WO2023130536A1 - 一种可有效防止Arcing的下部电极结构及其安装方法 - Google Patents
一种可有效防止Arcing的下部电极结构及其安装方法 Download PDFInfo
- Publication number
- WO2023130536A1 WO2023130536A1 PCT/CN2022/077264 CN2022077264W WO2023130536A1 WO 2023130536 A1 WO2023130536 A1 WO 2023130536A1 CN 2022077264 W CN2022077264 W CN 2022077264W WO 2023130536 A1 WO2023130536 A1 WO 2023130536A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- hole
- helium
- insulating block
- block
- glue
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
Definitions
- the invention belongs to the technical field of liquid crystal panel components, and in particular relates to a lower electrode structure capable of effectively preventing arcing and an installation method thereof.
- the object of the present invention is to provide a lower electrode structure that can effectively prevent Arcing and its installation method. Without changing the original structure of the helium hole, by adding a method of partially installing an insulating block, the helium can be effectively improved.
- the structural quality of the anodized coating inside the pores ensures that there will be no anode electrification under long-term use, preventing the occurrence of arcing in the helium pores.
- the present invention provides the following technical solutions:
- the present invention is a lower electrode structure that can effectively prevent arcing, comprising an electrode main board, a helium hole opened on the electrode main board, an insulating block is embedded on the electrode main board at one end of the helium hole, the insulating block There is a through hole with a smaller diameter than the helium hole, the through hole is coaxially arranged at the outer end of the helium hole, and the through hole communicates with the helium hole and runs through both sides of the electrode main board.
- a guide groove is provided on the insulating block, the through hole is provided at the bottom of the guide groove, and the opening of the guide groove is connected to the helium hole, so that the guide groove transfers the helium gas from the helium hole lead to the through hole.
- the structure of the guide groove is arc-shaped or conical.
- the diameter of the helium hole is 3mm-5mm
- the diameter of the through hole is 0.4-0.6mm
- the insulating block is cylindrical
- the diameter of the insulating block is 6-8mm
- the thickness is 3mm-5mm.
- a sealing ring is provided between the insulating block and the electrode main board, the end surface of the insulating block is provided with a first annular groove for accommodating the sealing ring, and the electrode main board is provided with a groove for accommodating the sealing ring. Second ring groove.
- an auxiliary installation block is provided on the outer side of the insulating block, and an installation space for fixing the insulating block is formed on the inner side of the auxiliary installation block, and a central hole is opened at the bottom of the installation space, and the center hole
- the outer edge forms a step for positioning the insulating block
- the lower electrode is provided with a mounting groove for mounting the auxiliary mounting block.
- a glue layer is provided between the auxiliary mounting block and the insulating block, and the insulating block is fixedly connected to the auxiliary mounting block through the glue layer, and the thickness of the glue layer is 0.4-1 mm.
- annular semicircular grooves are formed on the outer side of the insulating block, and the annular semicircular grooves are evenly spaced along the height direction of the insulating block.
- a number of glue filling holes are opened on the outside of the auxiliary installation block, the glue filling holes run through the outer wall and the inner wall of the auxiliary installation block, and the outer ends of the glue filling holes are matched with glue nails.
- a method for installing a lower electrode structure that can effectively prevent arcing adopting the lower electrode structure as claimed in claim 9, firstly prefabricating auxiliary installation blocks and insulation blocks respectively according to the design structure, and installing the outer wall of the insulation block and the inner wall of the auxiliary installation block Apply glue, assemble the insulating block into the installation space of the auxiliary installation block; replenish glue through the glue filling hole, put glue nails in sequence in the glue filling hole where the glue overflows, and fill the whole glue with the pressure of the glue nail In the space where the layer is located, trim the end glue of the auxiliary mounting block and the insulating block, and then wait for the glue to solidify and bond; then process a helium hole on the electrode main board of the lower electrode, and process a mounting groove on the electrode main board at one end of the helium hole, and in the mounting groove Install the sealing ring, install the auxiliary installation block with the insulating block into the installation groove, and complete the installation.
