WO2023105849A1 - 検査方法および検査装置 - Google Patents

検査方法および検査装置 Download PDF

Info

Publication number
WO2023105849A1
WO2023105849A1 PCT/JP2022/029596 JP2022029596W WO2023105849A1 WO 2023105849 A1 WO2023105849 A1 WO 2023105849A1 JP 2022029596 W JP2022029596 W JP 2022029596W WO 2023105849 A1 WO2023105849 A1 WO 2023105849A1
Authority
WO
WIPO (PCT)
Prior art keywords
image
wavelength band
light
reflectance
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/029596
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
伸也 中嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to JP2023566087A priority Critical patent/JPWO2023105849A1/ja
Publication of WO2023105849A1 publication Critical patent/WO2023105849A1/ja
Priority to US18/677,993 priority patent/US20240320849A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
    • G06V10/141—Control of illumination
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/07—Target detection

Definitions

  • the present disclosure relates to an inspection device and an inspection method for an object to be inspected.
  • a defect detection apparatus that uses a photoelectric conversion type image sensor to detect objects (foreign matter, defects, etc.) in an object to be inspected.
  • Patent Document 1 a high-speed detector is realized by arranging a plurality of image sensors and performing simultaneous processing.
  • Patent Document 1 in order to accurately detect a target object, a plurality of images output from an image sensor are combined to generate a high-definition image.
  • the images are combined after offsetting (correcting) the positions of each of the plurality of images based on the arrangement of the image sensors.
  • the way the light hits the object to be inspected may not be constant.
  • the position of the target object will be greatly deviated in the plurality of images output from the image sensor. Therefore, by correcting the positions of the plurality of images based on the arrangement of the image sensors, it is possible that the displacement of the object cannot be corrected and the object cannot be detected.
  • the position of the object is likely to shift.
  • the purpose of the present invention is to improve the detection reproducibility and detection probability of an object in an object to be inspected.
  • an inspection method for detecting an object included in an object to be inspected by imaging it with an inspection device, the inspection device comprising: an imaging device that captures an image of the object to be inspected and outputs an image; an illumination device; a moving means; an irradiation step of irradiating an object to be inspected; a moving step in which the moving means changes the relative positions of the illumination device and the imaging device and the object to be inspected during the imaging time of 1; a determination step of extracting a plurality of images of the object included in the image output by the imaging device and combining the extracted images of the object to determine the size of the object.
  • FIG. 1 is a side view of an inspection device according to a first embodiment
  • FIG. 1 is a plan view of an inspection apparatus according to a first embodiment
  • FIG. FIG. 2 is a plan view showing the configuration of an imaging element according to the first embodiment
  • 4 is a timing chart showing imaging timing of an imaging device, irradiation timing of a lighting device, and driving timing of an actuator in the inspection apparatus according to the first embodiment
  • 4 is a flow chart for explaining the overall operation flow of the image processing apparatus according to the first embodiment
  • 4A and 4B are diagrams showing an example of an image of a sheet captured by an imaging device according to the first embodiment
  • FIG. 4A and 4B are diagrams showing an example of an image of a sheet captured by an imaging device according to the first embodiment
  • FIG. 10 is a diagram showing an example of luminance values of an extracted image according to the second embodiment
  • FIG. 10 is a diagram showing an example of luminance values of an extracted image according to the second embodiment
  • 9 is a flowchart for explaining the flow of grouping processing of the image processing apparatus according to the second embodiment
  • FIG. 10 is a diagram for explaining the process of generating an original extracted image according to the second embodiment
  • 9 is a flowchart for explaining the flow of physical property determination processing of an image processing apparatus according to the second embodiment
  • FIG. 11 is a diagram for explaining a correction image generation process of the image processing apparatus according to the second embodiment;
  • Fig. 1 shows a side view of the inspection device
  • Fig. 2 shows a plan view of the inspection device.
  • the inspection apparatus A includes an imaging device 1, an illumination device 2, rollers 3 to 5 (moving means), a rotary encoder 6, an image processing device 7, an actuator 9 (moving means).
  • a conveyor belt 8 is wound around the rollers 3-5.
  • the inspection device A inspects the sheet S (object to be inspected).
  • the sheet S is used, for example, in the field of devices such as semiconductors, electronic devices, and secondary batteries.
  • devices such as semiconductors, electronic devices, and secondary batteries.
  • the object to be inspected may not be in the form of a sheet.
  • the sheet S is wound around rollers 3 and 4 instead of the conveying belt 8 . Then, the sheet S is conveyed in the direction of arrow D by rollers 3-5.
  • the inspection device A detects an object E such as a defect or foreign matter contained in the sheet S.
  • the defects include, for example, not only defects or deficiencies in the production of the sheet S such as a short circuit or disconnection in the sheet S to be inspected, but also damage to the sheet S (for example, the sheet S contacting another member). Scratch traces caused by accident) etc. are also included.
  • This inspection apparatus determines that the sheet S contains the object when the detected object E is larger than a predetermined size.
  • the sheet S is conveyed in the direction of arrow D indicated by the solid line in FIGS. 1 and 2 while being placed on the conveying belt 8 .
  • the imaging device 1 has an imaging element 11 and images the sheet S being conveyed by the conveying belt 8 .
  • the imaging device 1 is configured as an area sensor that captures an image of the entire sheet S between the rollers 4 and 5 .
  • the imaging device 1 transmits pixel signals output from the imaging device 11 to the image processing device 7 .
  • the scanning direction of the imaging device 1 is the X direction
  • the sub-scanning direction of the imaging device 1 is the Y direction
  • the direction perpendicular to the X and Y directions is the Z direction.
  • the lighting device 2 has a light source configured by, for example, an LED, a laser, a halogen light source, etc., and irradiates the scanning area (sheet S) of the imaging device 1 with light between the rollers 4 and 5 .
