a is formed to have a predetermined thickness in the longitudinal direction ( ⁇ y direction), and is formed to increase in width in the width direction ( ⁇ x direction) from top to bottom.
  • the upper end of the connection body part 120a is connected to the elastic part 150 .
  • the second connection part 120 has at least one pad contact protrusion 120c at the lower end of the connection body part 120a to make multi-contact with the pad 310 of the circuit board.
  • the pad contact protrusion 120c is formed along the thickness direction ( ⁇ z direction) of the connection body portion 120a and is formed to protrude and extend longer than the peripheral portion in the longitudinal direction ( ⁇ y direction).
  • the electrically conductive contact pin 100a of the first embodiment includes four pad contact protrusions 120c. Each pad contact protrusion 120c is spaced apart by a groove 121 provided between the pad contact protrusions 120c.
  • the two pad contact protrusions 120c provided on the outer portion are provided through the other end of the inclined leg portion 120b not provided with the second hooking portion SP2.
  • the second connector 120 contacts the pad 310 of the circuit board through the pad contact protrusion 120c and is pressed.
  • the second connection part 120 includes inclined leg parts 120b extending upward from both ends in the width direction ( ⁇ x direction) of the connection body part 120a.
  • the inclined leg portion 120b is formed to be inclined so that its width increases outward in the width direction ( ⁇ x direction) from the bottom to the top.
  • the connection body part 120a has a second hanging part SP2 at the upper end of the inclined leg part 120b.
  • the second hooking part SP2 protrudes inward in the width direction ( ⁇ x direction).
  • Ends of the second width changing portion 131b are connected to both ends in the width direction ( ⁇ x direction) of the middle portion of the connection body portion 120a. Accordingly, the second connection part 120 and the support part 130 are connected.
  • the electrically conductive contact pin 100a of the first embodiment includes the second width changing portion 131b inside the inclined leg portion 120b of the second connection portion 120 in the width direction ( ⁇ x direction).
  • the inclined leg portion 120b and the second width changing portion 131b are spaced apart from each other, but have a corresponding shape inclining inward in the width direction ( ⁇ x direction) from the top to the bottom. Such a shape makes it easier to insert the electrically conductive contact pin 100a of the first embodiment into the guide hole GH of the guide plate GP.
  • the electrically conductive contact pin 100a of the first embodiment has a first hooking part SP1 at an upper end through one end (upper end) of the support part 130, and a second width changing part 131b and The width in the width direction ( ⁇ x direction) of the lower end of the electrically conductive contact pin 100a is reduced from top to bottom through the inclined leg portion 120b.
  • the electrically conductive contact pin 100a of the first embodiment When the electrically conductive contact pin 100a of the first embodiment is inserted into the guide hole GH, the lower end including the second hooking part SP2 is compressed inward in the width direction ( ⁇ x direction) so that the second connection part 120 ) side is inserted first. At this time, the electrically conductive contact pin 100a of the first embodiment has a smaller width in the width direction ( ⁇ x direction) than the opening of the guide hole GH by the second width changing portion 131b and the inclined leg portion 120b. It is made easier to compress and deform the lower part to have
  • the electrically conductive contact pin 100a of the first embodiment is forcibly pushed into the guide hole GH by pressing it from the top to the bottom.
  • the electrically conductive contact pin 100a of the first embodiment is compressed in the width direction ( ⁇ x direction) and moved to the lower part of the guide hole GH.
  • the electrically conductive contact pin 100a of the first embodiment is supported when the second catching portion SP2 passes through the lower opening of the guide hole GH and the second catching portion SP2 is supported on the lower surface of the guide hole GH. is pushed upwards until Through this, the upper part of the electrically conductive contact pin 100a of the first embodiment including the first hooking part SP1 protrudes from the upper surface of the guide plate GP.
  • the electrically conductive contact pin 100a of the first embodiment is prevented from upwardly departing from the guide hole GH through the second locking portion SP2, and is prevented from escaping from the guide hole GH through the first locking portion SP1. The downward departure of is prevented.
  • the length of the support portion 130 is longer than the length of the guide hole GH, so that at least a portion of the support portion 130 is formed through the guide hole GH when insertion is completed. (GH) protrudes outward. Accordingly, a separation distance h is provided between the upper surface of the guide plate GP and the first hanging part SP1.
  • the electrically conductive contact pins 100a of the first embodiment may secure the contact stroke of the test object 400 through the separation distance h.
  • the electrically conductive contact pins 100a of the first embodiment secure a space equal to the distance h from the upper surface of the guide plate GP formed around the guide hole GH through the distance h. Due to this, when the electrically conductive contact pin 100a of the first embodiment is pressed by the connection terminal 410 and moves downward, the electrically conductive contact pin 100a of the first embodiment is moved within the free space provided through the separation distance h. It can move downward as a whole.
  • connection terminal 410 moves downward to contact the electrically conductive contact pin 100a of the first embodiment
  • the stroke may not be constant. Therefore, the separation distance h provided by protruding from the guide hole GH providing a free space between the first hanging part SP1 of the support part 130 and the guide plate GP is not secured. Otherwise, the electrically conductive contact pin 100a of the first embodiment may be excessively pressed. This may cause damage to the electrically conductive contact pins 100a of the first embodiment.