- the present invention is a lower electrode structure that can effectively prevent arcing and its installation method.
- the structure is located at one end of the helium hole and an insulating block is inlaid on the electrode main board, and the helium flow rate is controlled by the blocking of the insulating block.
- the lower electrode structure of the present invention by designing a through hole on the insulating block, the combination of the through hole and the helium hole replaces the original helium hole with a tapered part, and can also achieve the effect of speeding up the helium gas.
- the insulating block can be directly modified without changing the overall structure of the original lower electrode, which saves cost and design, and can meet the needs of customers.
- Fig. 1 is a schematic plan view of the lower electrode of the present invention
- Fig. 2 is the structural representation of embodiment 1 helium hole
- Fig. 3 is the structural representation of embodiment 2 helium pores
- Fig. 4 is the structural representation of embodiment 3 helium pores
- Fig. 5 is a schematic structural diagram of an insulating block and an auxiliary mounting block.
- electrode main board 1 helium hole 2
- insulating block 3 through hole 4
- guide groove 5 sealing ring 6
- first ring groove 7 second ring groove 8
- auxiliary mounting block 9 center hole 10
- step 11 installation groove 12
- glue layer 13 annular semicircular groove 14
- glue filling hole 15 glue nail 16.
- Embodiment 1 is a lower electrode structure that can effectively prevent Arcing, including an electrode main board 1, a helium hole 2 opened on the electrode main board 1, the electrode main board 1 is rectangular, and its There are two circles of helium holes 2 arranged in a rectangular shape on the inner side, wherein the structure of the helium holes 2 has been improved.
- an insulating block 3 is inlaid on the electrode main board 1 at one end of the helium hole 2, and a through hole 4 with a diameter smaller than the helium hole 2 is provided on the insulating block 3, and the through hole 4 Coaxially arranged at the outer end of the helium hole 2, and the through hole 4 communicates with the helium hole 2 and runs through both sides of the electrode main board 1, so that helium can pass through the helium hole 2 and pass through the through hole 4 Spray out to meet the needs of the product.
- the insulating block 3 is provided with a guiding groove 5 formed on the surface of the insulating block 3 , the opening of the guiding groove 5 is the largest, and extends inwardly along the smooth transition of the opening of the opening groove.
- the through hole 4 is opened at the bottom of the guide groove 5, and the opening of the guide groove 5 is connected to the helium hole 2, so that the guide groove 5 guides helium from the helium hole 2 to the through hole 4. Reduce the barrier to helium.
- the structure of the guide groove 5 is conical, the bottom diameter of the guide groove 5 is the same as the diameter of the through hole 4, the diameter of the helium hole 2 is 3 mm to 5 mm, preferably 4 mm, and the through hole
- the diameter of 4 is 0.4-0.6 mm, preferably 0.5 mm
- the insulating block 3 is cylindrical, the diameter of the insulating block 3 is 6-8 mm, preferably 7 mm, and the thickness is 3 mm-5 mm, preferably 4 mm.
- the thickness refers to the depth at which the insulating block 3 is installed into the installation groove 12 , that is, the length along the axial direction of the helium hole 2 .
- Embodiment 2 as shown in FIG. 3 , the difference between this embodiment and Embodiment 1 is that the structure of the guide groove 5 is arc-shaped.
- Embodiment 3 as shown in Figures 4 and 5, the difference between this embodiment and Embodiment 2 is that a sealing ring 6 is provided between the insulating block 3 and the electrode main board 1, and the end surface of the insulating block 3 is provided with a The first annular groove 7 for accommodating the sealing ring 6, the electrode main board 1 is provided with a second annular groove 8 for accommodating the sealing ring 6, by arranging the sealing ring 6, air leakage can be prevented, and the air leakage can be controlled more evenly Helium injection pressure.
- the outer side of the insulating block 3 is provided with an auxiliary mounting block 9, and the insulating block 3 is preferably made of ceramic material, which has a good insulating function and a smooth surface, which can better guide helium, so that The helium inflow guide is more regular, so that all the flushing force is all on the ceramic material. In the case of long-term use, it can effectively ensure the internal structure of the helium hole 2, so as to achieve the insulation effect of the helium hole 2 and prevent the occurrence of Arcing .
