WO2023106285A1 - ベーパーチャンバおよび電子機器 - Google Patents

ベーパーチャンバおよび電子機器 Download PDF

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Publication number
WO2023106285A1
WO2023106285A1 PCT/JP2022/044874 JP2022044874W WO2023106285A1 WO 2023106285 A1 WO2023106285 A1 WO 2023106285A1 JP 2022044874 W JP2022044874 W JP 2022044874W WO 2023106285 A1 WO2023106285 A1 WO 2023106285A1
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WO
WIPO (PCT)
Prior art keywords
sheet
vapor chamber
groove
steam
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/044874
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
伸一郎 高橋
和範 小田
貴之 太田
誠 山木
洋次 小鶴
利彦 武田
伸哉 木浦
崇之 寺内
直大 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2022/036767 external-priority patent/WO2023054692A1/ja
Priority claimed from PCT/JP2022/042105 external-priority patent/WO2023085401A1/ja
Priority to KR1020247021958A priority Critical patent/KR20240122797A/ko
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2023541845A priority patent/JP7344481B1/ja
Priority to US18/717,091 priority patent/US20250048591A1/en
Priority to CN202280080815.8A priority patent/CN118401802A/zh
Publication of WO2023106285A1 publication Critical patent/WO2023106285A1/ja
Priority to JP2023142567A priority patent/JP7568017B2/ja
Anticipated expiration legal-status Critical
Priority to JP2024172796A priority patent/JP7800847B2/ja
Priority to JP2025282471A priority patent/JP2026049011A/ja
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
    • H05K7/20336—Heat pipes, e.g. wicks or capillary pumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/73—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control for cooling by change of state

Definitions

  • the present disclosure relates to vapor chambers and electronic equipment.
  • Heat dissipating members such as heat pipes (e.g. , see Patent Documents 1 and 2).
  • CPUs central processing units
  • LEDs light emitting diodes
  • power semiconductors used in mobile terminals such as mobile terminals and tablet terminals
  • heat pipes heat pipes
  • a working fluid is sealed in the vapor chamber, and the vapor chamber cools the device by absorbing the heat of the device and diffusing it inside.
  • the working fluid in the vapor chamber receives heat from the device at a portion (evaporation section) close to the device and evaporates to become vapor (working vapor).
  • the working vapor diffuses in the vapor passage portion in a direction away from the evaporating portion, is cooled, and condenses into a liquid (working fluid).
  • a liquid channel portion as a capillary structure (wick) is provided in the vapor chamber, and the working liquid enters the liquid channel portion from the vapor channel portion, flows through the liquid channel portion, and heads for the evaporator. transported by Then, the working fluid again receives heat in the evaporator and evaporates. In this way, the working fluid circulates in the vapor chamber while repeating phase changes, that is, evaporation and condensation, thereby transferring heat from the device and increasing heat radiation efficiency.
  • JP 2018-204841 A Japanese Patent No. 6877513
  • An object of the present disclosure is to provide a vapor chamber and an electronic device capable of improving heat dissipation efficiency.
  • a first form of the present disclosure is A vapor chamber containing a working fluid, body sheet, A first sheet laminated on the main body sheet, the main body sheet includes a vapor channel portion through which the vapor of the working fluid passes; and a liquid channel portion that communicates with the vapor channel portion and through which the liquid of the working fluid passes; the steam passage portion includes a steam passage extending along a first direction;
  • the first sheet includes a first sheet inner surface facing the main body sheet and a first sheet groove provided in the first sheet inner surface and provided at a position overlapping the steam passage in a plan view. and a first seat groove extending along a direction intersecting the one direction.
  • a second aspect of the present disclosure provides, in the vapor chamber according to the first aspect described above,
  • the liquid flow path portion may include a main liquid flow path groove extending along the first direction,
  • a channel cross-sectional area of the first sheet groove may be smaller than a channel cross-sectional area of the liquid channel main groove.
  • a third aspect of the present disclosure provides, in the vapor chamber according to the first aspect described above,
  • the liquid flow path portion may include a main liquid flow path groove extending along the first direction,
  • a channel cross-sectional area of the first sheet groove may be larger than a channel cross-sectional area of the liquid channel main groove.
  • a fourth aspect of the present disclosure is a vapor chamber according to each of the above-described first to third aspects, wherein The first sheet groove may be provided over a position overlapping with the liquid flow path portion in a plan view.
  • a fifth aspect of the present disclosure provides, in the vapor chamber according to the fourth aspect described above,
  • the first seat groove may be provided so as to traverse the steam passage in a direction intersecting the first direction.
  • a sixth aspect of the present disclosure provides, in the vapor chamber according to the fourth aspect described above,
  • the first seat groove includes a first end provided at a position overlapping with the steam passage in plan view, and a second end provided at a position overlapping with the liquid flow path portion in plan view.
  • the first sheet may include a plurality of the first sheet grooves,
  • the plurality of first seat grooves includes the first seat grooves provided so as to cross the steam passage in a direction intersecting the first direction, and the first seat grooves provided at positions overlapping the steam passage in a plan view.
  • the first sheet groove may include one end portion and a second end portion provided at a position overlapping with the liquid flow path portion in a plan view.
  • An eighth aspect of the present disclosure is the vapor chamber according to each of the above sixth aspect and the above seventh aspect, comprising:
  • the first sheet groove may be formed such that the cross-sectional area of the flow path decreases from the second end toward the first end.
  • a ninth aspect of the present disclosure is a vapor chamber according to each of the above sixth aspect and the above seventh aspect, comprising:
  • the first sheet groove may be formed such that the cross-sectional area of the flow path decreases from the first end toward the second end.
  • a tenth aspect of the present disclosure is a vapor chamber according to each of the sixth to ninth aspects described above, comprising:
  • the first sheet groove may be arranged so as to be inclined with respect to the first direction in plan view.
  • An eleventh aspect of the present disclosure is a vapor chamber according to each of the above-described sixth to tenth aspects, wherein
  • the first sheet may include a plurality of the first sheet grooves,
  • the plurality of first sheet grooves may be radially arranged in plan view.
  • a twelfth aspect of the present disclosure is the vapor chamber according to each of the above-described first to eleventh aspects, wherein
  • the first sheet may include a plurality of first sheet grooves and a communication groove communicating between the adjacent first sheet grooves.
  • a thirteenth aspect of the present disclosure is a vapor chamber according to each of the above-described first to twelfth aspects, wherein:
  • the body sheet may include a first body surface facing the inner surface of the first sheet and a second body surface located opposite to the first body surface,
  • the liquid flow path portion may be provided on the first main body surface.
  • a fourteenth aspect of the present disclosure provides, in the vapor chamber according to the thirteenth aspect described above, A second sheet laminated on the second main body surface of the main body sheet may be provided, The liquid flow path portion may also be provided on the second main body surface,
  • the second seat includes a second seat inner surface facing the second main body surface and a second seat groove provided in the second seat inner surface and provided at a position overlapping the steam passage in a plan view, and a second seat groove extending along a direction crossing the first direction.
  • a fifteenth aspect of the present disclosure provides, in the vapor chamber according to each of the above-described first to fourteenth aspects, the first sheet may comprise a recessed region recessed toward the steam passage; The first seat groove may be arranged in the recessed region.
  • a sixteenth aspect of the present disclosure is a vapor chamber according to each of the above-described first to fifteenth aspects, wherein
  • the body sheet includes a plurality of land portions extending along the first direction and provided with the liquid flow path portion, the land portions being aligned along a second direction perpendicular to the first direction. , and a connection portion that connects the land portions adjacent to each other,
  • the first seat groove may be provided at a position facing the connecting portion.
  • a seventeenth aspect of the present disclosure is a vapor chamber according to each of the above-described first to sixteenth aspects, wherein
  • the body sheet includes a plurality of land portions extending along the first direction and provided with the liquid flow path portion, the land portions being aligned along a second direction perpendicular to the first direction. , and a connection portion that connects the land portions adjacent to each other,
  • the first seat groove may be provided in a region adjacent to the connecting portion along the first direction in plan view.
  • An eighteenth aspect of the present disclosure is a vapor chamber according to each of the above-described first to seventeenth aspects, wherein: The vapor chamber may have a bend region bent along a bend line, The first sheet groove may be arranged in the bending area.
  • a nineteenth aspect of the present disclosure comprises: A vapor chamber containing a working fluid, a body sheet including a first body surface and a second body surface opposite to the first body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet positioned on the second main body surface of the main body sheet; a space provided in the body sheet and covered with the first sheet and the second sheet; the body sheet includes a plurality of lands positioned in the space and extending in a first direction;
  • the second sheet includes a second sheet outer surface located on the opposite side of the body sheet, the vapor chamber includes a bending region bent along a bending line extending in a direction intersecting the first direction in plan view; A vapor chamber in which a second seat outer surface recess is located in the second seat outer surface in the bending region.
  • a twentieth aspect of the present disclosure provides, in the vapor chamber according to the nineteenth aspect described above,
  • the second sheet may be positioned inside the bend relative to the main body sheet.
  • a twenty-first aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect and the above-described twentieth aspect, comprising:
  • the second sheet outer surface concave portion may extend along the bending line and cross the space portion.
  • a twenty-second aspect of the present disclosure provides, in the vapor chamber according to the twenty-first aspect described above, A plurality of the second sheet outer surface recessed portions may be positioned on the second sheet outer surface in the bending region, The plurality of second sheet outer surface concave portions may be arranged in the first direction.
  • a twenty-third aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect and the above-described twentieth aspect, comprising: A plurality of the second sheet outer surface recessed portions may be positioned on the second sheet outer surface in the bending region, The plurality of second sheet outer surface concave portions may be arranged along the bending line, At least some of the plurality of second seat outer surface recessed portions may overlap with the space.
  • a twenty-fourth aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect to the above-described twenty-third aspect, comprising:
  • the bending line may extend in a direction orthogonal to the first direction in plan view.
  • a twenty-fifth aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect to the above-described twenty-third aspect, comprising:
  • the bending line may extend in a direction inclined in the first direction.
  • a twenty-sixth aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth to the above-described twenty-fifth aspects, comprising:
  • the first sheet may include a first sheet outer surface located opposite to the body sheet,
  • a first sheet outer surface concave portion may be located on the first sheet outer surface in the bending region.
  • a twenty-seventh aspect of the present disclosure is a vapor chamber according to each of the above-described nineteenth aspect to the above-described twenty-sixth aspect, comprising: A land recess may be located on the first main body surface or the second main body surface of the land, The land recess may not communicate with the space, The land recess may overlap the second seat outer surface recess.
  • a twenty-eighth aspect of the present disclosure is a vapor chamber according to the twenty-seventh aspect described above, comprising:
  • the land recess may extend to both sides in the first direction from the second seat outer surface recess.
  • a twenty-ninth aspect of the present disclosure comprises: A vapor chamber containing a working fluid, a body sheet including a first body surface and a second body surface opposite to the first body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet positioned on the second main body surface of the main body sheet; a space provided in the body sheet and covered with the first sheet and the second sheet; the body sheet includes a plurality of lands positioned in the space and extending in a first direction;
  • the second sheet includes a second sheet outer surface located on the opposite side of the body sheet, the vapor chamber is divided into a first region, a second region, and a third region located between the first region and the second region in the first direction; In the third region, the vapor chamber includes a second seat outer surface concave portion located on the second seat outer surface.
  • a thirtieth aspect of the present disclosure is a vapor chamber according to the twenty-ninth aspect described above, comprising:
  • the second seat outer surface concave portion may extend in a direction crossing the first direction in a plan view and cross the space portion.
  • a thirty-first aspect of the present disclosure is a vapor chamber according to the twenty-ninth aspect described above, comprising: In the third region, a plurality of the second sheet outer surface concave portions may be positioned on the second sheet outer surface, The plurality of second sheet outer surface concave portions may be arranged in a direction intersecting the first direction, At least some of the plurality of second seat outer surface recessed portions may overlap with the space.
  • a thirty-second aspect of the present disclosure comprises: a housing; a device contained within the housing; a vapor chamber according to any of the first to thirty-first aspects above, in thermal contact with the device.
  • heat dissipation efficiency can be improved.
  • FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment.
  • FIG. FIG. 2 is a top view showing the vapor chamber according to the first embodiment.
  • 3 is a cross-sectional view taken along line AA of FIG. 2.
  • FIG. 4 is a top view of the lower sheet of FIG. 3;
  • FIG. 5 is a bottom view of the upper sheet of FIG. 3;
  • FIG. 6 is a top view of the wick sheet of FIG. 3;
  • FIG. 7 is a partially enlarged sectional view of FIG. 3.
  • FIG. 8 is a top view of FIG. 7.
  • FIG. 9 is a partially enlarged bottom view of FIG. 5 at a position corresponding to FIG. 8.
  • FIG. 10 is a partially enlarged top view of the vapor chamber of FIG.
  • FIG. 12 is a modified example of FIG.
  • FIG. 13 is a modified example of FIG.
  • FIG. 14 is a modified example of FIG.
  • FIG. 15 is another modified example of FIG.
  • FIG. 16 is another modified example of FIG.
  • FIG. 17 is a modified example of FIG.
  • FIG. 18 is another modified example of FIG.
  • FIG. 19 is another modified example of FIG.
  • FIG. 20 is another modified example of FIG.
  • FIG. 21 is a partially enlarged top view showing the vapor chamber according to the second embodiment.
  • FIG. 22 is a modified example of FIG. FIG.
  • FIG. 23 is a partially enlarged top view showing the vapor chamber according to the third embodiment.
  • FIG. 24 is a partially enlarged top view showing the vapor chamber according to the fourth embodiment.
  • FIG. 25 is a partially enlarged top view showing the vapor chamber according to the fifth embodiment.
  • FIG. 26 is a partially enlarged top view showing the vapor chamber according to the sixth embodiment.
  • FIG. 27 is a partially enlarged top view showing the vapor chamber according to the seventh embodiment.
  • FIG. 28 is a modified example of FIG.
  • FIG. 29 is another modified example of FIG.
  • FIG. 30 is a partially enlarged top view showing the vapor chamber according to the eighth embodiment.
  • FIG. 31 is a modified example of FIG.
  • FIG. 32 is a partially enlarged top view showing the vapor chamber according to the ninth embodiment.
  • FIG. 33 is a modified example of FIG.
  • FIG. 34 is another modified example of FIG.
  • FIG. 35 is a partially enlarged sectional view showing the vapor chamber according to the tenth embodiment.
  • FIG. 36 is a partially enlarged sectional view showing the vapor chamber according to the eleventh embodiment.
  • FIG. 37 is a partially enlarged sectional view showing the vapor chamber according to the twelfth embodiment.
  • FIG. 38 is a partially enlarged top view showing the vapor chamber according to the thirteenth embodiment.
  • FIG. 39 is a top view showing the vapor chamber according to the fourteenth embodiment.
  • 40 is a side view showing the vapor chamber bent along the bend line of FIG. 39;
  • FIG. 41 is a modified example of FIG. FIG.
  • FIG. 42 is a schematic diagram showing an example of the vapor chamber according to the fifteenth embodiment.
  • FIG. 43 is a schematic diagram showing another example of the vapor chamber according to the fifteenth embodiment.
  • FIG. 44 is an external perspective view showing the vapor chamber according to the fifteenth embodiment.
  • 45 is a plan view of the vapor chamber shown in FIG. 42 before bending;
  • FIG. 46 is a cross-sectional view taken along line AA-AA of FIG. 45.
  • FIG. 47 is a plan view showing the inner surface of the first sheet shown in FIG. 46.
  • FIG. 48 is a plan view showing the inner surface of the second sheet shown in FIG. 46.
  • FIG. 49 is a cross-sectional view taken along line BB-BB of FIG. 48.
  • FIG. 50 is a partially enlarged plan view showing a modified example of the second seat outer surface concave portion shown in FIG. 45.
  • FIG. FIG. 51 is a modified example of FIG.
  • FIG. 52 is another modified example of FIG.
  • FIG. 53 is another modified example of FIG.
  • FIG. 54 is another modified example of FIG. 55 is a plan view showing the first main body surface of the wick sheet shown in FIG. 46.
  • FIG. 56 is a plan view showing the second main body surface of the wick sheet shown in FIG. 46.
  • FIG. 57 is a partially enlarged sectional view of FIG. 46.
  • FIG. FIG. 58 is a partially enlarged view of the liquid flow path shown in FIG. 55.
  • FIG. 59 is a schematic cross-sectional view showing the bend region of the vapor chamber shown in FIG.
  • FIG. 60 is a partially enlarged plan view showing a modified example of the second seat outer surface concave portion shown in FIG. 45.
  • FIG. FIG. 61 is a modified example of FIG.
  • FIG. 62 is another modified example of FIG.
  • FIG. 63 is another modified example of FIG. 64 is a schematic cross-sectional view showing one variation of the bending region of the vapor chamber shown in FIG. 59.
  • FIG. 65 is a partially enlarged plan view showing a modification of the vapor chamber shown in FIG. 45.
  • FIG. 66 is a cross-sectional view taken along line CC--CC of FIG. 65.
  • FIG. 69 is a partially enlarged sectional view showing the vapor chamber according to the seventeenth embodiment.
  • 70 is a partially enlarged plan view showing the second seat outer surface concave portion and the land concave portion shown in FIG. 69.
  • the shapes of multiple parts that can be expected to have similar functions are regularly described, but the shapes are not limited to strict meanings and are expected to have the relevant functions.
  • the shapes of the portions may differ from each other.
  • the boundary lines indicating the joint surfaces of members are shown as simple straight lines for convenience, but they are not limited to strict straight lines, and desired joint performance can be expected.
  • the shape of the boundary line is arbitrary as long as it is possible.
  • FIG. A vapor chamber 1 according to the present embodiment is a device mounted on an electronic device E in order to cool a device D (device to be cooled) as a heating element housed in the electronic device E.
  • FIG. Examples of the electronic device E include mobile terminals such as portable terminals and tablet terminals.
  • Examples of the device D include electronic devices that generate heat, such as central processing units (CPUs), light emitting diodes (LEDs), and power semiconductors used in mobile terminals and the like.
  • CPUs central processing units
  • LEDs light emitting diodes
  • power semiconductors used in mobile terminals and the like.
  • the electronic device E on which the vapor chamber 1 according to the present embodiment is mounted will be described by taking a tablet terminal as an example.
  • the electronic device E (tablet terminal) includes a housing H, a device D housed in the housing H, and a vapor chamber 1 .
  • a touch panel display TD is provided on the front surface of the housing H.
  • the vapor chamber 1 is housed within the housing H and arranged to be in thermal contact with the device D. As shown in FIG. This allows the vapor chamber 1 to receive the heat generated by the device D when the electronic equipment E is used.
  • the heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via working fluids 2a and 2b, which will be described later. In this way device D is effectively cooled. If the electronic device E is a tablet terminal, the device D corresponds to a central processing unit or the like.
  • the vapor chamber 1 includes a sealed space 3 in which working fluids 2a, 2b are enclosed.
  • the vapor chamber 1 is configured so that the working fluids 2a and 2b flow through the sealed space 3 while repeating phase changes, thereby cooling the device D of the electronic equipment E described above.
  • working fluids 2a and 2b include pure water, ethanol, methanol, acetone, etc., and mixtures thereof.
  • the vapor chamber 1 is interposed between a lower sheet 10 (second sheet), an upper sheet 20 (first sheet), and between the lower sheet 10 and the upper sheet 20. and a wick sheet 30 (main body sheet).
  • vapor chamber 1 is composed of lower sheet 10 , upper sheet 20 and wick sheet 30 .
  • lower sheet 10, wick sheet 30 and upper sheet 20 are laminated in this order.
  • the wick sheet 30 is made up of one sheet is shown, but the wick sheet 30 may be made up of two or more sheets. The number of sheets of the sheet 30 is arbitrary.
  • the vapor chamber 1 is generally formed in the shape of a thin flat plate.
  • the planar shape of the vapor chamber 1 is arbitrary, it may be rectangular as shown in FIG.
  • the planar shape of the vapor chamber 1 may be, for example, a rectangle having one side of 10 mm or more and 200 mm or less and another side of 50 mm or more and 600 mm or less, or a square having one side of 40 mm or more and 300 mm or less.
  • Planar dimensions are arbitrary.
