WO2023095391A1 - 半導体素子 - Google Patents

半導体素子 Download PDF

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Publication number
WO2023095391A1
WO2023095391A1 PCT/JP2022/030645 JP2022030645W WO2023095391A1 WO 2023095391 A1 WO2023095391 A1 WO 2023095391A1 JP 2022030645 W JP2022030645 W JP 2022030645W WO 2023095391 A1 WO2023095391 A1 WO 2023095391A1
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layer
semiconductor device
semiconductor layer
semiconductor
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English (en)
French (fr)
Japanese (ja)
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浅井光夫
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Kao Corp
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Kao Corp
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Priority to US18/714,026 priority Critical patent/US20250024692A1/en
Priority to EP22898176.7A priority patent/EP4443520A4/en
Priority to CN202280078920.8A priority patent/CN118355508A/zh
Priority to KR1020247020507A priority patent/KR20240110845A/ko
Priority to TW111145429A priority patent/TW202339286A/zh
Publication of WO2023095391A1 publication Critical patent/WO2023095391A1/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • C01B32/174—Derivatisation; Solubilisation; Dispersion in solvents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80—Constructional details
    • H10K10/88—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221—Carbon nanotubes

Definitions

  • the present disclosure relates to a semiconductor device, a method for manufacturing the semiconductor device, and the like.
  • Carbon nanotubes have high field-effect mobility and high chemical stability.
  • CNT can be dispersed in a solution, it is a material that can be applied to simple processes, and can be coated or deposited on various substrates. Therefore, CNTs are considered as a candidate material for forming a semiconductor layer, and semiconductor elements using CNTs are being actively studied. Specifically, research on a CNT field effect transistor (CNT-FET) using CNT as a channel is vigorously conducted.
  • CNT-FET CNT field effect transistor
  • Patent Document 1 a CNT ink is dropped in a channel layer formation region between a source electrode and a drain electrode, and the ink is dried to form a CNT between the source electrode and the drain electrode. Forming a channel layer is disclosed.
  • Patent Document 2 discloses that a dispersion solution in which CNT bundles are dispersed in an organic solvent is dropped between a source electrode and a drain electrode, and the dropped dispersion solution is heated to form a channel portion.
  • Patent Document 3 includes a step of forming a coating film by applying a CNT dispersion containing a polysaccharide, arabinogalactan, or gum arabic as a polymer dispersant, and drying the coating film to form a semiconductor layer.
  • a method for manufacturing a field effect transistor is disclosed.
  • the coated film, that is, the semiconductor layer that has undergone a drying process is subjected to a cleaning process in order to improve the on/off ratio. be.
  • semiconductor elements greatly affects the performance of the devices in which they are used, so semiconductor elements are required to have higher performance. Specifically, they are required to have smaller hysteresis.
  • Patent Documents 1 to 3 operate with the channel layer or the semiconductor layer exposed to the atmosphere, and therefore have a problem of large hysteresis.
  • the hysteresis is greatly reduced by sealing the semiconductor device with PMMA.
  • the semiconductor element disclosed in Non-Patent Document 1 succeeds in reducing hysteresis by sealing the semiconductor layer with a fluorine-based resin.
  • the on/off ratio of the semiconductor element deteriorates to about 10 4 , which is insufficient for practical use.
  • an attempt to reduce the hysteresis results in a worse on/off ratio. Conventionally, there was a trade-off between a small hysteresis and a large on/off ratio.
  • the present disclosure provides a semiconductor device using CNTs with small hysteresis and a large on/off ratio, and a method for manufacturing the same.
  • a CNT is a thin cylinder formed by rolling a graphene sheet into a cylinder.
  • the network structure of CNTs is a structure in which adjacent CNTs are entangled with each other and are connected in a mesh shape over a wide range.
  • the CNT density in the thickness direction of the network structure was high, and, for example, as shown in FIG.
  • the CNT network structure is a multi-layered structure in which a plurality of “substantially single-layer CNT films” are stacked, the CNTs located relatively far from the gate electrode Not enough voltage on the gate. Therefore, it is presumed that the off current does not decrease sufficiently, and as a result, the on/off ratio deteriorates (becomes small).
  • the semiconductor layer it is considered effective from the viewpoint of hysteresis reduction to cover the semiconductor layer with a sealing layer in order to limit the exposure of the semiconductor layer including the CNT network structure to the atmosphere.
  • the material of the sealing layer penetrates between the layers during the manufacturing process. Therefore, it is presumed that the gate voltage is less likely to be applied to the CNTs located relatively far from the gate electrode, and as a result, the on/off ratio is further deteriorated.