  • the upper end of the support part 130 protrudes beyond the guide hole GH, so that the separation distance (h) between the first hanging part SP1 and the guide plate GP is reduced.
  • the contact stroke is secured through
  • the separation distance (h) between the first hanging part SP1 of the support part 130 and the guide plate GP is reduced. Through this, damage can be prevented by moving downward as a whole.
  • the separation distance (h) may be formed to be 5 ⁇ m or more and 50 ⁇ m or less. If the separation distance (h) is less than 5 ⁇ m, it is difficult to secure the contact stroke of the inspection object, and if it exceeds 50 ⁇ m, excessive deformation of the contact pin (100a) may occur or the support part 130 may be damaged. is not desirable because there is
  • the deformation preventing part 160 is provided between the support part 130 and the elastic part 150 based on the width direction ( ⁇ x direction). In a state in which the elastic part 150 is not compressed, the deformation preventing part 160 is spaced apart from the support part 130 .
  • the deformation preventing part 160 is connected to the elastic part 150 by any one functioning as the connection part 140 among the straight parts 153 of the elastic part 150 and is provided.
  • the straight portion 153 serving as the connecting portion 140 is preferably a straight portion 153 having an upwardly protruding portion 111 .
  • the deformation preventing part 160 extends downward from both sides of the elastic part 150 . More specifically, the deformation preventing portion 160 extends downward from both ends of any one width direction ( ⁇ x direction) of the straight portion 153 of the elastic portion 150 .
  • the straight portion 153 serving as the connecting portion 140 includes upward protruding portions 111 extending upward from both sides, and includes deformation preventing portions 160 extending downward from both sides.
  • the deformation preventing portion 160 has a predetermined length from the connecting portion 140 and extends downward. Due to this, the deformation preventing part 160 is positioned so as to correspond to the middle part of the supporting part 130 in a state where one end is inserted into the longitudinal direction ( ⁇ y direction) of the supporting part 130 by a predetermined length.
  • the deformation prevention part 160 is located inside the support part 130 in the width direction ( ⁇ x direction) of the support part 130 including at least a part of the support part 130 (specifically, the first holding part SP1). upper part) and the width direction ( ⁇ x direction). Due to this, the deformation prevention part 160 is in contact with the support part 130 by the eccentric pressing force of the connection terminal 410 and is supported by the support part 130 .
  • the length extending from the connecting portion 140 is formed to be longer than a predetermined length, so that one end of the deformation preventing portion 160 is at the base of the support portion 130. Position it so that it corresponds to the middle part side. Accordingly, the deformation preventing portion 160 is positioned to correspond to the middle portion of the supporting portion 130 in a state in which one end thereof is inserted into the supporting portion 130 by a predetermined length in the longitudinal direction ( ⁇ y direction).
  • the electrically conductive contact pin 100a of the first embodiment has an inner surface of the support part 130 as a vertical surface.
  • the deformation preventing part 160 extends vertically from both sides of the elastic part 150 to the bottom along the longitudinal direction ( ⁇ y direction). Accordingly, at the upper end of the support part 130, the support part 130 and the deformation preventing part 160 are overlapped in the width direction ( ⁇ x direction) before the elastic part 150 is compressed and deformed, but provided in parallel to each other. do.
  • the deformation preventing part 160 includes an auxiliary contact protrusion 161 provided at a free end.
  • the auxiliary contact protrusion 161 protrudes convexly outward in the width direction ( ⁇ x direction) from the free end of the deformation preventing part 160 .
  • the deformation preventing part 160 comes into contact with the support part 130 and is supported by the support part 130, thereby buckling the elastic part 150 in the left and right directions. prevent deformation.
  • connection terminal 410 of the inspection object 400 moves downward (-y direction) while sequentially contacting the upper surface of the first connection part 110 and the upper surface of the upwardly protruding part 111. move Specifically, the connection terminal 410 first contacts the top surface of the first connection portion 110 and compresses and deforms the elastic portion 150 while contacting the inclined top surface of the upwardly protruding portion 111 . The connection terminal 410 moves downward while being in contact with the upper surface of the contact protrusion 110c of the first connection portion 110 and the upwardly protruding portion 111 . Accordingly, the first connection portion 110 and the upwardly protruding portion 111 gradually move downward, and the contact protrusion 110c contacts the upper end of the support portion 130 .
  • connection terminal 410 compresses and deforms the elastic part 150 connected to the first connection part 110
  • the contact protrusion 110c of the upwardly protruding part 111 comes into contact with the support part 130, and the pad 310 is in contact with the pad contact protrusion 120c of the second connection part 120 to compress and deform the elastic part 150 connected to the second connection part 120 .
  • the electrically conductive contact pin 100a of the first embodiment forms a current path leading to the first connection part 110 , the support part 130 , and the second connection part 120 .
  • the electrically conductive contact pins 100a of the first embodiment may receive a uniform pressing force through the connection terminals 410, the first embodiment is eccentric due to alignment errors or manufacturing errors of the connection terminals 410 of the object 400 to be inspected. may be subjected to pressure.
  • the electrically conductive contact pin 100a of the first embodiment may receive an eccentric pressing force. Accordingly, the pressing force for compressing the elastic part 150 acts eccentrically.