  • the planar shape of the vapor chamber 1 is a rectangular shape whose longitudinal direction is the X direction (first direction) and whose lateral direction is the Y direction (second direction) perpendicular to the X direction. An example will be described.
  • the lower sheet 10, the upper sheet 20 and the wick sheet 30 may also have the same planar shape as the vapor chamber 1, as shown in FIGS.
  • the planar shape of the vapor chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, a T-shape, and a U-shape.
  • the vapor chamber 1 includes an evaporation area SR where the working fluid 2b evaporates and a condensation area CR where the working steam 2a condenses.
  • the working vapor 2a is a working fluid in a gaseous state, that is, a vapor of the working fluid
  • the working fluid 2b is a working fluid in a liquid state, that is, a liquid of the working fluid.
  • the evaporation area SR is an area that overlaps with the device D in plan view, and is an area where the device D is attached.
  • the evaporation area SR can be arranged at any position on the vapor chamber 1 .
  • an evaporation region SR is formed on the negative side of the vapor chamber 1 in the X direction (left side in FIG. 2). Heat from the device D is transmitted to the evaporation region SR, and this heat causes the working liquid 2b to evaporate to generate the working vapor 2a.
  • the heat from the device D can be transferred not only to the region overlapping the device D in plan view, but also to the periphery of the region. Therefore, the evaporation region SR includes a region that overlaps the device D and a peripheral region thereof in plan view.
  • a plan view is a state in which the vapor chamber 1 is viewed from a direction orthogonal to the surface receiving heat from the device D and the surface emitting the received heat.
  • the surface receiving heat corresponds to the upper sheet outer surface 20b of the upper sheet 20, which will be described later
  • the surface emitting heat corresponds to the lower sheet outer surface 10a of the lower sheet 10, which will be described later.
  • the surface receiving heat may correspond to the lower sheet outer surface 10a
  • the surface emitting heat may correspond to the upper sheet outer surface 20b.
  • a state of viewing the vapor chamber 1 from above or a state of viewing from below corresponds to a plan view.
  • the condensation area CR is an area that does not overlap with the device D in plan view, and is an area where the working steam 2a mainly releases heat and condenses.
  • the condensation area CR can also be said to be an area around the evaporation area SR.
  • a condensation region CR is formed on the positive side of the vapor chamber 1 in the X direction (right side in FIG. 2). Heat from the working steam 2a is released to the lower sheet 10 in the condensation region CR, where the working steam 2a is cooled and condensed to produce a working fluid 2b.
  • the vertical relationship may be disrupted depending on the orientation of the mobile terminal.
  • the sheet that receives heat from the device D is referred to as the upper sheet 20 described above, and the sheet that releases the received heat is referred to as the lower sheet 10 described above. Therefore, the following description will be made with the lower sheet 10 arranged on the lower side and the upper sheet 20 arranged on the upper side.
  • the lower sheet 10 has a lower sheet outer surface 10a (second sheet outer surface) provided on the side opposite to the wick sheet 30, and a lower sheet inner surface 10b (second sheet outer surface) facing the wick sheet 30. 2 seat inner surface) and .
  • a housing member Ha which constitutes a part of a housing H of a mobile terminal or the like, is attached to the outer surface 10a of the lower seat.
  • the entire lower seat outer surface 10a may be covered with the housing member Ha.
  • the lower sheet 10 may be formed flat as a whole, and may have a uniform thickness as a whole.
  • alignment holes 12 may be provided at the four corners of the lower sheet 10 .
  • the planar shape of the alignment hole 12 is circular, but is not limited to this. Alignment holes 12 may pass through lower sheet 10 .
  • the upper sheet 20 has an upper sheet inner surface 20a (first sheet inner surface) facing the wick sheet 30 and an upper sheet outer surface 20b (first sheet inner surface) provided opposite to the upper sheet inner surface 20a. outer surface) and The device D described above is attached to the upper sheet outer surface 20b. Further, as shown in FIGS. 3 and 5, the upper sheet 20 includes an upper sheet groove 70 (first sheet groove) provided in the inner surface 20a of the upper sheet. Details of the upper seat groove 70 will be described later.
  • alignment holes 22 may be provided at the four corners of the upper sheet 20 .
  • the planar shape of the alignment hole 22 is circular, but is not limited to this.
  • Alignment holes 22 may extend through upper sheet 20 .
  • the wick sheet 30 includes a wick sheet lower surface 30a (second main body surface) and a wick sheet upper surface 30b (first main body surface) provided on the opposite side of the wick sheet lower surface 30a. I'm in.
  • the wick sheet lower surface 30 a faces the lower sheet inner surface 10 b of the lower sheet 10 .
  • the wick sheet upper surface 30 b faces the upper sheet inner surface 20 a of the upper sheet 20 .
  • the lower sheet inner surface 10b and the wick sheet lower surface 30a may be permanently joined to each other by thermocompression.
  • the upper sheet inner surface 20a and the wick sheet upper surface 30b may be permanently joined together by thermocompression bonding. Diffusion bonding can be given as an example of bonding by thermocompression bonding.
  • the lower sheet 10, the upper sheet 20 and the wick sheet 30 may be joined by other methods such as brazing instead of diffusion joining.
  • the term "permanently joined” is not limited to a strict meaning, and means that the vapor chamber 1 is joined to such an extent that the sealing of the sealed space 3 can be maintained during operation of the vapor chamber 1. used as a term.
  • the wick sheet 30 includes a frame portion 32 and a plurality of lands 33 provided within the frame portion 32 .
  • the frame portion 32 and the land portion 33 are portions where the material of the wick sheet 30 remains without being etched in the etching process described later.
  • the frame body portion 32 is formed in a rectangular frame shape in plan view.
  • a steam channel portion 50 is provided inside the frame portion 32 .
  • the steam channel portion 50 contains the working fluids 2a and 2b.
  • Each land portion 33 is provided inside the frame portion 32 , and a steam flow path portion 50 is provided around each land portion 33 . Therefore, the working steam 2 a flows around each land portion 33 .
  • each land portion 33 extends along the X direction (horizontal direction in FIG. 6) in plan view, and the planar shape of each land portion 33 is an elongated rectangular shape. Moreover, each land part 33 is located in a line along the Y direction (vertical direction in FIG. 6) orthogonal to the X direction. The land portions 33 may be arranged in the Y direction at regular intervals.
  • the width w1 (see FIG. 7) of each land portion 33 may be, for example, 100 ⁇ m to 3000 ⁇ m.
  • the width w1 of the land portion 33 is the dimension of the land portion 33 in the Y direction, and means the dimension in the Z direction at the position where the through portion 34, which will be described later, exists.
  • the X direction is specified as the direction in which the second steam passage 52 of the steam passage portion 50, which will be described later, extends.
  • the Y direction is specified as a direction orthogonal to the X direction in plan view.
  • the Z direction is specified as a direction orthogonal to the X direction and the Y direction, and corresponds to the thickness direction of the wick sheet 30 .
  • the frame portion 32 and each land portion 33 are diffusion-bonded to the lower sheet 10 and are diffusion-bonded to the upper sheet 20 . This improves the mechanical strength of the vapor chamber 1 .
  • a wall surface 53 a of the lower steam flow channel recess 53 and a wall surface 54 a of the upper steam flow channel recess 54 which will be described later, form side walls of the land portion 33 .
  • the wick sheet lower surface 30a and the wick sheet upper surface 30b may be formed flat across the frame portion 32 and each land portion 33. As shown in FIG.
  • alignment holes 35 may be provided at the four corners of the wick sheet 30 .
  • the planar shape of the alignment hole 35 is circular, but is not limited to this.
  • the alignment holes 35 may pass through the wick sheet 30 .
  • the wick sheet 30 includes a steam channel portion 50 through which the working steam 2a passes, and a liquid channel portion 60 that communicates with the steam channel portion 50 and through which the working fluid 2b passes.
  • the steam channel portion 50 is mainly a channel through which the working steam 2a passes.
  • the working fluid 2b may also pass through the vapor flow path portion 50 .
  • the steam channel portion 50 may extend through the wick sheet 30 from the wick sheet lower surface 30 a to the wick sheet upper surface 30 b.
  • the steam channel portion 50 may be covered with the lower sheet 10 on the wick sheet lower surface 30a, and may be covered with the upper sheet 20 on the wick sheet upper surface 30b.
  • the steam flow path section 50 may include a first steam passage 51 and a plurality of second steam passages 52.
  • the first steam passage 51 is formed between the frame portion 32 and the land portion 33 .
  • the first steam passage 51 is formed continuously inside the frame portion 32 and outside the land portion 33 .
  • the planar shape of the first steam passage 51 is a rectangular frame shape.
  • the second steam passage 52 is formed between land portions 33 adjacent to each other.
  • the second steam passage 52 extends along the X direction.
  • the planar shape of the second steam passage 52 is an elongated rectangular shape.
  • the plurality of lands 33 partition the steam flow path section 50 into a first steam passage 51 and a plurality of second steam passages 52 .
  • the steam flow path portion 50 includes the first steam passage 51 in the present embodiment, the steam flow path portion 50 does not have to include the first steam passage 51 . That is, the frame portion 32 and the land portion 33 may be arranged adjacent to each other, and no steam passage may be provided between the frame portion 32 and the land portion 33 .
  • the first steam passage 51 and the second steam passage 52 may extend through the wick sheet 30 from the wick sheet lower surface 30a to the wick sheet upper surface 30b.
  • the first steam passage 51 and the second steam passage 52 include a lower steam passage recess 53 provided in the wick sheet lower surface 30a and an upper steam passage recess 54 provided in the wick sheet upper surface 30b.
  • the lower steam channel recess 53 and the upper steam channel recess 54 communicate with each other, and the first steam channel 51 and the second steam channel 52 are formed to extend from the wick sheet lower surface 30a to the wick sheet upper surface 30b. .
  • the lower steam flow path concave portion 53 is formed in a concave shape on the wick sheet lower surface 30a by etching the wick sheet 30 from the wick sheet lower surface 30a in an etching process to be described later.
  • forming a concave shape on the lower surface 30a of the wick sheet means that it is formed so as to be concave from the lower surface 30a of the wick sheet.
  • the lower steam channel recess 53 has a curved wall surface 53a, as shown in FIG.
  • This wall surface 53a defines the lower steam flow channel recessed portion 53, and in the cross section shown in FIG. 7, is curved so as to approach the opposing wall surface 53a as it proceeds toward the wick sheet upper surface 30b.
  • the hydraulic fluid 2b can adhere to this wall surface 53a.
  • Such a lower steam passage concave portion 53 constitutes part (lower half) of the first steam passage 51 and part (lower half) of the second steam passage 52 .
  • the upper steam flow path concave portion 54 is formed in a concave shape on the wick sheet upper surface 30b by etching the wick sheet 30 from the wick sheet upper surface 30b in an etching process to be described later.
  • being formed in a concave shape on the upper surface 30b of the wick sheet means forming so as to be concave from the upper surface 30b of the wick sheet.
  • the upper steam passage recess 54 has a curved wall surface 54a, as shown in FIG.
  • the wall surface 54a defines the upper steam flow channel recessed portion 54, and in the cross section shown in FIG. 7, the wall surface 54a curves toward the opposing wall surface 54a as it proceeds toward the wick sheet lower surface 30a.
  • the hydraulic fluid 2b can adhere to this wall surface 54a.
  • Such an upper steam passage concave portion 54 constitutes part (upper half) of the first steam passage 51 and part (upper half) of the second steam passage 52 .
  • the wall surface 53a of the lower steam flow path recessed portion 53 and the wall surface 54a of the upper steam flow path recessed portion 54 are connected to form the through portion 34.
  • the planar shape of the penetration portion 34 in the first steam passage 51 is a rectangular frame like the first steam passage 51
  • the planar shape of the penetration portion 34 in the second steam passage 52 is , and has an elongated rectangular shape like the second steam passage 52 .
  • the penetrating portion 34 may be defined by a ridgeline formed so that the wall surface 53a of the lower steam flow channel recessed portion 53 and the wall surface 54a of the upper steam flow channel recessed portion 54 merge and protrude inward.
  • the plane area of the first steam passage 51 may be the smallest, and the plane area of the second steam passage 52 may be the smallest.
  • the width w2 (see FIG. 7) of the penetration portion 34 of each steam passage 51, 52 may be, for example, 400 ⁇ m to 1600 ⁇ m.
  • the width w2 of the through portion 34 of the first steam passage 51 corresponds to the gap between the land portions 33 adjacent to each other in the Y direction.
  • the width w2 of the through portion 34 of the second steam passage 52 corresponds to the gap between the frame portion 32 and the land portion 33 in the Y direction (or the X direction).
  • the position of the penetrating portion 34 in the Z direction may be an intermediate position between the wick sheet lower surface 30a and the wick sheet upper surface 30b.
  • the position is not limited to this, and may be a position closer to the lower seat 10 than the intermediate position, or a position closer to the upper seat 20 than the intermediate position.
  • the position of the penetrating portion 34 in the Z direction is arbitrary.
  • the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 include the penetrating portion 34 defined by the ridgeline formed to protrude inward.
  • the cross-sectional shape of the first steam passage 51 and the cross-sectional shape of the second steam passage 52 may be trapezoidal, rectangular, or barrel-shaped.
  • the steam passage portion 50 including the first steam passage 51 and the second steam passage 52 configured in this manner constitutes part of the sealed space 3 described above.
  • the first steam passage 51 and the second steam passage 52 are formed mainly by the lower sheet 10, the upper sheet 20, and the frame portion 32 and land portion 33 of the wick sheet 30 described above. defined.
  • Each of the steam passages 51, 52 has a relatively large cross-sectional area for passage of the working steam 2a.
  • FIG. 3 shows the first steam passage 51, the second steam passage 52, etc. in an enlarged manner for clarity of the drawing, and the number and arrangement of these steam passages 51, 52, etc. are not shown in the figure. 2. It is different from FIGS. 6 to 10 and the like.
  • a plurality of support portions that support the land portion 33 to the frame portion 32 may be provided in the steam flow path portion 50 .
  • a plurality of connecting portions 38 may be provided to connect the land portions 33 adjacent to each other.
  • the support portion and the connecting portion 38 may be formed so as not to block the flow of the working steam 2a that diffuses through the steam flow path portion 50 .
  • the wick sheet 30 may be arranged at a position close to one of the wick sheet lower surface 30a and the wick sheet upper surface 30b and at a position close to the other, a space forming a recessed portion of the steam flow path may be formed.
  • the thickness of the supporting portion and the connecting portion 38 can be made thinner than the thickness of the wick sheet 30, and the first steam passage 51 and the second steam passage 52 are separated in the X direction and the Y direction. can be prevented.
  • the liquid channel portion 60 is mainly a channel through which the working liquid 2b passes.
  • the working steam 2 a may also pass through the liquid flow path portion 60 .
  • the liquid flow path portion 60 may be provided on the wick sheet upper surface 30b of the wick sheet 30.
  • the liquid flow path portion 60 is provided on the wick sheet upper surface 30 b of each land portion 33 .
  • the liquid channel portion 60 constitutes a part of the above-described sealed space 3 and communicates with the vapor channel portion 50 .
  • the liquid flow path portion 60 is configured as a capillary structure (wick) for transporting the working liquid 2b to the evaporation region SR.
  • the liquid flow path portion 60 may be formed over the entire wick sheet upper surface 30 b in each land portion 33 .
  • the liquid flow path portion 60 may be provided on the wick sheet upper surface 30 b of the frame portion 32 .
  • the liquid flow path section 60 may be composed of a plurality of grooves provided on the wick sheet upper surface 30b. More specifically, the liquid flow path portion 60 includes a plurality of main liquid flow path grooves 61 through which the working fluid 2b passes, and a plurality of liquid flow path communication grooves 65 communicating with the main liquid flow path grooves 61. may be present.
  • Each liquid flow channel main groove 61 extends along the X direction, as shown in FIG.
  • the main liquid channel groove 61 has a small channel cross-sectional area mainly so that the working fluid 2b flows by capillary action.
  • the channel cross-sectional area of the liquid channel main groove 61 is smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • the liquid flow path main groove 61 is configured to transport the working fluid 2b condensed from the working steam 2a to the evaporation region SR.
  • the main liquid flow channel grooves 61 may be arranged along the Y direction.
  • the main liquid flow channel grooves 61 may be arranged in parallel with each other at regular intervals.
  • the liquid flow channel main groove 61 may be formed by etching the wick sheet 30 from the wick sheet upper surface 30b in an etching process to be described later. Accordingly, the main liquid flow channel groove 61 may have a curved wall surface 62 as shown in FIG. The wall surface 62 defines the main liquid flow channel groove 61 and may be concavely curved toward the lower surface 30a of the wick sheet.
  • the width w3 of the main groove 61 of the liquid flow path may be, for example, 5 ⁇ m to 150 ⁇ m.
  • the width w3 of the main liquid flow channel groove 61 means the dimension on the wick sheet upper surface 30b.
  • the depth h1 (dimension in the Z direction) of the main liquid flow channel groove 61 shown in FIG. 7 may be, for example, 3 ⁇ m to 150 ⁇ m.
  • each liquid channel communication groove 65 extends along the direction crossing the X direction.
  • each liquid channel connecting groove 65 extends along the Y direction and is formed perpendicular to the main liquid channel groove 61 .
  • Some liquid flow channel communication grooves 65 communicate with adjacent liquid flow channel main grooves 61 .
  • the other liquid channel communication groove 65 communicates the first steam passage 51 or the second steam passage 52 with the liquid channel main groove 61 . That is, the liquid flow channel connecting groove 65 extends from the edge of the land portion 33 in the Y direction to the main liquid flow channel groove 61 adjacent to the edge. In this manner, the first steam passage 51 and the liquid flow path main groove 61 communicate with each other, and the second steam path 52 and the liquid flow path main groove 61 communicate with each other.
  • the liquid channel communication groove 65 has a small channel cross-sectional area mainly so that the working fluid 2b flows by capillary action.
  • the channel cross-sectional area of the liquid channel communication groove 65 is smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • Each liquid channel communication groove 65 may be arranged along the X direction.
  • the liquid flow channel communication grooves 65 may be arranged in parallel with each other at regular intervals.
  • the liquid channel communication groove 65 may also be formed by etching, similar to the liquid channel main groove 61 .
  • the liquid flow path connecting groove 65 may have a curved wall surface (not shown) similar to that of the liquid flow path main groove 61 .
  • the width w4 of the liquid channel communication groove 65 may be equal to the width w3 of the liquid channel main groove 61 .
  • the width w4 of the liquid flow communication groove 65 may be larger or smaller than the width w3 of the liquid flow main groove 61, without being limited to this.
  • the depth of the liquid channel communication groove 65 may be equal to the depth h1 of the liquid channel main groove 61 . However, it is not limited to this, and the depth of the liquid flow channel connecting groove 65 may be deeper or shallower than the depth h1 of the main liquid flow channel groove 61 .
  • the liquid flow path portion 60 may have a liquid flow path projection row 63 provided on the wick sheet upper surface 30b.
  • the liquid flow path protrusion row 63 is provided between the liquid flow path main grooves 61 adjacent to each other.
  • Each liquid flow path projection row 63 includes a plurality of liquid flow path projections 64 arranged in the X direction.
  • the liquid flow path convex portion 64 is in contact with the upper sheet inner surface 20a.
  • Each liquid flow path convex portion 64 is formed in a rectangular shape in a plan view so that the X direction is the longitudinal direction.
  • the main liquid flow channel groove 61 is interposed between the liquid flow channel protrusions 64 adjacent to each other in the Y direction.
  • a liquid flow path connecting groove 65 is interposed between the liquid flow path protrusions 64 adjacent to each other in the X direction.
  • the liquid flow path convex portion 64 is a portion where the material of the wick sheet 30 remains without being etched in the etching process described later. As shown in FIG. 8, the planar shape of the liquid flow path convex portion 64 (the shape at the position of the wick sheet upper surface 30b) may be rectangular.
  • the liquid flow path protrusions 64 may be arranged in a zigzag pattern. More specifically, the liquid flow path projections 64 of the liquid flow path projection arrays 63 that are adjacent to each other in the Y direction may be displaced from each other in the X direction. This shift amount may be half the arrangement pitch of the liquid flow path protrusions 64 in the X direction.
  • the width w5 (dimension in the Y direction) of the liquid flow path convex portion 64 shown in FIG. 8 may be, for example, 5 ⁇ m to 500 ⁇ m.