  • the illumination device 2 is installed so that the light irradiation direction has an incident angle of about 10° with respect to the conveying belt 8 .
  • the imaging device 1 and the lighting device 2 are configured with a dark field optical system so that the light emitted by the lighting device 2 does not directly enter the imaging device 11 .
  • the imaging device 1 and the illumination device 2 may be configured with a bright field optical system, but are preferably configured with a dark field optical system.
  • the imaging device 1 and the lighting device 2 are provided with an actuator 9 that moves the imaging device 1 and the lighting device 2 in the X direction. Detailed operations of the actuator 9 will be described later.
  • the rollers 3 are rotated by a driving mechanism (not shown) to drive the conveying belt 8 and convey the sheet S in the arrow D direction.
  • the rotary encoder 6 detects the rotation speed of the roller 4 and detects the amount of movement of the sheet S conveyed by the conveying belt 8 .
  • the rotary encoder 6 transmits the detected movement amount of the sheet S to the image processing device 7 .
  • the image processing device 7 is, for example, a computer.
  • the image processing device 7 determines the size of the object E based on the pixel signals received from the imaging device 1 (image sensor 11). Specifically, the image processing device 7 executes image extraction processing, image correction processing, and size determination processing, which will be described later.
  • FIG. 3 is a plan view showing the configuration of the imaging device according to the first embodiment.
  • the imaging device 11 is, for example, a CMOS (Complementary MOS) sensor.
  • the image sensor 11 includes a pixel array 12 in which m pixels in the X direction and n pixels in the Y direction (508 ⁇ 508 in FIG. 3) are arranged in a grid pattern.
  • the i-th pixel 10 in the X direction and the j-th pixel 10 in the Y direction may be referred to as a pixel (Xi, Yj).
  • FIG. 4 is a timing chart showing imaging timing of the imaging device, irradiation timing of the lighting device, and driving timing of the actuator in the inspection apparatus according to the first embodiment.
  • the imaging timing of the imaging device 1, the irradiation timing of the lighting device 2, and the driving timing of the actuator 9 are set with reference to the encoder pulse.
  • One pulse of the encoder pulses in FIG. 4 is, for example, 1 ⁇ m, but is not limited to this.
  • the imaging device 1 is an area sensor
  • the pixel signal readout interval is set to be equal to or less than the frame rate.
  • the pixel signal readout interval is set to be equal to or less than the minimum scan rate.
  • the imaging device 1 is an area image sensor
  • the frame rate is 240 fps (4.17 mesc/time)
  • the conveying speed of the sheet S is 3000 mm/sec or less. That is, pixel signals are read every 12,500 encoder pulses, that is, every 12.5 mm.
  • the illumination device 2 can irradiate light multiple times in a short period of time. Specifically, the illumination device 2 irradiates light four times within one shooting time (exposure time). More specifically, the illumination device 2 emits light for the first time after a predetermined pulse (for example, 0 pulse) from the start of exposure. The lighting time at this time is 3 ⁇ sec. Also, the illumination device 2 irradiates light for the second time after a predetermined pulse (for example, 513 pulses) from the start of exposure. The lighting time at this time is 3 ⁇ sec. The illumination device 2 irradiates light for the third time after a predetermined pulse (for example, 1500 pulses) from the start of exposure.
  • a predetermined pulse for example, 1500 pulses
  • the lighting time at this time is 3 ⁇ sec. Further, the illumination device 2 irradiates light for the fourth time after a predetermined pulse (for example, 3013 pulses) from the start of exposure. The lighting time at this time is 3 ⁇ sec. In the present embodiment, the illumination device 2 emits light four times during one imaging time, but the present invention is not limited to this, and the illumination device 2 emits light a plurality of times (two times or more) during one imaging time. You can irradiate.
  • a predetermined pulse for example, 3013 pulses
  • the actuator 9 shifts the image pickup position of the sheet S (object E), so that the actuator 9 is driven after the illumination device 2 emits light and before the next light is emitted.
  • the imaging position of the target object E can be shifted in the X direction and the Y direction and imaged.
  • the object E imaged by the second light is offset by 0 ⁇ m in the X direction and 513 ⁇ m in the Y direction (hereinafter referred to as An image is generated at the position with the first offset value), and the object E imaged by the third light is offset by 13 ⁇ m in the X direction and 1500 ⁇ m in the Y direction (hereinafter referred to as the second offset value).
  • the object E imaged by the fourth light is offset by 13 ⁇ m in the X direction and 3013 ⁇ m in the Y direction (hereinafter sometimes referred to as the third offset value). image is generated.
  • FIG. 5 is a flowchart for explaining the overall operation flow of the image processing apparatus according to the first embodiment.
  • the imaging device 1 (imaging element 11) images the sheet S (object to be inspected) conveyed by the conveying belt 8 between the rollers 4 and 5, as described above. At this time, the sheet S is imaged according to the timing chart of FIG.
  • the image processing device 7 acquires (receives) pixel signals output from the imaging device 1 (step S1).
  • the image processing device 7 generates an image P based on the pixel signals acquired from the imaging device 1 (step S2). Then, the image processing device 7 executes image extraction processing, which will be described later, to generate an extracted image p from the image P (step S3).
  • the image processing device 7 determines whether or not the image P includes the extracted image p of the object E (step S4). When the image processing device 7 determines that the extracted image p of the object E is not included in the image P (No in step S4), the process ends. That is, the image processing device 7 determines that the object E is not included in the sheet S.
  • the image processing device 7 determines that the image of the object E is included in the image P (Yes in step S4), the image processing device 7 generates a corrected image pw from the extracted image p (step S5), and determines the size of the object E is determined (step S6).
  • FIG. 6 to 8 are diagrams showing examples of images of a sheet imaged by the imaging element according to the first embodiment.
  • 6 shows the area from image (x0, y0) to image (x507, y59) of image P
  • FIG. 7 shows the area from image (x0, y60) to image (x507, y180) of image P. showing.