  • the elastic part 150 is compressed and deformed while tilting in the direction in which the pressing force is applied.
  • the deformation preventing part 160 is in contact with the inner surface of the support part 130 according to the compressive deformation inclined to one side of the elastic part 150 .
  • the auxiliary contact protrusion 161 of the deformation preventing part 160 contacts the inner surface of the support part 130 .
  • the deformation preventing part 160 is a first deformation preventing part 160a located on one side of the elastic part 150 and a second deformation preventing part 160a located on the other side of the elastic part 150 opposite to the first deformation preventing part 160a. It includes a prevention part (160b).
  • the first and second deformation prevention parts 160a and 160b extend downward from both sides of the elastic part 150 and are connected to the elastic part 150 .
  • the first deformation preventing part 160a extends downward from one end of the straight part 153 functioning as the connecting part 140, and the other end of the straight part 153 extends It extends to the lower part of the double deformation prevention part 160b and is connected to the elastic part 150.
  • the auxiliary contact protrusion 161 of the first deformation preventing part 160a moves inside the first support part 130a. come into contact with the side
  • the first deformation preventing part 160a is in contact with the support part 130, and the first support part 130a form a supporting structure.
  • the deformation preventing part 160 is in contact with the inner surface of the support part 130, so that the support part 130 By forming a supporting structure, excessive buckling deformation of the elastic part 150 in the left and right directions can be prevented.
  • the electrically conductive contact pin 100a of the first embodiment includes the deformation preventing portion 160, so that when the elastic portion 150 is compressed and deformed by an eccentric pressing force, the deformation preventing portion 160 contacts the support portion 130. It has a structure supported by the support portion 130.
  • the deformation preventing part 160 is in contact with the support part 130. It is supported by the furnace support part 130. In the electrically conductive contact pin 100a of the first embodiment, when the deformation preventing portion 160 is supported by the support portion 130, a force is generated to prevent further tilting.
  • the electrically conductive contact pin 100a of the first embodiment cannot be further tilted through the deformation preventing portion 160 at a predetermined tilted position even if the elastic portion 150 is compressed and deformed while being biased to one side by an eccentric pressing force. It can be prevented. Therefore, the conductive contact pin 100a of the first embodiment prevents excessive buckling deformation in the left and right directions through the deformation preventing portion 160 even when an eccentric pressing force is applied to the conductive contact pin 100a of the first embodiment. can do. Furthermore, the problem of breakage due to buckling deformation can be prevented.
  • connection terminal 410 contacts only one of at least a portion of the upper surface of the contact portion 110a and the upwardly protruding portion 111 of the first connection portion 110 to form the electrically conductive contact pin 100a of the first embodiment. ), an eccentric pressing force may act.
  • one of the upward protrusions 111 is in contact with the support 130 and the other is not in contact with the support 130, or is in contact and falls off, making it unstable. Even if they are in contact, a current path can be stably formed through the deformation preventing part 160 .
  • the upwardly protruding portion 111 that is not in contact with the support portion 130 and the deformation prevention portion 160 corresponding to the up and down directions are in contact with the support portion 130 so that the contact state with the support portion 130 is unstable ( 111) side current path can be formed.
  • the upward protruding part 111 is provided on the upper part of the first deformation preventing part 160a, and the first upwardly protruding part 111a and the second deformation preventing part 160b correspond to the first deformation preventing part 160a in the upward and downward directions. ) and includes a second upwardly protruding part 111b that is provided on the top and corresponds to the second deformation prevention part 160b in the upward and downward directions.
  • the first and second upwardly projecting portions 111a and 111b are provided to face each other.
  • connection terminal 410 comes into contact with the second upwardly projecting portion 111b and an eccentric pressing force acts on the electrically conductive contact pin 100a of the first embodiment
  • the second upwardly projecting portion 111b In contact with the second support portion 130b, the first upward protruding portion 111a is in a non-contact state with the first support portion 130a.
  • the current path on the side of the second upward protruding portion 111b is formed relatively stably, but the current path on the side of the first upwardly protruding portion 111a is not formed.
  • the first deformation prevention part 160a is in contact with the first support part 130a by applying the eccentric pressing force toward the second upward protruding part 111b, and is supported by the first support part 130a. Therefore, the first deformation preventing part 160a provided under the first upwardly protruding part 111a is in stable contact with the first supporting part 130a to correspond to the side of the first upwardly protruding part 111a. ) to form a stable current path.
  • FIG. 8A is a plan view of the mold 1000 in which the inner space 1100 is formed
  • FIG. 8B is a cross-sectional view taken along line A-A' of FIG. 8A.
  • the mold 1000 may be made of an anodic oxide film, photoresist, silicon wafer, or a material similar thereto. However, preferably, the mold 1000 may be made of an anodic oxide film material.
  • the anodic oxide film means a film formed by anodic oxidation of a base metal
  • the pore means a hole formed in the process of forming an anodic oxide film by anodic oxidation of a metal.
  • the base metal is aluminum (Al) or an aluminum alloy
  • Al 2 O 3 aluminum oxide
  • the base metal is not limited thereto, and includes Ta, Nb, Ti, Zr, Hf, Zn, W, Sb, or an alloy thereof.