  • the width w5 of the liquid flow path convex portion 64 means the dimension on the upper surface 30b of the wick sheet.
  • the width w5 of the liquid flow path convex portion 64 corresponds to the gap between the liquid flow path main grooves 61 adjacent to each other in the Y direction.
  • the arrangement of the liquid flow path protrusions 64 is not limited to the zigzag pattern, and may be arranged in parallel. In this case, the liquid flow path projections 64 of the liquid flow path projection rows 63 adjacent to each other in the Y direction are also aligned in the X direction.
  • the vapor chamber 1 may include an injection part 4 for injecting the working fluid 2b into the sealed space 3.
  • the position of the injection part 4 is arbitrary, but as shown in FIG. 2, the injection part 4 may be provided at the edge of the vapor chamber 1 on the negative side in the X direction (left side in FIG. 2).
  • the injection part 4 may have an injection channel 37 formed in the wick sheet 30 . After the working liquid 2b is injected, the injection channel 37 may be sealed.
  • the materials forming the lower sheet 10, the upper sheet 20 and the wick sheet 30 are not particularly limited as long as they have good thermal conductivity.
  • Lower sheet 10, upper sheet 20 and wick sheet 30 may comprise, for example, copper or a copper alloy.
  • the thermal conductivity of each sheet 10, 20, 30 can be enhanced, and the heat radiation efficiency of the vapor chamber 1 can be enhanced.
  • corrosion can be prevented.
  • Other metal materials such as aluminum and titanium, or other metal alloy materials such as stainless steel may be used for these sheets 10, 20, and 30 as long as desired heat radiation efficiency can be obtained and corrosion can be prevented. good.
  • the thickness t1 of the vapor chamber 1 shown in FIG. 3 may be, for example, 100 ⁇ m to 1000 ⁇ m.
  • the thickness t1 of the vapor chamber 1 may be, for example, 100 ⁇ m to 1000 ⁇ m.
  • the vapor flow path portion 50 can be properly secured, and the vapor chamber 1 can function properly.
  • the thickness t1 to 1000 ⁇ m or less, thickening of the vapor chamber 1 can be suppressed.
  • the thickness t2 of the lower sheet 10 shown in FIG. 3 may be, for example, 6 ⁇ m to 100 ⁇ m. By setting the thickness t2 of the lower sheet 10 to 6 ⁇ m or more, the mechanical strength of the lower sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the lower sheet 10 to 100 ⁇ m or less, thickening of the vapor chamber 1 can be suppressed.
  • the thickness t3 of the upper sheet 20 shown in FIG. 3 may be set similarly to the thickness t2 of the lower sheet 10. The thickness t3 of the upper sheet 20 and the thickness t2 of the lower sheet 10 may differ from each other.
  • the thickness t4 of the wick sheet 30 shown in FIG. 3 may be, for example, 50 ⁇ m to 400 ⁇ m.
  • the thickness t4 of the wick sheet 30 shown in FIG. 3 may be, for example, 50 ⁇ m to 400 ⁇ m.
  • the upper sheet 20 of the vapor chamber 1 includes the upper sheet grooves 70 provided in the upper sheet inner surface 20a.
  • the upper sheet 20 may include a plurality of upper sheet grooves 70, as shown in FIGS.
  • FIG. 10 is a partially enlarged top view showing a state in which the wick sheet 30 and the upper sheet 20 are overlapped.
  • the upper seat groove 70 is provided at a position overlapping the steam passages 51 and 52 in plan view.
  • the upper seat groove 70 is provided at a position overlapping the second steam passage 52 in plan view, and the entire upper seat groove 70 overlaps the second steam passage 52 in plan view.
  • the upper seat groove 70 is provided between the land portions 33 adjacent to each other in plan view.
  • the upper seat groove 70 may be provided at a position overlapping the first steam passage 51 in plan view. In this case, the upper seat groove 70 may be provided at a position overlapping a portion of the first steam passage 51 extending in the X direction in plan view.
  • the upper seat groove 70 extends along the direction crossing the X direction.
  • the upper seat groove 70 extends along the Y direction orthogonal to the X direction.
  • the planar shape of the upper seat groove 70 is an elongated rectangular shape.
  • the upper sheet groove 70 includes a first end portion 71 and a second end portion 72 provided at both ends in the Y direction.
  • the first end portion 71 constitutes the end portion of the upper sheet groove 70 on the positive side in the Y direction (upper side in FIGS. 9 and 10)
  • the second end portion 72 constitutes the end portion of the upper sheet groove 70 on the negative side in the Y direction. (lower side in FIGS. 9 and 10).
  • both the first end portion 71 and the second end portion 72 are provided at positions overlapping the second steam passage 52 in plan view.
  • the upper seat grooves 70 may be arranged along the X direction.
  • the upper sheet grooves 70 may be arranged in parallel with each other at regular intervals.
  • the upper sheet groove 70 may be formed by etching the upper sheet 20 from the upper sheet inner surface 20a. Accordingly, the upper sheet groove 70 may have a curved wall surface 73 as shown in FIG. 11 . This wall surface 73 defines the upper seat groove 70 and may curve concavely from the upper seat inner surface 20a toward the upper seat outer surface 20b. In the example shown in FIG. 11, the cross-sectional shape of the upper seat groove 70 is semicircular.
  • the upper seat groove 70 mainly has a small flow passage cross-sectional area so that the hydraulic fluid 2b flows by capillary action.
  • the upper seat groove 70 is a groove having a channel cross-sectional area smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • the upper seat groove 70 facilitates the movement of the hydraulic fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60.
  • the channel cross-sectional area of the upper sheet groove 70 may be equal to the channel cross-sectional area of the liquid channel main groove 61 .
  • the flow path cross-sectional area of the upper sheet groove 70 may be smaller than the flow path cross-sectional area of the liquid flow main groove 61 without being limited to this.
  • the capillary action of the upper seat groove 70 imparts a driving force to the hydraulic fluid 2b from the liquid flow path portion 60 toward the upper seat groove 70, and the hydraulic fluid 2b in the liquid flow path portion 60 passes through the upper seat groove 70. can be quickly moved to the steam passages 51 and 52.
  • the flow channel cross-sectional area of the upper sheet groove 70 may be larger than the flow channel cross-sectional area of the main liquid flow channel groove 61 .
  • the capillary action of the upper seat groove 70 gives the working fluid 2b a driving force from the upper seat groove 70 toward the liquid flow path portion 60, causing the working fluid 2b in the steam passages 51 and 52 to pass through the upper seat groove 70. can be quickly moved to the liquid flow path section 60.
  • the length L1 (dimension in the Y direction) of the upper sheet groove 70 shown in FIG. (see FIG. 8). If the upper seat groove 70 has a channel cross-sectional area smaller than the channel cross-sectional areas of the steam passages 51 and 52, the length L1 of the upper seat groove 70 is larger than the width w6 of the upper seat groove 70, which will be described later. It can be big.
  • the length L1 of the upper sheet groove 70 may be, for example, greater than 5 ⁇ m.
  • the width w6 (dimension in the X direction) of the upper sheet groove 70 shown in FIGS. 9 and 11 may be equal to the width w3 (see FIG. 7) of the main liquid flow path groove 61. However, it is not limited to this, and the width w6 of the upper sheet groove 70 may be smaller or larger than the width w3 of the main liquid flow channel groove 61 .
  • the width w6 (dimension in the X direction) of the upper sheet groove 70 may be, for example, 5 ⁇ m to 150 ⁇ m.
  • the width w6 of the upper sheet groove 70 means the dimension of the upper sheet inner surface 20a.
  • the depth h2 (dimension in the Z direction) of the upper sheet groove 70 shown in FIG. 11 may be equal to the depth h1 of the main liquid flow channel groove 61 (see FIG. 7). However, it is not limited to this, and the depth h2 of the upper sheet groove 70 may be deeper or shallower than the depth h1 of the main liquid flow channel groove 61 .
  • the depth h2 of the upper sheet groove 70 may be, for example, 3 ⁇ m to 150 ⁇ m.
  • the present invention is not limited to this, and the gap w7 between the upper sheet grooves 70 adjacent to each other in the X direction may be larger than the width w5 of the liquid flow path convex portion 64.
  • a gap w7 between upper sheet grooves 70 adjacent to each other in the X direction may be, for example, 3 ⁇ m to 500 ⁇ m.
  • the planar shape of the upper seat groove 70 is an elongated rectangular shape, and the cross-sectional shape of the upper seat groove 70 is a semicircular shape, but it is not limited to this. , the shape of the upper seat groove 70 is arbitrary.
  • the upper seat groove 70 is provided over the entire region overlapping the second steam passage 52 in a plan view, but the present invention is not limited to this, and the upper seat groove 70 is provided in a plane. It may be provided only in a part of the regions visually overlapping with the steam passages 51 and 52 .
  • the upper sheet groove 70 may be arranged only in the evaporation region SR. Further, for example, the upper seat groove 70 may be arranged only in the condensation region CR.
  • each sheet 10, 20, 30 is prepared.
  • the sheet preparation process includes a lower sheet preparation process for preparing the lower sheet 10 , an upper sheet preparation process for preparing the upper sheet 20 , and a wick sheet preparation process for preparing the wick sheet 30 .
  • a lower sheet base material having a desired thickness is prepared.
  • the lower sheet base material may be a rolled material.
  • the lower sheet base material is etched to form the lower sheet 10 having a desired planar shape.
  • the lower sheet 10 having a desired planar shape may be formed by pressing the lower sheet base material. In this way, the lower sheet 10 as shown in FIG. 4 can be prepared.
  • an upper sheet base material having a desired thickness is prepared.
  • the upper sheet base material may be a rolled material.
  • the upper sheet base material is etched to form the upper sheet 20 having a desired planar shape. This etching forms the above-described upper sheet groove 70 in the upper sheet 20 .
  • the upper sheet 20 having a desired planar shape may be formed by pressing the upper sheet base material.
  • the upper sheet grooves 70 may be formed by cutting the upper sheet base material. In this way, the upper sheet 20 as shown in FIG. 5 can be prepared.
  • the wick sheet preparation process may include a material sheet preparation process of preparing a metal material sheet and an etching process of etching the metal material sheet.
  • a material sheet preparation process of preparing a metal material sheet and an etching process of etching the metal material sheet.
  • a flat metal material sheet having a desired thickness is prepared.
  • the sheet of metal material may be a rolled material.
  • the metal material sheet is etched from the first material surface and the second material surface to form the wick sheet 30 having a desired planar shape and the vapor channel portion 50 and the liquid channel portion 60.
  • the wick sheet 30 as shown in FIG. 6 can be prepared.
  • the first material surface and the second material surface of the metal material sheet may be etched simultaneously.
  • the etching of the first material surface and the second material surface may be performed as separate steps.
  • the vapor channel portion 50 and the liquid channel portion 60 may be formed by etching at the same time, but may be formed by etching in separate steps.
  • an iron chloride-based etchant such as an aqueous ferric chloride solution or a copper chloride-based etchant such as an aqueous copper chloride solution may be used.
  • the lower sheet 10, the upper sheet 20 and the wick sheet 30 are joined as a joining process.
  • the lower sheet 10, the wick sheet 30 and the upper sheet 20 are laminated in this order.
  • the sheets 10 , 20 and 30 may be aligned using the alignment hole 12 of the lower sheet 10 , the alignment hole 35 of the wick sheet 30 and the alignment hole 22 of the upper sheet 20 .
  • the lower sheet 10, the wick sheet 30 and the upper sheet 20 are temporarily fixed.
  • each sheet 10, 20, 30 may be tacked together by spot welding or laser welding.
  • the lower sheet 10, the wick sheet 30 and the upper sheet 20 are then permanently joined together by thermocompression bonding.
  • each sheet 10, 20, 30 may be bonded by diffusion bonding.
  • the working fluid 2b is injected into the sealed space 3 from the injection channel 37 of the injection part 4 as an injection process.
  • the injection channel 37 is sealed as a sealing process.
  • communication between the sealed space 3 and the outside is cut off, and the sealed space 3 is sealed. Therefore, it is possible to obtain the sealed space 3 in which the hydraulic fluid 2b is enclosed, and to prevent the hydraulic fluid 2b in the sealed space 3 from leaking to the outside.
  • the vapor chamber 1 according to this embodiment can be obtained.
  • the vapor chamber 1 obtained as described above is installed in a housing H of a mobile terminal or the like.
  • a device D such as a CPU, which is a device to be cooled, is attached to the upper sheet outer surface 20b of the upper sheet 20 (or the vapor chamber 1 is attached to the device D).
  • the working fluid 2b in the sealed space 3 moves against the wall surfaces of the sealed space 3, that is, the wall surface 53a of the lower steam flow channel recess 53, the wall surface 54a of the upper steam flow channel recess 54, and the liquid flow channel portion 60 due to its surface tension. It adheres to the wall surface 62 of the liquid channel main groove 61 and the wall surface of the liquid channel connecting groove 65 .
  • the hydraulic fluid 2b may also adhere to the portion of the lower seat inner surface 10b of the lower seat 10 exposed to the lower steam flow channel recessed portion 53 . Furthermore, the working fluid 2b may also adhere to the portions of the upper sheet inner surface 20a of the upper sheet 20 exposed to the upper vapor channel recess 54, the liquid channel main groove 61, and the liquid channel connecting groove 65. As shown in FIG.
  • the working fluid 2b existing in the evaporation region SR receives heat from the device D.
  • the received heat is absorbed as latent heat, and the working fluid 2b evaporates (vaporizes) to generate the working steam 2a.
  • the generated working steam 2 a diffuses within the first steam passage 51 and the second steam passage 52 that form the sealed space 3 . More specifically, the working steam 2a mainly diffuses in the X direction in the portion of the first steam passage 51 extending in the X direction and the second steam passage 52 (see the solid line arrow in FIG. 6).
  • the working steam 2a in each of the steam passages 51, 52 leaves the evaporation area SR and is transported to the relatively low-temperature condensation area CR (the right part in FIG. 6).
  • the working steam 2a is mainly radiated to the lower sheet 10 and cooled.
  • the heat received by the lower seat 10 from the working steam 2a is transferred to the outside air via the housing member Ha (see FIG. 3).
  • the working steam 2a loses latent heat absorbed in the evaporation area SR by radiating heat to the lower sheet 10 in the condensation area CR. Thereby, the working steam 2a is condensed and the working liquid 2b is produced.
  • the generated hydraulic fluid 2b adheres to the wall surfaces 53a and 54a of the respective vapor passage recesses 53 and 54, the lower sheet inner surface 10b of the lower sheet 10, and the upper sheet inner surface 20a of the upper sheet 20. As shown in FIG. Here, the working fluid 2b continues to evaporate in the evaporation region SR.
  • the working fluid 2b existing in the area other than the evaporation area SR (that is, the condensation area CR) of the liquid flow path portion 60 is transported toward the evaporation area SR by the capillary action of each liquid flow path main groove 61. (see dashed arrow in FIG. 6).
  • the working fluid 2b adhering to the wall surfaces 53a, 54a, the lower seat inner surface 10b, and the upper seat inner surface 20a moves to the liquid flow path portion 60, passes through the liquid flow path communication groove 65, and flows into the liquid flow path. It enters the mainstream groove 61 .
  • each liquid flow path main groove 61 and each liquid flow path communication groove 65 are filled with the working fluid 2b.
  • the filled working fluid 2b obtains a driving force toward the evaporation area SR due to the capillary action of each fluid flow channel main groove 61, and is smoothly transported toward the evaporation area SR.
  • each liquid channel main groove 61 communicates with another adjacent liquid channel main groove 61 via the corresponding liquid channel communication groove 65 .
  • the working fluid 2b is prevented from flowing between the main liquid flow channel grooves 61 adjacent to each other, and the occurrence of dryout in the main liquid flow channel grooves 61 is suppressed. Therefore, a capillary action is imparted to the working fluid 2b in each liquid flow path main groove 61, and the working fluid 2b is smoothly transported toward the evaporation region SR.
  • the working fluid 2b that has reached the evaporation region SR receives heat from the device D again and evaporates.
  • the working steam 2a evaporated from the working liquid 2b passes through the liquid flow channel communication groove 65 in the evaporation region SR and moves to the lower steam flow channel concave portion 53 and the upper steam flow channel concave portion 54 having a large flow channel cross-sectional area.
  • the working steam 2a then diffuses within the respective steam flow channel recesses 53 and 54 .
  • the working fluids 2a and 2b circulate within the sealed space 3 while repeating phase changes, that is, evaporation and condensation. This causes the heat of device D to be diffused and released. As a result, device D is cooled.
  • upper sheet grooves 70 are provided in the upper sheet inner surface 20a of the upper sheet 20 .
  • the upper seat groove 70 is provided at a position overlapping the steam passages 51 and 52 in plan view, and extends along a direction crossing the X direction.
  • the working fluid 2b can smoothly move from the steam passages 51 and 52 to the liquid flow path portion 60 through the upper sheet groove 70, and smoothly flow into the main flow groove 61 of the liquid flow path. can enter.
  • the working fluid 2b in the evaporation region SR, can move from the liquid flow path portion 60 to the vapor passages 51 and 52 through the upper sheet groove 70 . Therefore, the heat of the device D can be effectively absorbed by the working fluid 2b that has moved to the steam passages 51 and 52, and the device D can be cooled effectively.
  • the upper seat 20 has the upper seat grooves 70 provided in the inner surface 20a of the upper seat, and is provided at a position overlapping the steam passages 51 and 52 in plan view. It includes an upper seat groove 70 extending along the transverse direction.
  • the channel cross-sectional area of the upper sheet groove 70 may be smaller than the channel cross-sectional area of the main liquid channel groove 61 .
  • the capillary action of the upper seat groove 70 imparts a driving force to the hydraulic fluid 2b from the liquid flow path portion 60 toward the upper seat groove 70, causing the hydraulic fluid 2b in the liquid flow path portion 60 to flow through the upper seat groove 70.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the channel cross-sectional area of the upper sheet groove 70 may be larger than the channel cross-sectional area of the main liquid channel groove 61 .
  • the capillary action of the upper seat grooves 70 imparts a driving force to the hydraulic fluid 2b from the upper seat grooves 70 toward the liquid flow path portion 60, causing the hydraulic fluid 2b in the steam passages 51 and 52 to flow through the upper seat grooves 70. It can be quickly moved to the liquid flow path section 60 through the liquid flow path section 60 . Therefore, when such upper seat grooves 70 are arranged in the condensation area CR, the movement of the working fluid 2b from the steam passages 51 and 52 to the liquid flow path portion 60 can be effectively promoted in the condensation area CR. . As a result, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the liquid flow path portion 60 is provided on the wick sheet upper surface 30b.
  • the upper sheet grooves 70 are provided in the upper sheet inner surface 20a facing the wick sheet upper surface 30b.
  • the hydraulic fluid 2b that has flowed through the upper seat groove 70 can smoothly move to the vapor passages 51 and 52 or the liquid flow path portion 60.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • liquid flow path portion 60 is provided on the upper surface 30b of the wick sheet.
  • the present invention is not limited to this, and as shown in FIG. 12, the liquid flow path section 60 may be provided on the wick sheet lower surface 30a.
  • the hydraulic fluid 2b flows from the liquid flow path portion 60 along the wall surface 53a of the lower steam flow path recessed portion 53 and the wall surface 54a of the upper steam flow path recessed portion 54, and flows through the upper seat groove 70. It can move to steam passages 51 , 52 .
  • the working fluid 2b flows from the steam passages 51 and 52 through the upper seat groove 70, along the wall surface 53a of the lower steam channel recess 53 and the wall surface 54a of the upper steam channel recess 54, and into the liquid channel portion 60. can move. Therefore, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.
  • the upper seat groove 70 is located at a position corresponding to the liquid flow channel communication groove 65 located closest to the steam passages 51 and 52 in the liquid flow channel portion 60. may be placed in That is, as shown in FIG. 13, the upper sheet groove 70 is located at the same position as the liquid flow passage communication groove 65 located closest to the vapor passages 51 and 52 in the liquid flow passage portion 60 in the X direction, and is the second in the Y direction.
  • the first end portion 71 or the second end portion 72 may be arranged so as to face the liquid channel communication groove 65 .
  • the upper seat groove 70 does not have to be arranged at any position other than this position in the X direction.