  • FIGS. 8(a) to (h) show extracted images p1 to p8, respectively.
  • the extracted images p1 to p8 are images of the captured objects E1 to E8.
  • step S ⁇ b>2 the image processing device 7 generates an image P based on the pixel signals acquired from the image sensor 11 .
  • the image processing device 7 executes image extraction processing. Specifically, the image processing device 7 extracts an extracted image p of the object E based on the feature amount of each image (xi, yj) in the image P.
  • FIG. As this feature amount, for example, the brightness value and brightness of each image (xi, yj) in the image P can be cited.
  • the feature amount may be determined based on the feature amount of the sheet S that does not include the object E.
  • the presence or absence of the object E is determined using the feature values such as the area value of the object E, the size in the X direction, the size in the Y direction, the shape, and the total density.
  • the feature amount is the luminance value of each image (xi, yj) in the image P will be described as an example.
  • FIG. 8 shows the luminance value for each image (xi, yj) in the image P.
  • the luminance value is displayed in 256 8-bit gradations, and the minimum luminance value is 0 and the maximum luminance value is 255.
  • the luminance value is 0 when the object E does not exist on the sheet S (ground level).
  • the image processing device 7 extracts an image (xi, yj) whose luminance value is equal to or greater than the threshold. Then, the image processing device 7 treats a plurality of adjacent images (xi, yj) among the extracted images as one object E.
  • FIG. The term "adjacent image” as used herein refers to an image adjacent to one image in the X direction (horizontal direction), Y direction (vertical direction), X direction, and Y direction (diagonal direction). Specifically, for an image (xi, yj), images (xi, yj ⁇ 1) (xi ⁇ 1, yj) (xi ⁇ 1, yj ⁇ 1) are adjacent images.
  • the image processing device 7 generates an extracted image p so as to include the extracted object E.
  • the image processing device 7 when the threshold value of the luminance value is set to 20, the image processing device 7, from FIGS. Extract. Then, the image processing device 7 generates extracted images p1 to p8 so as to include the objects E1 to E8, respectively (see each drawing in FIG. 8).
  • the image processing device 7 determines that the extracted image p of the object E is included in the image P when the extracted image p is generated from the image P in step S4.
  • FIG. 9 is a flowchart for explaining the flow of correction image generation processing of the image processing apparatus according to the first embodiment.
  • the image processing device 7 When the image processing device 7 acquires the extracted images p (extracted images p1 to p8 in each diagram of FIG. 8) (step S11), it performs grouping processing of the extracted images p (step S12). Specifically, the image processing device 7 compares the coordinates of the object E included in each extracted image p, and classifies the extracted images p satisfying a predetermined condition into the same group. For example, in FIGS. 6 and 7, with the extracted image p1 as a reference, the extracted image p2 is at the position corresponding to the first offset value, the extracted image p3 is at the position corresponding to the second offset value, and the extracted image p4 is at the position corresponding to the second offset value.
  • the extracted images p1 to p4 are classified into the same group.
  • the extracted image p6 is at a position corresponding to the first offset value
  • the extracted image p7 is at a position corresponding to the second offset value
  • the extracted image p8 is at a third offset value. Therefore, the extracted images p5 to p8 are classified into the same group.
  • the illumination device 2 irradiates light four times within one exposure time. Therefore, in the image P, four extracted images p are generated for one object E.
  • the image of the object E imaged by the third light is generated at the position corresponding to the second offset value, and the image of the object E imaged by the fourth light is the third offset value. Drive to be generated at the corresponding position. Therefore, by classifying the extracted images p into groups based on the first to third offset values, it is possible to determine that the extracted images p belonging to the same group are images showing the same object E.
  • the image processing device 7 doubles the extracted images p1 to p8 in the X and Y directions. Then, the image processing device 7 synthesizes the extracted image p by superimposing the extracted images p belonging to the same group on the basis of the barycentric coordinates of the images (step S13). This synthesized extracted image p becomes the corrected image pw (step S5). More specifically, the image processing device 7 generates a corrected image of the object represented by the extracted images p1 to p4 by synthesizing the extracted images p1 to p4. Further, the image processing device 7 synthesizes the extracted images p5 to p8 to generate a corrected image of another object indicated by the extracted images p5 to p8.
  • the image processing device 7 determines the size of the object E from the generated corrected image pw (step S6).
  • the size of the object E the area, maximum length, aspect ratio, vertical width, horizontal width, Feret diameter (maximum value, minimum value, etc.), main axis length (maximum value, minimum value, etc.), etc. are used. .
  • the size determination of the object E may be performed after performing the binarization process on each image of the corrected image pw.
  • the inspection apparatus includes an imaging device 1 that captures an image of a sheet S (object to be inspected) and outputs an image P, an illumination device 2, rollers 3 to 5, and an actuator 9 ( and an image processing device 7 .
  • the lighting device 2 irradiates the sheet S with light a plurality of times during one imaging time.
  • the rollers 3 to 5 and the actuator 9 change the relative positions of the lighting device 2 and the imaging device 1 and the sheet S in one imaging time.
  • the image processing device 7 extracts images of a plurality of objects E included in the image P, and synthesizes the extracted images of the plurality of objects E to determine the size of the object E.
  • the lighting device 2 irradiates the sheet S with light a plurality of times during one imaging time, and the rollers 3 to 5 and the actuator 9 change the relative positions of the lighting device 2, the imaging device 1, and the sheet S.
  • the image P output by the imaging device 1 includes images of a plurality of objects E.
  • the image processing device 7 synthesizes images of a plurality of objects E included in the image P.
