WO2023088170A1 - Mécanisme de mâchoire de serrage - Google Patents

Mécanisme de mâchoire de serrage Download PDF

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Publication number
WO2023088170A1
WO2023088170A1 PCT/CN2022/131252 CN2022131252W WO2023088170A1 WO 2023088170 A1 WO2023088170 A1 WO 2023088170A1 CN 2022131252 W CN2022131252 W CN 2022131252W WO 2023088170 A1 WO2023088170 A1 WO 2023088170A1
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WO
WIPO (PCT)
Prior art keywords
transmission
plate
fixed
frame
clamping
Prior art date
Application number
PCT/CN2022/131252
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English (en)
Chinese (zh)
Inventor
林佳继
张立
李亚康
Original Assignee
拉普拉斯(无锡)半导体科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 拉普拉斯(无锡)半导体科技有限公司 filed Critical 拉普拉斯(无锡)半导体科技有限公司
Publication of WO2023088170A1 publication Critical patent/WO2023088170A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present application belongs to the field of photovoltaics, and for example relates to a claw mechanism.
  • quartz boats In the industry, some devices are usually required to load materials, and such loading or moving devices are usually called quartz boats in the industry.
  • Quartz boats need to be transported during the processing of semiconductor or photovoltaic materials, including the movement between different stations.
  • the related technology equipment transfers the quartz boats, the distance between the jaws of the quartz boats is generally fixed.
  • the installation of the equipment position for placing the quartz boat is very precise, and the cost of time and energy of the staff is relatively high.
  • the application provides a jaw mechanism to realize the adjustability of the distance between the quartz boats.
  • An embodiment of the present application provides a jaw mechanism, including a transmission assembly, a clamping assembly, and a frame assembly carrying the transmission assembly and the clamping assembly;
  • the clamping components are provided with two groups, and the clamping components of the two groups are distributed in parallel;
  • the transmission components are respectively connected with two groups of the clamping components, and the transmission components are configured to adjust the distance between the two groups of the clamping components.
  • Fig. 1 is the schematic diagram of a kind of jaw mechanism of the embodiment of the present application
  • Fig. 2 is a top view of a jaw mechanism according to an embodiment of the present application
  • FIG. 3 is a schematic cutaway view of A-A in FIG. 2 .
  • All directional indications (such as up, down, left, right, front, back, horizontal, vertical, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement, etc. between the various components in a specific posture, If the specific posture changes, the directional indication also changes accordingly.
  • a jaw mechanism for example: the jaw mechanism is a jaw mechanism with variable pitch
  • the jaw mechanism is a jaw mechanism with variable pitch
  • the frame assembly 30, the clamping assembly 10 is provided with two groups, the two groups of clamping assemblies 10 are distributed in parallel, the transmission assembly 20 is respectively connected with the two groups of clamping assemblies 10, and the transmission assembly is set to adjust the two groups of clamping assemblies 10 spacing.
  • the frame assembly 30 includes a frame bottom plate 311, a frame side plate 313, and a frame connecting plate 312.
  • Two sets of frame side plates 313 are fixed on both sides of the frame bottom plate 311 in parallel, and the frame sides far away from each other The end face of the plate 313 is flush with the end face of the frame bottom plate 311.
  • the frame bottom plate 311 is fixed with a bottom plate moving groove 3111 that penetrates up and down.
  • the two groups of clamping assemblies 10 are set to move in the bottom plate moving groove 3111.
  • the plate 312 is fixed on the upper end surfaces of the two sets of frame side plates 313.
  • a frame cavity is formed between the frame connection plate 312, the two sets of frame side plates 313 and the frame bottom plate 311, and the transmission assembly 20 is located in the frame cavity.
  • the frame side panels 313 extend vertically, and the frame side panels 313 are above the frame bottom panel 311 .
  • two sets of symmetrical frame connecting grooves 3121 are fixed on the upper surface of the frame connecting plate 312 , and the frame connecting grooves 3121 are configured to position the frame assembly 30 for connection with external devices.
  • the transmission assembly 20 includes a transmission motor 341, the two ends of the frame bottom plate 311 are fixed with a transmission motor fixing seat 342 and a support seat 349, the output shaft of the transmission motor 341 passes through the transmission motor fixing seat 342, and the transmission motor 341
  • the extension part of the output shaft is fixed with a drive wheel 344
  • the support seat 349 is rotatably provided with a drive wheel 344
  • a drive belt 347 is dynamically connected between the two sets of drive wheels 344.
  • a transmission slider 346 is slidably arranged on the rail 345 , and the two sets of clamping assemblies 10 are respectively fixed with the transmission slider 346 , and the transmission motor 341 drives the clamping assembly 10 to move by driving the transmission belt 347 .