  • planar shape of the upper seat groove 70 is an elongated rectangular shape (see FIG. 9).
  • the present invention is not limited to this, and for example, as shown in FIG. 72) may have a rounded elongated shape.
  • the planar shape of the upper seat groove 70 may be an elongated elliptical shape extending in the Y direction.
  • the planar shape of the upper seat groove 70 may be a beaded shape in which a plurality of circles are partially overlapped and connected in the Y direction.
  • the planar shape of the upper sheet groove 70 is arbitrary.
  • the cross-sectional shape of the upper seat groove 70 is semicircular (see FIG. 11).
  • the cross-sectional shape of the upper seat groove 70 may be triangular.
  • the cross-sectional shape of the upper seat groove 70 may be rectangular.
  • the cross-sectional shape of the upper seat groove 70 may be trapezoidal.
  • the cross-sectional shape of the upper seat groove 70 may be a partially circular shape having a width wider than the opening on the inner side.
  • the cross-sectional shape of the upper seat groove 70 is arbitrary as long as it has a channel cross-sectional area smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • FIG. 21 (Second embodiment) Next, a vapor chamber and electronic equipment according to a second embodiment of the present disclosure will be described with reference to FIGS. 21 and 22.
  • FIG. 21 (Second embodiment) Next, a vapor chamber and electronic equipment according to a second embodiment of the present disclosure will be described with reference to FIGS. 21 and 22.
  • FIG. 21 (Second embodiment) Next, a vapor chamber and electronic equipment according to a second embodiment of the present disclosure will be described with reference to FIGS. 21 and 22.
  • the first sheet groove is provided over a position overlapping with the liquid flow path portion in a plan view, and the vapor
  • the main difference is that it is provided so as to traverse the passage, and other configurations are substantially the same as those of the first embodiment shown in FIGS. 21 and 22, the same parts as in the first embodiment shown in FIGS. 1 to 20 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 is provided over a position overlapping the liquid flow path portion 60 in plan view. That is, the upper seat groove 70 also overlaps the land portion 33 in plan view. As shown in FIG. 21, the upper sheet groove 70 may overlap the main liquid flow path groove 61 in plan view.
  • the upper seat groove 70 is provided so as to traverse the steam passages 51 and 52 in the direction intersecting the X direction.
  • the upper seat groove 70 is provided so as to cross the second steam passage 52 in the Y direction.
  • a first end portion 71 and a second end portion 72 of the upper seat groove 70 are provided at positions overlapping the land portion 33 in plan view. More specifically, the first end portion 71 is provided at a position overlapping the one land portion 33 in plan view, and the second end portion 72 is adjacent to the one land portion 33 in plan view. is provided at a position overlapping the land portion 33 of the .
  • the upper sheet groove 70 is provided over a position overlapping the liquid flow path portion 60 in plan view.
  • the movement of the working fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60 can be effectively promoted. Therefore, when such upper sheet grooves 70 are arranged in the evaporation region SR, it is possible to effectively promote the movement of the working fluid 2b from the liquid flow path portion 60 to the vapor passages 51 and 52 in the evaporation region SR. .
  • the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 can be quickly moved to the steam passages 51 and 52 through the upper seat groove 70, and the evaporation region
  • the movement of the working steam 2a in the SR from the liquid flow path portion 60 to the steam passages 51 and 52 can be effectively promoted.
  • the working steam 2a in the evaporation region SR moves from the liquid flow channel portion 60 to the vapor passages 51 and 52. can be promoted more effectively.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the upper seat groove 70 is provided so as to cross the steam passages 51 and 52 in the direction intersecting the first direction.
  • the amount of the working liquid 2b that moves to each liquid flow path section 60 provided in the land section 33 adjacent to each other can be made uniform. Therefore, uneven distribution of a large amount of the working liquid 2b in a specific liquid flow path portion 60 can be suppressed.
  • the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the first end portion 71 and the second end portion 72 of the upper seat groove 70 are provided at positions overlapping the land portion 33 in plan view.
  • the present invention is not limited to this.
  • the upper seat groove 70 may be provided so as to cross the land portion 33 in the direction intersecting the X direction.
  • the upper seat groove 70 extends linearly along the Y direction so as to cross the steam passages 51, 52 and the land portion 33 in plan view.
  • the working steam 2a in the evaporation region SR moves from the liquid flow channel portion 60 to the vapor passages 51 and 52. can be promoted more effectively.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the amount of the working fluid 2b that moves to each fluid flow path portion 60 can be made uniform, and uneven distribution of a large amount of the working fluid 2b in a specific fluid flow path portion 60 can be suppressed. Therefore, the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the first seat grooves are provided at a first end provided at a position overlapping with the steam passage in plan view and at a position overlapping with the liquid flow path portion in plan view. 21 and 22.
  • the other configuration is substantially the same as that of the second embodiment shown in FIGS. 23, the same parts as in the second embodiment shown in FIGS. 21 and 22 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 includes a first end portion 71 provided at a position overlapping the steam passages 51 and 52 in plan view, and a liquid flow passage portion 60 in plan view. and a second end 72 positioned to overlap.
  • the first end portion 71 is defined as the end portion on the side overlapping the steam passages 51 and 52 in plan view among both end portions in the direction intersecting the X direction
  • the second end portion 72 is defined in the X direction. It is defined as the end overlapping the liquid flow path portion 60 in a plan view among both end portions in the intersecting direction.
  • the first end portion 71 overlaps the second steam passage 52 in plan view
  • the second end portion 72 overlaps the liquid flow path main groove 61 in plan view.
  • the upper sheet groove 70 overlaps the edge of the land portion 33 on the positive side in the Y direction in plan view, and the edge of the land portion 33 on the negative side in the Y direction in plan view. position and may be provided respectively.
  • the upper sheet grooves 70 may be arranged along the X direction at a position overlapping the edge of the land portion 33 on the positive side in the Y direction in plan view. Further, the upper sheet grooves 70 may be arranged along the X direction even at positions overlapping the Y-direction negative side edge of the land portion 33 in plan view.
  • the upper seat groove 70 includes the first end portion 71 provided at a position overlapping with the steam passages 51 and 52 in plan view, and the position overlapping with the liquid flow path portion 60 in plan view. and a second end 72 located at the .
  • the movement of the working fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60 can be effectively promoted. Therefore, when such upper sheet grooves 70 are arranged in the evaporation region SR, it is possible to effectively promote the movement of the working fluid 2b from the liquid flow path portion 60 to the vapor passages 51 and 52 in the evaporation region SR. .
  • the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 can be quickly moved to the steam passages 51 and 52 through the upper seat groove 70, and the evaporation region
  • the movement of the working steam 2a in the SR from the liquid flow path portion 60 to the steam passages 51 and 52 can be effectively promoted.
  • the working steam 2a in the evaporation region SR moves from the liquid flow channel portion 60 to the vapor passages 51 and 52. can be promoted more effectively.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • first seat grooves are provided so as to cross the steam passage in the direction intersecting the first direction, and the steam passage in plan view.
  • first sheet groove includes a first end provided at a position overlapping with and a second end provided at a position overlapping with the liquid flow path in plan view.
  • the plurality of upper seat grooves 70, 70' are provided so as to cross the steam passages 51, 52 in the direction crossing the X direction. , a first end portion 71′ provided at a position overlapping with the steam passages 51 and 52 in plan view, and a second end portion 72′ provided at a position overlapping with the liquid flow path portion 60 in plan view. ' and .
  • the upper seat groove 70 is provided so as to cross the second steam passage 52 in the Y direction.
  • a first end portion 71 and a second end portion 72 of the upper seat groove 70 are provided at positions overlapping the land portion 33 in plan view. More specifically, the first end portion 71 is provided at a position overlapping the one land portion 33 in plan view, and the second end portion 72 is adjacent to the one land portion 33 in plan view. is provided at a position overlapping the land portion 33 of the .
  • the first end 71' of the upper seat groove 70' overlaps the second steam passage 52 in plan view, and the second end 72' of the upper seat groove 70' , overlap with the main groove 61 of the liquid flow path in plan view.
  • the upper sheet groove 70' overlaps the edge of the one land portion 33 (for example, the land portion 33 arranged in the central portion in FIG. 24) on the positive side in the Y direction in plan view. , and a position overlapping the edge of the one land portion 33 on the negative side in the Y direction in plan view.
  • the upper sheet grooves 70 and the upper sheet grooves 70' may be alternately arranged in the X direction at positions overlapping the Y-direction positive side edge of the one land portion 33 in plan view. Further, the upper sheet grooves 70 and the upper sheet grooves 70' may be alternately arranged in the X direction even at a position overlapping the Y-direction negative side edge of the one land portion 33 in plan view.
  • the upper seat groove 70' is formed by the other land portions 33 adjacent to the one land portion 33 in plan view (for example, the land portions 33 arranged on the lower side and the upper side in FIG. 24). ) and the position overlapping the negative Y-direction edge of the other land portion 33 in plan view may not be provided.
  • the upper sheet grooves 70 may be arranged along the X direction at a position overlapping the edge of the other land portion 33 on the Y direction positive side in plan view. Also, the upper sheet grooves 70 may be alternately arranged in the X direction at positions overlapping the edges of the other land portions 33 on the negative side in the Y direction in plan view.
  • the plurality of upper seat grooves 70, 70' are composed of the upper seat grooves 70 provided so as to cross the steam passages 51, 52 in the direction intersecting the X direction, and the upper seat grooves 70, 70' an upper seat groove 70' including a first end portion 71' provided at a position overlapping with the steam passages 51 and 52 at the bottom and a second end portion 72' provided at a position overlapping with the liquid flow path portion 60 in plan view; contains.
  • the movement of the working fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60 can be effectively promoted.
  • the working steam 2a in the evaporation region SR moves from the liquid flow channel portion 60 to the vapor passages 51 and 52. can be promoted more effectively. As a result, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the present embodiment it is possible to facilitate the movement of the hydraulic fluid 2b between the steam passages 51 and 52 and the liquid flow path portion 60 provided in one land portion 33.
  • the working fluid 2b can be unevenly distributed between the liquid flow paths 60.
  • a large amount of the working fluid 2b can be moved to the specific liquid flow path portion 60 that has a higher transport capacity for the working fluid 2b than the other liquid flow path portions 60 .
  • the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the main difference is that the first seat groove is formed so that the cross-sectional area of the flow passage decreases from the second end toward the first end.
  • Other configurations are substantially the same as those of the third embodiment shown in FIG. 25 in FIG. 25, the same parts as those of the third embodiment shown in FIG. 23 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 is formed such that the cross-sectional area of the flow path decreases from the second end 72 toward the first end 71 . That is, the upper seat groove 70 is formed so as to taper from the second end portion 72 toward the first end portion 71 .
  • the upper sheet groove 70 may be formed such that the width w6 of the upper sheet groove 70 decreases from the second end 72 toward the first end 71 .
  • the upper seat groove 70 may be formed such that the depth h2 of the upper seat groove 70 becomes shallower from the second end portion 72 toward the first end portion 71 .
  • the upper seat groove 70 is formed such that the flow passage cross-sectional area decreases from the second end portion 72 toward the first end portion 71 .
  • the capillary action of the upper seat groove 70 imparts a driving force to the hydraulic fluid 2b from the liquid flow path portion 60 toward the upper seat groove 70, causing the hydraulic fluid 2b in the liquid flow path portion 60 to flow through the upper seat groove 70.
  • the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 can be quickly moved to the steam passages 51 and 52 through the upper seat groove 70, and the evaporation region
  • the movement of the working steam 2a in the SR from the liquid flow path portion 60 to the steam passages 51 and 52 can be effectively promoted.
  • the working steam 2a in the evaporation region SR moves from the liquid flow channel portion 60 to the vapor passages 51 and 52. can be promoted more effectively.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the sixth embodiment shown in FIG. 26 is mainly different in that the first seat groove is formed such that the cross-sectional area of the flow passage decreases from the first end toward the second end.
  • Other configurations are substantially the same as those of the third embodiment shown in FIG. 26, the same parts as in the third embodiment shown in FIG. 23 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 is formed such that the cross-sectional area of the flow path decreases from the first end portion 71 toward the second end portion 72 . That is, the upper seat groove 70 is formed to taper from the first end portion 71 toward the second end portion 72 .
  • the upper sheet groove 70 may be formed such that the width w6 of the upper sheet groove 70 decreases from the first end portion 71 toward the second end portion 72 .
  • the upper seat groove 70 may be formed such that the depth h2 of the upper seat groove 70 becomes shallower from the first end portion 71 toward the second end portion 72 .
  • the upper seat groove 70 is formed such that the flow passage cross-sectional area decreases from the first end portion 71 toward the second end portion 72 .
  • the capillary action of the upper seat grooves 70 imparts a driving force to the hydraulic fluid 2b from the upper seat grooves 70 toward the liquid flow path portion 60, causing the hydraulic fluid 2b in the steam passages 51 and 52 to flow through the upper seat grooves 70. It can be quickly moved to the liquid flow path section 60 through the liquid flow path section 60 . Therefore, when such upper seat grooves 70 are arranged in the condensation area CR, the movement of the working fluid 2b from the steam passages 51 and 52 to the liquid flow path portion 60 can be effectively promoted in the condensation area CR. .
  • the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 passes through the upper sheet grooves 70 when the temperature rises rapidly. It is possible to quickly move the working steam 2a to the steam passages 51 and 52, and effectively promote the movement of the working steam 2a from the liquid flow path portion 60 to the steam passages 51 and 52 in the evaporation region SR. Furthermore, when the flow channel cross-sectional area of the upper sheet groove 70 is larger than the flow channel cross-sectional area of the liquid flow main groove 61, the working steam 2a in the evaporation region SR moves from the liquid flow channel portion 60 to the vapor passages 51 and 52. can be promoted more effectively. As a result, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the seventh embodiment shown in FIGS. 27 to 29 is mainly different in that the first seat groove is arranged so as to be inclined with respect to the first direction in plan view, and other configurations are as follows. It is substantially the same as the third embodiment shown in FIG. 27 to 29, the same parts as those of the third embodiment shown in FIG. 23 are assigned the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 is arranged so as to be inclined with respect to the X direction in plan view.
  • the inclination angle of the upper seat groove 70 can be any angle greater than 0 degrees and less than 90 degrees. It can also be said that the upper seat groove 70 is inclined with respect to the Y direction in plan view.
  • each upper sheet groove 70 is more positive in the X direction than the second end 72 at a position overlapping the edge of the land portion 33 on the positive side in the Y direction in plan view. side and on the positive side in the Y direction.
  • the upper sheet grooves 70 are arranged along the X direction so as to be parallel to each other at a position overlapping the edge of the land portion 33 on the positive side in the Y direction in plan view. In the example shown in FIG. 27, four upper seat grooves 70 are arranged.
  • each upper sheet groove 70 is located on the positive side in the X direction and negative in the Y direction relative to the second end portion 72 . slanted to the side.
  • the upper sheet grooves 70 are arranged along the X direction so as to be parallel to each other at a position overlapping the edge of the land portion 33 on the negative side in the Y direction in plan view. In the example shown in FIG. 27, four upper seat grooves 70 are arranged.
  • Each upper seat groove 70 may be arranged at a position close to the end of the vapor chamber 1 (for example, the end of the vapor chamber 1 on the negative side in the X direction). However, the present invention is not limited to this, and each upper seat groove 70 may be arranged at any position in the vapor chamber 1 .
  • the upper seat groove 70 is arranged so as to be inclined with respect to the X direction in plan view.
  • the working fluid 2b in the steam passages 51 and 52 can be moved so as to be concentrated in the liquid flow path portion 60 in the condensation region CR.
  • a sufficient amount of the working fluid 2b can be moved to the liquid flow path part 60 .
  • the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 passes through the upper sheet grooves 70 when the temperature rises rapidly.
  • the upper sheet grooves 70 are arranged parallel to each other along the X direction at positions overlapping the edges of the land portion 33 in plan view.
  • the present invention is not limited to this.
  • the upper seat grooves 70 may not be parallel to each other.
  • six upper sheet grooves 70 are arranged along the X direction at positions overlapping the edge of the land portion 33 on the positive side in the Y direction in plan view.
  • the three upper sheet grooves 70 positioned on the negative side in the X direction are arranged such that the first end 71 is positioned on the negative side in the X direction and the positive side in the Y direction relative to the second end 72.
  • inclined to The three upper seat grooves 70 located on the positive side in the X direction are inclined such that the first end portions 71 are located on the positive side in the X direction and the positive side in the Y direction relative to the second end portions 72 .
  • upper sheet grooves 70 are also arranged along the X direction at a position overlapping the edge of the land portion 33 on the Y direction negative side in plan view.
  • the three upper sheet grooves 70 positioned on the negative side in the X direction are arranged such that the first end 71 is positioned on the negative side in the X direction and the negative side in the Y direction relative to the second end 72.
  • inclined to The three upper seat grooves 70 located on the positive side in the X direction are inclined such that the first end portions 71 are located on the positive side in the X direction and the negative side in the Y direction relative to the second end portions 72 .
  • the working fluid 2b in the steam passages 51 and 52 can be moved so as to be concentrated in the liquid flow path portion 60 in the condensation region CR. As a result, a sufficient amount of working fluid 2b can be moved to the fluid flow path portion 60 . Further, when such upper sheet grooves 70 are arranged in the evaporation region SR, the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 passes through the upper sheet grooves 70 when the temperature rises rapidly. It is possible to quickly move the working steam 2a to the steam passages 51 and 52, and effectively promote the movement of the working steam 2a from the liquid flow path portion 60 to the steam passages 51 and 52 in the evaporation region SR.
  • the flow of working steam 2a can be directed to each condensation area CR and the working steam 2a can be rapidly transported to each condensation area CR. Therefore, the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.
  • six upper sheet grooves 70 are arranged along the X direction at positions overlapping the edge of the land portion 33 on the positive side in the Y direction in plan view.
  • the three upper sheet grooves 70 positioned on the negative side in the X direction are arranged such that the first end 71 is positioned on the positive side in the X direction and the positive side in the Y direction relative to the second end 72.
  • inclined to The three upper seat grooves 70 located on the positive side in the X direction are inclined such that the first end portions 71 are located on the negative side in the X direction and the positive side in the Y direction relative to the second end portions 72 .
  • upper sheet grooves 70 are also arranged along the X direction at a position overlapping the edge of the land portion 33 on the Y direction negative side in plan view.
  • the three upper sheet grooves 70 positioned on the negative side in the X direction are arranged such that the first end 71 is positioned on the positive side in the X direction and the negative side in the Y direction relative to the second end 72.
  • inclined to The three upper seat grooves 70 located on the positive side in the X direction are inclined such that the first end portions 71 are located on the negative side in the X direction and the negative side in the Y direction relative to the second end portions 72 .
  • the working fluid 2b in the liquid flow path portion 60 can be moved so as to be concentrated in the vapor passages 51 and 52 in the evaporation region SR.
  • the working fluid 2b can be efficiently evaporated in the evaporation region SR. Therefore, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.
  • FIG. 30 (Eighth embodiment) Next, a vapor chamber and electronic equipment according to an eighth embodiment of the present disclosure will be described with reference to FIGS. 30 and 31.
  • FIG. 30 (Eighth embodiment) Next, a vapor chamber and electronic equipment according to an eighth embodiment of the present disclosure will be described with reference to FIGS. 30 and 31.
  • FIG. 30 (Eighth embodiment) Next, a vapor chamber and electronic equipment according to an eighth embodiment of the present disclosure will be described with reference to FIGS. 30 and 31.
  • the eighth embodiment shown in FIGS. 30 and 31 is mainly different in that the plurality of first seat grooves are arranged radially in a plan view, and the other configuration is the third seat groove shown in FIG. is substantially the same as the embodiment of 30 and 31, the same parts as those of the third embodiment shown in FIG. 23 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • each upper sheet groove 70 is arranged so as to be inclined with respect to the X direction.
  • Each upper sheet groove 70 is arranged so that the second end 72 faces a specific position of the liquid flow path portion 60 .
  • Each upper sheet groove 70 is arranged such that a gap w7 (see FIG. 11) between the upper sheet grooves 70 adjacent to each other in the X direction becomes smaller as it goes from the steam passages 51, 52 side to the liquid flow path portion 60 side. , are arranged radially.
  • the upper seat grooves 70 are radially arranged in plan view.