- the inner side of the auxiliary installation block 9 forms an installation space for fixedly installing the insulating block 3, the bottom of the installation space is provided with a central hole 10, and the outer edge of the central hole 10 is formed for the installation of the insulating block 3.
- the step 11 on which the insulating block 3 is positioned can be used to position and compress the insulating block 3 during installation, and the lower electrode is provided with a mounting groove 12 for installing the auxiliary mounting block 9, and the auxiliary mounting block 9 and Can adopt threaded connection between the mounting grooves 12, and the insulating block 3 can be compressed in the mounting grooves 12 by the auxiliary mounting block 9, which is convenient and fast, and will not fall off after long-term use.
- a glue layer 13 is provided between the auxiliary mounting block 9 and the insulating block 3, and the insulating block 3 is fixedly connected to the auxiliary mounting block 9 through the glue layer 13, and the glue layer 13
- the thickness is 0.4-1 mm.
- the auxiliary installation block 9 and the insulation block 3 are glued in advance to avoid the problem of the insulation block 3 falling off. By bonding the auxiliary installation block 9 and the insulation block 3 in advance, the problem of glue overflow caused by on-site bonding can be avoided. Effectively protect the inner wall of the helium hole 2 from being affected by glue, and ensure the quality of the helium hole 2.
- the auxiliary installation block 9 By setting the auxiliary installation block 9, the positioning and installation of the insulating block 3 can be facilitated, and the on-site installation is convenient and quick.
- annular semicircular grooves 14 are formed on the outside of the insulating block 3, and the annular semicircular grooves 14 are evenly spaced along the height direction of the insulating block 3, which can increase the anchoring force of the insulating block 3 in the axial direction. The problem of relative looseness between the insulating block 3 and the auxiliary installation block 9 caused by helium flushing is avoided.
- the outer side of the auxiliary installation block 9 is provided with a number of glue filling holes 15, the glue filling holes 15 run through the outer wall and the inner wall of the auxiliary installation block 9, and the outer ends of the glue filling holes 15 are arranged in cooperation with each other. There are glued nails 16.
- An installation method of the lower electrode structure that can effectively prevent arcing, adopting the lower electrode structure as claimed in claim 9, firstly prefabricating the auxiliary installation block 9 and the insulating block 3 in the factory according to the design structure, and directly completing the auxiliary installation block 9 directly in the factory Assembly between the mounting block 9 and the insulating block 3.
- the outer wall of the insulating block 3 and the inner wall of the auxiliary installation block 9 are covered with glue, and the insulating block 3 is assembled into the installation space of the auxiliary installation block 9; the glue is replenished through the glue filling hole 15, and the glue is filled when the glue overflows.
- the glue nails 16 are sequentially loaded into the holes 15, the glue is filled with the entire space where the glue layer 13 is located by the pressure of the glue nails 16, the end face glue of the auxiliary installation block 9 and the insulating block 3 is trimmed, and then the glue is solidified and bonded; then Process the helium hole 2 on the electrode main board 1 of the lower electrode, process the installation groove 12 on the electrode main board 1 at one end of the helium hole 2, install the sealing ring 6 in the installation groove 12, install the auxiliary installation block 9 with the insulating block 3 into the installation groove Within 12, complete the installation.