  • the substantially single-layer CNT film preferably has a CNT network structure in which two CNTs 50 intersect each other and are repeatedly connected in a planar direction in a network structure. It is a network structure of CNT.
  • the substantially single-layer CNT film preferably does not substantially have a portion in which three or more CNTs are stacked in the thickness direction (the direction orthogonal to the surface of the semiconductor layer 5), more preferably substantially Not present, more preferably not present. It can be confirmed by cross-sectional observation using an atomic force microscope (AFM) that the semiconductor layer is substantially a single-layer CNT film.
  • AFM atomic force microscope
  • the semiconductor device of the present disclosure is, in one aspect, a CNT-field effect transistor (CNT-FET), preferably a p-type CNT field effect transistor.
  • a semiconductor element 1 includes a gate electrode 2 , a source electrode 3 , a drain electrode 4 and a semiconductor layer 5 .
  • a gate insulating layer 6 is arranged between the semiconductor layer 5 and the gate electrode 2 , and the gate insulating layer 6 insulates the semiconductor layer 5 and the gate electrode 2 .
  • the source electrode 3 and the drain electrode 4 are formed on the surface of the semiconductor layer 5 opposite to the surface of the semiconductor layer 5 facing the gate insulating layer 6 with a predetermined gap (channel length) therebetween.
  • the semiconductor layer 5 includes a CNT network structure that is easy to manufacture and allows a large amount of current to flow.
  • the semiconductor layer 5 is composed of a CNT network structure.
  • a network structure refers to a structure in which the CNTs in the semiconductor layer are not oriented in a specific direction, and one CNT preferably intersects five or more other CNTs.
  • CNTs are randomly oriented in two-dimensional directions, and are scattered in all directions without being aligned in one direction. Since CNTs have such a network structure, a large electric current can flow through the semiconductor layer, and anisotropy in conductivity does not appear because they are not oriented in a specific direction.
  • a single CNT does not connect the source electrode and the drain electrode, but multiple CNTs form a conductive path between the source electrode and the drain electrode, so a small amount of metallic CNT is mixed. Even in this case, a good on/off ratio can be obtained without short-circuiting the source electrode and the drain electrode.
  • the CNT network structure is substantially a single-layer CNT film.
  • the average film thickness of the semiconductor layer 5 is 5 nm or less, preferably 4 nm or less, more preferably 3 nm or less, from the viewpoint of reducing hysteresis and improving the on/off ratio.
  • the average film thickness of the semiconductor layer 5 is preferably 0.1 nm or more, more preferably 0.3 nm or more, from the viewpoint of ensuring a sufficient amount of current.
  • the average film thickness of the semiconductor layer 5 can be measured with an atomic force microscope (AFM).
  • the CNTs are preferably in a non-aggregated state and in a non-bundled state.
  • the bundled state is a state in which a plurality of CNTs are attached to each other and bundled.
  • the gate voltage is less likely to be applied, as in the case of using multi-layered CNTs. and the on/off ratio deteriorates.
  • 10% or more of the length of one CNT overlaps with another CNT it can be said to be in a bundle state. Since the diameter of CNTs is about 1 to 2 nm, if the average film thickness of the semiconductor layer is 5 nm or less, the semiconductor layer will be substantially free of bundles (that is, in a non-bundle state).
  • the density of the carbon nanotube network is preferably 100/ ⁇ m 2 or more from the viewpoint of obtaining a sufficient drain current. Moreover, if the density is too high, a conductive path is formed between the source-drain electrodes by the metal-type CNTs that are mixed in a minute amount, and these are short-circuited, resulting in a decrease in the on/off ratio.
  • the density is preferably 8000 lines/ ⁇ m 2 or less from the viewpoint of suppressing a decrease in the on/off ratio.
  • the CNTs forming the semiconductor layer 5 are single-walled carbon nanotubes (SWCNTs) in which a graphene sheet is wound in one layer, SWCNTs and double-walled carbon nanotubes (DWCNTs) in two layers, or three or more layers. It may be a mixture with multi-walled carbon nanotubes (MWCNT), but among these, from the viewpoint of reducing leakage current and ensuring a sufficient on/off ratio, it is preferable to consist substantially only of SWCNT. is preferred, and it is more preferred to be composed only of SWCNTs. These CNTs can be identified by known means such as Raman spectroscopy.
  • the content of semiconducting CNTs in the CNTs constituting the semiconductor layer 5 is preferably 70% by mass or more, more preferably 80% by mass or more, and still more preferably 90% by mass or more. More preferably, it is 95% by mass or more.