  • the anodic oxide film formed as above is a barrier layer without pores formed vertically therein. And, it is divided into a porous layer in which pores are formed. In the base material on which the anodic oxide film having the barrier layer and the porous layer is formed, when the base material is removed, only the anodic oxide film made of aluminum oxide (Al 2 O 3 ) remains.
  • the anodic oxidation film may be formed in a structure in which the barrier layer formed during anodic oxidation is removed to pass through the upper and lower pores, or in a structure in which the barrier layer formed during anodic oxidation remains as it is and seals one end of the upper and lower portions of the pores.
  • the anodic oxide film has a thermal expansion coefficient of 2 to 3 ppm/°C. Due to this, when exposed to a high temperature environment, thermal deformation due to temperature is small. Accordingly, the electrically conductive contact pins 100a can be manufactured precisely without thermal deformation even in a high-temperature environment.
  • the electrically conductive contact pin 100a of the first embodiment is manufactured using the mold 1000 made of anodized film instead of the photoresist mold, the photoresist mold has limitations in realizing the precision of the shape and the implementation of the fine shape effect can be exerted.
  • an electrically conductive contact pin having a thickness of 40 ⁇ m can be manufactured, but in the case of using the mold 1000 made of anodized film, an electrically conductive contact pin having a thickness of 100 ⁇ m or more to 200 ⁇ m or less ( 100a) can be produced.
  • a seed layer 1200 is provided on the lower surface of the mold 1000 .
  • the seed layer 1200 may be provided on the lower surface of the mold 1000 before forming the inner space 1100 in the mold 1000 .
  • a support substrate (not shown) is formed under the mold 1000 to improve handling of the mold 1000 .
  • the seed layer 1200 is formed on the upper surface of the support substrate and the mold 1000 in which the inner space 1100 is formed may be used by being coupled to the support substrate.
  • the seed layer 1200 may be formed of a copper (Cu) material and may be formed by a deposition method.
  • the inner space 1100 may be formed by wet etching the mold 1000 made of an anodic oxide film. To this end, a photoresist is provided on the upper surface of the mold 1000 and patterned, and then the anodic oxide film in the patterned open area reacts with the etching solution to form the inner space 1100 .
  • FIG. 8C is a plan view illustrating an electroplating process performed on the inner space 1100
  • FIG. 8D is a cross-sectional view A-A' of FIG. 8C.
  • the metal layer is formed while growing in the thickness direction ( ⁇ z direction) of the mold 1000, the shape of each cross section in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a is the same, and the electrically conductive contact pin 100a has the same shape.
  • a plurality of metal layers are stacked in the thickness direction ( ⁇ z direction) of the fin 100a.
  • the plurality of metal layers include a first metal layer 101 and a second metal layer 102 .
  • the first metal layer 101 is a metal having relatively high wear resistance compared to the second metal layer 102, and is made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium or any of these.
  • the second metal layer 102 is a metal having relatively higher electrical conductivity than the first metal layer 101 and includes copper (Cu), silver (Ag), gold (Au), or an alloy thereof.
  • the first metal layer 101 is provided on the lower and upper surfaces of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction), and the second metal layer 102 is provided between the first metal layers 101 .
  • the electrically conductive contact pin 100a is provided by alternately stacking the first metal layer 101, the second metal layer 102, and the first metal layer 101 in this order, and the number of layers is three or more. It can be.
  • the first metal layer 101 and the second metal layer 102 may be made more dense by raising the temperature to a high temperature and pressing the metal layer on which the plating process is completed by applying pressure.
  • a photoresist material is used as a mold, a process of raising the temperature to a high temperature and applying pressure cannot be performed because the photoresist exists around the metal layer after the plating process is completed.
  • the mold 1000 made of an anodic oxide film is provided around the metal layer on which the plating process is completed, deformation is minimized due to the low thermal expansion coefficient of the anodic oxide film even when the temperature is raised to a high temperature. It is possible to densify the first metal layer 101 and the second metal layer 102 . Therefore, it becomes possible to obtain a higher density first metal layer 101 and second metal layer 102 compared to a technique using a photoresist as a mold.
  • a process of removing the mold 1000 and the seed layer 1200 is performed.
  • the mold 1000 is made of an anodic oxide film material
  • the mold 1000 is removed using a solution that selectively reacts to the anodic oxide film material.
  • the seed layer 1200 is made of copper (Cu)
  • the seed layer 1200 is removed using a solution that selectively reacts with copper (Cu).
  • the electrically conductive contact pin 100a of the first embodiment includes a plurality of fine trenches 88 on its side surface.
  • the fine trench 88 is formed to elongate from the side of the electrically conductive contact pin 100a in the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a.
  • the thickness direction ( ⁇ z direction) of the electrically conductive contact pin 100a means a direction in which metal fillers grow during electroplating.
  • the fine trench 88 has a depth of 20 nm or more and 1 ⁇ m or less, and a width of 20 nm or more and 1 ⁇ m or less.
  • the width and depth of the fine trench 88 have a value equal to or less than the range of the diameter of the pore of the anodic oxide film mold 1000. .
  • the anodic oxide film mold 1000 includes numerous pores, at least a part of the anodic oxide film mold 1000 is etched to form an inner space 1100, and a metal filler is formed by electroplating into the inner space 1100, A fine trench 88 formed while contacting the pores of the anodic oxide film mold 1000 is provided on the side surface of the electrically conductive contact pin 100a.