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Insulators (AREA)
Abstract
本发明公开了一种可有效防止Arcing的下部电极结构及其安装方法，属于液晶面板零部件技术领域，结构包括电极主板、开设在所述电极主板上的氦气孔，位于所述氦气孔的一端在所述电极主板上镶嵌有一绝缘块，所述绝缘块上开设有一孔径小于所述氦气孔的通孔，所述通孔同轴设置在氦气孔的外端，且所述通孔与所述氦气孔连通后贯穿所述电极主板的两侧。本发明装置和方法，通过增加局部安装绝缘块，可以有效的改善氦气孔内部阳极氧化涂层的结构质量，保证在长时间使用状态下，不会有阳极通电现象发生，防止氦气孔Arcing的产生。
Description
本发明属于液晶面板零部件技术领域，具体涉及一种可有效防止Arcing的下部电极结构及其安装方法。
现有ESC下部电极在长时间使用过程中，氦气孔上端的锥孔部位由于受到氦气长时间的冲刷，其表面的阳极氧化涂层容易遭到破坏，无法产生绝缘效果，导致氦气孔槽部位上端与刻蚀腔中的Plasma接触后容易产生Arcing，且Arcing点位出现随机性以及不确定性，会对客户端产品造成严重损失。
发明内容
有鉴于此，本发明的目的在于提供一种可有效防止Arcing的下部电极结构及其安装方法，在不改变氦气孔原始结构的情况下，通过增加局部安装绝缘块的方法，可以有效的改善氦气孔内部阳极氧化涂层的结构质量，保证在长时间使用状态下，不会有阳极通电现象发生，防止氦气孔Arcing的产生。
为达到上述目的，本发明提供如下技术方案：
本发明一种可有效防止Arcing的下部电极结构，包括电极主板、开设在所述电极主板上的氦气孔，位于所述氦气孔的一端在所述电极主板上镶嵌有一绝缘块，所述绝缘块上开设有一孔径小于所述氦气孔的通孔，所述通孔同轴设置在氦气孔的外端，且所述通孔与所述氦气孔连通后贯穿所述电极主板的两侧。
进一步，所述绝缘块上开设有一引导槽，所述通孔开设在所述引导槽的底部，所述引导槽的开口与所述氦气孔相接，使得所述引导槽将氦气从氦气孔引导至所述通孔。
进一步，所述引导槽的结构呈圆弧形或者圆锥形。
进一步，所述氦气孔的直径为3mm～5mm，所述通孔的直径为0.4～0.6mm，所述绝缘块呈圆柱状，所述绝缘块的直径为6～8mm，厚度为3mm～5mm。
进一步，所述绝缘块与电极主板之间设置有密封圈，所述绝缘块的端面开设有用于容纳所述密封圈的第一环槽，所述电极主板上开设有用于容纳所述密封圈的第二环槽。
进一步，所述绝缘块的外侧设置有一辅助安装块，所述辅助安装块的内侧形成用于固定安装所述绝缘块的安装空间，所述安装空间的底部开设有中心孔，所述中心孔的外沿形成用 于对所述绝缘块定位的台阶，所述下部电极上开设有用于安装所述辅助安装块的安装槽。
进一步，所述辅助安装块与绝缘块之间设置有胶水层，所述绝缘块通过所述胶水层与所述辅助安装块固定连接，所述胶水层的厚度为0.4～1mm。
进一步，所述绝缘块的外侧形成有若干环形半圆槽，所述环形半圆槽沿着绝缘块的高度方向均匀间隔布置。
进一步，所述辅助安装块的外侧开设有若干补胶孔，所述补胶孔贯穿所述辅助安装块的外壁和内壁，所述补胶孔的外端配合设置有压胶钉。
一种可有效防止Arcing的下部电极结构的安装方法，采用如权利要求9所述的下部电极结构，先按照设计结构分别预制辅助安装块和绝缘块，在绝缘块的外壁和辅助安装块的内壁涂满胶水，将绝缘块装配进入辅助安装块的安装空间内；通过补胶孔补充胶水，在胶水溢出的补胶孔内依次装入压胶钉，通过压胶钉的压力使得胶水充满整个胶水层所在空间，修整辅助安装块和绝缘块的端面胶水，随后等待胶水凝固粘接；然后在下部电极的电极主板上加工氦气孔，位于氦气孔的一端在电极主板上加工安装槽，安装槽内装入密封圈，将辅助安装块附带绝缘块安装进入安装槽内，完成安装。
本发明的有益效果在于：
本发明一种可有效防止Arcing的下部电极结构及其安装方法，结构在位于所述氦气孔的一端在所述电极主板上镶嵌有一绝缘块，通过绝缘块的阻挡从而实现对氦气流速进行控制，避免氦气直接冲刷原有的氦气孔的锥形内壁，导致的原有阳极氧化涂层造成破坏的问题，可以有效的保证氦气孔内部结构，从而达到氦气孔部位的绝缘效果，防止Arcing的产生。