  • the working fluid 2b in the steam passages 51 and 52 can be moved so as to be concentrated in the liquid flow path portion 60 in the condensation region CR. Therefore, a sufficient amount of working fluid 2b can be moved to the fluid flow path portion 60 .
  • the working steam 2a evaporated from the working fluid 2b in the liquid flow path portion 60 passes through the upper sheet grooves 70 when the temperature rises rapidly.
  • the upper sheet grooves 70 are arranged so that the gap w7 between the upper sheet grooves 70 adjacent to each other in the X direction extends from the steam passages 51 and 52 side to the liquid flow path portion 60 side.
  • An example has been described in which they are arranged radially so that they become smaller as they go.
  • the present invention is not limited to this.
  • As shown in FIG. It may be radially arranged so that it becomes smaller toward the steam passages 51 and 52 from the side.
  • Each upper seat groove 70 may be arranged such that the first end 71 faces a specific position of the steam passages 51 , 52 .
  • the working fluid 2b in the liquid flow path portion 60 can be moved so as to be concentrated in the vapor passages 51 and 52 in the evaporation region SR.
  • the working fluid 2b can be efficiently evaporated in the evaporation region SR. Therefore, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be promoted.
  • FIG. 32 (Ninth embodiment) Next, a vapor chamber and electronic equipment according to a ninth embodiment of the present disclosure will be described with reference to FIGS. 32 to 34.
  • FIG. 32 (Ninth embodiment) Next, a vapor chamber and electronic equipment according to a ninth embodiment of the present disclosure will be described with reference to FIGS. 32 to 34.
  • FIG. 32 (Ninth embodiment) Next, a vapor chamber and electronic equipment according to a ninth embodiment of the present disclosure will be described with reference to FIGS. 32 to 34.
  • the ninth embodiment shown in FIGS. 32 to 34 is mainly different in that the first sheet includes communication grooves for communicating the adjacent first sheet grooves. 22 is substantially the same as the second embodiment. 32 to 34, the same parts as those of the second embodiment shown in FIGS. 21 and 22 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the upper sheet 20 includes upper sheet communication grooves 75 (communication grooves) that communicate the upper sheet grooves 70 adjacent to each other.
  • Upper sheet 20 may include a plurality of upper sheet communication grooves 75 .
  • each upper seat groove 70 extends along the Y direction.
  • Each upper seat groove 70 is provided so as to cross the second steam passage 52 in the Y direction.
  • Each upper seat communication groove 75 is arranged at a position overlapping the second steam passage 52 in plan view.
  • Each upper sheet communication groove 75 extends along the X direction.
  • Each upper sheet communication groove 75 is connected to the upper sheet grooves 70 adjacent to each other.
  • the upper seat communication groove 75 has a small flow passage cross-sectional area mainly so that the hydraulic fluid 2b flows by capillary action.
  • the channel cross-sectional area of the upper seat communication groove 75 is smaller than the channel cross-sectional areas of the steam passages 51 and 52 .
  • the channel cross-sectional area of the upper seat communication groove 75 may be equal to the channel cross-sectional area of the upper seat groove 70 .
  • the flow passage cross-sectional area of the upper seat communication groove 75 may be smaller or larger than that of the upper seat groove 70 without being limited to this.
  • the upper sheet communication groove 75 may be formed by etching the upper sheet 20 from the inner surface 20a of the upper sheet, similar to the upper sheet groove 70 . Accordingly, the upper sheet communication groove 75 may have a curved wall surface (not shown) similar to that of the upper sheet groove 70 . Further, the upper seat communication groove 75 may be formed integrally and continuously with the upper seat groove 70 .
  • the upper seat communication grooves 75 may be arranged along the X direction and the Y direction. Also, as shown in FIG. 32, the upper sheet communication grooves 75 may be arranged in a zigzag pattern. That is, upper sheet communication grooves 75 that are adjacent to each other in the X direction may be arranged to be shifted from each other in the Y direction. This amount of deviation may be half the arrangement pitch of the upper sheet communication grooves 75 in the X direction.
  • the upper sheet 20 includes upper sheet communication grooves 75 that communicate the upper sheet grooves 70 adjacent to each other.
  • the hydraulic fluid 2b can be moved between the upper seat grooves 70 by the capillary action of the upper seat communication grooves 75 . Therefore, uneven distribution of the hydraulic fluid 2b between the upper seat grooves 70 can be suppressed.
  • the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the upper seat grooves 70 are provided so as to cross the second steam passage 52 in the Y direction, and the upper seat communication grooves 75 are arranged in a zigzag pattern. bottom.
  • the arrangement of the upper sheet grooves 70 and the upper sheet communication grooves 75 is not limited to this, and is arbitrary.
  • the upper seat grooves 70 are arranged in a zigzag pattern. That is, the upper sheet grooves 70 that are adjacent to each other in the X direction are offset from each other in the Y direction. This shift amount may be half the arrangement pitch of the upper sheet grooves 70 in the X direction.
  • each upper seat communication groove 75 extends linearly along the X direction.
  • Each upper sheet communication groove 75 is connected to an end portion (first end portion 71 or second end portion 72) of each upper sheet groove 70 to communicate with each upper sheet groove 70, 70'.
  • Each upper seat communication groove 75 is arranged at a position overlapping the second steam passage 52 in plan view.
  • Each upper sheet communication groove 75 is arranged along the Y direction. In the example shown in FIG. 33, three upper sheet communication grooves 75 are arranged parallel to each other.
  • the hydraulic fluid 2b can be moved between the upper seat grooves 70 by the capillary action of the upper seat communication grooves 75. Therefore, uneven distribution of the hydraulic fluid 2b between the upper seat grooves 70 can be suppressed. As a result, the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the present invention is not limited to this, and the upper sheet communication grooves 75 may be arranged in a grid pattern as shown in FIG. That is, the upper sheet communication grooves 75 may be aligned in the X direction and the Y direction.
  • the hydraulic fluid 2b can be moved between the upper seat grooves 70 by the capillary action of the upper seat communication grooves 75. Therefore, uneven distribution of the hydraulic fluid 2b between the upper seat grooves 70 can be suppressed. As a result, the transport efficiency of the working fluid 2b can be improved, and the reflux of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the liquid flow path portion is also provided on the second main body surface, and the second sheet is a second sheet groove provided on the inner surface of the second sheet.
  • the main difference is that it includes a second seat groove provided at a position overlapping the steam passage in view and extending along the direction intersecting the first direction, and other configurations are the same as those of the first embodiment shown in FIGS. is substantially the same as the form of
  • FIG. 35 the same parts as those of the first embodiment shown in FIGS. 1 to 20 are assigned the same reference numerals, and detailed description thereof will be omitted.
  • the liquid flow path section 60 is also provided on the lower surface 30a of the wick sheet. That is, the liquid flow path portion 60 is provided on the wick sheet upper surface 30b and is also provided on the wick sheet lower surface 30a.
  • the lower seat 10 includes a lower seat groove 80 (second seat groove) provided on the inner surface 10b of the lower seat.
  • the lower seat 10 may include multiple lower seat grooves 80 .
  • the lower seat groove 80 is provided at a position overlapping the steam passages 51 and 52 in plan view.
  • the lower seat groove 80 may be provided at a position facing the upper seat groove 70 .
  • the lower seat groove 80 extends along the direction crossing the X direction.
  • the lower seat groove 80 may, for example, extend along the Y direction perpendicular to the X direction, like the upper seat groove 70 .
  • Other configurations of the lower seat groove 80 are the same as those of the upper seat groove 70 described above.
  • the liquid flow path portion 60 is also provided on the wick sheet lower surface 30a.
  • the space within the vapor chamber 1 can be effectively used, and the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the lower seat 10 has the lower seat grooves 80 provided in the inner surface 10b of the lower seat, which are provided at positions overlapping the steam passages 51 and 52 in a plan view, and are arranged in the X direction. It includes a lower seat groove 80 extending along a direction transverse to the .
  • the eleventh embodiment shown in FIG. 36 is mainly different in that the first seat has a recessed region recessed toward the steam passage, and the first seat groove is arranged in the recessed region.
  • the configuration is substantially the same as that of the first embodiment shown in FIGS. 1-20. 36, the same parts as in the first embodiment shown in FIGS. 1 to 20 are assigned the same reference numerals, and detailed description thereof is omitted.
  • the vapor chamber 1 includes a flat region FR in which the upper sheet 20 is formed in a flat shape, and the upper sheet 20 in the vapor passages 51 and 52 of the vapor passage portion 50. and a recessed region DR that is recessed toward.
  • the lower sheet 10 may also be flat.
  • the recessed region DR the lower sheet 10 may also be recessed toward the steam passages 51 and 52 of the steam channel portion 50 .
  • the depression region DR can be formed by partially pressing the flat vapor chamber 1 from the outside or by bending the flat vapor chamber 1 .
  • the upper seat groove 70 is arranged in the recessed region DR. That is, the upper sheet groove 70 is provided in a portion of the upper sheet inner surface 20a located in the recessed region DR. On the other hand, the upper sheet groove 70 may not be provided in the area other than the recessed area DR, that is, the flat area FR.
  • upper seat groove 70 is arranged in recessed region DR.
  • the cross-sectional area of steam passages 51 and 52 is smaller than the cross-sectional area of steam passages 51 and 52 in other regions.
  • the working steam 2a is easily condensed and the working fluid 2b is easily generated. Therefore, there is a risk that the hydraulic fluid 2b will stay in the recessed region DR.
  • the upper seat groove 70 by arranging the upper seat groove 70 in the recessed region DR, movement of the hydraulic fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60 is promoted in the recessed region DR. be able to. Therefore, retention of the hydraulic fluid 2b in the recessed region DR can be suppressed. As a result, the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be effectively promoted.
  • the twelfth embodiment shown in FIG. 37 is mainly different in that the first seat groove is provided at a position overlapping with the connecting portion in a plan view, and other configurations are shown in FIGS. 1 to 20. It is substantially the same as the first embodiment. 37, the same parts as in the first embodiment shown in FIGS. 1 to 20 are assigned the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 is provided at a position overlapping the connecting portion 38 in plan view. It can also be said that the upper seat groove 70 is provided at a position facing the connecting portion 38 .
  • the connecting portion 38 is a member that connects the adjacent land portions 33 as described above.
  • the connecting portion 38 is arranged at a position close to the wick sheet lower surface 30a of the wick sheet 30.
  • the connecting portion 38 is arranged in the space that forms the lower steam flow path concave portion 53 of the steam passages 51 and 52 .
  • upper steam flow channel recesses 54 of the steam passages 51 and 52 are secured.
  • the upper seat groove 70 may not be provided at a position other than the position facing the connecting portion 38 .
  • the upper seat groove 70 is provided at a position overlapping the connecting portion 38 in plan view.
  • the cross-sectional area of the steam passages 51 and 52 is smaller than the cross-sectional area of the steam passages 51 and 52 at other positions. Accordingly, at the position where the connecting portion 38 is provided, the working steam 2a is easily condensed and the working fluid 2b is easily generated. Therefore, there is a risk that the hydraulic fluid 2b will stay at that position.
  • the upper seat groove 70 is provided at a position overlapping with the connecting portion 38 in a plan view, the working fluid 2b between the steam passages 51, 52 and the liquid flow passage portion 60 at this position can be promoted, and retention of the hydraulic fluid 2b can be suppressed. Therefore, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be effectively promoted.
  • the thirteenth embodiment shown in FIG. 38 is mainly different in that the first seat groove is provided in a region adjacent to the connecting portion along the first direction in plan view. It is substantially the same as the first embodiment shown in FIGS. In FIG. 38, the same parts as those of the first embodiment shown in FIGS. 1 to 20 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the upper seat groove 70 is provided in a region adjacent to the connecting portion 38 along the X direction in plan view.
  • the connecting portion 38 is a member that connects the adjacent land portions 33 as described above.
  • the connecting portion 38 may be arranged at a position close to the wick sheet lower surface 30 a of the wick sheet 30 .
  • the connecting portion 38 is arranged in a space forming the lower steam channel recessed portion 53 of the steam passages 51 and 52 , and the upper steam channel of the steam passages 51 and 52 is located near the wick sheet upper surface 30 b of the wick sheet 30 .
  • a recess 54 may be reserved.
  • the upper seat groove 70 may not be provided at a position other than the region adjacent to the connecting portion 38 along the X direction in plan view, that is, at a position distant from the connecting portion 38 in plan view.
  • the region adjacent to the connecting portion 38 along the X direction in plan view may be, for example, a region within 300 ⁇ m from the connecting portion 38 in the X direction in plan view, or may be a region within 150 ⁇ m. It may be a region within 50 ⁇ m.
  • the upper seat grooves 70 are provided in the regions on both sides in the X direction among the regions adjacent to the connecting portion 38 along the X direction in plan view. , and the upper sheet groove 70 may be provided in a region on either side in the X direction.
  • the upper seat groove 70 is not provided at a position that overlaps the connecting portion 38 in plan view, but the present invention is not limited to this. It may also be provided at a position where it overlaps with the connecting portion 38 .
  • the upper seat groove 70 is provided in a region adjacent to the connecting portion 38 along the X direction in plan view.
  • the cross-sectional area of the steam passages 51 and 52 is smaller than the cross-sectional area of the steam passages 51 and 52 at other positions.
  • the upper seat groove 70 is provided in a region adjacent to the connecting portion 38 along the X direction in a plan view, the vapor passages 51 and 52 and the liquid flow passage portion 60 are separated from each other in this region. Circulation of the hydraulic fluid 2b between them can be promoted, and retention of the hydraulic fluid 2b can be suppressed. Therefore, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be effectively promoted.
  • FIG. 39 (14th embodiment) Next, a vapor chamber and electronic equipment according to a fourteenth embodiment of the present disclosure will be described with reference to FIGS. 39 and 40.
  • FIG. 39 (14th embodiment) Next, a vapor chamber and electronic equipment according to a fourteenth embodiment of the present disclosure will be described with reference to FIGS. 39 and 40.
  • FIG. 39 (14th embodiment) Next, a vapor chamber and electronic equipment according to a fourteenth embodiment of the present disclosure will be described with reference to FIGS. 39 and 40.
  • the fourteenth embodiment shown in FIGS. 39 and 40 is mainly different in that the vapor chamber has a bending region bent along the bending line, and the first seat groove is arranged in the bending region,
  • Other configurations are substantially the same as those of the first embodiment shown in FIGS. 39 and 40, the same parts as in the first embodiment shown in FIGS. 1 to 20 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the vapor chamber 1 is bent along the bending line BL shown in FIG.
  • FIG. 39 shows the planar vapor chamber 1 before being bent.
  • the bending line BL is provided in the central portion of the vapor chamber 1 in the X direction and extends along the Y direction.
  • a curved vapor chamber 1 can be obtained comprising a first region RR1 and a second region RR2 that are separated.
  • the device D may be attached to the first region RR1, and the housing member Ha may be attached to the second region RR2.
  • the vapor chamber 1 may be bent so that the lower sheet 10 is located inside and the upper sheet 20 is located outside.
  • the bending angle may be any angle. In the example shown in FIG. 40, the bending angle is 90 degrees (right angle). Therefore, the cross-sectional shape of the vapor chamber 1 is substantially L-shaped.
  • the present invention is not limited to this, and for example, the vapor chamber 1 may be bent so that the cross-sectional shape of the vapor chamber 1 is U-shaped. Further, for example, the vapor chamber 1 may be bent a plurality of times so that the cross-sectional shape of the vapor chamber 1 becomes a U-shape or the like.
  • the bending angle means that the lower seat outer surface 10a or the upper seat outer surface 20b in the first region RR1 of the vapor chamber 1 and the lower seat outer surface 10a or the upper seat outer surface 20b in the second region RR2 of the vapor chamber 1 are bent. It means the angle to make.
  • Such a bent vapor chamber 1 can be produced by bending the flat vapor chamber 1 along the bending line BL as a bending step after the sealing step in the manufacturing process of the vapor chamber 1. can.
  • the upper seat groove 70 is arranged in the bending region BR. That is, the upper sheet groove 70 is provided in the upper sheet inner surface 20a of the upper sheet 20 in the bending region BR. Upper seat groove 70 may not be arranged in areas other than bending area BR, that is, in first area RR1 and second area RR2.
  • the upper seat groove 70 is arranged in the bending region BR.
  • the inner lower sheet 10 is subjected to compressive stress in the bent region BR and deforms so as to be recessed toward the lower vapor flow path concave portion 53 .
  • the upper sheet 20 located outside can be deformed so as to be recessed toward the upper steam flow channel concave portion 54 by receiving tensile stress in the bending region BR.
  • the bent region BR of the bent vapor chamber 1 can be formed with the recessed region DR as described with reference to FIG. 36 in the eleventh embodiment. Therefore, the cross-sectional areas of the steam passages 51 and 52 can be reduced in the bending region BR.
  • the working steam 2a can be easily condensed and the working fluid 2b can be easily generated. Therefore, there is a risk that the hydraulic fluid 2b will stay in the bending region BR.
  • the upper seat groove 70 is arranged in the bending region BR, the movement of the hydraulic fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60 is promoted in the bending region BR. be able to. Therefore, it is possible to suppress retention of the hydraulic fluid 2b in the bending region BR. As a result, the recirculation of the working fluids 2a and 2b within the vapor chamber 1 can be effectively promoted.
  • the working vapor 2a is likely to condense on the upper sheet inner surface 20a of the upper sheet 20 located outside, and the working fluid 2b is likely to be generated.
  • the upper seat grooves 70 are provided in the upper seat inner surface 20a.
  • the working fluid 2b condensed on the upper sheet inner surface 20a can be quickly moved to the liquid flow path portion 60 by the capillary action of the upper sheet groove 70.
  • the vapor passages 51, 52 of the working liquid 2b in the condensation region CR are connected to the liquid flow path.
  • the movement to the part 60 can be effectively promoted.
  • the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be further promoted.
  • the vapor chamber 1 is composed of the lower sheet 10, the upper sheet 20, and the wick sheet 30 has been described.
  • the vapor chamber 1 may be composed of an upper sheet 20 and a wick sheet 30 as shown in FIG.
  • the vapor chamber 1 includes the upper sheet 20 and the wick sheet 30, but does not include the lower sheet 10.
  • the housing member Ha may be attached to the wick sheet lower surface 30 a of the wick sheet 30 .
  • the heat of the working steam 2a is transferred from the wick sheet 30 to the housing member Ha.
  • the steam flow path portion 50 is provided on the wick sheet upper surface 30 b , but does not extend to the wick sheet lower surface 30 a and does not penetrate the wick sheet 30 . That is, the first steam passage 51 and the second steam passage 52 of the steam passage portion 50 are configured by the upper steam passage recess 54 , and the wick sheet 30 is not provided with the lower steam passage recess 53 .
  • an upper sheet groove 70 is provided at a position of the upper sheet 20 facing the steam flow path portion 50 . That is, the upper seat 20 includes upper seat grooves 70 provided in the upper seat inner surface 20a at positions overlapping the steam passages 51 and 52 in plan view.
  • a thickness t5 of the vapor chamber 1 shown in FIG. 41 may be, for example, 100 ⁇ m to 1000 ⁇ m.
  • the thickness t6 of the upper sheet 20 shown in FIG. 41 may be, for example, 6 ⁇ m to 200 ⁇ m.
  • a thickness t7 of the wick sheet 30 shown in FIG. 41 may be, for example, 50 ⁇ m to 800 ⁇ m.
  • the upper sheet inner surface 20a of the upper sheet 20 is not provided with the liquid flow path portion 60, but the present invention is not limited to this.
  • a liquid flow path portion 60 may be provided.
  • the liquid channel portion 60 of the upper sheet 20 may be provided at a position facing the liquid channel portion 60 of the wick sheet 30 .
  • the vapor chamber 1 may be composed of the upper sheet 20 and the wick sheet 30. Even in such a case, since the upper sheet 20 includes the upper sheet grooves 70, it is possible to facilitate the movement of the hydraulic fluid 2b between the steam passages 51, 52 and the liquid flow path portion 60. can. Therefore, the circulation of the working fluids 2a and 2b within the vapor chamber 1 can be promoted. Also, in this case, the vapor chamber 1 can be made even thinner.
  • the vapor chamber may bend depending on the internal structure of the mounted electronic equipment. In this case, since the steam flow path is bent, the steam flow path tends to collapse. As a result, there is a problem that the flow path resistance increases and the flow of the working steam in the steam flow path portion is obstructed.