  • the fine trench 88 as described above has an effect of increasing the surface area on the side surface of the electrically conductive contact pin 100a.
  • the heat generated in the electrically conductive contact pin 100a can be quickly dissipated, thereby suppressing the temperature rise of the electrically conductive contact pin 100a. You can do it.
  • the configuration of the micro trench 88 formed on the side surface of the electrically conductive contact pin 100a it is possible to improve torsional resistance when the electrically conductive contact pin 100a is deformed.
  • the overall length L of the electrically conductive contact pin 100a should be short. Accordingly, the length of the elastic part 150 should also be shortened. However, when the length of the elastic part 150 is shortened, a problem of increasing contact pressure occurs. In order to keep the contact pressure from increasing while shortening the length of the elastic part 150, the actual width t of the plate-shaped plate constituting the elastic part 150 should be reduced. However, if the actual width t of the plate-shaped plate constituting the elastic part 150 is reduced, the elastic part 150 may be easily damaged. In order to shorten the length of the elastic part 150 and prevent damage to the elastic part 150 without increasing the contact pressure, the total thickness H of the plate-shaped plate constituting the elastic part 150 should be formed large.
  • the electrically conductive contact pin 100a of the first embodiment is formed such that the overall thickness H of the plate-shaped plate is large while the actual width t of the plate-shaped plate is thin. That is, the overall thickness dimension (H) is formed to be larger than the actual width (t) of the plate-shaped plate.
  • the actual width (t) of the planar plate constituting the electrically conductive contact pin (100a) is provided in the range of 5 ⁇ m or more and 15 ⁇ m or less, and the total thickness (H) is in the range of 70 ⁇ m or more and 200 ⁇ m or less.
  • the actual width (t) and total thickness (H) of the plate-shaped plate are provided in the range of 1:5 to 1:30.
  • the actual width of the plate-like plate is formed to be substantially 10 ⁇ m, and the total thickness dimension (H) is formed to be 100 ⁇ m, so that the effective width (t) and the total thickness dimension (H) of the plate-like plate are formed to be 1:10. can be made in proportion.
  • the overall thickness (H) and the overall length (L) of the electrically conductive contact pin (100a) are provided in the range of 1:3 to 1:9.
  • the overall length dimension (L) of the electrically conductive contact pin 100a may be provided in the range of 300 ⁇ m or more and less than 2 mm, and more preferably may be provided in the range of 350 ⁇ m or more and 600 ⁇ m or less.
  • planar plate constituting the electrically conductive contact pin 100a has a substantially smaller width t than the thickness H, resistance to bending in the front and rear directions is improved.
  • the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a of the first embodiment are provided in the range of 1:1 to 1:5.
  • the overall thickness (H) of the electrically conductive contact pins (100a) is provided in the range of 70 ⁇ m or more and 200 ⁇ m or less
  • the overall width (W) of the electrically conductive contact pins (100a) is 100 ⁇ m or more and 500 ⁇ m or less.
  • the total width W of the electrically conductive contact pin 100a may be provided in a range of 150 ⁇ m or more and 400 ⁇ m or less. In this way, by shortening the overall width W of the electrically conductive contact pin 100a, it is possible to narrow the pitch.
  • the overall thickness (H) and the overall width (W) of the electrically conductive contact pin 100a of the first embodiment may be formed to have substantially the same length. Accordingly, there is no need to bond a plurality of electrically conductive contact pins 100a in the thickness direction ( ⁇ z direction) so that the overall thickness dimension H and the overall width dimension W have substantially the same length.
  • the electrically conductive contact pin (100a) acts in the front and rear directions. The resistance to the moment is increased, and as a result, the contact stability is improved.
  • the overall thickness H of the electrically conductive contact pin 100a is 70 ⁇ m or more, and the overall thickness H and the overall width W are in the range of 1:1 to 1:5. While overall durability and deformation stability of the conductive contact pin 100a are improved, contact stability with the connection terminal 410 is improved. In addition, as the total thickness H of the electrically conductive contact pin 100a is formed to be 70 ⁇ m or more, current carrying capacity can be improved.
  • the electrically conductive contact pin 100a manufactured using a conventional photoresist mold cannot have a large overall thickness due to alignment problems because the mold is formed by laminating a plurality of photoresists. As a result, the overall thickness dimension (H) is small compared to the overall width dimension (W). For example, since the conventional electrically conductive contact pin 100a has an overall thickness H of less than 70 ⁇ m and an overall thickness H and an overall width W in the range of 1:2 to 1:10. , the resistance to the moment that deforms the electrically conductive contact pin 100a in the forward and backward directions by the contact pressure is weak.
  • FIG. 10 is a plan view of an electrically conductive contact pin 100b of the second embodiment.
  • the electrically conductive contact pin 100b of the second embodiment is formed on a first connection portion 110 including a contact portion 110a and an upwardly protruding portion 111, a connection body portion 120a, and a connection body portion 120a.
  • the second connection part 120 including the connection cavity 120d, the elastic part 150 provided between the first and second connection parts 110 and 120 in the longitudinal direction ( ⁇ y direction), and the width direction ( ⁇ y direction). It includes a support part 130 provided outside the elastic part 150 in the x direction) and a deformation preventing part 160 provided between the support part 130 and the elastic part 150 in the width direction ( ⁇ x direction). .