本发明下部电极结构，通过将绝缘块上设计通孔，通孔与氦气孔的组合代替了原有的具有锥形部位的氦气孔，同样对氦气能达到增速的效果，通过在局部增加绝缘块，无需改变原有下部电极的整体结构，可以直接进行改造，节约了成本和设计，能满足客户的需求。
本发明的其他优点、目标和特征将在随后的说明书中进行阐述，并且在某种程度上对本领域技术人员而言是显而易见的，或者本领域技术人员可以从本发明的实践中得到教导。本发明的目标和其他优点可以通过下面的说明书来实现和获得。
为了使本发明的目的、技术方案和有益效果更加清楚，本发明提供如下附图进行说明：
图1为本发明下部电极的平面示意图；
图2为实施例1氦气孔的结构示意图；
图3为实施例2氦气孔的结构示意图；
图4为实施例3氦气孔的结构示意图；
图5为绝缘块和辅助安装块的结构示意图。
附图中标记如下：电极主板1、氦气孔2、绝缘块3、通孔4、引导槽5、密封圈6、第一环槽7、第二环槽8、辅助安装块9、中心孔10、台阶11、安装槽12、胶水层13、环形半圆槽14、补胶孔15、压胶钉16。
实施例1，如图1～2所示，本发明一种可有效防止Arcing的下部电极结构，包括电极主板1、开设在所述电极主板1上的氦气孔2，电极主板1呈矩形，其内侧分布有大小两圈呈矩形布置的氦气孔2，其中，对氦气孔2的结构上进行了改进。具体的，在位于所述氦气孔2的一端在所述电极主板1上镶嵌有一绝缘块3，所述绝缘块3上开设有一孔径小于所述氦气孔2的通孔4，所述通孔4同轴设置在氦气孔2的外端，且所述通孔4与所述氦气孔2连通后贯穿所述电极主板1的两侧，使得氦气从氦气孔2经过后可以从通孔4内喷出，满足产品的需要。
本实施例中，所述绝缘块3上开设有一引导槽5，该引导槽5形成在绝缘块3的表面，引导槽5的开口最大，沿着开口槽的开口平滑过渡向内延伸。所述通孔4开设在所述引导槽5的底部，所述引导槽5的开口与所述氦气孔2相接，使得所述引导槽5将氦气从氦气孔2引导至所述通孔4，减少对氦气的阻挡。
本实施例中，所述引导槽5的结构呈圆锥形，引导槽5的底部直径与通孔4的直径相同，所述氦气孔2的直径为3mm～5mm，优选为4mm，所述通孔4的直径为0.4～0.6mm，优选为0.5mm，所述绝缘块3呈圆柱状，所述绝缘块3的直径为6～8mm，优选为7mm，厚度为3mm～5mm，优选为4mm，该厚度指的是绝缘块3安装进安装槽12的深度，即沿着氦气孔2的轴向的长度。
实施例2，如图3所示，本实施例与实施例1的区别在于，所述引导槽5的结构呈圆弧形。
实施例3，如图4和5所示，本实施例与实施例2的区别在于，所述绝缘块3与电极主板1之间设置有密封圈6，所述绝缘块3的端面开设有用于容纳所述密封圈6的第一环槽7，所述电极主板1上开设有用于容纳所述密封圈6的第二环槽8，通过设置密封圈6，可以防止漏风，能够比较均匀地控制氦气的喷射压力。
本实施例中，所述绝缘块3的外侧设置有一辅助安装块9，绝缘块3优先选择陶瓷材料，具有良好的绝缘功能的同时，表面光滑，能够对氦气进行一个较好的引导，使得氦气流入导 向更加规则，使得所有冲刷的受力全部在陶瓷材料上，在长时间使用情况下，可以有效的保证氦气孔2内部结构，从而达到氦气孔2部位的绝缘效果，防止Arcing的产生。具体的，所述辅助安装块9的内侧形成用于固定安装所述绝缘块3的安装空间，所述安装空间的底部开设有中心孔10，所述中心孔10的外沿形成用于对所述绝缘块3定位的台阶11，可以在安装时用于对绝缘块3进行定位和压紧，所述下部电极上开设有用于安装所述辅助安装块9的安装槽12，辅助安装块9与安装槽12之间可以采用螺纹连接，绝缘块3可以通过辅助安装块9压紧在安装槽12内，方便快捷，长久使用不会脱落。
本实施例中，所述辅助安装块9与绝缘块3之间设置有胶水层13，所述绝缘块3通过所述胶水层13与所述辅助安装块9固定连接，所述胶水层13的厚度为0.4～1mm。辅助安装块9与绝缘块3之间提前通过胶水粘接，可以避免绝缘块3的脱落问题，通过提前粘接好辅助安装块9与绝缘块3，避免现场粘接导致的胶水溢出问题，可以有效地保护氦气孔2内壁不受到胶水的影响，保证氦气孔2的质量，通过设置辅助安装块9，可以便于绝缘块3的定位和安装，现场安装方便快捷。
本实施例中，所述绝缘块3的外侧形成有若干环形半圆槽14，所述环形半圆槽14沿着绝缘块3的高度方向均匀间隔布置，可以增加绝缘块3在轴向的锚固力，避免氦气冲刷导致的绝缘块3与辅助安装块9之间相对的松动问题。
本实施例中，所述辅助安装块9的外侧开设有若干补胶孔15，所述补胶孔15贯穿所述辅助安装块9的外壁和内壁，所述补胶孔15的外端配合设置有压胶钉16。