  • a horizontal chute 363 runs through the support base 349 , and a driven shaft 348 slidably connected to the chute 363 is provided between the support base 349 .
  • the left and right sides of the groove 363 are arc-shaped surfaces, the upper and lower sides of the chute 363 are planes, the sliding contact surface between the driven shaft 348 and the chute 363 is a plane, and the driven shaft 348 passes through the sliding surface of the chute 363.
  • the length direction of the transmission slide rail 345 is consistent with the transmission direction of the transmission belt 347.
  • the transmission assembly 20 includes a transmission motor 341, the transmission motor 341 is fixed on the first side of the frame bottom plate 311, and a transmission motor fixing seat 342 opposite to the transmission motor 341 is fixed on the frame bottom plate 311, and the transmission motor
  • the output shaft of 341 runs through the transmission motor fixing seat 342 and extends to the frame cavity.
  • the extension part of the output shaft of the transmission motor is fixed with a transmission wheel 344, and the second side of the frame bottom plate 311 is fixed with a front and rear symmetrical support seat 349.
  • a horizontal chute 3491 runs through the support base 349, and a driven shaft 348 slidingly connected to the chute 3491 is provided between the two sets of support bases 349, and a drive wheel 344 is rotatably arranged on the driven shaft 348.
  • a transmission belt 347 is dynamically connected between the two groups of transmission wheels 344, the left and right sides of the chute 3491 are arc-shaped, the upper and lower sides of the chute 3491 are planes, and the driven shaft 348 and The sliding contact surface of the chute 3491 is flat to prevent the driven shaft 348 from rotating.
  • the driven shaft 348 adjusts the tension of the transmission belt 347 by sliding on the chute 3491.
  • the frame bottom plate 311 is symmetrically fixed with moving grooves located on the bottom plate.
  • the transmission slide rails 345 on both sides of the 3111, the length direction of the transmission slide rails 345 is consistent with the transmission direction of the transmission belt 347, and the transmission slide rails 345 are slidably provided with transmission slide blocks 346. If multiple transmission slide blocks 346 are provided, the two groups of clamping The components 10 are respectively fixed with the transmission sliders 346 , and the transmission motor 341 drives the clamping component 10 to move by driving the transmission belt 347 .
  • each set of clamping assemblies 10 includes an assembly connecting plate 100, and the assembly connecting plates 100 of the two sets of clamping assemblies are respectively connected to the transmission sliders 346 on the two sets of transmission slide rails 345. , the moving direction of the component connecting plate 100 is consistent with the driving direction of the transmission belt 347, and the transmission belt 347 drives the clamping component 10 to move.
  • a synchronous belt penetrating chamber 1 is formed between the transmission pressure plate 1 381 and the component connecting plate 100, and a transmission solid plate 371 fixed to the transmission pressure plate 1 381 is arranged in the synchronous belt penetrating cavity 1, and a transmission belt 347 located on the upper side of the component connecting plate 100 Pass through the synchronous belt through the cavity and be pressed by the transmission fixing plate 1 371, so that the transmission pressure plate 381 moves with the transmission belt 347, and then drives the clamping assembly 10 to move through the transmission belt 347, and the assembly connecting plate of another set of clamping assembly 10
  • the upper end surface of the 100 is fixed with a transmission platen 2 382, a synchronous belt penetrating cavity 2 is formed between the transmission platen 382 and the frame bottom plate 311, and a transmission platen 2 fixed to the transmission platen 382 is arranged in the synchronous belt penetrating cavity 2 372, the transmission belt 347 located on the lower side of the component connecting plate 100 passes through the second cavity through the synchronous belt and is pressed by the transmission
  • the contact surfaces of the first driving fixing plate 371 and the second driving fixing plate 372 and the driving belt 347 are provided with a toothed structure, and the toothed structure meshes with the driving belt.
  • the toothed structure meshes with the transmission belt 347 to avoid relative movement between the two, thus ensuring the transmission efficiency of the transmission belt 347 .
  • a buffer device is fixed on the upper end surface of the frame bottom plate 311.
  • the buffer device is provided with two groups and Close to the ends of two groups of transmission slide rails 345 respectively
  • the buffer device includes a limit mounting plate 363, a limit rod 361 and a stop block 362
  • the limit mounting plate 363 is an L-shaped structure, such as a limit mounting plate 363 It includes a horizontal plate located on the horizontal plane and fixedly connected to the frame bottom plate 311 and a vertical plate located on the vertical plane.
  • the limiting rod 361 is movably connected to the vertical plate.
  • the limiting rod 361 is set as a screw rod.