  • the average length of the SWCNTs is preferably 0.1 ⁇ m or more, more preferably 0.3 ⁇ m or more, still more preferably 0.5 ⁇ m or more, from the viewpoint of reducing the number of CNT intersections to ensure sufficient mobility, and From the viewpoint of reducing leakage current caused by mixed metallic CNTs and ensuring a sufficient on/off ratio, it is preferably shorter than the distance (channel length) between the source electrode and the drain electrode of the semiconductor element, more preferably the channel length. , preferably less than half the channel length. For example, it is preferably 100 ⁇ m or less, more preferably 50 ⁇ m or less, even more preferably 20 ⁇ m or less, and even more preferably 10 ⁇ m or less.
  • the average length of SWCNTs can be calculated, for example, by measuring the lengths of 10 or more CNTs from an image obtained using a transmission electron microscope and averaging them.
  • the unit of the SP value is (cal/cm 3 ) 1/2 .
  • ⁇ [ ⁇ E coh / ⁇ V] 1/2 (1)
  • ⁇ E coh indicates cohesive energy and ⁇ V indicates molar molecular volume.
  • the dielectric constant of the material forming the sealing layer 8 is a value measured by the method described in Examples.
  • the material of the sealing layer 8 is preferably an electrically inactive compound that does not dope the semiconductor layer with electrons or holes.
  • a hydrophobic polymer is preferable.
  • an acrylic resin is preferably used from the viewpoint that it does not cause a side reaction with SWCNT during sealing and does not deteriorate the performance of the semiconductor element.
  • styrene-based resins vinyl-based resins, olefin-based resins and fluorine-based resins.
  • acrylic resins include polymethyl methacrylate (PMMA), polybutyl methacrylate, and polycyclohexyl methacrylate
  • styrene resins include polystyrene (P-St), acrylonitrile-styrene copolymer (AS), and acrylonitrile-butadiene.
  • ABS - Styrene copolymer
  • vinyl resins such as polyvinyl acetate, vinyl chloride resin (PVC), polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone (PVP), etc.
  • olefin resins polyethylene, polypropylene, cycloolefin polymer (COP), cycloolefin copolymer (COC), and the like.
  • fluorine-based resins include commercially available products such as CYTOP (registered trademark) CTL-809A (manufactured by AGC).
  • the material of the sealing layer 8 may be one of these resin materials or a combination of two or more of them.
  • the sealing layer 8 is made of polyvinyl alcohol (PVA: SP value 14.6), polyvinylpyrrolidone (PVP: SP value 13.4), vinyl chloride resin (PVC: SP value 11.0). , polystyrene (P-St: SP value 10.5), polymethyl methacrylate (PMMA: SP value 9.9), and CYTOP (registered trademark) CTL-809A (SP value 8.7, manufactured by AGC) One or more selected polymers are preferred.
  • the average thickness of the sealing layer 8 in the region (channel region) between the source electrode 3 and the drain electrode 4 is sufficient for sufficient moisture.
  • the thickness is preferably 200 nm or more, more preferably 500 nm or more, and still more preferably 1000 nm or more.
  • the average thickness of the sealing layer it is preferably 1 mm or less.
  • the average thickness of sealing layer 8 can be measured by an atomic force microscope (AFM) or a stylus profilometer.
  • the source electrode 3 and the drain electrode 4 are electrically connected by the CNT network structure of the semiconductor layer 5 functioning as a channel.
  • the material of the source electrode 3 and the drain electrode 4 is not particularly limited as long as it has conductivity.
  • the source electrode 3 and the drain electrode 4 may have a multi-layer structure with two or more kinds of metals. Methods for forming these electrodes include conventionally known methods such as vacuum deposition, electron beam, sputtering, plating, CVD, ion plating coating, inkjet, and printing, depending on the material.
  • the channel length (L) and channel width (W) may be conventionally known dimensions, and the channel length (L) is, for example, 10 ⁇ m or more and 1000 ⁇ m or less, and the channel width (W) is, for example, 10 ⁇ m or more and 10000 ⁇ m or less.
  • the present disclosure is not limited thereto.
  • a semiconductor element 1 is a so-called bottom-gate semiconductor element, in which a silicon substrate functions as a gate electrode 2, and a thermal oxide film SiO 2 formed on one main surface of the silicon substrate serves as gate insulation. It functions as a membrane 6.
  • a silicon substrate functions as a gate electrode 2
  • a thermal oxide film SiO 2 formed on one main surface of the silicon substrate serves as gate insulation. It functions as a membrane 6.