一种可有效防止Arcing的下部电极结构的安装方法，采用如权利要求9所述的下部电极结构，先按照设计结构在工厂分别预制辅助安装块9和绝缘块3，并且直接在工厂直接完成辅助安装块9和绝缘块3之间的装配。具体的，先在绝缘块3的外壁和辅助安装块9的内壁涂满胶水，将绝缘块3装配进入辅助安装块9的安装空间内；通过补胶孔15补充胶水，在胶水溢出的补胶孔15内依次装入压胶钉16，通过压胶钉16的压力使得胶水充满整个胶水层13所在空间，修整辅助安装块9和绝缘块3的端面胶水，随后等待胶水凝固粘接；然后在下部电极的电极主板1上加工氦气孔2，位于氦气孔2的一端在电极主板1上加工安装槽12，安装槽12内装入密封圈6，将辅助安装块9附带绝缘块3安装进入安装槽12内，完成安装。
最后说明的是，以上优选实施例仅用以说明本发明的技术方案而非限制，尽管通过上述优选实施例已经对本发明进行了详细的描述，但本领域技术人员应当理解，可以在形式上和细节上对其作出各种各样的改变，而不偏离本发明权利要求书所限定的范围。
Claims (10)
- 一种可有效防止Arcing的下部电极结构，包括电极主板、开设在所述电极主板上的氦气孔，其特征在于：位于所述氦气孔的一端在所述电极主板上镶嵌有一绝缘块，所述绝缘块上开设有一孔径小于所述氦气孔的通孔，所述通孔同轴设置在氦气孔的外端，且所述通孔与所述氦气孔连通后贯穿所述电极主板的两侧。
- 根据权利要求1所述的可有效防止Arcing的下部电极结构，其特征在于：所述绝缘块上开设有一引导槽，所述通孔开设在所述引导槽的底部，所述引导槽的开口与所述氦气孔相接，使得所述引导槽将氦气从氦气孔引导至所述通孔。
- 根据权利要求2所述的可有效防止Arcing的下部电极结构，其特征在于：所述引导槽的结构呈圆弧形或者圆锥形。
- 根据权利要求3所述的可有效防止Arcing的下部电极结构，其特征在于：所述氦气孔的直径为3mm～5mm，所述通孔的直径为0.4～0.6mm，所述绝缘块呈圆柱状，所述绝缘块的直径为6～8mm，厚度为3mm～5mm。
- 根据权利要求1所述的可有效防止Arcing的下部电极结构，其特征在于：所述绝缘块与电极主板之间设置有密封圈，所述绝缘块的端面开设有用于容纳所述密封圈的第一环槽，所述电极主板上开设有用于容纳所述密封圈的第二环槽。
- 根据权利要求1-5任一项所述的可有效防止Arcing的下部电极结构，其特征在于：所述绝缘块的外侧设置有一辅助安装块，所述辅助安装块的内侧形成用于固定安装所述绝缘块的安装空间，所述安装空间的底部开设有中心孔，所述中心孔的外沿形成用于对所述绝缘块定位的台阶，所述下部电极上开设有用于安装所述辅助安装块的安装槽。
- 根据权利要求6所述的可有效防止Arcing的下部电极结构，其特征在于：所述辅助安装块与绝缘块之间设置有胶水层，所述绝缘块通过所述胶水层与所述辅助安装块固定连接，所述胶水层的厚度为0.4～1mm。
- 根据权利要求7所述的可有效防止Arcing的下部电极结构，其特征在于：所述绝缘块的外侧形成有若干环形半圆槽，所述环形半圆槽沿着绝缘块的高度方向均匀间隔布置。
- 根据权利要求8所述的可有效防止Arcing的下部电极结构，其特征在于：所述辅助安装块的外侧开设有若干补胶孔，所述补胶孔贯穿所述辅助安装块的外壁和内壁，所述补胶孔的外端配合设置有压胶钉。
- 一种可有效防止Arcing的下部电极结构的安装方法，采用如权利要求9所述的下部电极结构，其特征在于：先按照设计结构分别预制辅助安装块和绝缘块，在绝缘块的外壁和辅助安装块的内壁涂满胶水，将绝缘块装配进入辅助安装块的安装空间内；通过补胶孔补充 胶水，在胶水溢出的补胶孔内依次装入压胶钉，通过压胶钉的压力使得胶水充满整个胶水层所在空间，修整辅助安装块和绝缘块的端面胶水，随后等待胶水凝固粘接；然后在下部电极的电极主板上加工氦气孔，位于氦气孔的一端在电极主板上加工安装槽，安装槽内装入密封圈，将辅助安装块附带绝缘块安装进入安装槽内，完成安装。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210011583.2A CN114326229B (zh) | 2022-01-06 | 2022-01-06 | 一种可有效防止Arcing的下部电极结构及其安装方法 |