  • the limit rod 361 runs through the vertical plate and is fixed by a nut, thereby adjusting the distance between the end of the limit rod 361 and the vertical plate.
  • Block 362 is made of resilient material, thereby increasing the longevity of the structure.
  • an anti-collision bar 400 is fixed on the side of the component connection plate 100 of a group of clamping components 10, and the anti-collision bar 400
  • An anti-collision washer 401 is fixed, and the anti-collision washer 401 is set as a soft elastic material, which can be cushioned and has a small degree of deformation under pressure, and has elastic recovery ability.
  • the anti-collision washer 401 The material is set to be polyurethane, so as to avoid collisions when the clamping component 10 clamps quartz boats of different sizes, and improve the safety level of the equipment.
  • each set of clamping components 10 also includes a clamping mechanism 1010, the clamping mechanism 1010 is connected to the component connection plate 100 through the adapter plate 110 and the cylinder mounting plate 106, and the component connection plate 100 A symmetrical positioning cavity is fixed on the lower end surface of the lower end surface, and the positioning cavity is used for positioning the fixing of the component connection plate 100 and the adapter frame plate 110.
  • the adapter frame plate 110 is fixedly connected with the cylinder mounting plate 106, and the clamping mechanism 1010 There are two groups, and the two groups of clamping mechanisms 1010 are symmetrically arranged on both ends of the cylinder mounting plate 106.
  • the moving direction of the clamping mechanisms 1010 is perpendicular to the driving direction of the transmission belt 347, that is, the moving direction of the clamping mechanisms 1010 is in line with the clamping assembly 10
  • the direction of movement is vertical
  • the cylinder mounting plate 106 is fixed with a detection sensor 420 for detecting whether there is material in the quartz boat
  • the lower end surface of the frame bottom plate 311 is fixed with a sensor 410
  • the adapter frame plate 110 is fixed with a
  • the blocking piece matched with the sensor 410 the cooperation between the sensor 410 and the blocking piece is used to detect the origin of the clamping assembly 10 .
  • the clamping mechanism 1010 includes a driving cylinder 101 fixed on the cylinder mounting plate 106, a connecting plate 107 is fixed on the end surface of the output shaft of the driving cylinder 101, and a clamping claw is fixed on the connecting plate 107
  • the mounting plate 103, the side of the jaw mounting plate 103 is fixed with the jaws 102 located at the lower side of the connecting plate 107, two groups of jaws 102 are horizontally and symmetrically fixed at both ends of the jaw mounting plate 103, the jaws 102
  • the end face is fixed with a notch, and the notch spacing on the two sets of clamping jaws 102 matches the connecting rod spacing of the quartz boat.
  • the design of the notch facilitates the clamping of the quartz boat and prevents the quartz boat from falling off, thereby improving the clamping efficiency and quality of the quartz boat.
  • the jaw mounting plate 103 is connected with a supporting plate 104.
  • the supporting plate The plate 104 is arranged in an L-shaped structure, the supporting plate 104 includes a horizontal forming surface and a vertical forming surface, the vertical forming surface of the supporting plate 104 is fixedly connected with the lower end surface of the jaw mounting plate 103, and two groups of clamping jaws are clamped together.
  • the horizontal molding surfaces of the two sets of supporting plates 104 of the mechanism 1010 are opposite to each other.
  • the two groups of coaming plates of the quartz boat are respectively offset against the horizontal forming surface and the vertical forming surface of the supporting plate 104, that is, the supporting plate
  • the horizontal molding surface of 104 supports the quartz boat, and the vertical molding surface of the supporting plate 104 restricts the movement of the quartz boat, that is, the quartz boat is limited, and the output shaft of the driving cylinder 101 is extended or retracted to drive the clamping.
  • the movement of the mechanism 1010 thereby realizing the loosening or clamping movement of the quartz boat.
  • a limit plate 105 is fixed on the cylinder mounting plate 106, a buffer rod is arranged on the limit plate 105, and the end surface of the buffer rod is fixed.
  • a washer is provided, and the washer is opposite to the jaw mounting plate 103.
  • the washer is made of soft elastic material, which can be used for cushioning and has little deformation under pressure, and has elastic recovery ability.
  • the application drives the transmission belt 347 through the transmission motor 341 to realize the synchronous movement of the two sets of clamping assemblies 10 in the same direction or in the opposite direction, and realizes the adjustability of the distance between the quartz boats. Clamping or loosening, simple structure and convenient operation.
  • the application through the design of the anti-collision bar 400 and the anti-collision washer 401 can effectively alleviate the impact force generated by the collision between the quartz boats.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Clamps And Clips (AREA)
  • Jigs For Machine Tools (AREA)