  • the lighting device 2 irradiates the sheet S with light a plurality of times, and the rollers 3 to 5 and the actuator 9 change the relative positions of the lighting device 2, the imaging device 1, and the sheet S. It is possible to suppress the positional deviation of the object E due to the way light hits it. As a result, the image of the object E can be accurately synthesized, and the size of the object in the object to be inspected can be accurately detected. Therefore, it is possible to improve the detection reproducibility and detection probability of the object (foreign matter or defect) on the object to be inspected (sheet S).
  • the actuator 9 moves the illumination device 2 and the imaging device 1 in the X direction perpendicular to the Y direction, which is the sheet S conveying direction. Thereby, the relative positions of the lighting device 2 and the imaging device 1 and the sheet S can be changed in both the X direction and the Y direction.
  • the second embodiment differs from the first embodiment in the configuration of the illumination device 2 and the operation of the image processing device.
  • symbol is attached
  • the illumination device 2 can emit light in different wavelength bands. Specifically, in the second embodiment, the illumination device 2 can emit light in the first to third wavelength bands and the reference wavelength band.
  • the first wavelength band is the red wavelength band (625-780 nm)
  • the second wavelength band is the green wavelength band (500-565 nm)
  • the third wavelength band is the blue wavelength band (450-485 nm).
  • the reference wavelength band is 400-800 nm.
  • the reference wavelength band does not necessarily need to include the entire first, second, and third wavelength bands, and may include a part of each wavelength band. That is, the reference wavelength band may overlap with the first, second, and third wavelength bands.
  • FIG. 10 is a timing chart showing the imaging timing of the imaging device, the irradiation timing of the lighting device, and the driving timing of the actuator in the inspection device according to the first embodiment. As shown in FIG. 10, exposure of the imaging element 11, readout of pixel signals, and light irradiation by the illumination device 2 are performed during one frame.
  • the illumination device 2 irradiates light of four different wavelength bands (here, first to third wavelength bands and a reference wavelength band) at different timings within one exposure time. Specifically, the illumination device 2 irradiates light in the reference wavelength band after a predetermined pulse (for example, 0 pulse) from the start of exposure. The lighting time at this time is 3 ⁇ sec. Also, the illumination device 2 emits light in the first wavelength band after a predetermined number of pulses (for example, 513 pulses) from the start of exposure. The lighting time at this time is 3 ⁇ sec. Also, the illumination device 2 irradiates light in the second wavelength band after a predetermined number of pulses (for example, 1500 pulses) from the start of exposure. The lighting time at this time is 3 ⁇ sec.
  • a predetermined pulse for example, 0 pulse
  • the lighting time at this time is 3 ⁇ sec.
  • the illumination device 2 emits light in the first wavelength band after a predetermined number of pulses (for example, 513 pulses) from the start
  • the illumination device 2 emits light in the third wavelength band after a predetermined number of pulses (for example, 3013 pulses) from the start of exposure.
  • the lighting time at this time is 3 ⁇ sec.
  • the irradiation order of light in each wavelength band shown in FIG. 10 is merely an example, and the illumination device 2 may emit light in any order in each wavelength band.
  • the illumination device 2 irradiates light in four wavelength bands at different timings during one imaging time, but the present invention is not limited to this. 2 or more) may be irradiated.
  • the actuator 9 is driven after the illumination device 2 emits light until the next light is emitted in order to shift the imaging position of the sheet S (object E).
  • the imaging position of the target object E can be shifted in the X direction and the Y direction and imaged.
  • the object E imaged with the light of the first wavelength band is offset by 0 ⁇ m in the X direction and by 513 ⁇ m in the Y direction.
  • An image is generated at a position offset by (second offset value), and the object E imaged by light in the second wavelength band is offset by 13 ⁇ m in the X direction and 1500 ⁇ m in the Y direction (third offset value).
  • An image is generated, and an image of the object E imaged with light in the third wavelength band is generated at a position offset by 13 ⁇ m in the X direction and 3013 ⁇ m in the Y direction (fourth offset value).
  • FIG. 11 is a flowchart for explaining the overall operation flow of the image processing apparatus according to the second embodiment.
  • step S4 when step S4 is Yes, the image processing device 7 executes physical property determination processing, which will be described later (step S7).
  • FIG. 12 and 13 are diagrams showing examples of images of a sheet imaged by an imaging element according to the second embodiment.
  • 14 and 15 are diagrams showing examples of luminance values of extracted images according to the second embodiment.
  • 12 shows the area from image (x0, y0) to image (x507, y59) of image P
  • FIG. 13 shows the area from image (x0, y60) to image (x507, y180) of image P. showing.
  • FIGS. 14(a)-(d) and 15(a)-(g) show the extracted images p11-p21 of FIGS. 12 and 13, respectively.
  • the objects shown in the extracted images p11 to p21 are assumed to be objects E11 to E21, respectively.
  • the illumination device 2 irradiates light in the first to third wavelength bands and the reference wavelength band at different timings within one exposure time. Therefore, in the image P, the number of target objects ⁇ 4 extracted images will be generated. However, only 11 extracted images are formed in FIGS. It is considered that this is because the images of different objects E (extracted image p16 in FIG. 12) are overlapped because the two objects E are in the vicinity of the same X coordinate. Therefore, in the second embodiment, a grouping process (FIG. 16) of extracted images (objects) is performed, which is different from that in the first embodiment. Thereby, it is possible to extract the target object E without omission.
  • FIG. 16 is a flowchart showing grouping processing according to the second embodiment.
  • the image processing device 7 performs a binarization process on the extracted images p11 to p21 using a predetermined feature amount as a threshold value (for example, 20), extracts the objects E11 to E21 from each extracted image, and extracts them.
  • a predetermined feature amount for example, 20
  • An object is registered in the list (step S401).
  • the feature amount includes a brightness value, the position of the object, the fillet diameter, and the like. In this embodiment, an example in which the feature amount is a luminance value will be described.
