WO2023088170A1

WO2023088170A1 - Clamping jaw mechanism

Info

Publication number: WO2023088170A1
Application number: PCT/CN2022/131252
Authority: WO
Inventors: 林佳继; 张立; 李亚康
Original assignee: 拉普拉斯(无锡)半导体科技有限公司
Priority date: 2020-11-16
Filing date: 2022-11-11
Publication date: 2023-05-25
Also published as: CN216736383U; CN112390006A

Abstract

A clamping jaw mechanism, comprising a transmission assembly (20), a clamping assembly (10), and a frame assembly (30) bearing the transmission assembly (20) and the clamping assembly (10). Two sets of clamping assemblies (10) are provided, and the two sets of clamping assemblies (10) are distributed in parallel. The transmission assembly (20) is separately connected to the two sets of clamping assemblies (10), and the transmission assembly (20) is configured to adjust the distance between the two sets of clamping assemblies (10).

Description

Gripper Mechanism

This disclosure claims priority to a Chinese patent application with application number 202122803652.7 filed with the China Patent Office on November 16, 2021, the entire contents of which are incorporated herein by reference.

technical field

The present application belongs to the field of photovoltaics, and for example relates to a claw mechanism.

Background technique

During the processing of semiconductor or photovoltaic materials, some devices are usually required to load materials, and such loading or moving devices are usually called quartz boats in the industry.

Quartz boats need to be transported during the processing of semiconductor or photovoltaic materials, including the movement between different stations. When the related technology equipment transfers the quartz boats, the distance between the jaws of the quartz boats is generally fixed. The installation of the equipment position for placing the quartz boat is very precise, and the cost of time and energy of the staff is relatively high.

Contents of the invention

The application provides a jaw mechanism to realize the adjustability of the distance between the quartz boats.

An embodiment of the present application provides a jaw mechanism, including a transmission assembly, a clamping assembly, and a frame assembly carrying the transmission assembly and the clamping assembly;

The clamping components are provided with two groups, and the clamping components of the two groups are distributed in parallel;

The transmission components are respectively connected with two groups of the clamping components, and the transmission components are configured to adjust the distance between the two groups of the clamping components.

Description of drawings

Fig. 1 is the schematic diagram of a kind of jaw mechanism of the embodiment of the present application;

Fig. 2 is a top view of a jaw mechanism according to an embodiment of the present application;

FIG. 3 is a schematic cutaway view of A-A in FIG. 2 .

Marked in the picture:

10. Clamping component; 20. Transmission component; 30. Frame component;

1010. Clamping mechanism;

100. Component connection plate; 101. Drive cylinder; 102. Gripper; 103. Gripper mounting plate; 104. Support plate; 105. Limiting plate; 106. Cylinder mounting plate; 107. Connecting plate; 110. Adapter frame 311, frame bottom plate; 312, frame connecting plate; 313, frame side plate; 3111, bottom plate moving groove; 3121, frame connecting groove; 341, transmission motor; 342, transmission motor fixed seat; 344, transmission wheel; 345, Transmission slide rail; 346, transmission slider; 347, transmission belt; 348, driven shaft; 349, support seat; 3491, chute; 363, limit mounting plate; 361, limit lever; 372, transmission solid plate two; 381, transmission pressure plate one; 382, transmission pressure plate two; 410, sensor; 400, anti-collision bar; 401, anti-collision washer; 420, detection sensor.

Detailed ways

The following examples illustrate the implementation of the present application, and those skilled in the art can understand other advantages and effects of the present application from the content disclosed in this specification. The present application can also be implemented or applied through other different implementation modes.

It should be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic ideas of the present application, so that only the components related to the application are shown in the diagrams rather than the number, shape and number of components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual implementation, and the component layout type may also be more complicated.

All directional indications (such as up, down, left, right, front, back, horizontal, vertical, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement, etc. between the various components in a specific posture, If the specific posture changes, the directional indication also changes accordingly.