| CN202210011583.2 | 2022-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2023130536A1 true WO2023130536A1 (zh) | 2023-07-13 |
Family
ID=81025328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2022/077264 WO2023130536A1 (zh) | 2022-01-06 | 2022-02-22 | 一种可有效防止Arcing的下部电极结构及其安装方法 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114326229B (zh) |
| WO (1) | WO2023130536A1 (zh) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940010230A (ko) * | 1992-10-17 | 1994-05-24 | 김주용 | 식각 장비의 전극 구조 |
| US20060073354A1 (en) * | 2004-09-30 | 2006-04-06 | Toshiba Ceramics Co., Ltd. | Gas diffusion plate and manufacturing method for the same |
| CN207159098U (zh) * | 2017-08-10 | 2018-03-30 | 重庆臻宝实业有限公司 | 上部电极熔射辅助装置 |
| CN209487786U (zh) * | 2019-05-06 | 2019-10-11 | 重庆市龙唐环保科技有限公司 | 一种绝缘连接器 |
| CN112133619A (zh) * | 2020-09-22 | 2020-12-25 | 重庆臻宝实业有限公司 | 下部电极塑封夹具及塑封工艺 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774234A (ja) * | 1993-06-28 | 1995-03-17 | Tokyo Electron Ltd | 静電チャックの電極構造、この組み立て方法、この組み立て治具及び処理装置 |
| KR20080000112A (ko) * | 2006-06-26 | 2008-01-02 | 삼성전자주식회사 | 건식식각장치의 상부전극 및 그를 구비한 건식식각장치 |
| US10741425B2 (en) * | 2017-02-22 | 2020-08-11 | Lam Research Corporation | Helium plug design to reduce arcing |
| JP2019207912A (ja) * | 2018-05-28 | 2019-12-05 | 東京エレクトロン株式会社 | 上部電極アセンブリ、処理装置及び上部電極アセンブリの製造方法 |
| CN109112458B (zh) * | 2018-09-29 | 2020-11-20 | 芜湖通潮精密机械股份有限公司 | 一种干刻下部电极的再生工艺预处理方法 |
| CN209708939U (zh) * | 2019-06-25 | 2019-11-29 | 重庆臻宝实业有限公司 | 蚀刻用上部电极 |
-
2022
- 2022-01-06 CN CN202210011583.2A patent/CN114326229B/zh active Active
- 2022-02-22 WO PCT/CN2022/077264 patent/WO2023130536A1/zh unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940010230A (ko) * | 1992-10-17 | 1994-05-24 | 김주용 | 식각 장비의 전극 구조 |
| US20060073354A1 (en) * | 2004-09-30 | 2006-04-06 | Toshiba Ceramics Co., Ltd. | Gas diffusion plate and manufacturing method for the same |