  • the image processing device 7 extracts the object Ea with the smallest Y coordinate from among the objects E registered in the list (step S402). Then, the image processing device 7 determines whether or not the object Eb exists at the position of the first offset value based on the X and Y coordinates of the object Ea (step S403).
  • the first offset value refers to a distance caused by a difference in the timing at which the illumination device 2 emits light in the reference wavelength band and light in the first wavelength band.
  • step S404a When the image processing device 7 determines that the object Eb exists at the position of the first offset value (Yes in step S403), it extracts the object Eb (step S404a). On the other hand, when the image processing device 7 determines that the object Eb does not exist at the position of the first offset (No in step S403), it reads out the initial list, and based on the X and Y coordinates of the object Ea, An object Eb present at the position of the first offset value is extracted (step S404a). As will be described later in detail, the extracted object is deleted from the list. Therefore, when objects overlap (for example, object E16 in FIG. 12), the object may already be deleted from the list. Here, in order to extract all the objects E, the objects Eb are extracted from the initial list. For the same reason, substantially the same processing as in step S404a is performed in steps S406b and S408b described below.
  • the image processing device 7 determines whether or not the object Ec exists at the position of the second offset value with reference to the X and Y coordinates of the object Ea (step S405).
  • the second offset value refers to a distance caused by the difference in the timing at which the illumination device 2 irradiates the light in the reference wavelength band and the light in the second wavelength band and the driving of the actuator 9 .
  • the image processing device 7 extracts the object Ec (step S406a).
  • the image processing device 7 determines that the object Ec does not exist at the position of the second offset (No in step S405), it reads out the initial list, and based on the X and Y coordinates of the object Ea, An object Ec present at the position of the second offset value is extracted (step S406a).
  • the image processing device 7 determines whether or not the object Ed exists at the position of the third offset value with reference to the X and Y coordinates of the object Ea (step S407).
  • the third offset value refers to a distance caused by the difference in the timing at which the illumination device 2 irradiates the light in the reference wavelength band and the light in the third wavelength band and the driving of the actuator 9 .
  • the image processing device 7 extracts the object Ed (step S408a).
  • the image processing device 7 determines that the object Ed does not exist at the position of the third offset (No in step S407), it reads out the initial list, and based on the X and Y coordinates of the object Ea, The object Ed existing at the position of the third offset value is extracted (step S408a).
  • the image processing device 7 classifies the extracted objects Ea to Ed into the same group (step S409). Then, the image processing device 7 deletes the extracted objects Ea to Ed from the list (step S410).
  • step S410 the image processing device 7 determines whether any objects remain in the list (step S411).
  • the process returns to step S401 and performs the grouping process again.
  • the process ends. That is, the image processing device 7 performs grouping processing until all the objects are classified. By this grouping, objects E classified into the same group indicate the same object E.
  • step S404b when the initial list is read and the object Eb does not exist at the position of the first offset value with respect to the X and Y coordinates of the object Ea, the object Ea is in the reference wavelength band. It is considered that the light is not generated by irradiating the light of the first to third wavelength bands, but is generated by irradiating the light of any one of the first to third wavelength bands.
  • the image processing device 7 extracts the objects located at the positions of the first to third offset values from the initial list based on the X and Y coordinates of the object Ea.
  • the extracted target object is set as the target object Ea, and the processes after step S403 are performed again.
  • the first to third offset values are set to different values. Therefore, only one true object Ea is extracted.
  • the offset position for performing this grouping process may have a certain width.
  • objects E11 to E21 are registered in the initial list, and objects E15, E16, E18, and E20 are classified into the same group by the first grouping process.
  • the objects E11 to E14 are classified into the same group by the second grouping process.
  • the object E17 is determined to be the object Ea.
  • neither of the objects E19 and E21 remaining in the list exists at the position of the first offset value when the object E17 is used as a reference. Therefore, the image processing device 7 cannot extract the object Eb. Therefore, the image processing device 7 extracts the object E at the positions of the first to third offsets with the object E17 as a reference.
  • the image processing device 7 determines the object E16 as the true object Ea. As a result, the image processing device 7 performs the processing from step S403 onwards with the object E16 as the object Ea, and classifies the objects E16, E17, E19, and E21 into the same group.
  • the object E (extracted image p) classified into the same group has the smallest Y coordinate because the illumination device 2 irradiates light in the order of the light in the first to third reference wavelength bands.
  • the extracted image p is an extracted image generated by irradiating light in the reference wavelength band (hereinafter referred to as “reference image”), and the extracted image p with the second smallest Y coordinate is irradiated with light in the first wavelength band.
  • An extracted image generated by irradiating light in the third wavelength band hereinafter referred to as a "second image”
  • the extracted image p with the largest Y coordinate can be determined as an extracted image generated by irradiating light in the third wavelength band (hereinafter referred to as "third image").
  • the reference images are extracted images p11, p15 and p16
  • the first images are extracted images p12, p16 and p17
  • the second images are extracted images p13, p18 and p19
  • the third image is the extracted images p14, p20 and p21.
  • the image processing device 7 performs processing for generating an extracted image p of the original object E.
  • FIG. 5 the processing after step S4 is performed using the extracted image p generated by this processing.