  • one main surface of the silicon substrate is entirely covered with the gate insulating film 6, but at least the source electrode 3, the drain electrode 4 and the semiconductor layer 5 are arranged. It is sufficient if the region is covered with the gate insulating layer 6 .
  • the gate insulating layer 6 may have a single-layer structure, a multilayer structure, or a partially multilayer structure.
  • the total thickness of the gate insulating layer 6 is preferably 10 nm or more, more preferably 20 nm or more, from the viewpoint of sufficiently reducing gate leakage current. From the viewpoint of reducing the operating voltage, the thickness is preferably 500 nm or less, more preferably 200 nm or less.
  • materials for the gate insulating layer include inorganic compounds such as silicon oxide, silicon nitride, and hafnium oxide, and organic compounds such as vinylphenol resin, paraxylene resin, vinylidene fluoride resin, and polyimide.
  • the semiconductor element of the present disclosure is not limited to the form in which the silicon substrate functions as the gate electrode 2, but includes a substrate having an insulating surface at least on which the electrode is arranged, and the gate electrode is arranged on the substrate. good too.
  • the substrate may be, for example, inorganic materials such as glass, sapphire, alumina sintered body, silicon wafer, and substrates whose surfaces are coated with an oxide film, polyimide (PI) resin, polyester resin, polyamide resin. , an epoxy resin, a polysulfone resin, a polyamide resin, or the like, or a film-like flexible material made of these resins.
  • the material for the gate electrode is not particularly limited as long as it has conductivity, and examples include metals such as gold, platinum, chromium, titanium, and aluminum.
  • the gate electrode is formed, for example, by evaporating these metals at an arbitrary position.
  • a separately prepared metal thin film may be placed as a gate electrode at an arbitrary position on the substrate to form the gate electrode.
  • Methods for forming these electrodes include conventionally known methods such as vacuum deposition, electron beam, sputtering, plating, CVD, ion plating coating, inkjet, and printing, depending on the material.
  • the semiconductor device of the present disclosure can adopt various aspects such as a back gate type, a side gate type, and a top gate type.
  • the surface of the gate insulating layer 6 is treated with a surface treatment agent to form an adsorption layer 9.
  • the adsorption layer 9 is , is arranged between the semiconductor layer 5 and the gate insulating layer 6 and is in contact therewith.
  • a compound having an anion group causes charge trapping due to its presence on the gate insulating layer 6, which can cause an increase in hysteresis or a decrease in the on/off ratio. It is preferably formed of a compound that does not
  • the adsorption layer 9 is preferably formed of, for example, a silane coupling agent having no anionic group, such as 3-aminopropyltriethoxysilane (APTES), methyltriethoxysilane (MTES), methyltrimethoxysilane.
  • APTES 3-aminopropyltriethoxysilane
  • MTES methyltriethoxysilane
  • methyltrimethoxysilane methyltrimethoxysilane.
  • the adsorption layer 9 may be formed, for example, by applying a solution obtained by dissolving these materials in an organic solvent to the gate insulating layer 6 by a coating method such as a dip coating method, or may be formed by a vapor phase method or the like. may be formed by
  • FIGS. 1 and 2 are cross-sectional views showing the manufacturing method of the semiconductor device 1 in order of steps.
  • a gate electrode 2 having one main surface covered with a gate insulating film 6 is prepared. Specifically, a silicon substrate (gate electrode 2) having a silicon oxide (SiO 2 ) layer (gate insulating film 6) formed by thermally oxidizing one main surface is prepared.
  • a coating film 15 is formed by applying a CNT dispersion to the entire surface of the gate insulating film 6 opposite to the surface on the side of the gate electrode 2 . Then, the CNTs are sufficiently adsorbed on the surface of the gate insulating film 6 by allowing it to stand still for a while. Thereafter, excess CNTs are removed from the coating 15 to reduce the thickness of the coating prior to drying. Then, the remaining coating film is dried to form a substantially single-layer CNT film as the semiconductor layer 5′ as shown in FIG. 5C.
  • the CNT dispersion can be applied by a method of dropping the CNT dispersion using a dispenser, a printing method such as inkjet printing, screen printing, or offset printing, a spin coating method, a dip coating method, or the like.
  • the method of dropping the CNT dispersion using a dispenser and the spin coating method are preferable from the viewpoint of forming a CNT network structure with good homogeneity.
  • the adsorption of CNTs to the surface to be coated with the CNT dispersion (the surface of the gate insulating film 6 or the surface of the adsorption layer 9 when the adsorption layer 9 (see FIG. 4) is coated) is caused by the CNTs and the surface to be coated.