  • the electrically conductive contact pin 100b of the second embodiment includes a first protruding connection portion 170a extending outward in the width direction ( ⁇ x direction) from at least one end of the straight portion 153 close to the second connection portion 120. ), and a second protruding connection portion 170b extending outward in the width direction ( ⁇ x direction) from the other end of the same straight portion 153.
  • the first and second protruding connection portions 170a and 170b may be provided at the same position in the longitudinal direction ( ⁇ y direction) or may be provided at different positions.
  • the electrically conductive contact pin 100b of the second embodiment connects the elastic part 150 and the first support part 130a through the first protruding connection part 170a, and connects the elastic part 150 through the second protruding connection part 170b. ) and the second support part 130b are connected.
  • the electrically conductive contact pin 100b of the second embodiment divides the upper space US and the lower space LS through the first and second protruding connection portions 170a and 170b. Accordingly, the electrically conductive contact pin 100b of the second embodiment prevents foreign substances introduced from the upper portion from flowing into the lower space LS and prevents foreign substances introduced from the lower portion from flowing into the upper space US.
  • the electrically conductive contact pin 100b of the second embodiment limits the movement of foreign substances introduced into the electrically conductive contact pin 100b through the first and second protruding connection portions 170a and 170b, thereby solving the problem of interference with foreign substances. It can be prevented.
  • the support part 130 has a first catching part SP1 at one end (upper end) and a second catching part SP2 at the other end (lower end).
  • the second hanging part SP2 is provided in the form of a hook.
  • the second hanging part SP2 is connected to the support part 130 and is connected to the first inclined part IC1 inclined inward in the width direction ( ⁇ x direction), one end connected to the first inclined part IC1 and the other end free. It is formed as a step and includes a second inclined portion IC2 inclined in the direction of inclination of the first inclined portion IC1.
  • the other end of the second inclined portion IC2 is formed as a free end perpendicular to the longitudinal direction ( ⁇ y direction).
  • the second inclined portion IC2 is formed to be inclined from one end connected to the first inclined portion IC1 toward the other end, and the other end is formed vertically in the longitudinal direction ( ⁇ y direction).
  • the second hanging part SP2 has a hook shape through the configuration of the first inclined part IC1 and the second inclined part IC2, so that the other end of the second inclined part IC2 is supported on the lower surface of the guide plate GP. do.
  • the other end of the second inclined portion IC2 is formed vertically in the longitudinal direction ( ⁇ y direction), and the upper surface of the other end is inclined in the inclined direction of the first inclined portion IC1. Accordingly, when the lower end of the electrically conductive contact pin 100b of the second embodiment is compressed and deformed inward in the width direction ( ⁇ x direction) in order to insert the electrically conductive contact pin 100b of the second embodiment into the guide hole GH. , while the other end of the second inclined portion IC2 comes into close contact with the first inclined portion IC1, it can be elastically deformed more easily.
  • the second connection part 120 includes first and second inclined parts IC1 and IC2 formed under the first support part 130a and first and second inclined parts IC1 and IC2 formed under the second support part 130b. IC2) is provided between them. Accordingly, the second connection part 120 is provided inside the lower end of the support part 130 in the width direction ( ⁇ x direction).
  • the second connection part 120 has a connection cavity 120d in the connection body 120a so that the contact surface can be more easily deformed by pressing the pad 310 of the circuit board.
  • connection body portion 120a includes a connection inclined portion CI that is inclined inward in the width direction ( ⁇ x direction) and is inclined in the inclined direction of the first inclined portion IC1, and a lower portion from one end of the connection inclined portion CI. It includes a connection vertical portion (CV) extending vertically in the furnace length direction ( ⁇ y direction).
  • the second connection part 120 has a pad contact protrusion 120c on the lower part of the connection body part 120a.
  • three pad contact protrusions 120c are provided.
  • the two pad contact protrusions 120c provided on the outer portion are inclined outward in the width direction ( ⁇ x direction).
  • Each pad contact protrusion 120c is spaced apart by a groove 121 provided between the pad contact protrusions 120c.
  • the second connection part 120 and the support part 130 are spaced apart from each other.
  • connection vertical part CV of the connection body part 120a and A portion connecting the first inclined portion IC1 and the second inclined portion IC2 is in contact with each other.
  • the electrically conductive contact pin 100b of the second embodiment forms a current path leading to the second connection part 120 and the support part 130 .
  • the electrically conductive contact pin 100b of the second embodiment is connected to the first connection part 110 through the contact protrusion 110c of the upwardly protruding part 111 contacting the end of the support part 130 by the pressing force of the connection terminal 410. and a current path leading to the support part 130 .
  • the electrically conductive contact pin 100b of the second embodiment may receive an eccentric pressing force by the connection terminal 410 .
  • the elastic part 150 is compressed and deformed while inclined to one side by an eccentric pressing force.
  • the deformation preventing part 160 comes into contact with the inner surface of the support part 130 and is supported by the support part 130 .
  • the conductive contact pin 100b of the second embodiment is prevented from being excessively buckling and deformed in the left and right directions due to the eccentric pressing force.