  • One of the processes for generating the original extracted image is, for example, when the reference image overlaps another extracted image p, by synthesizing the first to third images belonging to the same group, the original A reference image can be generated.
  • the extracted image p11 can be generated by synthesizing the extracted images p12 to p14.
  • the extracted image can be generated by subtracting the extracted image that does not have.
  • the extracted image p12 can be generated by subtracting the feature amounts of the extracted images p13 and p14 from the feature amount of the extracted image p11.
  • the extracted Images can be generated.
  • the image ⁇ is the image with the largest feature amount among the reference images
  • the image ⁇ is the image with the largest feature amount among the first images
  • the image ⁇ is the image with the largest feature amount among the second images.
  • An image with a large feature amount is an image ⁇
  • an image with the largest feature amount among the third images is an image ⁇ .
  • the reflectance R of the object E in the first wavelength band is (luminance value of image ⁇ )/(luminance value of image ⁇ ).
  • the reflectance R of the object E in the second wavelength band is (luminance value of image ⁇ )/(luminance value of image ⁇ ).
  • the reflectance R of the object E in the third wavelength band is (luminance value of image ⁇ )/(luminance value of image ⁇ ).
  • the extracted image p16 is an image of two objects E overlapping. Therefore, the extracted image p16 cannot be used as the first image of the object E15.
  • the reflectance R22 of the object E15 (E18 and E20) in the second wavelength band is 150/255 ⁇ 0. 59, the reflectance R22 is 59%.
  • the reflectance R23 of the object E15 in the third wavelength band is 204/255 ⁇ 0.8, so the reflectance R23 is 80%.
  • the reflectance R21 of the object E15 in the first wavelength band can be determined to be approximately 50%.
  • a reference image of the object E17 can be generated.
  • the central portion of the image has a higher luminance value than the peripheral portion of the image, and the extraction image p16b cannot be correctly estimated. This is probably because the highest luminance value exceeded 255 in the extracted image p16 as a result of the overlapping of the two objects E16 and E17. Therefore, the reference image of the object E17 can be estimated using the extracted image p18 that belongs to the same group as the object E17 and has no overlap.
  • the extraction image p16c of the object E17 in the reference wavelength band (Fig. 17(c)) can be generated.
  • step S7 The physical property determination process (step S7) of the image processing apparatus 7 according to the second embodiment will be described with reference to FIGS. 18 and 19.
  • FIG. FIG. 18 is a flowchart for explaining the flow of physical property determination processing of the image processing apparatus according to the second embodiment.
  • the image processing device 7 acquires the extracted images p (the extracted images p11 to p21 and the estimated extracted images in FIG. 18) (step S31), the image processing device 7 acquires the reference image (the Y coordinate is the most Among the images included in the small extracted image p), an image ⁇ having the highest feature amount is extracted (step S32).
  • the image processing device 7 extracts the image ⁇ having the highest feature amount among the images included in the first image (the extracted image p having the second smallest Y coordinate) among the extracted images p belonging to the same group (step S33 ).
  • the image processing device 7 extracts the image ⁇ having the highest feature amount among the images included in the second image (extracted image p with the third smallest Y coordinate) among the extracted images p belonging to the same group (step S34 ).
  • the image processing device 7 extracts the image ⁇ having the highest feature amount among the images included in the third image (the extracted image p having the largest Y coordinate) among the extracted images p belonging to the same group (step S35).
  • the extracted images p11 to p14 are classified into the same group.
  • the image ⁇ 4 of the extracted image p11 corresponds to the image ⁇
  • the image ⁇ 4 of the extracted image p12 corresponds to the image ⁇
  • the image ⁇ 4 of the extracted image p13 corresponds to the image ⁇
  • the image ⁇ 4 of the extracted image p14 corresponds to the image ⁇ .
  • reflectances R31 to R33 of the object E11 (E12 to E14) in the first, second, and third wavelength bands are calculated based on the luminance values of the image ⁇ and the images ⁇ , ⁇ , and ⁇ . are obtained (step S36).
  • the reflectance R31 can be obtained by (luminance value of image ⁇ )/(luminance value of image ⁇ ).
  • the reflectance R32 can be obtained by (luminance value of image ⁇ )/(luminance value of image ⁇ ).
  • the reflectance R33 can be obtained by (luminance value of image ⁇ )/(luminance value of image ⁇ ).
  • the reflectance R31 of the object E11 133/255 ⁇ 0.52, and the reflectance R31 of the object E11 is 55%.
  • the reflectance R32 of the object E1 is 155/255 ⁇ 0.60, and the reflectance R32 of the object E11 is 60%.
  • the reflectance R33 of the object E11 is 148/255 ⁇ 0.58, and the reflectance R33 of the object E11 is 58%.
  • the reflectance R can be obtained for each of the objects E15 and E17.
  • step S37 the reflectance is plotted on a graph (step S37).
  • the obtained reflectance R in each wavelength band is plotted on a graph with the wavelength on the X axis and the reflectance R on the Y axis.
  • the reflectance R in each wavelength band is plotted as the median value of the wavelength band (see FIG. 19).
  • the plotted reflectance and the spectral reflectance curve are compared, the closest spectral reflectance curve is selected from the correlation, and the physical properties of the object E are determined based on the spectral reflectance curve (step S38).
  • the reflectance plot for object E11 (E12-E14) best approximates the spectral reflectance curve for Fe. Therefore, the image processing device 7 determines that the object E11 is Fe.
  • the reflectance plot for object E15 (E16, E18, E20) best approximates the spectral reflectance curve for Al. Therefore, the image processing device 7 determines that the object E15 is Al.
  • a plot of reflectance R for object E17 (E16, E19, E21) best approximates the spectral reflectance curve for Cu. Therefore, the image processing device 7 determines that the object E17 is Cu.
  • step S6 the size determination processing (step S6) of the object E of the image processing apparatus according to the second embodiment will be described.
  • the objects E11 to E14 are the same object, and the extracted images p11 to p14 are the same object captured by light of different wavelength bands.
  • the image can be corrected to have a luminance value of about
  • each extracted image p12 is multiplied by 255/140
  • each extracted image p13 is multiplied by 255/155