  • Excess CNTs are removed from the coating film 15 before the drying treatment, preferably by the washing treatment described below.
  • the thickness of the coating film 15 before washing, the concentration of CNTs in the CNT dispersion, the time from application of the CNT dispersion to washing, etc. should be appropriately adjusted. can be done by
  • the CNT dispersion contains CNTs and a dispersion medium, and optionally a CNT dispersant.
  • the CNT concentration in the CNT dispersion is preferably 0.1 ⁇ g/mL or higher, more preferably 0.5 ⁇ g/mL or higher, and still more preferably 1.0 ⁇ g/mL or higher, from the viewpoint of ensuring a sufficient amount of current, From the viewpoint of forming a substantially single-layer homogeneous CNT network structure, it is preferably 7.0 ⁇ g/mL or less, more preferably 5.0 ⁇ g/mL or less, and even more preferably 3.0 ⁇ g/mL or less.
  • the dispersion medium is preferably an aqueous medium, and the aqueous medium is preferably pure water, ion-exchanged water, purified water or distilled water, more preferably pure water.
  • the aqueous medium may contain, in addition to water, lower alcohols such as methanol, ethanol and isopropyl alcohol, and water-soluble organic solvents such as acetone, tetrahydrofuran and dimethylformamide.
  • the semiconductor layer 5 is formed using a CNT dispersion obtained by applying a technique for increasing the content of semiconducting CNTs to a mixture of metallic CNTs and semiconducting CNTs. preferably.
  • a semiconductor obtained by the method described in JP-A-2021-080121, JP-A-2021-080120, JP-A-2021-080119, or JP-A-2019-202912 Preferably, the semiconductor layer 5 is formed using a type SWCNT dispersion.
  • These semiconducting SWCNT dispersions contain, for example, an acrylic resin as a CNT dispersant.
  • acrylic resins disclosed in these publications include polyacrylic acid, copolymers of acrylic acid and phenoxydioxyethylene acrylate (PDEA), and copolymers of acrylic acid and methoxydioxypropylene acrylate (MDPA). Polymers, copolymers of acrylic acid and polyethylene glycol monoacrylate (average number of added moles of ethyleneoxy group is 2 to 10), polyethylene glycol monomethacrylate (average number of added moles of ethyleneoxy group is 2 to 45), etc. A homopolymer is mentioned.
  • the content of semiconducting CNTs is preferably 70% by mass or more, more preferably 80% by mass or more, and still more preferably 90% by mass or more. Yes, more preferably 95% by mass or more.
  • the standing time from immediately after the coating film 15 is formed until the cleaning treatment for removing excess CNTs is determined from the viewpoint that the CNTs are appropriately adsorbed on the lower layer, that is, the gate insulating layer 6 or the adsorption layer 9. , preferably 1 minute or more, more preferably 5 minutes or more, still more preferably 10 minutes or more, and even more preferably 30 minutes or more, and from the viewpoint of productivity, preferably 180 minutes or less, more preferably 120 minutes or less. , and more preferably 90 minutes or less.
  • a drying process in one aspect of the method for manufacturing a semiconductor element of the present disclosure, in the formation of the semiconductor layer 5, a CNT dispersion is applied to the surface to be coated to form a coating film, the CNTs are adsorbed to the surface to be coated, and the coating film is formed. After removing excess CNTs from the coated film while it is undried, a drying treatment is performed to form the semiconductor layer.
  • the undried state refers to a state before the dispersion medium, which is a component of the CNT dispersion, is completely evaporated, for example, a state before starting the drying treatment described later. Excess CNTs are removed from the coating film 15 by, for example, washing treatment.
  • the cleaning treatment is carried out by, for example, pouring a cleaning liquid onto the coating film 15 or cleaning the coating film 15, the gate insulating layer 6, and the gate electrode after the CNTs are properly adsorbed to the lower layer through the standing time. It can be performed by a method such as immersing the laminate containing 2 in a cleaning liquid in a bath. From the viewpoint of forming a substantially single-layer CNT film and forming a homogeneous CNT network structure, it is preferable to wash the laminate including the coating film 15 by immersing it in a washing liquid in a bath.
  • the cleaning liquid ultrapure water, alcohol such as ethanol and methanol, acetone, tetrahydrofuran (THF ) are preferred.
  • the immersion time is preferably 1 minute or longer, more preferably 3 minutes or longer, still more preferably 5 minutes or longer, even more preferably 10 minutes or longer, still more preferably 30 minutes or longer, and preferably 180 minutes or shorter, More preferably 120 minutes or less, still more preferably 90 minutes or less, and even more preferably 80 minutes or less.