  • the purpose of the present embodiment is to provide a vapor chamber and an electronic device that can improve heat dissipation efficiency even when bent.
  • the vapor chamber 101 according to this embodiment is bent as shown in FIGS.
  • the vapor chamber 101 is bent according to the internal structure of the electronic equipment E. As shown in FIG.
  • the vapor chamber 101 may be bent depending on the positional relationship between the heat-generating electronic device E and the heat-dissipating housing member Ha.
  • the housing member Ha is a member that constitutes the housing H. As shown in FIG.
  • FIG. 1 An example is the case where the electronic device D and the housing member Ha are arranged as shown in FIG.
  • the vapor chamber 101 is bent at right angles so as to contact the electronic device D and the housing member Ha.
  • Electronic device D is mounted on substrate S.
  • the vapor chamber 101 may be bonded to the substrate S using an adhesive AD.
  • the adhesive AD may be bonded to the bending region 107, which will be described later, or may be bonded to the first region 105 or the second region 106, which will be described later.
  • the vapor chamber 101 is bent 180 degrees so as to contact the electronic device D and the housing member Ha.
  • the vapor chamber 101 may be bonded to the substrate S using an adhesive AD, similar to the example shown in FIG. Figures 42 and 42 show, but are not limited to, a vapor chamber 101 bent at a single bend line 108 (see Figures 44 and 45).
  • the vapor chamber 101 may be bent at two or more bend lines 108 at different locations.
  • the vapor chamber 101 that is bent at right angles along one bending line 108 will be described as an example.
  • the vapor chamber 101 shown in FIG. 44 is divided into a first region 105, a second region 106, and a bending region 107 located between the first region 105 and the second region 106.
  • the bent region 107 is an example of a third region. In the bend region 107 the vapor chamber 101 is bent at right angles.
  • the first region 105 and the second region 106 are formed substantially flat.
  • the first region 105 may be in contact with the electronic device D, and the second region 106 may be in contact with the housing member Ha (see FIG. 42). A detailed description of each area will be given later.
  • FIGS. 45 to 58 showing the vapor chamber 101 before being bent.
  • the vapor chamber 101 has a sealed space 103 filled with working fluids 102a and 102b.
  • the working fluids 102a and 102b in the sealed space 103 undergo repeated phase changes, the electronic device D is cooled.
  • the working fluids 102a, 102b include pure water, ethanol, methanol, acetone, etc., and mixtures thereof.
  • the vapor chamber 101 includes a first sheet 110, a second sheet 120, a vapor chamber wick sheet 130, a vapor channel portion 150, a liquid channel portion 160, It has The second sheet 120 is provided on the opposite side of the wick sheet 130 to the first sheet 110 .
  • a wick sheet 130 for the vapor chamber is an example of a main sheet and is interposed between the first sheet 110 and the second sheet 120 .
  • the wick sheet 130 for the vapor chamber is hereinafter simply referred to as the wick sheet 130 .
  • Vapor chamber 101 according to the present embodiment has first sheet 110, wick sheet 130 and second sheet 120 stacked in this order. In the present embodiment, an example in which wick sheet 130 is made up of one sheet is shown, but wick sheet 130 may be made up of two or more sheets. The number of sheets of the sheet 130 is arbitrary.
  • a vapor chamber 101 shown in FIG. 45 is generally formed in a thin flat plate shape.
  • the vapor chamber 101 may have any planar shape before bending, it may have a rectangular shape as shown in FIG. 45 .
  • the planar shape of the vapor chamber 101 may be, for example, a rectangle with one side of 1 cm and the other side of 3 cm, or a square with one side of 15 cm.
  • the plane dimensions of the vapor chamber 101 before bending are arbitrary. In the present embodiment, an example will be described in which the planar shape of vapor chamber 101 before bending is a rectangular shape whose longitudinal direction is the X direction, which will be described later.
  • the first sheet 110, the second sheet 120 and the wick sheet 130 may have the same planar shape as the vapor chamber 101, as shown in FIGS.
  • the planar shape of the vapor chamber 101 before bending is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, or a T-shape.
  • the vapor chamber 101 has an evaporation area SR where the working fluid 102b evaporates and a condensation area CR where the working steam 102a condenses.
  • the working vapor 102a is a gaseous working fluid
  • the working liquid 102b is a liquid working fluid.
  • the evaporation region SR is a region that overlaps with the electronic device D in plan view, and is a region that contacts the electronic device D. Although the evaporation area SR is located within the first area 105, the location of the evaporation area SR is arbitrary. In the present embodiment, an evaporation region SR is formed on one side (left side in FIG. 45) of the vapor chamber 101 in the X direction. Heat from the electronic device D is transferred to the evaporation region SR, and the heat evaporates the working liquid 102b to generate the working vapor 102a. The heat from the electronic device D can be transmitted not only to the area overlapping the electronic device D in plan view, but also to the periphery of the area overlapping the electronic device D. Therefore, the evaporation region SR may include a region overlapping the electronic device D and a region therearound in plan view.
  • the condensation area CR is an area that does not overlap with the electronic device D in plan view, and is an area where mainly the working steam 102a releases heat and condenses.
  • the condensation region CR may be located within the second region 106 .
  • Condensation region CR may be a region surrounding evaporation region SR including second region 106 . Heat is released from the working steam 102a in the condensation region CR. The working vapor 102a is cooled and condensed to produce a working liquid 102b.
  • planar view means a state in which the vapor chamber 101 is viewed from a direction orthogonal to the surface receiving heat from the electronic device D and the surface emitting the received heat.
  • the heat receiving surface corresponds to a second sheet outer surface 120b described later of the second sheet 120
  • the heat emitting surface corresponds to a first sheet outer surface 110a described later of the first sheet 110. do.
  • the surface receiving heat may correspond to the first sheet outer surface 110a
  • the surface emitting heat may correspond to the second sheet outer surface 120b.
  • the state viewed in the direction indicated by the arrow V1 corresponds to a planar view.
  • the state viewed in the direction indicated by the arrow V2 corresponds to a planar view.
  • a state in which the vapor chamber 101 is viewed from above or a state in which the vapor chamber 101 is viewed from below corresponds to a plan view.
  • the first sheet 110 includes a first sheet outer surface 110a located on the side opposite to the wick sheet 130 and a first sheet inner surface 110b facing the wick sheet 130.
  • the housing member Ha described above may be in contact with the first seat outer surface 110a.
  • a later-described first body surface 130a of the wick sheet 130 is in contact with the first sheet inner surface 110b.
  • the first sheet 110 may be formed substantially flat.
  • the first sheet 110 may have a substantially constant thickness.
  • alignment holes 112 may be formed in the four corners of the first sheet 110 .
  • FIG. 47 shows an example in which the planar shape of the alignment hole 112 is circular, it is not limited to this.
  • the alignment holes 112 may pass through the first sheet 110 .
  • the second sheet 120 includes a second sheet inner surface 120a facing the wick sheet 130 and a second sheet outer surface 120b positioned opposite to the wick sheet 130.
  • the electronic device D described above may be in contact with the second sheet outer surface 120b.
  • a later-described second body surface 130b of the wick sheet 130 is in contact with the second sheet inner surface 120a.
  • the second sheet 120 may be formed substantially flat.
  • the second sheet 120 may have a substantially constant thickness.
  • alignment holes 122 may be formed in the four corners of the second sheet 120 .
  • FIG. 48 shows an example in which the planar shape of the alignment hole 122 is circular, it is not limited to this.
  • the alignment holes 122 may pass through the second sheet 120 .
  • the second seat 120 includes a plurality of second seat outer surface recesses 123 located on the second seat outer surface 120b.
  • the second seat outer surface concave portion 123 may be located in the bending region 107 as shown in FIG.
  • the second seat outer surface concave portion 123 extends in a direction crossing the X direction in plan view.
  • the second sheet outer surface concave portion 123 may extend in the Y direction or may extend along the bending line 108 .
  • the second seat outer surface recessed portion 123 may cross the first steam passage 151 or the second steam passage 152 in plan view.
  • the second sheet outer surface concave portion 123 is formed over the entire area of the second sheet 120 in the Y direction.
  • the second seat outer surface concave portion 123 extends so as to intersect the frame portion 132 , each land portion 133 and each steam passage 151 , 152 in plan view.
  • the present invention is not limited to this.
  • the second sheet outer surface concave portion 123 has a linear shape extending in the Y direction in a plan view, but it is not limited to this.
  • the second sheet outer surface concave portion 123 may have a beaded shape in plan view, in which a plurality of circles are partially overlapped and linked in the Y direction.
  • the planar shape of the second seat outer surface concave portion 123 is arbitrary.
  • the second seat outer surface concave portion 123 is formed in a concave shape on the second seat outer surface 120b.
  • the second seat outer surface concave portion 123 may be formed in a groove shape extending in the Y direction.
  • the second sheet outer surface concave portions 123 may be arranged in the X direction, or may be spaced apart at equal intervals in the X direction.
  • Each of the second sheet outer surface recesses 123 may be positioned parallel to each other.
  • a bending region 107 is a region where the vapor chamber 101 is bent. Thereby, after the vapor chamber 101 is bent, the second seat outer surface recess 123 is located in the bending area 107 . The second seat outer surface recess 123 extends along the bend line 108 .
  • the second sheet outer surface concave portion 123 is formed by etching from the second sheet outer surface 120b of the second sheet 120 in the second sheet etching step described later.
  • the second seat outer surface concave portion 123 may have a curved wall surface, as shown in FIG.
  • This wall surface defines a second seat outer surface recess 123 and may be curved in a shape that bulges toward the second seat inner surface 120a.
  • FIG. 49 shows an example in which the second seat outer surface concave portion 123 has a semicircular cross section.
  • the cross-sectional shape of the second seat outer surface concave portion 123 is arbitrary as long as it can absorb the stress acting on the second seat 120 when the vapor chamber 101 is bent. For example, as shown in FIG.
  • the cross-sectional shape of the second seat outer surface concave portion 123 may be triangular. Further, for example, as shown in FIG. 52, the cross-sectional shape of the second seat outer surface concave portion 123 may be rectangular. Further, for example, as shown in FIG. 53, the cross-sectional shape of the second seat outer surface concave portion 123 may be trapezoidal. Further, for example, as shown in FIG. 54, the cross-sectional shape of the second seat outer surface concave portion 123 may be a partial circular shape having a width wider than the opening on the inner side. Further, the second sheet outer surface recessed portion 123 may be formed by a method other than etching, and the forming method is arbitrary. For example, the second sheet outer surface concave portion 123 may be formed by pressing or router processing.
  • the width w18 of the second sheet outer surface concave portion 123 may be, for example, 10 ⁇ m to 60 ⁇ m.
  • the width w18 means the dimension of the second seat outer surface recess 123 in the second seat outer surface 120b.
  • the width w18 corresponds to the X-direction dimension of the second seat outer surface concave portion 123.
  • the X-direction pitch p11 of the second sheet outer surface concave portions 123 may be, for example, 20 ⁇ m to 100 ⁇ m.
  • the depth h12 of the second sheet outer surface concave portion 123 may be 5 ⁇ m to 30 ⁇ m.
  • the depth h12 corresponds to the Z-direction dimension of the second seat outer surface concave portion 123 .
  • the wick sheet 130 has a first main body surface 130a and a second main body surface 130b located opposite to the first main body surface 130a.
  • the first sheet inner surface 110b of the first sheet 110 is in contact with the first body surface 130a.
  • the second sheet inner surface 120a of the second sheet 120 is in contact with the second body surface 130b.
  • the first sheet inner surface 110b of the first sheet 110 and the first body surface 130a of the wick sheet 130 may be diffusion-bonded.
  • the first seat inner surface 110b and the first body surface 130a may be permanently joined together.
  • the second sheet inner surface 120a of the second sheet 120 and the second body surface 130b of the wick sheet 130 may be diffusion-bonded.
  • the second seat inner surface 120a and the second body surface 130b may be permanently joined together.
  • the term "permanently bonded” is not limited to a strict meaning, and means that the vapor chamber 101 is bonded to such an extent that the sealing of the sealed space 103 can be maintained during operation of the vapor chamber 101. is used as
  • the wick sheet 130 includes a frame portion 132 and a plurality of land portions 133.
  • the frame body portion 132 defines the steam channel portion 150 and is formed in a rectangular frame shape along the X direction and the Y direction in plan view.
  • the land portion 133 is located inside the frame portion 132 in plan view, and the steam flow path portion 150 is located around the land portion 133 . Therefore, the working steam 102 a flows around the land portion 133 .
  • the frame portion 132 and the land portion 133 are portions where the material of the wick sheet 130 remains without being etched in the wick sheet etching process described later.
  • a first steam passage 151 which will be described later, through which the working steam 102a flows is formed.
  • a second steam passage 152 (to be described later) through which the working steam 102a flows is formed between the land portions 133 adjacent to each other.
  • the land portion 133 may extend in an elongated shape with the X direction as its longitudinal direction in plan view.
  • the planar shape of the land portion 133 may be an elongated rectangular shape.
  • the X direction is an example of a first direction, and corresponds to the horizontal direction in FIGS. 55 and 56.
  • FIG. also, the land portions 133 may be arranged at regular intervals in the Y direction.
  • the Y direction is an example of a second direction, and is a direction orthogonal to the X direction in plan view.
  • the Y direction is the width direction of the land portion 133 and corresponds to the vertical direction in FIGS.
  • Each land portion 133 may be positioned parallel to each other.
  • a direction orthogonal to each of the X direction and the Y direction is defined as the Z direction.
  • the Z direction corresponds to the vertical direction in FIGS. 46 and 57, and corresponds to the thickness direction.
  • the width w11 of the land portion 133 may be, for example, 100 ⁇ m to 1500 ⁇ m.
  • the width w11 of the land portion 133 is the dimension of the land portion 133 in the Y direction.
  • the width w11 means the dimension of the wick sheet 130 in the Z direction at the position where the through portion 134, which will be described later, exists.
  • the X direction in the first region 105 and the second region 106 of the vapor chamber 101 shown in FIG. 44 corresponds to the direction along the longitudinal direction of the land portion 133 .
  • the X direction in the first area 105 corresponds to the vertical direction in FIG.
  • the Y direction in the first region 105 and the second region 106 of the vapor chamber 101 shown in FIG. 44 corresponds to the direction in which the land portions 133 are arranged.
  • the Z direction corresponds to the direction orthogonal to vapor chamber 101 in first region 105 and second region 106 of vapor chamber 101 shown in FIG.
  • the Z direction in the second area 106 corresponds to the vertical direction in FIG.
  • the frame body part 132 and each land part 133 are diffusion-bonded to the first sheet 110 and diffusion-bonded to the second sheet 120 . This improves the mechanical strength of the vapor chamber 101 .
  • a wall surface 153 a of the first steam flow channel recess 153 and a wall surface 154 a of the second steam flow channel recess 154 which will be described later, form side walls of the land portion 133 .
  • the first main body surface 130a and the second main body surface 130b of the wick sheet 130 may be formed flat over the frame body portion 132 and each land portion 133 .
  • alignment holes 135 may be formed in the four corners of the wick sheet 130 .
  • 55 and 56 show an example in which the planar shape of the alignment hole 135 is circular, but it is not limited to this. Also, the alignment hole 135 may pass through the wick sheet 130 .
  • the steam channel portion 150 may be provided on the first main body surface 130a of the wick sheet 130. As shown in FIG. The steam channel portion 150 is an example of a space portion. The steam channel portion 150 may be a channel through which the working steam 102a primarily passes. The working fluid 102b may also pass through the steam flow path portion 150 . In the present embodiment, the steam channel portion 150 may extend from the first main body surface 130 a to the second main body surface 130 b and may penetrate the wick sheet 130 . The steam channel portion 150 may be covered with the first sheet 110 on the first body surface 130a, and may be covered with the second sheet 120 on the second body surface 130b.
  • the steam flow passage section 150 may include a first steam passage 151 and a plurality of second steam passages 152.
  • Each of the first steam passage 151 and the second steam passage 152 is an example of a working fluid passage.
  • the first steam passage 151 is formed between the frame portion 132 and the land portion 133 .
  • the first steam passage 151 is formed continuously inside the frame portion 132 and outside the land portion 133 .
  • the planar shape of the first steam passage 151 may be a rectangular frame shape along the X direction and the Y direction.
  • the second steam passage 152 is formed between land portions 133 adjacent to each other.
  • the planar shape of the second steam passage 152 may be an elongated rectangular shape.
  • the plurality of lands 133 partition the steam flow path section 150 into a first steam passage 151 and a plurality of second steam passages 152 .
  • the first steam passage 151 and the second steam passage 152 may extend from the first body surface 130a of the wick sheet 130 to the second body surface 130b.
  • the first steam passage 151 and the second steam passage 152 penetrate from the first body surface 130a to the second body surface 130b.
  • the first steam passage 151 and the second steam passage 152 have a first steam passage recess 153 provided on the first main body surface 130a and a second steam passage recess 154 provided on the second main body surface 130b. contains.
  • the first steam channel recess 153 and the second steam channel recess 154 communicate with each other.
  • the first steam channel recess 153 may be formed by etching from the first main body surface 130a of the wick sheet 130 in a wick sheet etching step, which will be described later.
  • the first steam flow path recess 153 is formed in a recessed shape on the first main body surface 130a.
  • the first steam flow channel recess 153 may have a curved wall surface 153a.
  • FIG. 57 shows a cross section perpendicular to the X direction.
  • This wall surface 153a defines the first steam flow path recess 153 and may be curved so as to approach the opposing wall surface 153a as it approaches the second body surface 130b.
  • the first steam passage concave portion 153 constitutes a portion of the first steam passage 151 relatively close to the first sheet 110 and a portion of the second steam passage 152 relatively close to the first sheet 110 .
  • the width w12 of the first vapor channel recesses 153 in the first region 105 and the second region 106 may be, for example, 100 ⁇ m to 5000 ⁇ m.
  • the width w12 of the first steam flow channel recess 153 is the dimension in the Y direction, which is the dimension of the first steam flow channel recess 153 on the first main body surface 130a.
  • the width w12 corresponds to the Y-direction dimension of the portion of the first steam passage 151 extending in the X direction and the Y-direction dimension of the second steam passage 152 .
  • the width w12 also corresponds to the X-direction dimension of the portion of the first steam passage 151 that extends in the Y-direction.
  • the second steam flow path concave portion 154 may be formed by etching from the second main body surface 130b of the wick sheet 130 in a wick sheet etching step, which will be described later.
  • the second steam flow channel recess 154 is formed in a recessed shape in the second main body surface 130b. As shown in FIG. 57, the second steam flow channel recess 154 may have a curved wall surface 154a. This wall surface 154a defines a second steam flow path recess 154 and may curve toward the opposing wall surface 154a as it approaches the first body surface 130a.
  • the second steam passage concave portion 154 constitutes a portion of the first steam passage 151 relatively close to the second sheet 120 and a portion of the second steam passage 152 relatively close to the second sheet 120 .
  • the width w13 of the second steam passage recess 154 in the first region 105 and the second region 106 may be, for example, 100 ⁇ m to 5000 ⁇ m, similar to the width w12 of the first steam passage recess 153 described above.
  • the width w13 of the second steam flow path recess 154 is the dimension in the Y direction, which is the dimension of the second steam flow path recess 154 on the second main body surface 130b.
  • the width w13 corresponds to the Y-direction dimension of the portion of the first steam passage 151 extending in the X direction and the Y-direction dimension of the second steam passage 152 .
  • the width w13 also corresponds to the X-direction dimension of the portion of the first steam passage 151 that extends in the Y-direction.
  • the width w13 of the second steam channel recess 154 may be equal to or different from the width w12 of the first steam channel recess 153 .
  • the wall surface 153a of the first steam flow channel recessed portion 153 and the wall surface 154a of the second steam flow channel recessed portion 154 may be connected to form the through portion 134.
  • the planar shape of penetration portion 134 in first steam passage 151 may be a rectangular frame shape.
  • the planar shape of the penetrating portion 134 in the second steam passage 152 may be an elongated rectangular shape.
  • the through portion 134 may be defined by a ridgeline where the wall surface 153a of the first steam flow path recess 153 and the wall surface 154a of the second steam flow path recess 154 merge.
  • the ridge line may be formed so as to protrude inside the steam passages 151 and 152 as shown in FIG.