| CN207159098U (zh) * | 2017-08-10 | 2018-03-30 | 重庆臻宝实业有限公司 | 上部电极熔射辅助装置 |
| CN209487786U (zh) * | 2019-05-06 | 2019-10-11 | 重庆市龙唐环保科技有限公司 | 一种绝缘连接器 |
| CN112133619A (zh) * | 2020-09-22 | 2020-12-25 | 重庆臻宝实业有限公司 | 下部电极塑封夹具及塑封工艺 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114326229B (zh) | 2022-09-20 |
| CN114326229A (zh) | 2022-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20150085240A1 (en) | Display substrate and manufacturing method thereof, and display device | |
| WO2023130536A1 (zh) | 一种可有效防止Arcing的下部电极结构及其安装方法 | |
| JP4218899B2 (ja) | 静電チャックを備える基板ホルダ及びその製造方法 | |
| KR101503402B1 (ko) | 슬릿 노즐 및 이를 이용한 표시장치 제조방법 | |
| WO2003094224B1 (en) | Process for manufacturing substrates with detachment of a temporary support, and associated substrate | |
| KR100691184B1 (ko) | 웨이퍼 스케일 렌즈의 적층을 위한 접착방법 및 이에 의해제조된 웨이퍼 스케일 렌즈 | |
| US11331895B2 (en) | Laminating method and device for display module, display module and electronic device | |
| US6716365B2 (en) | Method for wet etching and wet etching apparatus | |
| JPH06273779A (ja) | 液晶の注入方法 | |
| CN104511394A (zh) | 一种点胶头及点胶装置 | |
| JPH088277A (ja) | Ｔｃｐ半導体装置 | |
| JPH08167677A (ja) | 半導体モジュール | |
| KR20000038965A (ko) | 유체 분사 장치의 제조 방법 | |
| JPH05297384A (ja) | 液晶表示素子 | |
| CN114325996B (zh) | 光纤导入装置及光纤导入方法 | |
| KR20090076510A (ko) | 선박용 탱크의 연결부위 단열 및 코팅 시공방법 | |
| JP2522816Y2 (ja) | 液晶注入装置 | |
| JP2008095375A (ja) | 木材接合体及び木材接合体の製造方法 | |
| JP4531441B2 (ja) | 塗布ノズル、接着剤塗布装置、及び接着剤塗布方法 | |
| JPH01180520A (ja) | 液晶表示素子 | |
| KR20000038968A (ko) | 유체 분사 장치 및 그 제조 방법 | |
| JPH0545661A (ja) | 液晶表示パネルの製造方法 | |
| KR100348587B1 (ko) | 대면적 산화물 박막 형성장비의 샤워헤드 | |
| KR20150008027A (ko) | 슬릿 노즐 및 이를 이용한 표시장치 제조방법 | |
| KR200227122Y1 (ko) | 압전트랜스 실장장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 22918003 Country of ref document: EP Kind code of ref document: A1 |