  • the coating film 15 washed as described above is dried to volatilize the dispersion medium to form the semiconductor layer 5'.
  • the drying process is performed, for example, by arranging in an atmosphere set at a predetermined temperature.
  • the temperature of the atmosphere is preferably 50° C. or higher, more preferably 80° C. or higher, still more preferably 100° C. or higher, and preferably 250° C. or lower, more preferably 220° C. or lower, further preferably 200° C. or lower. be.
  • the drying time is preferably 5 minutes or more, more preferably 10 minutes or more, still more preferably 20 minutes or more, still more preferably 30 minutes or more, and preferably 240 minutes or less, more preferably 180 minutes or less, and further preferably It is preferably 120 minutes or less, and still more preferably 90 minutes or less.
  • the source electrode 3 and the drain electrode 4 are formed on the semiconductor layer 5'.
  • the method of forming the source electrode 3 and the drain electrode 4 may be a conventionally known method.
  • a metal material to be the source electrode 3 and the drain electrode 4 is vacuum-deposited on each of the portions.
  • the silicon substrate 2 on which the source electrode 3 and the drain electrode 4 are formed is heated at 100° C. or more and 200° C. or less. Heating is performed for 30 minutes or more and 60 minutes or less to remove a trace amount of moisture adsorbed to the gate insulating layer 6 and the semiconductor layer 5 and perform annealing.
  • a sealing layer 8 is formed on a portion (channel region) of the semiconductor layer 5 that is arranged between the source electrode 3 and the drain electrode 4 .
  • the sealing layer 8 is formed by applying a resin solution for forming the sealing layer 8 by a coating method such as spin coating, and then drying it as necessary.
  • the present application further discloses the following semiconductor device and its manufacturing method.
  • ⁇ 1> including a gate electrode, a source electrode, a drain electrode, a semiconductor layer in contact with the source electrode and the drain electrode, and a gate insulating layer insulating the semiconductor layer from the gate electrode, wherein the semiconductor layer includes a network structure of carbon nanotubes, The semiconductor layer is sealed with a sealing layer, A semiconductor device, wherein the semiconductor layer has an average film thickness of 5 nm or less.
  • ⁇ 2> including a gate electrode, a source electrode, a drain electrode, a semiconductor layer in contact with the source electrode and the drain electrode, and a gate insulating layer insulating the semiconductor layer from the gate electrode,
  • the semiconductor layer includes a network structure of single-walled carbon nanotubes,
  • the semiconductor layer is sealed with a sealing layer having a dielectric constant of 5.0 or less,
  • the semiconductor layer includes a network structure of single-walled carbon nanotubes, The content of semiconducting carbon nanotubes among the carbon nanotubes contained in the semiconductor layer is 70% by mass or more,
  • the semiconductor layer is sealed with a sealing layer containing at least one selected from the group consisting of fluorine-based resin, acrylic resin, styrene-based resin, vinyl-based resin, and olefin-based resin, The average thickness of the sealing layer is 200 nm or more,
  • the sealing layer contains a compound having an SP value of 3 (cal/cm 3 ) 1/2 or more and 15 (cal/cm 3 ) 1/2 or less calculated by the Fedors method ⁇ 1>- ⁇ 3>
  • An adsorption layer disposed between the semiconductor layer and the gate insulating film and in contact with the semiconductor layer and the gate insulating film, wherein the adsorption layer is made of a compound having no anion group ⁇ 1>- ⁇ 4>
  • ⁇ 6> The semiconductor device according to ⁇ 5>, wherein the adsorption layer is formed of a silane coupling agent having no anionic group.
  • ⁇ 7> The semiconductor device according to any one of ⁇ 1> to ⁇ 6>, wherein the network structure has a carbon nanotube density of 100/ ⁇ m 2 or more and 8000/ ⁇ m 2 or less.
  • ⁇ 8> The semiconductor device according to any one of ⁇ 1> to ⁇ 7>, wherein in the network structure, the average length of the carbon nanotubes is shorter than the channel length of the semiconductor device.
  • ⁇ 9> The semiconductor device according to any one of ⁇ 1> to ⁇ 8>, wherein in the network structure, the carbon nanotubes have an average diameter of 0.5 nm or more and 3 nm or less.