  • each extracted image p14 is multiplied by 255/155.
  • the extracted images p12 to p14 are corrected to the extracted images p12' to p14' (see FIGS. 20(a) to (c)).
  • the image processing device 7 generates a corrected image pw using the extracted image p11 and the corrected extracted images p12' to p14'. Then, the image processing device 7 determines the size of the object E.
  • FIG. 20(a) to (c) The image processing device 7 generates a corrected image pw using the extracted image p11 and the corrected extracted images p12' to p14'. Then, the image processing device 7 determines the size of the object E.
  • the inspection apparatus includes an imaging device 1 that captures an image of a sheet S (object to be inspected) and outputs an image P, an illumination device 2, rollers 3 to 5, and an actuator 9 ( and an image processing device 7 .
  • the illumination device 2 includes light in a first wavelength band, light in a second wavelength band, light in a third wavelength band, and a reference wavelength band in which the wavelength bands overlap with the first, second, and third wavelength bands. of light can be irradiated.
  • the illumination device irradiates the sheet S with the light in the first wavelength band, the light in the second wavelength band, the light in the third wavelength band, and the light in the reference wavelength band at different timings in one imaging time.
  • the image processing device 7 calculates the first reflectance, which is the reflectance in the first wavelength band, and the second reflectance, which is the reflectance in the second wavelength band, of the object E. and a third reflectance, which is the reflectance in the third wavelength band, and determine the physical properties of the object E based on the first reflectance, the second reflectance, and the third reflectance.
  • the lighting device 2 irradiates the sheet S with the light in the first wavelength band, the light in the second wavelength band, and the light in the reference wavelength band at different timings during one imaging time, thereby producing an image.
  • the P is an extracted image p of the object E by light in the first wavelength band, an extracted image p of the object E by light in the second wavelength band, and an extracted image p of the object E by light in the third wavelength band.
  • an extracted image p of the object E is formed by light in the fundamental wavelength band. Since the reflectances R31, R32, and R33 of the object E in the first, second, and third wavelength bands can be obtained based on these four extracted images p, the physical properties of the object E can be determined. can.
  • the image P includes an extracted image p of the object E using light in the first wavelength band, an extracted image p of the object E using light in the second wavelength band, and an extracted image p of the object E using light in the third wavelength band.
  • the image p and the extracted image p of the object E using light in the basic wavelength band are included, it is not necessary to photograph the sheet S for each wavelength band, and an increase in imaging time can be suppressed. Therefore, it is possible to determine the physical properties of the object while suppressing an increase in imaging time.
  • the image processing device 7 also determines the physical properties of the object E by comparing the reflectances R31, R32, and R33 with spectral reflectance data representing the spectral reflectances of a plurality of substances. Thereby, the physical properties of the object E can be determined more accurately.
  • the image processing device 7 performs a first image, which is an extracted image p of the object E by the light of the first wavelength band, and an image of the object E by the light of the second wavelength band. Any two images of the second image that is the extracted image p, the third image that is the extracted image p of the object E in the third wavelength band, and the reference image that is the extracted image p of the object E in the reference wavelength band to generate the remaining image.
  • any one of the first image, the second image, the third image, and the reference image overlaps the extracted image p of the other object E.
  • the image processing device 7 combines the feature amounts of the first image, the second image, and the third image to generate a reference image. Thereby, even if the reference image overlaps another extracted image p in the image P, the reference image can be generated from the first image, the second image, and the third image.
  • the image processing device 7 also subtracts the feature amount of the first image from the feature amount of the reference image to generate a third image. As a result, even if the first image overlaps another extracted image p in the image P, the first image can be generated from the reference image and the second image.
  • the image processing device 7 classifies the first image, the second image, and the reference image for each of the plurality of objects E. Further, the image processing device 7 calculates the first reflectance, the second reflectance and the third reflectance based on the first image, the second image, the third image and the reference image classified into the same group. Accordingly, when a plurality of objects E are present on the sheet S, the physical properties of each object E can be determined.
  • the imaging device 1 and the lighting device 2 are composed of dark-field optical systems, but may be composed of bright-field optical systems. Further, the imaging device 1 is configured as a line sensor, but may be configured as an area sensor. Also, the image processing device 7 may generate a moving image or a still image from the pixel signals output from the imaging device 11 .
  • the arrangement of the pixels 10 arranged in the imaging element 11 is not limited to the arrangement described above. Further, the number of pixels of the imaging device 11 is not limited to the number described above.
  • rollers 3 to 5 and the actuator 9 have been described as an example of the moving means. Anything can be used as long as the position can be changed.
  • the inspection apparatus of the present disclosure can be used to inspect foreign matter and defects contained in members used in semiconductors, electronic devices, secondary batteries, and the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Evolutionary Computation (AREA)
  • Computing Systems (AREA)
  • Databases & Information Systems (AREA)
  • Artificial Intelligence (AREA)
  • Geometry (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
PCT/JP2022/029596 2021-12-07 2022-08-02 検査方法および検査装置 Ceased WO2023105849A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023566087A JPWO2023105849A1 (https=) 2021-12-07 2022-08-02
US18/677,993 US20240320849A1 (en) 2021-12-07 2024-05-30 Inspecting method and inspecting device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021198581 2021-12-07
JP2021-198581 2021-12-07