  • the plane area of the first steam passage 151 in the penetration portion 134 may be the minimum, and the plane area of the second steam passage 152 in the penetration portion 134 may be the minimum.
  • the width w14 of the penetration portion 134 of each steam passage 151, 152 may be, for example, 400 ⁇ m to 5000 ⁇ m.
  • the width w14 of the penetrating portion 134 is the width of the penetrating portion 134 in the first region 105 and the second region 106, and corresponds to the gap between the land portions 133 adjacent to each other in the Y direction.
  • the width w14 may be the gap between the portions of the land portion 133 that protrude most inwardly of the steam passages 151 and 152, as shown in FIG.
  • the position of the penetrating portion 134 in the Z direction may be an intermediate position between the first main body surface 130a and the second main body surface 130b.
  • the position of the penetrating portion 134 may be a position closer to the first seat 110 than the intermediate position, or a position closer to the second seat 120 than the intermediate position.
  • the position of the penetrating portion 134 in the Z direction is arbitrary.
  • the cross-sectional shapes of the first steam passage 151 and the second steam passage 152 are formed so as to include the through portion 134 defined by the ridgeline formed to protrude inward.
  • the cross-sectional shape of the first steam passage 151 and the cross-sectional shape of the second steam passage 152 may be trapezoidal, parallelogram-shaped, or barrel-shaped.
  • the steam flow path section 150 including the first steam path 151 and the second steam path 152 configured in this manner constitutes part of the sealed space 103 described above.
  • Each steam passage 151, 152 has a relatively large flow cross-sectional area through which the working steam 102a passes.
  • FIG. 57 shows the first steam passage 151 and the second steam passage 152 enlarged for clarity of the drawing.
  • the number of main grooves 161, which will be described later, is different from that shown in FIG.
  • a plurality of support portions that support the land portion 133 on the frame portion 132 may be provided in each of the steam passages 151 and 152 .
  • a support portion may be provided to support the land portions 133 adjacent to each other. These support portions may be provided on both sides of the land portion 133 in the X direction, or may be provided on both sides of the land portion 133 in the Y direction.
  • the support portion may be formed so as not to block the flow of the working steam 102 a that diffuses through the steam flow path portion 150 .
  • the support portion is positioned close to one of the first main body surface 130a and the second main body surface 130b of the wick sheet 130, and a space forming the steam channel portion 150 is formed at a position close to the other.
  • the thickness of the support portion can be made thinner than the thickness of the wick sheet 130, and the first steam passage 151 and the second steam passage 152 can be prevented from being divided in the X direction and the Y direction.
  • the vapor chamber 101 may include an injection part 104 for injecting the working fluid 102b into the sealed space 103.
  • the injection section 104 includes an injection passage 136 communicating with the first steam passage 151 .
  • the position of the injection part 104 is arbitrary.
  • the injection channel 136 may be recessed in the second body surface 130b.
  • the injection channel 136 may be recessed in the first body surface 130a.
  • the injection channel 136 may communicate with the liquid channel portion 160 depending on the configuration of the liquid channel portion 160 .
  • the liquid flow path section 160 may be formed between the first sheet 110 and the wick sheet 130.
  • FIG. In this embodiment, the liquid flow path portion 160 is formed on the first main body surface 130 a of each land portion 133 .
  • the liquid channel portion 160 may be a channel through which the working liquid 102b mainly passes.
  • the working steam 102 a described above may pass through the liquid flow path portion 160 .
  • the liquid channel portion 160 constitutes a part of the above-described sealed space 103 and communicates with the vapor channel portion 150 .
  • the liquid flow path section 160 is configured as a capillary structure for transporting the working liquid 102b to the evaporation region SR.
  • the liquid flow path section 160 may also be referred to as a wick.
  • the liquid flow path portion 160 may be formed over the entire first body surface 130 a of each land portion 133 . Although not shown in FIG. 55 and the like, the liquid flow path portion 160 may be formed inside the first main body surface 130a of the frame portion 132 . In the present embodiment, the second body surface 130b of the land portion 133 and the second body surface 130b of the frame body portion 132 are not formed with liquid flow paths.
  • the liquid flow path portion 160 is an example of a first groove aggregate including a plurality of grooves. More specifically, the liquid flow path portion 160 includes multiple main grooves 161 and multiple communication grooves 165 .
  • the main groove 161 and the communication groove 165 of the liquid flow path portion 160 are examples of first grooves.
  • the main groove 161 and the communication groove 165 are grooves through which the hydraulic fluid 102b passes.
  • the communication groove 165 communicates with the main groove 161 .
  • Each mainstream groove 161 extends in the X direction, as shown in FIG.
  • the main groove 161 has a small flow cross-sectional area mainly so that the hydraulic fluid 102b flows by capillary action.
  • the channel cross-sectional area of the main groove 161 is smaller than the channel cross-sectional areas of the steam passages 151 and 152 .
  • Main flow channel 161 is configured to transport working fluid 102b condensed from working steam 102a to evaporation region SR.
  • Each main groove 161 may be spaced apart at equal intervals along the Y direction perpendicular to the X direction.
  • Each mainstream groove 161 may be positioned parallel to each other.
  • the main groove 161 is formed by etching from the first main body surface 130a of the wick sheet 130 in a wick sheet etching step, which will be described later.
  • the mainstream groove 161 may have a curved wall surface 162 as shown in FIG. This wall surface 162 defines the mainstream groove 161 and may be curved in a shape that bulges toward the second body surface 130b.
  • the width w15 of the main groove 161 may be smaller than the width w12 of the first steam flow path recess 153.
  • the width w15 of the main groove 161 may be smaller than the width w11 of the land portion 133 .
  • the width w15 of the main groove 161 may be, for example, 5 ⁇ m to 400 ⁇ m.
  • the width w15 means the dimension of the main groove 161 on the first main body surface 130a.
  • the width w15 corresponds to the Y-direction dimension of the main groove 161.
  • the depth h11 of the main groove 161 may be, for example, 3 ⁇ m to 300 ⁇ m.
  • the depth h11 corresponds to the Z-direction dimension of the main groove 161 .
  • each communication groove 165 extends in a direction different from the X direction.
  • Each communication groove 165 according to this embodiment extends in the Y direction and is formed perpendicular to the main groove 161 .
  • Some communication grooves 165 communicate with adjacent main grooves 161 .
  • Another communication groove 165 communicates the first steam passage 151 or the second steam passage 152 with the main groove 161 . That is, the communication groove 165 extends from the side edge 133e of the land portion 133 in the Y direction to the main groove 161 adjacent to the side edge 133e. In this manner, the first steam passage 151 communicates with the main groove 161 and the second steam passage 152 communicates with the main groove 161 .
  • the communication groove 165 has a small channel cross-sectional area so that the working fluid 102b mainly flows by capillary action.
  • the channel cross-sectional area of the communication groove 165 is smaller than the channel cross-sectional areas of the steam passages 151 and 152 .
  • the communication grooves 165 are spaced apart at predetermined intervals along the X direction. Each communication groove 165 may be positioned parallel to each other.
  • the communication groove 165 is also formed by etching, which will be described later, similarly to the main groove 161 . Accordingly, the communication groove 165 may have a curved wall surface (not shown) similar to that of the main groove 161 .
  • Width w ⁇ b>16 of communication groove 165 may be smaller than width w ⁇ b>12 of first steam flow path recess 153 .
  • Width w16 of communication groove 165 may be smaller than width w11 of land portion 133 .
  • the width w16 of the communication groove 165 may be equal to the width w15 of the main groove 161. As shown in FIG. However, width w16 may be larger or smaller than width w15.
  • the width w16 means the dimension of the communication groove 165 on the first main body surface 130a. In FIG. 58, the width w16 corresponds to the dimension of the communication groove 165 in the X direction.
  • the depth of the communication groove 165 may be equal to the depth h11 of the main groove 161. However, the depth of the communication groove 165 may be deeper or shallower than the depth h11.
  • the liquid flow path section 160 has a plurality of rows of protrusions 163 .
  • the row of protrusions 163 is formed on the first body surface 130 a of each land 133 .
  • the row of protrusions 163 is located between the main grooves 161 adjacent to each other.
  • Each projection row 163 includes a plurality of projections 164 arranged in the X direction.
  • the convex portion 164 is in contact with the first sheet 110 .
  • each convex portion 164 is formed in a rectangular shape in plan view so that the X direction is the longitudinal direction.
  • Main grooves 161 are interposed between protrusions 164 adjacent to each other in the Y direction.
  • a communication groove 165 is interposed between the protrusions 164 adjacent to each other in the X direction.
  • the protruding portion 164 is a portion where the material of the wick sheet 130 remains without being etched in the wick sheet etching process described later.
  • the planar shape of the convex portion 164 is rectangular. More specifically, the planar shape of the convex portion 164 corresponds to the planar shape at the position of the first main body surface 130a.
  • the protrusions 164 are arranged in a zigzag pattern. More specifically, the convex portions 164 of the convex portion rows 163 adjacent to each other in the Y direction are positioned at positions shifted from each other in the X direction. This shift amount may be half the arrangement pitch of the protrusions 164 in the X direction.
  • the width w17 of the protrusion 164 may be, for example, 5 ⁇ m to 500 ⁇ m.
  • the width w17 means the dimension of the protrusion 164 on the first main body surface 130a. In FIG. 58, the width w17 corresponds to the Y-direction dimension of the projection 164. In FIG.
  • the positions of the projections 164 are not limited to being staggered, and may be arranged in parallel.
  • the convex portions 164 of the convex portion rows 163 adjacent to each other in the Y direction are positioned at the same position in the X direction.
  • each sheet 110, 120, 130 may be constructed of a metallic material.
  • each sheet 110, 120, 130 may comprise copper or a copper alloy. Copper and copper alloys have good thermal conductivity and corrosion resistance when using pure water as the working fluid. Examples of copper include pure copper and oxygen-free copper (C1020). Examples of copper alloys include copper alloys containing tin, copper alloys containing titanium (such as C1990), and Corson copper alloys (such as C7025), which are copper alloys containing nickel, silicon and magnesium.
  • a copper alloy containing tin is, for example, phosphor bronze (C5210 or the like).
  • a thickness t11 of the vapor chamber 101 shown in FIG. 46 may be, for example, 100 ⁇ m to 500 ⁇ m.
  • the vapor passage portion 150 can be appropriately secured.
  • the vapor chamber 101 can function properly.
  • the thickness t11 to 500 ⁇ m or less it is possible to suppress the thickness t11 of the vapor chamber 101 from increasing. Therefore, the vapor chamber 101 can be made thin.
  • the thickness of the wick sheet 130 may be thicker than the thickness of the first sheet 110 .
  • the thickness of the wick sheet 130 may be thicker than the thickness of the second sheet 120 .
  • This embodiment shows an example in which the thickness of the first sheet 110 and the thickness of the second sheet 120 are equal. However, it is not limited to this, and the thickness of the first sheet 110 and the thickness of the second sheet 120 may be different.
  • the thickness t12 of the first sheet 110 may be, for example, 6 ⁇ m to 100 ⁇ m. By setting the thickness t12 of the first sheet 110 to 6 ⁇ m or more, the mechanical strength and long-term reliability of the first sheet 110 can be ensured. On the other hand, by setting the thickness t12 of the first sheet 110 to 100 ⁇ m or less, it is possible to suppress the thickness t11 of the vapor chamber 101 from increasing.
  • the thickness t13 of the second sheet 120 may be set similarly to the thickness t12 of the first sheet 110 .
  • the thickness t14 of the wick sheet 130 may be, for example, 50 ⁇ m to 400 ⁇ m. By setting the thickness t14 of the wick sheet 130 to 50 ⁇ m or more, it is possible to properly secure the steam flow path portion 150 . Thus, the vapor chamber 101 can function properly. On the other hand, by setting the thickness to 400 ⁇ m or less, it is possible to suppress the thickness t11 of the vapor chamber 101 from increasing. Therefore, the vapor chamber 101 can be made thin. Note that the thickness t14 of the wick sheet 130 may be the distance between the first main body surface 130a and the second main body surface 130b.
  • the vapor chamber 101 includes a bending region 107. As shown in FIG. In the bending region 107, the vapor chamber 101 bends along a bending line 108 extending in a direction crossing the X direction in plan view. As shown in FIGS. 44 and 45, the bending line 108 according to the present embodiment extends in the Y direction in plan view. The Y direction is a direction orthogonal to the X direction in plan view. Bending line 108 crosses frame portion 132 , land portion 133 , first steam passage 151 and second steam passage 152 .
  • first sheet 110 can be prevented from being deformed into the steam passages 151 and 152
  • second sheet 120 can be prevented from being deformed into the steam passages 151 and 152
  • the channel cross-sectional area of the first steam passage 151 and the second steam passage 152 can be secured.
  • First region 105 , second region 106 and bend region 107 may be separated by a boundary line along bend line 108 . In the examples shown in FIGS. 44 and 45, the regions 105, 106, and 107 may be separated by boundary lines extending in the Y direction in plan view.
  • the second seat outer surface concave portion 123 described above is located in the bending region 107. As shown in FIGS. The second sheet outer surface concave portion 123 overlaps the bending line 108 when the bending region 107 is viewed from the inside or outside of the bending.
  • the vapor chamber 101 is bent as shown in FIG.
  • the first sheet 110 is positioned on the outside of the bend relative to the wick sheet 130 .
  • the first sheet 110 is located outside the wick sheet 130 with respect to the center O of bending.
  • the second sheet 120 is located inside the bend relative to the wick sheet 130 .
  • the second sheet 120 is located inside the wick sheet 130 with respect to the center O of bending.
  • Each steam passage 151, 152 may include a passage bend 157 located in the bend region 107, as shown in FIG.
  • FIG. 59 shows an example of a passage bend 157.
  • the shape of the passage bent portion 157 when viewed along the Y direction is a quarter arc, but it is not limited to this.
  • the passage bend 157 may include the first steam flow path recess 153 and the second steam flow path recess 154 described above.
  • the first sheet 110, the second sheet 120 and the wick sheet 130 are prepared.
  • the preparation process may include a second sheet etching process of etching the second sheet 120 and a wick sheet etching process of etching the wick sheet 130 .
  • the second sheet 120 and the wick sheet 130 may be formed by etching using a patterned resist film (not shown) by photolithography.
  • the first sheet 110, the wick sheet 130 and the second sheet 120 are temporarily fixed.
  • each sheet 110, 120, 130 may be tacked together by spot welding or laser welding.
  • the sheets 110, 120, and 130 may be aligned using the alignment holes 112, 122, and 135 described above.
  • the first sheet 110, the wick sheet 130, and the second sheet 120 are permanently bonded.
  • Each sheet 110, 120, 130 may be bonded by diffusion bonding.
  • the sealed space 103 is evacuated, and the working fluid 102b is injected into the sealed space 103 from the injection part 104 (see FIG. 45).
  • the injection channel 136 described above is sealed as a sealing process.
  • communication between the sealed space 103 and the outside is cut off, and the sealed space 103 is sealed.
  • a sealed space 103 in which the hydraulic fluid 102b is enclosed is obtained, and the hydraulic fluid 102b in the sealed space 103 is prevented from leaking to the outside.
  • the first sheet 110, the second sheet 120 and the wick sheet 130 may be bent as a bending process.
  • each sheet 110, 120, 130 is bent along a bending line 108 extending in the Y direction as shown in FIG.
  • a jig (not shown) is brought into contact with the second sheet outer surface 120b of the second sheet 120 on the inner side of the bend.
  • Both ends in the X direction of each sheet 110, 120, 130 in the X direction are gripped, and each sheet 110, 120, 130 is bent at a desired angle.
  • the bending process may be performed between the bonding process and the injection process.
  • a second sheet outer surface concave portion 123 is formed in the second sheet outer surface 120b of the second sheet 120 located inside the bend.
  • the vapor chamber 101 may be bent at the position where the second sheet outer surface concave portion 123 is formed.
  • the vapor chamber 101 may be bent such that the bending line 108 is along the direction in which the second seat outer surface recess 123 extends.
  • the second seat outer surface concave portion 123 is easily visible and can serve as a mark of the bending position.
  • the second sheet lid portion 124 When the second sheet 120 is bent, a compressive stress acts on the second sheet lid portion 124 (see FIG. 57) covering the steam passages 151 and 152 of the second sheet 120 . Since the second sheet 120 is located inside the bend, a jig (not shown) contacts the second sheet outer surface 120b of the second sheet 120 . Therefore, the second seat lid portion 124 is restricted from being displaced toward the inside of the bend, and tends to enter the second steam flow path concave portion 154 located outside the bend relative to the second seat 120 . However, according to the present embodiment, the second sheet outer surface recessed portion 123 is formed in the second sheet outer surface 120 b in the bending region 107 . As a result, the compressive stress acting on the second seat lid portion 124 during bending can be absorbed, and the second seat lid portion 124 can be prevented from entering the second steam flow path concave portion 154 .
  • the vapor chamber 101 according to the present embodiment is obtained.
  • the vapor chamber 101 obtained as described above When the vapor chamber 101 obtained as described above is mounted on the substrate S, it may be bonded to the substrate S using an adhesive AD as shown in FIG.
  • the adhesive AD may be bonded to the second sheet outer surface 120b in the bending region 107.
  • FIG. In this case, the adhesive AD enters the second sheet outer surface concave portion 123 . This improves the adhesion between the vapor chamber 101 and the adhesive AD.
  • the vapor chamber 101 obtained as described above is installed in a housing H of a mobile terminal or the like.
  • the first sheet outer surface 110a of the first sheet 110 contacts the housing member Ha.
  • a second sheet outer surface 120b of the second sheet 120 contacts the electronic device D in the first region 105 .
  • the hydraulic fluid 102b in the sealed space 103 adheres to the wall surface of the sealed space 103 due to its surface tension. More specifically, the working fluid 102b flows through the wall surface 153a of the first vapor flow channel recess 153, the wall surface 154a of the second vapor flow channel recess 154, the wall surface 162 of the main groove 161 of the liquid flow channel portion 160, and the communication groove 165. Adheres to walls.
  • the working fluid 102b may also adhere to the portion of the first sheet inner surface 110b of the first sheet 110 that is exposed to the first steam channel recess 153 . Further, the working fluid 102b may also adhere to the portions of the second sheet inner surface 120a of the second sheet 120 exposed to the second steam flow channel recess 154, the main groove 161 and the communication groove 165. As shown in FIG.
  • the working fluid 102b existing in the evaporation region SR receives heat from the electronic device D.
  • the received heat is absorbed as latent heat to evaporate the working liquid 102b and produce working vapor 102a.
  • the generated working steam 102a diffuses within the first steam passage 151 and the second steam passage 152 that form the sealed space 103 (see solid line arrows in FIG. 55). More specifically, in the portion of the first steam passage 151 of the steam passage portion 150 extending in the X direction and the second steam passage 152, the working steam 102a mainly diffuses in the X direction. In this case, some of the working steam 102 a diffuses through the passage bend 157 . On the other hand, in the portion of the first steam passage 151 extending in the Y direction, the working steam 102a mainly diffuses in the Y direction.
  • the working steam 102a in each of the steam passages 151, 152 leaves the evaporation area SR and is transported to the condensation area CR with a relatively low temperature.
  • the working steam 102a is mainly radiated to the first sheet 110 and cooled.
  • the heat received by the first seat 110 from the working steam 102a is transferred to the outside air via the housing member Ha (see FIG. 46).
  • the working steam 102a loses latent heat absorbed in the evaporation region SR by radiating heat to the first sheet 110 in the condensation region CR. This causes the working steam 102a to condense and produce working fluid 102b.
  • the generated hydraulic fluid 102b adheres to the wall surfaces 153a, 154a of the respective steam flow channel recesses 153, 154, the first sheet inner surface 110b of the first sheet 110, and the second sheet inner surface 120a of the second sheet 120.
  • the working fluid 102b continues to evaporate in the evaporation region SR.
  • each main groove 161 the working fluid 102b in the condensation area CR of the liquid flow path portion 160 is transported toward the evaporation area SR by the capillary action of each main groove 161 (see the dashed arrow in FIG. 55).
  • the hydraulic fluid 102b adhering to the wall surfaces 153a, 154a, the first seat inner surface 110b, and the second seat inner surface 120a moves to the fluid flow path portion 160, passes through the communication groove 165, and enters the main groove 161.