  • a method of manufacturing a semiconductor device including a gate electrode, a source electrode, a drain electrode, a semiconductor layer in contact with the source electrode and the drain electrode, and a gate insulating layer insulating the semiconductor layer from the gate electrode can be,
  • a method of manufacturing a semiconductor device including a gate electrode, a source electrode, a drain electrode, a semiconductor layer in contact with the source electrode and the drain electrode, and a gate insulating layer insulating the semiconductor layer from the gate electrode can be,
  • the carbon nanotube dispersion is applied to form a coating film, the carbon nanotubes are adsorbed on the surface to be coated, and the excess carbon nanotubes are removed from the coating film while the coating film is undried, followed by drying. to form the semiconductor layer.
  • the carbon nanotube dispersion liquid has a carbon nanotube concentration of 0.1 ⁇ g/mL or more and 7.0 ⁇ g/mL or less.
  • ⁇ 13> The method of manufacturing a semiconductor device according to ⁇ 11> or ⁇ 12>, wherein the excess carbon nanotubes are removed by immersing the coating film in a cleaning liquid.
  • ⁇ 14> The method for manufacturing a semiconductor device according to any one of ⁇ 10> to ⁇ 13>, including preparing the carbon nanotube dispersion containing an acrylic resin.
  • the ratio of the peak area A s peculiar to semiconducting SWCNTs to the peak area A s peculiar to metallic SWCNTs of SWCNTs before dispersion (A s / m ), and the peak area A m peculiar to metallic SWCNTs of the SWCNT dispersion liquid
  • the semiconducting SWCNT content in the SWCNT dispersion liquid can be calculated from the following formula based on the semiconductor content of 67% by mass of the SWCNT before dispersion.
  • the average diameter and length of SWCNTs were calculated by measuring the diameters and lengths of 10 or more CNTs from an image obtained using a transmission electron microscope and averaging them.
  • the relative dielectric constant of the sealing layer was measured at 25° C. and 1 MHz by the capacitance method using an impedance analyzer after molding the resin used for the sealing layer into a film.
  • the transfer characteristics in semiconductor devices were measured in air.
  • the drain current (Ids) when changing the gate voltage (Vgs) was measured using a semiconductor property evaluation device (manufactured by Keithley Co., Ltd.).
  • the drain voltage (Vds) was set to -1V and the gate voltage (Vgs) was swept back and forth between 20V and -20V.
  • the on/off ratio was obtained from the maximum and minimum values of the drain current (Ids).
  • the hysteresis was calculated from the absolute value
  • of the gate voltage difference between forward (Vgs1) and backward (Vgs2) at drain current (Ids) ⁇ 100 nA.
  • the dispersed solution was centrifuged for 60 minutes using an ultracentrifuge (“CX100GXII” manufactured by Hitachi Koki Co., Ltd., rotor S50) at a rotation speed of 50000 rpm and a liquid temperature of 20°C.
  • CX100GXII manufactured by Hitachi Koki Co., Ltd., rotor S50
  • the ratio of semiconducting CNTs (semiconducting CNT content) to the total amount of CNTs (total of semiconducting CNTs and metallic CNTs) is 98 wt% CNT dispersion. I got the liquid.
  • the SWCNTs used have peaks characteristic of metallic SWCNTs in the vicinity of 100 to 220 cm -1 and peaks characteristic of semiconducting SWCNTs in the vicinity of 220 to 350 cm -1 .
  • Example 1 An adsorption layer of 3-aminopropyltriethoxysilane (APTES) was formed by a vapor phase method on a 1 cm 2 (main surface area) silicon substrate on which a 200 nm thick thermal oxide film (SiO 2 ) was deposited. bottom.
  • the CNT dispersion liquid obtained by the above method is diluted with pure water to adjust the concentration to 1.45 ⁇ g/mL in terms of CNT mass, and is applied to the entire surface of the adsorption layer to form a coating film. , and allowed to stand at room temperature for 1 hour. After that, before the drying treatment, the silicon substrate on which the coating film is formed is immersed in ultrapure water for 60 minutes to remove excess CNTs.
  • APTES 3-aminopropyltriethoxysilane
  • the network density of carbon nanotubes in the semiconductor layer was 625/ ⁇ m 2 .
  • an image of 1 ⁇ m square in the region (channel region) between the source electrode and the drain electrode in the semiconductor layer was observed. They were randomly oriented in two-dimensional directions, and one CNT intersected with five or more other CNTs.
  • the total length of the portions overlapping (intersecting) other CNTs in the length of the CNTs in the longitudinal direction was 3%.
  • Ti was deposited to a thickness of 5 nm through a metal mask so that the channel length (L) and channel width (W) were 100 ⁇ m and 1000 ⁇ m, respectively, and then Au was deposited on the Ti layer to a thickness of 100 nm.