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/677,993 Continuation US20240320849A1 (en) 2021-12-07 2024-05-30 Inspecting method and inspecting device

Publications (1)

Publication Number Publication Date
WO2023105849A1 true WO2023105849A1 (ja) 2023-06-15

Family

ID=86730061

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/029596 Ceased WO2023105849A1 (ja) 2021-12-07 2022-08-02 検査方法および検査装置

Country Status (3)

Country Link
US (1) US20240320849A1 (https=)
JP (1) JPWO2023105849A1 (https=)
WO (1) WO2023105849A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4610631A1 (en) * 2024-02-29 2025-09-03 Samsung Sdi Co., Ltd. Object overlap detection apparatus and method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250097416A (ko) * 2023-12-21 2025-06-30 삼성에스디아이 주식회사 배터리 진단 장치 및 방법, 컴퓨터 프로그램

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09222361A (ja) * 1995-12-12 1997-08-26 Omron Corp 物体の色等の検出装置及びそれを用いた検査装置
JP2012154628A (ja) * 2011-01-21 2012-08-16 Olympus Corp 顕微鏡システム、情報処理装置、及び情報処理プログラム
JP2013186075A (ja) * 2012-03-09 2013-09-19 Hitachi Information & Control Solutions Ltd 異物検査装置、及び、その異物検査方法
JP2014020910A (ja) * 2012-07-18 2014-02-03 Omron Corp 欠陥検査方法及び欠陥検査装置
WO2017169242A1 (ja) * 2016-03-28 2017-10-05 セーレン株式会社 欠陥検査装置、及び欠陥検査方法
JP2018189561A (ja) * 2017-05-09 2018-11-29 株式会社キーエンス 画像検査装置
JP2018189560A (ja) * 2017-05-09 2018-11-29 株式会社キーエンス 画像検査装置
JP2018204999A (ja) * 2017-05-31 2018-12-27 株式会社キーエンス 画像検査装置
JP2019184589A (ja) * 2018-03-30 2019-10-24 セーレン株式会社 欠陥検査装置、及び欠陥検査方法
CN110596130A (zh) * 2018-05-25 2019-12-20 上海翌视信息技术有限公司 一种具有辅助照明的工业检测装置
WO2022030083A1 (ja) * 2020-08-06 2022-02-10 Ｊｆｅスチール株式会社 金属帯の表面検査装置、表面検査方法、及び製造方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09222361A (ja) * 1995-12-12 1997-08-26 Omron Corp 物体の色等の検出装置及びそれを用いた検査装置
JP2012154628A (ja) * 2011-01-21 2012-08-16 Olympus Corp 顕微鏡システム、情報処理装置、及び情報処理プログラム
JP2013186075A (ja) * 2012-03-09 2013-09-19 Hitachi Information & Control Solutions Ltd 異物検査装置、及び、その異物検査方法
JP2014020910A (ja) * 2012-07-18 2014-02-03 Omron Corp 欠陥検査方法及び欠陥検査装置
WO2017169242A1 (ja) * 2016-03-28 2017-10-05 セーレン株式会社 欠陥検査装置、及び欠陥検査方法
JP2018189561A (ja) * 2017-05-09 2018-11-29 株式会社キーエンス 画像検査装置
JP2018189560A (ja) * 2017-05-09 2018-11-29 株式会社キーエンス 画像検査装置
JP2018204999A (ja) * 2017-05-31 2018-12-27 株式会社キーエンス 画像検査装置
JP2019184589A (ja) * 2018-03-30 2019-10-24 セーレン株式会社 欠陥検査装置、及び欠陥検査方法
CN110596130A (zh) * 2018-05-25 2019-12-20 上海翌视信息技术有限公司 一种具有辅助照明的工业检测装置
WO2022030083A1 (ja) * 2020-08-06 2022-02-10 Ｊｆｅスチール株式会社 金属帯の表面検査装置、表面検査方法、及び製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4610631A1 (en) * 2024-02-29 2025-09-03 Samsung Sdi Co., Ltd. Object overlap detection apparatus and method

Also Published As

Publication number Publication date
US20240320849A1 (en) 2024-09-26
JPWO2023105849A1 (https=) 2023-06-15

Similar Documents

Publication Publication Date Title
US20240320849A1 (en) Inspecting method and inspecting device
JP3397101B2 (ja) 欠陥検査方法および装置
JP6040930B2 (ja) 表面欠陥検出方法及び表面欠陥検出装置
JP7724465B2 (ja) 検出方法および検出装置
KR20170107952A (ko) 광학식 외관 검사 장치 및 이를 이용한 광학식 외관 검사 시스템
JP2015143656A (ja) 検査装置および検査方法
JP6461555B2 (ja) バンプ検査装置
JP2010117322A (ja) 表面疵検査装置、表面疵検査方法及びプログラム
JPWO2013175703A1 (ja) 表示装置の検査方法、および表示装置の検査装置
JP2016224069A (ja) 表面欠陥検出方法及び表面欠陥検出装置
KR20240067222A (ko) 시트 형상물의 요철 측정 장치, 시트 형상물의 요철 측정 방법
JP2007040909A (ja) 欠陥検査装置及び欠陥検査方法
JP2010078485A (ja) 印刷物の検査方法
JP2012027810A (ja) 機能性検査装置
JP7649952B2 (ja) 検査方法および検査装置
JP7607245B2 (ja) 検査方法および検査装置
JP4822468B2 (ja) 欠陥検査装置、欠陥検査方法、及びパターン基板の製造方法
JP2004138417A (ja) 鋼板の疵検査方法およびその装置
JP2009058382A (ja) 多重スキャンによる画像取得方法、画像取得装置および試料検査装置
JP2015059854A (ja) 欠陥検査方法及び欠陥検査装置
TWI471551B (zh) 用以高速偵測電子零件中微小反射率變化之方法及設備
JP2013246749A (ja) 管の結束内本数計測方法および装置
CN109425617A (zh) 光学检测系统及图像处理方法
JP2005274325A (ja) 金属帯の光学式欠陥検査方法
CN113533343A (zh) 一种基于tdi线阵相机的检测方法及装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22903785

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2023566087

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22903785

Country of ref document: EP

Kind code of ref document: A1