  • the electrically conductive contact pin 100b of the second embodiment is in contact with the support 130 when only one of the upwardly protruding portions 111 is in contact with the end of the support 130 and the other is not in contact with the end of the support 130 by the eccentric pressing force.
  • a current path leading to the deformation preventing portion 160 and the support portion 130 is formed through the deformation preventing portion 160 corresponding to the other upward protruding portion 111 in the upward and downward directions.
  • FIG. 11 is a plan view of an electrically conductive contact pin 100c of the third embodiment.
  • the electrically conductive contact pin 100c of the third embodiment includes a first connection portion 110 including a contact portion 110a and a contact cavity 110b formed in the contact portion 110a, a connection body portion 120a, and a connection body portion 120a. It extends downward from the end of the second connection part 120 including the cavity part 120d, the elastic part 150, the support part 130, and the first connection part 110 in the width direction ( ⁇ x direction), and at least Some include the deformation preventing portion 160 located inside the support portion 130 in the width direction ( ⁇ x direction) and overlapping at least a portion of the support portion 130 .
  • the first connection part 110 has a contact cavity 110b in the contact part 110a so that the contact surface can be more easily deformed by the pressure of the test object 400 .
  • the upper surface of the contact portion 110a based on the contact cavity 110b, becomes a part contacting the connection terminal 410 of the test object 400, and the lower portion of the contact portion 110a based on the contact cavity 110b.
  • the cotton is connected to the elastic part (150).
  • the contact cavity 110b is formed as an empty space with curved left and right sides, so that the upper surface of the contact portion 110a can be easily deformed.
  • the first connection part 110 includes at least one connection terminal protrusion 110e on the upper surface of the contact part 110a to make multi-contact with the connection terminal 410 .
  • the connection terminal protrusion 110e is formed along the thickness direction ( ⁇ z direction) of the contact portion 110a and extends longer than its periphery in a longitudinal direction ( ⁇ y direction).
  • the deformation preventing portion 160 is continuously formed on the lower surface of the end of the contact portion 110a in the width direction ( ⁇ x direction) and extends downward.
  • the left and right sides of the contact portion 110a are curved corresponding to the curved left and right sides of the contact cavity 110b. Accordingly, the contact portion 110a protrudes outward in the width direction ( ⁇ x direction) with respect to the deformation preventing portion 160 due to the curved left and right sides.
  • the first connection part 110 contacts the end of the support part 130 through protruding parts on the left and right sides to form a current path leading to the first connection part 110 and the support part 130 .
  • the deformation preventing part 160 is provided to overlap at least a portion of the elastic part 150 in the width direction ( ⁇ x direction). In addition, the deformation preventing portion 160 overlaps at least a portion of the support portion 130 in the width direction ( ⁇ x direction). The deformation preventing portion 160 overlaps at least a portion of the elastic portion 150 located inside the deformation preventing portion 160 in the width direction ( ⁇ x direction) in the width direction ( ⁇ x direction), and the deformation preventing portion 160 ) overlaps with at least a portion of the support 130 located outside the width direction ( ⁇ x direction) in the width direction ( ⁇ x direction).
  • the first deformation preventing part 160a is provided on one side of the elastic part 150 and is provided between the first support part 130a and the elastic part 150
  • the second deformation preventing part 160b is the first deformation preventing part. It is opposite to (160a) and is provided on the other side of the elastic part (150). Accordingly, the second deformation prevention part 160b is provided between the second support part 130b and the elastic part 150 .
  • the first deformation preventing portion 160a and the second deformation preventing portion 160b may have the same length or may have different lengths.
  • the first deformation preventing portion 160a has a longer length than the second deformation preventing portion 160b.
  • one end of the upper region UF is connected to the contact portion and is inclined inward in the width direction ( ⁇ x direction) from one end of the upper region UF to the other end of the upper region UF.
  • One end of the lower region LF is connected to the other end of the upper region UF, and the distance from one end of the lower region LF to the other end of the lower region LF is perpendicular to the longitudinal direction ( ⁇ y direction).
  • the lower region LF includes auxiliary contact protrusions 161 .
  • the second deformation preventing portion 160b has a different length from the first deformation preventing portion 160a, but the shape of the upper region UF and the lower region LF are the same.
  • the support portion 130 including the first and second support portions 130a and 130b has an inner inclined portion IS that is inclined inward while increasing in width in the downward direction (-y direction).
  • the conductive contact pin 100c of the third embodiment is formed by the compression deformation of the elastic part 150 through the configuration of the auxiliary contact protrusion 161 and the inner slope IS of the deformation preventing part 160 160 moves downward (-y direction), it gently contacts the inner surface of the support 130 and maintains the contact state.
  • the deformation preventing portion 160 contacts the inner surface of the support portion 130 to form a current path leading to the deformation preventing portion 160 and the support portion 130 .
  • the electrically conductive contact pin 100c of the third embodiment includes first and second protruding connection portions 170a and 170b provided at different positions in the longitudinal direction ( ⁇ y direction).
  • the electrically conductive contact pin 100c of the third embodiment has the first and second protruding connectors 170a and 170b at different locations to distribute stress.
