KR20240110845A - 반도체 소자 - Google Patents

반도체 소자 Download PDF

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Publication number
KR20240110845A
KR20240110845A KR1020247020507A KR20247020507A KR20240110845A KR 20240110845 A KR20240110845 A KR 20240110845A KR 1020247020507 A KR1020247020507 A KR 1020247020507A KR 20247020507 A KR20247020507 A KR 20247020507A KR 20240110845 A KR20240110845 A KR 20240110845A
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KR
South Korea
Prior art keywords
layer
semiconductor device
semiconductor
semiconductor layer
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247020507A
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English (en)
Korean (ko)
Inventor
미츠오 아사이
Original Assignee
카오카부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 카오카부시키가이샤 filed Critical 카오카부시키가이샤
Publication of KR20240110845A publication Critical patent/KR20240110845A/ko
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/484Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • H01L29/78684
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741Group IV materials, e.g. germanium or silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/168After-treatment
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/168After-treatment
    • C01B32/174Derivatisation; Solubilisation; Dispersion in solvents
    • H01L29/16
    • H01L29/66045
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/466Lateral bottom-gate IGFETs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80Constructional details
    • H10K10/88Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020247020507A 2021-11-29 2022-08-10 반도체 소자 Pending KR20240110845A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-193569 2021-11-29
JP2021193569 2021-11-29
PCT/JP2022/030645 WO2023095391A1 (ja) 2021-11-29 2022-08-10 半導体素子

Publications (1)

Publication Number Publication Date
KR20240110845A true KR20240110845A (ko) 2024-07-16

Family

ID=86539140

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247020507A Pending KR20240110845A (ko) 2021-11-29 2022-08-10 반도체 소자

Country Status (7)

Country Link
US (1) US20250024692A1 (https=)
EP (1) EP4443520A4 (https=)
JP (1) JP2023080040A (https=)
KR (1) KR20240110845A (https=)
CN (1) CN118355508A (https=)
TW (1) TW202339286A (https=)
WO (1) WO2023095391A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008053607A (ja) 2006-08-28 2008-03-06 Osaka Univ カーボンナノチューブ分散ポリマーを用いた電界効果トランジスタの製造方法
JP2008071898A (ja) 2006-09-13 2008-03-27 Osaka Univ カーボンナノチューブ電界効果トランジスタ及びその製造方法
JP2011126727A (ja) * 2009-12-16 2011-06-30 Toray Ind Inc カーボンナノチューブ複合体、カーボンナノチューブ複合体分散液、カーボンナノチューブ複合体分散膜および電界効果型トランジスタ
CN105810749B (zh) * 2014-12-31 2018-12-21 清华大学 N型薄膜晶体管
US10177199B2 (en) * 2016-05-03 2019-01-08 Tsinghua University Method for making three dimensional complementary metal oxide semiconductor carbon nanotube thin film transistor circuit
JP6485593B2 (ja) * 2017-03-27 2019-03-20 東レ株式会社 半導体素子、相補型半導体装置、半導体素子の製造方法、無線通信装置および商品タグ
WO2019064504A1 (ja) 2017-09-29 2019-04-04 日本電気株式会社 ナノカーボンインクおよびそれを用いた半導体デバイスの製造方法
JP7014675B2 (ja) 2018-05-23 2022-02-01 花王株式会社 半導体型単層カーボンナノチューブ分散液の製造方法
JP6900453B2 (ja) 2019-11-15 2021-07-07 花王株式会社 半導体型単層カーボンナノチューブ分散液の製造方法
JP7002517B2 (ja) 2019-11-15 2022-01-20 花王株式会社 半導体型単層カーボンナノチューブ分散液の製造方法
JP2021080121A (ja) 2019-11-15 2021-05-27 花王株式会社 半導体型単層カーボンナノチューブ分散液の製造方法
JP7589569B2 (ja) * 2020-02-17 2024-11-26 東レ株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
EP4443520A1 (en) 2024-10-09
US20250024692A1 (en) 2025-01-16
JP2023080040A (ja) 2023-06-08
TW202339286A (zh) 2023-10-01
CN118355508A (zh) 2024-07-16
WO2023095391A1 (ja) 2023-06-01
EP4443520A4 (en) 2025-12-10

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