Abstract

Un mécanisme de mâchoire de serrage, comprenant un ensemble de transmission (20), un ensemble de serrage (10), et un ensemble cadre (30) portant l'ensemble de transmission (20) et l'ensemble de serrage (10). Deux ensembles d'ensembles de serrage (10) sont prévus, et les deux ensembles d'ensembles de serrage (10) sont répartis en parallèle. L'ensemble de transmission (20) est relié séparément aux deux ensembles d'ensembles de serrage (10), et l'ensemble de transmission (20) est configuré pour ajuster la distance entre les deux ensembles d'ensembles de serrage (10).
PCT/CN2022/131252 2020-11-16 2022-11-11 Mécanisme de mâchoire de serrage WO2023088170A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN202011281013.2A CN112390006A (zh) 2020-11-16 2020-11-16 一种可变间距夹爪机构
CN202122803652.7U CN216736383U (zh) 2020-11-16 2021-11-16 一种可变间距的夹爪机构
CN202122803652.7 2021-11-16

Publications (1)

Publication Number Publication Date
WO2023088170A1 true WO2023088170A1 (fr) 2023-05-25

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PCT/CN2022/131252 WO2023088170A1 (fr) 2020-11-16 2022-11-11 Mécanisme de mâchoire de serrage

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CN (2) CN112390006A (fr)
WO (1) WO2023088170A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116871847A (zh) * 2023-08-15 2023-10-13 首凯高科技(江苏)有限公司 一种用于氨气传感器制造的冲压定位设备
CN117367682A (zh) * 2023-12-08 2024-01-09 邢台百信密封件有限公司 一种曲轴油封密闭性测试装置
CN117712226A (zh) * 2023-12-22 2024-03-15 齐河双百数码影像设备有限公司 一种光伏组件自动装框机
CN117816818A (zh) * 2024-03-04 2024-04-05 江苏宇邦电子科技有限公司 一种楼宇单元门制造用板材冲压成型生产线
CN117985590A (zh) * 2024-03-15 2024-05-07 山东港口渤海湾港集团有限公司 一种港口堆高机用伸缩式吊具
CN118082286A (zh) * 2024-04-24 2024-05-28 江苏润倾城包装科技有限公司 一种具有检测功能的纸箱组装设备
CN118089632A (zh) * 2024-04-17 2024-05-28 山东尚泰新材料有限公司 一种石英坩埚直径测量装置及测量方法
CN118282149A (zh) * 2024-05-31 2024-07-02 南通科美自动化科技有限公司 一种电机丝杆涂胶组装站

Families Citing this family (2)

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CN112390006A (zh) * 2020-11-16 2021-02-23 拉普拉斯(无锡)半导体科技有限公司 一种可变间距夹爪机构
CN113751431B (zh) * 2021-09-06 2023-02-03 深圳泰德半导体装备有限公司 转移机构及等离子清洗机