  • each main groove 161 and each communication groove 165 are filled with hydraulic fluid 102b.
  • the filled working fluid 102b obtains a driving force toward the evaporation area SR due to the capillary action of each main groove 161, and is smoothly transported toward the evaporation area SR. As shown in FIG. 44, even if the vaporization region SR is positioned above the vapor chamber 101, the working fluid 102b is transported by capillary action.
  • each main groove 161 communicates with another adjacent main groove 161 via a corresponding communication groove 165.
  • the hydraulic fluid 102b is prevented from flowing between the main grooves 161 adjacent to each other, and the occurrence of dryout in the main grooves 161 is suppressed. Therefore, the working fluid 102b in each main groove 161 is imparted with a capillary action, and the working fluid 102b is smoothly transported toward the evaporation region SR.
  • the working fluid 102b that has reached the evaporation region SR receives heat from the electronic device D again and evaporates.
  • the working steam 102a evaporated from the working fluid 102b passes through the communication groove 165 in the evaporation region SR and moves to the first steam flow path recess 153 and the second steam flow path recess 154 having a large flow path cross-sectional area.
  • the working steam 102 a then diffuses within each steam flow path recess 153 , 154 , and a portion of the working steam 102 a can diffuse through the passage bend 157 .
  • the working fluids 102a and 102b circulate within the sealed space 103 while repeating phase changes, that is, evaporation and condensation.
  • the heat of the electronic device D is diffused and released.
  • the electronic device D is cooled.
  • the second sheet outer surface concave portion 123 is positioned on the second sheet outer surface 120 b of the second sheet 120 in the bending region 107 .
  • the stress acting on the second sheet 120 can be absorbed when the vapor chamber 101 is bent, and the second sheet 120 in the bent region 107 is prevented from entering the first steam passage 151 or the second steam passage 152. can. Therefore, it is possible to secure the flow passage cross-sectional areas of the first steam passage 151 and the second steam passage 152, and to suppress the flow of the working steam 102a in the curved region 107 from being obstructed. As a result, even when bent, the heat dissipation efficiency of the vapor chamber 101 can be improved. Further, since the second seat outer surface concave portion 123 is easily visible, it can be used as a mark of the bending position of the vapor chamber 101 before bending. Therefore, bending workability can be improved.
  • the second sheet 120 is positioned inside the bend relative to the wick sheet 130 . Accordingly, when the vapor chamber 101 is bent, the compressive stress acting on the second sheet 120 can be absorbed by the second sheet outer surface concave portion 123 . Therefore, it is possible to prevent the second sheet 120 in the bent region 107 from entering the first steam passage 151 or the second steam passage 152 .
  • the second seat outer surface concave portion 123 extends along the bending line 108 and crosses the first steam passage 151 or the second steam passage 152 .
  • the stress acting on the second sheet 120 can be effectively absorbed when the vapor chamber 101 is bent, and the second sheet 120 in the bent region 107 enters the first steam passage 151 or the second steam passage 152. can be further suppressed.
  • the vapor chamber 101 can be easily bent along the bending line 108 .
  • the plurality of second seat outer surface concave portions 123 are positioned on the second seat outer surface 120b.
  • the plurality of second seat outer surface concave portions 123 are arranged in the X direction.
  • the bending line 108 extends in the Y direction orthogonal to the X direction. This makes it easy to bend the vapor chamber 101 along the direction orthogonal to the X direction in which the land portion 133 extends. Therefore, in the bent region 107 , the first sheet 110 can be prevented from being deformed into the steam passages 151 and 152 , and the second sheet 120 can be prevented from being deformed into the steam passages 151 and 152 . Therefore, it is possible to secure the flow passage cross-sectional areas of the first steam passage 151 and the second steam passage 152, and to suppress the flow of the working steam 102a in the curved region 107 from being obstructed.
  • a liquid flow path (not shown) may be formed on the second body surface 130b of the land 133 .
  • the liquid flow path portion may include a main groove 161 and a communication groove 165 in the same manner as the liquid flow path portion 160 described above.
  • the channel cross-sectional area of the groove of the liquid channel portion formed in the second main body surface 130b may be equal to the channel cross-sectional area of the groove of the liquid channel portion 160, or It may be larger than the channel cross-sectional area.
  • the liquid flow path 160 may not be formed on the first main body surface 130a.
  • the second seat outer surface concave portion 123 extends in the Y direction.
  • the plurality of second sheet outer surface concave portions 123 may be arranged along the bend line 108 or may be arranged in the Y direction. Adjacent second seat outer surface concave portions 123 are separated from each other.
  • the second seat outer surface recessed portions 123 are arranged in a zigzag pattern, but they may be arranged in a grid pattern (see FIG. 63), and the arrangement of the second seat outer surface recessed portions 123 is arbitrary. is.
  • the second seat outer surface recessed portions 123 may overlap the first steam passage 151 or the second steam passage 152 in plan view.
  • the remaining second seat outer surface concave portion 123 may not overlap the first steam passage 151 or the second steam passage 152 in plan view.
  • all the second seat outer surface concave portions 123 may overlap the first steam passage 151 or the second steam passage 152 in plan view.
  • the second seat outer surface concave portion 123 overlaps the land portion 133 , the frame portion 132 and the steam passages 151 and 152 .
  • the second seat outer surface recessed portion 123 has a circular planar shape, but the planar shape of the second seat outer surface recessed portion 123 is arbitrary.
  • the second seat outer surface concave portion 123 may have an elliptical planar shape.
  • the second seat outer surface concave portion 123 may have a rectangular planar shape.
  • each side of the second sheet outer surface recessed portion 123 is arranged so that each side of the rectangle is It may be slanted and the opposite corners of the rectangle may be arranged along the bend line 108 .
  • the second seat outer surface concave portions 123 are arranged in a grid pattern. Further, the second sheet outer surface concave portion 123 and the bending line 108 may extend in a direction inclined in the X direction in plan view.
  • first sheet outer surface recesses 113 may be located in first sheet outer surface 110 a of first sheet 110 in bending region 107 .
  • first sheet outer surface recesses 113 may be located in first sheet outer surface 110 a of first sheet 110 in bending region 107 .
  • the first seat outer surface recessed portion 113 can be formed in the same manner as the second seat outer surface recessed portion 123 . As shown in FIG. 64, a first seat outer surface recessed portion 113 may be formed in the first seat outer surface 110a, and a second seat outer surface recessed portion 123 may be formed in the second seat outer surface 120b. Alternatively, although not shown, the first seat outer surface recess 113 may be formed in the first seat outer surface 110a, and the second seat outer surface recess 123 may not be formed in the second seat outer surface 120b.
  • the second sheet 120 having the second sheet outer surface concave portion 123 formed thereon may be arranged on the outside of the bend, and the first sheet 110 without the first sheet outer surface concave portion 113 formed may be arranged on the inside of the bend. good.
  • the sheet grooves 70 and 80 are provided as described in the first to fourteenth embodiments.
  • a sheet groove 70 is provided in the second sheet inner surface 120a of the second sheet 120.
  • the seat groove 70 may be provided at a position overlapping the steam passages 151 and 152 and the second seat outer surface concave portion 123 in plan view.
  • the seat groove 70 may not be provided at a position that does not overlap the steam passages 151 and 152, for example, a position that overlaps the land portion 133 in plan view.
  • the first end 71 of the sheet groove 70 overlaps the edge of the land portion 133 on the Y-direction negative side (lower side in FIG. 65 ) in plan view.
  • the second end portion 72 overlaps the edge portion of the land portion 133 on the positive side in the Y direction (the upper side in FIG. 65) in plan view.
  • the seat groove 70 does not have to be provided at a position that does not overlap the second seat outer surface concave portion 123 in plan view.
  • Such a sheet groove 70 can further absorb the stress acting on the second sheet 120 when the vapor chamber 101 is bent, and the second sheet 120 in the bent region 107 can be either the first steam passage 151 or the second steam passage 152 . It can further prevent you from getting inside.
  • the seat groove 70 is not provided at a position that does not overlap the second seat outer surface concave portion 123 in plan view, but the seat groove 70 does not overlap the second seat outer surface recessed portion 123 in plan view. It may also be provided at a position that does not overlap with the two-seat outer surface concave portion 123 .
  • the condensed working fluid 102b can be rapidly moved to the fluid flow path portion 160 by the capillary action of the seat groove 70. It is possible to further suppress an increase in flow path resistance.
  • FIG. 67 a vapor chamber and electronic equipment according to a sixteenth embodiment of the present disclosure will be described with reference to FIGS. 67 and 68.
  • FIG. 67 a vapor chamber and electronic equipment according to a sixteenth embodiment of the present disclosure will be described with reference to FIGS. 67 and 68.
  • the sixteenth embodiment shown in FIGS. 67 and 68 is mainly different in that the bending line extends in a direction inclined in the first direction.
  • Other configurations are substantially the same as those of the fifteenth embodiment shown in FIGS. 67 and 68, the same parts as those of the fifteenth embodiment shown in FIGS. 42 to 66 are assigned the same reference numerals, and detailed description thereof will be omitted.
  • the vapor chamber 101 is bent along a bending line 108 inclined in the X direction in plan view.
  • a bending line 108 shown in FIGS. 67 and 68 extends in a direction inclined in the X direction and in a direction inclined in the Y direction.
  • the bending line 108 according to the present embodiment also extends in a direction crossing the X direction in plan view.
  • each of the second seat outer surface concave portions 123 extends in a direction inclined in the X direction in plan view. Also in this case, the second seat outer surface concave portion 123 intersects with the X direction.
  • the second sheet outer surface concave portions 123 may be arranged in the X direction, or may be spaced apart at equal intervals in the X direction.
  • Each of the second sheet outer surface recesses 123 may be positioned parallel to each other.
  • the bending line 108 extends in a direction inclined in the X direction.
  • the second sheet 120 in the bending region 107 is not in contact with the first steam passage 151 or the second steam path. Entry into the passage 152 can be suppressed. Therefore, it is possible to secure the flow passage cross-sectional areas of the first steam passage 151 and the second steam passage 152, and to suppress the flow of the working steam 102a in the curved region 107 from being obstructed. As a result, even when bent, the heat dissipation efficiency of the vapor chamber 101 can be improved.
  • the second seat outer surface concave portion 123 extends in a direction inclined in the X direction in plan view.
  • the plurality of second sheet outer surface concave portions 123 may be arranged along the bending line 108 or may be arranged in a direction inclined in the X direction.
  • a second seat outer surface concave portion 123 may be formed.
  • FIG. 69 a vapor chamber and electronic equipment according to a seventeenth embodiment of the present disclosure will be described with reference to FIGS. 69 and 70.
  • FIG. 69 a vapor chamber and electronic equipment according to a seventeenth embodiment of the present disclosure will be described with reference to FIGS. 69 and 70.
  • the main difference from the seventeenth embodiment shown in FIGS. 69 and 70 is that the land recesses are located on the first main body surface or the second main body surface of the land portion.
  • Other configurations are substantially the same as those of the fifteenth embodiment shown in FIGS. 69 and 70, the same parts as those of the fifteenth embodiment shown in FIGS. 42 to 66 are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • land recesses 137 are formed in the second body surface 130b of the land portion 133. As shown in FIG. The land recess 137 does not communicate with the steam passages 151 and 152 . The land concave portion 137 does not communicate with the main groove 161 and the communication groove 165 of the liquid flow path portion 160 either. As described above, the liquid flow path portion 160 is located on the first main body surface 130a of the land portion 133, and the land concave portion 137 is located on the second main body surface 130b located on the opposite side of the liquid flow path portion 160. formed.
  • the liquid flow path portion 160 may be formed on one of the first main body surface 130a and the second main body surface 130b of the land portion 133, and the land concave portion 137 may be formed on the other.
  • the land recess 137 may be formed on the first body surface 130 a of the land portion 133 .
  • the land recess 137 overlaps the second seat outer surface recess 123 in plan view. In other words, the land recess 137 overlaps the second seat outer surface recess 123 when the bend region 107 is viewed from the inside or outside of the bend.
  • the land recessed portion 137 is located in the bent region 107 .
  • the land recess 137 is formed in a concave shape on the second body surface 130b, and may be formed in a groove shape.
  • the land recess 137 extends in the X direction.
  • the land recess 137 intersects the second seat outer surface recess 123 .
  • the land recess 137 may extend to both sides in the X direction from the second seat outer surface recess 123 .
  • a land recess 137 may be formed in each land 133 .
  • a plurality of land recesses 137 may be formed in one land portion 133 .
  • the land recesses 137 may be aligned along the second sheet outer surface recesses 123 and the bending line 108, or may be aligned in the Y direction.
  • the land recesses 137 may be positioned parallel to each other.
  • the land recess 137 may be formed in the frame portion 132 .
  • the land recesses 137 are formed by etching from the second main body surface 130b of the wick sheet 130 in the wick sheet etching process described above. As a result, the land recess 137 may have a curved wall surface, as shown in FIG. The wall surface defines a land recess 137 and may be curved in a shape that bulges toward the first body surface 130a.
  • the width w19 of the land recess 137 may be, for example, 50 ⁇ m to 150 ⁇ m.
  • the width w19 means the dimension of the land recess 137 on the second main body surface 130b.
  • the width w19 corresponds to the dimension of the land recess 137 in the Y direction.
  • the depth h13 of the land recess 137 may be, for example, 20 ⁇ m to 120 ⁇ m.
  • the depth h13 corresponds to the dimension of the land recess 137 in the Z direction.
  • the land recess 137 that does not communicate with the steam passages 151 and 152 is positioned on the second main body surface 130b of the land 133, and the land recess 137 overlaps the second seat outer surface recess 123. ing.
  • the rigidity of the land portion 133 in the bent region 107 can be reduced. Therefore, when the vapor chamber 101 is bent, the land portion 133 can be easily bent.
  • the land recessed portion 137 extends to both sides in the X direction from the second seat outer surface recessed portion 123 .
  • the rigidity of the land portion 133 can be reduced even in the vicinity of the second seat outer surface concave portion 123 . Therefore, when the vapor chamber 101 is bent, the land portion 133 can be bent more easily.
  • the second seat outer surface concave portion 123 and the bending line 108 extend in the Y direction in plan view.
  • the second seat outer surface concave portion 123 may extend in a direction that is inclined in the X direction in plan view.
  • the second seat outer surface concave portion 123 and the bending line 108 may extend in a direction inclined in the X direction in plan view.
  • the land recesses 137 formed in the respective land portions 133 may overlap the second seat outer surface recesses 123 and be aligned along the second seat outer surface recesses 123 and the bending line 108 .
  • the present invention is not limited to the above-described embodiments and modifications as they are, and can be embodied by modifying the constituent elements without departing from the gist of the invention at the implementation stage. Also, various inventions can be formed by appropriate combinations of the plurality of constituent elements disclosed in the above embodiments and modifications. Some components may be deleted from all the components shown in each of the above embodiments and modifications.

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  • Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Structure Of Printed Boards (AREA)
  • Physical Vapour Deposition (AREA)
  • Casings For Electric Apparatus (AREA)
  • Laminated Bodies (AREA)
PCT/JP2022/044874 2021-12-06 2022-12-06 ベーパーチャンバおよび電子機器 Ceased WO2023106285A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN202280080815.8A CN118401802A (zh) 2021-12-06 2022-12-06 蒸发室和电子设备
US18/717,091 US20250048591A1 (en) 2021-12-06 2022-12-06 Vapor chamber and electronic apparatus
KR1020247021958A KR20240122797A (ko) 2021-12-06 2022-12-06 베이퍼 챔버 및 전자 기기
JP2023541845A JP7344481B1 (ja) 2021-12-06 2022-12-06 ベーパーチャンバおよび電子機器
JP2023142567A JP7568017B2 (ja) 2021-12-06 2023-09-01 ベーパーチャンバおよび電子機器
JP2024172796A JP7800847B2 (ja) 2021-12-06 2024-10-01 ベーパーチャンバおよび電子機器
JP2025282471A JP2026049011A (ja) 2021-12-06 2025-12-25 ベーパーチャンバおよび電子機器

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JP2021-198039 2021-12-06
JP2021198039 2021-12-06
JP2021-204523 2021-12-16
JP2021204523 2021-12-16
JP2021-208635 2021-12-22
JP2021208635 2021-12-22
JP2022-028635 2022-02-25
JP2022028635 2022-02-25
JPPCT/JP2022/036767 2022-09-30
PCT/JP2022/036767 WO2023054692A1 (ja) 2021-09-30 2022-09-30 ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法
JPPCT/JP2022/042105 2022-11-11
PCT/JP2022/042105 WO2023085401A1 (ja) 2021-11-12 2022-11-11 ベーパーチャンバ、電子機器およびベーパーチャンバ用の本体シート

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CN118401802A (zh) * 2021-12-06 2024-07-26 大日本印刷株式会社 蒸发室和电子设备
TWI834500B (zh) * 2023-02-17 2024-03-01 邁萪科技股份有限公司 均溫板及其單件式支撐結構

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004028557A (ja) * 2002-05-08 2004-01-29 Furukawa Electric Co Ltd:The 薄型シート状ヒートパイプ
JP2009024933A (ja) * 2007-07-19 2009-02-05 Sony Corp 熱拡散装置及びその製造方法
US20170363366A1 (en) * 2016-06-15 2017-12-21 Delta Electronics, Inc. Temperature plate and heat dissipation device
US20190124791A1 (en) * 2017-10-25 2019-04-25 Getac Technology Corporation Bendable heat plate
JP2019086280A (ja) * 2017-11-06 2019-06-06 大日本印刷株式会社 ベーパーチャンバ、ベーパーチャンバ用シートおよびベーパーチャンバの製造方法
US20190354148A1 (en) * 2018-05-17 2019-11-21 Microsoft Technology Licensing, Llc Conducting heat through a hinge
WO2020184620A1 (ja) * 2019-03-11 2020-09-17 大日本印刷株式会社 ベーパーチャンバ、電子機器、及び、ベーパーチャンバ用シート
US20200326134A1 (en) * 2019-04-12 2020-10-15 Auras Technology Co., Ltd. Flexible vapor chamber
WO2021232134A1 (en) * 2020-05-18 2021-11-25 Huawei Technologies Co., Ltd Heat pipe for electronic device, and method of manufacturing therefor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6462771B2 (ja) 2017-06-01 2019-01-30 古河電気工業株式会社 平面型ヒートパイプ
JP6801700B2 (ja) 2017-11-10 2020-12-16 大日本印刷株式会社 ベーパーチャンバ、電子機器およびベーパーチャンバの製造方法
JP7011938B2 (ja) 2017-12-28 2022-01-27 新光電気工業株式会社 ループ型ヒートパイプ及びその製造方法
WO2019235552A1 (ja) 2018-06-08 2019-12-12 国立大学法人名古屋大学 装置、熱交換器、および蒸発体収容器
CN118401802A (zh) 2021-12-06 2024-07-26 大日本印刷株式会社 蒸发室和电子设备

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004028557A (ja) * 2002-05-08 2004-01-29 Furukawa Electric Co Ltd:The 薄型シート状ヒートパイプ
JP2009024933A (ja) * 2007-07-19 2009-02-05 Sony Corp 熱拡散装置及びその製造方法
US20170363366A1 (en) * 2016-06-15 2017-12-21 Delta Electronics, Inc. Temperature plate and heat dissipation device
US20190124791A1 (en) * 2017-10-25 2019-04-25 Getac Technology Corporation Bendable heat plate
JP2019086280A (ja) * 2017-11-06 2019-06-06 大日本印刷株式会社 ベーパーチャンバ、ベーパーチャンバ用シートおよびベーパーチャンバの製造方法
US20190354148A1 (en) * 2018-05-17 2019-11-21 Microsoft Technology Licensing, Llc Conducting heat through a hinge
WO2020184620A1 (ja) * 2019-03-11 2020-09-17 大日本印刷株式会社 ベーパーチャンバ、電子機器、及び、ベーパーチャンバ用シート
US20200326134A1 (en) * 2019-04-12 2020-10-15 Auras Technology Co., Ltd. Flexible vapor chamber
WO2021232134A1 (en) * 2020-05-18 2021-11-25 Huawei Technologies Co., Ltd Heat pipe for electronic device, and method of manufacturing therefor

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TW202328622A (zh) 2023-07-16
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US20250048591A1 (en) 2025-02-06

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