  • the first protruding connection part 170a is located close to the second connection part 120 in the longitudinal direction ( ⁇ y direction)
  • the second protruding connection part 170b has a first protruding connection part 170b in the longitudinal direction ( ⁇ y direction). It is located closer to the first connection part 110 than the connection part 140 .
  • the first and second protruding connectors 170a and 170b are positioned differently in the longitudinal direction ( ⁇ y direction), so that the first and second deformation preventing portions 160a of different lengths have different lengths. , 160b) can more effectively perform the function of the stopper to limit the additional descent.
  • the upper surfaces of the first and second protruding connection parts 170a and 170b are concave, and the first and second deformation preventing parts 160a and 160b are free to correspond to the shape of the upper surface of the first and second protruding connection parts 170a and 170b.
  • the end is provided convexly.
  • the convex free ends of the first and second deformation preventing portions 160a and 160b are moved to the respective corresponding first and second deformation preventing portions 160a and 160b. It is accommodated in the concave portion of the 1 and 2 protruding connection portions 170a and 170b.
  • the downwardly moving deformation preventing part 160 is firmly supported by the first and second protruding connection parts 170a and 170b without shaking in the lowered position.
  • the electrically conductive contact pin 100c of the third embodiment may receive the eccentric pressing force of the connection terminal 410 .
  • the elastic part 150 tilts to one side and is compressed and deformed, and the deformation preventing part 160 contacts the inner surface of the support part 130 and is supported by the support part 130 .
  • the electrically conductive contact pin 100c of the third embodiment is prevented from being excessively buckling and deformed in the left and right directions due to the eccentric pressing force.
  • one of the curved left and right ends of the first connection part 110 comes into contact with the end of the support part 130 and the other one comes into contact with the end of the support part 130. ) may not be contacted.
  • the electrically conductive contact pin 100c of the third embodiment is connected to the deformation preventing portion 160 and the supporting portion 130 through the deformation preventing portion 160 corresponding to the other one that is not in contact with the supporting portion 130 in the upward and downward directions. form a continuous current path.
  • the curved left end of the first connection part 110 may be in unstable contact with the end of the support part 130 by the eccentric pressing force.
  • the first deformation preventing part 160a provided under the curved left end of the first connection part 110 by the elastic part 150 compressed and deformed to one side by the eccentric pressing force is the first support part ( 130a) may be in contact with the inner surface.
  • the electrically conductive contact pin 100c of the third embodiment is connected to the first connection part 110 in an unstable contact state with the end of the support part 130 through the first deformation prevention part 160a in contact with the first support part 130a. A current path leading to the first deformation preventing portion 160a and the first support portion 130a is formed.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Multi-Conductor Connections (AREA)
PCT/KR2023/001434 2022-02-08 2023-02-01 전기 전도성 접촉핀 WO2023153703A1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2022-0015993 2022-02-08
KR1020220015993A KR20230119799A (ko) 2022-02-08 2022-02-08 전기 전도성 접촉핀

Publications (1)

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WO2023153703A1 true WO2023153703A1 (ko) 2023-08-17

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KR (1) KR20230119799A (zh)
TW (1) TW202336443A (zh)
WO (1) WO2023153703A1 (zh)

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JP2007132681A (ja) * 2005-11-08 2007-05-31 Micronics Japan Co Ltd プローブおよびその製造方法
KR20160030536A (ko) * 2013-07-09 2016-03-18 폼팩터, 인크. 전기적 도전성 가이드 플레이트들 사이의, 신호 통과 경로들 및 이차 경로들을 갖는 다경로 전기적 프로브 및 프로브 어셈블리들
KR20190085835A (ko) * 2018-01-11 2019-07-19 오므론 가부시키가이샤 프로브 핀, 검사 지그, 검사 유닛 및 검사 장치
KR102132232B1 (ko) * 2019-05-10 2020-07-10 (주)루켄테크놀러지스 프로브 핀, 이의 제조 방법 및 이를 포함하는 반도체 검사 장치
JP2020170008A (ja) * 2016-06-17 2020-10-15 オムロン株式会社 プローブピン

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Publication number Priority date Publication date Assignee Title
KR100659944B1 (ko) 2005-12-23 2006-12-21 리노공업주식회사 플런저 및 이를 장착한 검사용 탐침장치
KR100952712B1 (ko) 2007-12-27 2010-04-13 주식회사 아이에스시테크놀러지 판형 도전입자를 포함한 실리콘 콘택터

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007132681A (ja) * 2005-11-08 2007-05-31 Micronics Japan Co Ltd プローブおよびその製造方法
KR20160030536A (ko) * 2013-07-09 2016-03-18 폼팩터, 인크. 전기적 도전성 가이드 플레이트들 사이의, 신호 통과 경로들 및 이차 경로들을 갖는 다경로 전기적 프로브 및 프로브 어셈블리들
JP2020170008A (ja) * 2016-06-17 2020-10-15 オムロン株式会社 プローブピン
KR20190085835A (ko) * 2018-01-11 2019-07-19 오므론 가부시키가이샤 프로브 핀, 검사 지그, 검사 유닛 및 검사 장치
KR102132232B1 (ko) * 2019-05-10 2020-07-10 (주)루켄테크놀러지스 프로브 핀, 이의 제조 방법 및 이를 포함하는 반도체 검사 장치

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KR20230119799A (ko) 2023-08-16

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