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104803035A (zh) * 2015-04-24 2015-07-29 成都松川雷博机械设备有限公司 带机械夹爪的食品装盒机夹持机构
CN204548594U (zh) * 2015-04-24 2015-08-12 成都松川雷博机械设备有限公司 带机械夹爪的食品装盒机夹持机构
US10493618B1 (en) * 2018-11-20 2019-12-03 Jiangsu Fine Storage Information Technology Co., Ltd. Multi-axis mechanical gripper with symmetrically fixed pair of racks
CN210438044U (zh) * 2019-08-23 2020-05-01 天津齐物科技有限公司 圆柱型单体动力电池夹取装置
CN111302031A (zh) * 2020-03-05 2020-06-19 云南中烟工业有限责任公司 一种可伸缩夹爪组及烟草夹持装置及其使用方法
CN212445271U (zh) * 2020-05-27 2021-02-02 精技电子（南通）有限公司 一种可变间距的防撞夹爪装置
CN216736383U (zh) * 2020-11-16 2022-06-14 拉普拉斯(无锡)半导体科技有限公司 一种可变间距的夹爪机构

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104803035A (zh) * 2015-04-24 2015-07-29 成都松川雷博机械设备有限公司 带机械夹爪的食品装盒机夹持机构
CN204548594U (zh) * 2015-04-24 2015-08-12 成都松川雷博机械设备有限公司 带机械夹爪的食品装盒机夹持机构
US10493618B1 (en) * 2018-11-20 2019-12-03 Jiangsu Fine Storage Information Technology Co., Ltd. Multi-axis mechanical gripper with symmetrically fixed pair of racks
CN210438044U (zh) * 2019-08-23 2020-05-01 天津齐物科技有限公司 圆柱型单体动力电池夹取装置
CN111302031A (zh) * 2020-03-05 2020-06-19 云南中烟工业有限责任公司 一种可伸缩夹爪组及烟草夹持装置及其使用方法
CN212445271U (zh) * 2020-05-27 2021-02-02 精技电子（南通）有限公司 一种可变间距的防撞夹爪装置
CN216736383U (zh) * 2020-11-16 2022-06-14 拉普拉斯(无锡)半导体科技有限公司 一种可变间距的夹爪机构

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116871847A (zh) * 2023-08-15 2023-10-13 首凯高科技(江苏)有限公司 一种用于氨气传感器制造的冲压定位设备
CN116871847B (zh) * 2023-08-15 2023-12-22 首凯高科技(江苏)有限公司 一种用于氨气传感器制造的冲压定位设备
CN117367682A (zh) * 2023-12-08 2024-01-09 邢台百信密封件有限公司 一种曲轴油封密闭性测试装置
CN117367682B (zh) * 2023-12-08 2024-02-20 邢台百信密封件有限公司 一种曲轴油封密闭性测试装置
CN117712226A (zh) * 2023-12-22 2024-03-15 齐河双百数码影像设备有限公司 一种光伏组件自动装框机
CN117712226B (zh) * 2023-12-22 2024-05-14 齐河双百数码影像设备有限公司 一种光伏组件自动装框机
CN117816818A (zh) * 2024-03-04 2024-04-05 江苏宇邦电子科技有限公司 一种楼宇单元门制造用板材冲压成型生产线
CN117816818B (zh) * 2024-03-04 2024-05-10 江苏宇邦电子科技有限公司 一种楼宇单元门制造用板材冲压成型生产线
CN117985590A (zh) * 2024-03-15 2024-05-07 山东港口渤海湾港集团有限公司 一种港口堆高机用伸缩式吊具
CN118089632A (zh) * 2024-04-17 2024-05-28 山东尚泰新材料有限公司 一种石英坩埚直径测量装置及测量方法
CN118082286A (zh) * 2024-04-24 2024-05-28 江苏润倾城包装科技有限公司 一种具有检测功能的纸箱组装设备
CN118282149A (zh) * 2024-05-31 2024-07-02 南通科美自动化科技有限公司 一种电机丝杆涂胶组装站

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CN112390006A (zh) 2021-02-23
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