  • a source electrode and a drain electrode each having a two-layer structure (Ti/Au) were formed by vacuum deposition as described above. The substrate on which the source electrode and the drain electrode were formed was heated at 180° C. for 1 hour.
  • Example 2 instead of a 1 wt% chloroform solution of polystyrene, a 9 wt% CT-Solv.180 solution of fluororesin (CYTOP (registered trademark), CTL-809A, manufactured by AGC) was used for spin coating (first stage: 500 rpm for 5 s, 2 Stage: 2000 rpm for 20 s), followed by heating at 180° C. for 60 minutes to fabricate a semiconductor device in the same manner as in Example 1, except that a sealing layer having an average thickness of 1200 nm was formed.
  • CYTOP registered trademark
  • CTL-809A manufactured by AGC
  • Example 3 After spin coating (first stage: 500 rpm 5 s, second stage: 3000 rpm 20 s), heating was performed at 180 ° C. for 60 minutes to form a sealing layer having an average thickness of 500 nm. A semiconductor device was fabricated in the same manner.
  • Example 4 A semiconductor device was fabricated in the same manner as in Example 1, except that a 1 wt % chloroform solution of polymethyl methacrylate was used instead of the 1 wt % chloroform solution of polystyrene to form a sealing layer having an average thickness of 500 nm.
  • Example 5 A semiconductor device was fabricated in the same manner as in Example 1, except that methyltrimethoxysilane (MTMS) was used instead of APTES as the material for the adsorption layer.
  • MTMS methyltrimethoxysilane
  • Example 6 Example except that a 1 wt% isopropanol solution of N-2-(aminoethyl)-3-aminopropyltrimethoxysilane (KBM-603, manufactured by Shin-Etsu Chemical Co., Ltd.) was used instead of APTES as the material for the adsorption layer.
  • KBM-603 N-2-(aminoethyl)-3-aminopropyltrimethoxysilane
  • APTES APTES
  • Example 7 A semiconductor device was fabricated in the same manner as in Example 1, except that a 1 wt % acetone solution of polyvinyl chloride was used instead of the 1 wt % chloroform solution of polystyrene to form a sealing layer having an average thickness of 500 nm.
  • Example 8 A semiconductor device was fabricated in the same manner as in Example 1, except that a 1 wt % acetone solution of polyvinylpyrrolidone was used instead of the 1 wt % chloroform solution of polystyrene to form a sealing layer having an average thickness of 500 nm.
  • Example 9 Instead of a 1 wt% polystyrene chloroform solution, a 1 wt% polyvinyl alcohol aqueous solution was spin-coated (2000 rpm, 30 s) and then heated at 100°C for 60 minutes to form a sealing layer with an average thickness of 500 nm. A semiconductor device was fabricated in the same manner as in Example 1 except for the above.
  • Example 1 A CNT dispersion with a CNT concentration of 7.5 ⁇ g/mL was used instead of the CNT dispersion with a CNT concentration of 1.45 ⁇ g/mL, and the procedure was the same as in Example 1 except that the formation of the sealing layer was omitted.
  • a semiconductor device was fabricated by From the AFM image, the density of the carbon nanotube network in the semiconductor layer was 10000 lines/ ⁇ m 2 .
  • Example 2 A semiconductor device was fabricated in the same manner as in Example 2, except that a CNT dispersion with a CNT concentration of 7.5 ⁇ g/mL was used instead of the CNT dispersion with a CNT concentration of 1.45 ⁇ g/mL.
  • Example 3 A semiconductor device was fabricated in the same manner as in Example 1, except that a CNT dispersion with a CNT concentration of 7.5 ⁇ g/mL was used instead of the CNT dispersion with a CNT concentration of 1.45 ⁇ g/mL.
  • Example 4 A semiconductor device was fabricated in the same manner as in Example 1, except that the sealing layer was not formed.
  • FIG. 7 shows an atomic force microscope photograph of the semiconductor layer constituting the semiconductor element of Example 1. As shown in FIG. 7, it can be confirmed that the semiconductor layer has a CNT network structure.
  • the average film thickness of the semiconductor layer is 5 nm or less, so that the on/off ratio is significantly larger than that of the semiconductor devices in Comparative Examples 1 to 3. Moreover, from the comparison with Comparative Example 4, in Example, the on/off ratio did not decrease even when the sealing layer was formed. Thus, the semiconductor device of the example has a large on/off ratio and a small hysteresis.
  • the on/off ratio can be improved and the hysteresis can be reduced, which can contribute to the improvement of device performance using this.

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