Embodiment one:

As shown in Figures 1-3, a jaw mechanism (for example: the jaw mechanism is a jaw mechanism with variable pitch), including a transmission assembly 20, a clamping assembly 10, and a frame carrying the transmission assembly 20 and the clamping assembly 10 The frame assembly 30, the clamping assembly 10 is provided with two groups, the two groups of clamping assemblies 10 are distributed in parallel, the transmission assembly 20 is respectively connected with the two groups of clamping assemblies 10, and the transmission assembly is set to adjust the two groups of clamping assemblies 10 spacing.

In one embodiment, the frame assembly 30 includes a frame bottom plate 311, a frame side plate 313, and a frame connecting plate 312. Two sets of frame side plates 313 are fixed on both sides of the frame bottom plate 311 in parallel, and the frame sides far away from each other The end face of the plate 313 is flush with the end face of the frame bottom plate 311. The frame bottom plate 311 is fixed with a bottom plate moving groove 3111 that penetrates up and down. The two groups of clamping assemblies 10 are set to move in the bottom plate moving groove 3111. The plate 312 is fixed on the upper end surfaces of the two sets of frame side plates 313. A frame cavity is formed between the frame connection plate 312, the two sets of frame side plates 313 and the frame bottom plate 311, and the transmission assembly 20 is located in the frame cavity.

In one embodiment, the frame side panels 313 extend vertically, and the frame side panels 313 are above the frame bottom panel 311 .

In one embodiment, two sets of symmetrical frame connecting grooves 3121 are fixed on the upper surface of the frame connecting plate 312 , and the frame connecting grooves 3121 are configured to position the frame assembly 30 for connection with external devices.

In one embodiment, the transmission assembly 20 includes a transmission motor 341, the two ends of the frame bottom plate 311 are fixed with a transmission motor fixing seat 342 and a support seat 349, the output shaft of the transmission motor 341 passes through the transmission motor fixing seat 342, and the transmission motor 341 The extension part of the output shaft is fixed with a drive wheel 344, and the support seat 349 is rotatably provided with a drive wheel 344, and a drive belt 347 is dynamically connected between the two sets of drive wheels 344. A transmission slider 346 is slidably arranged on the rail 345 , and the two sets of clamping assemblies 10 are respectively fixed with the transmission slider 346 , and the transmission motor 341 drives the clamping assembly 10 to move by driving the transmission belt 347 . In one embodiment, a horizontal chute 363 runs through the support base 349 , and a driven shaft 348 slidably connected to the chute 363 is provided between the support base 349 . The left and right sides of the groove 363 are arc-shaped surfaces, the upper and lower sides of the chute 363 are planes, the sliding contact surface between the driven shaft 348 and the chute 363 is a plane, and the driven shaft 348 passes through the sliding surface of the chute 363. To adjust the tension of the transmission belt 347, the length direction of the transmission slide rail 345 is consistent with the transmission direction of the transmission belt 347.

Exemplarily, the transmission assembly 20 includes a transmission motor 341, the transmission motor 341 is fixed on the first side of the frame bottom plate 311, and a transmission motor fixing seat 342 opposite to the transmission motor 341 is fixed on the frame bottom plate 311, and the transmission motor The output shaft of 341 runs through the transmission motor fixing seat 342 and extends to the frame cavity. The extension part of the output shaft of the transmission motor is fixed with a transmission wheel 344, and the second side of the frame bottom plate 311 is fixed with a front and rear symmetrical support seat 349. A horizontal chute 3491 runs through the support base 349, and a driven shaft 348 slidingly connected to the chute 3491 is provided between the two sets of support bases 349, and a drive wheel 344 is rotatably arranged on the driven shaft 348. A transmission belt 347 is dynamically connected between the two groups of transmission wheels 344, the left and right sides of the chute 3491 are arc-shaped, the upper and lower sides of the chute 3491 are planes, and the driven shaft 348 and The sliding contact surface of the chute 3491 is flat to prevent the driven shaft 348 from rotating. The driven shaft 348 adjusts the tension of the transmission belt 347 by sliding on the chute 3491. The frame bottom plate 311 is symmetrically fixed with moving grooves located on the bottom plate. The transmission slide rails 345 on both sides of the 3111, the length direction of the transmission slide rails 345 is consistent with the transmission direction of the transmission belt 347, and the transmission slide rails 345 are slidably provided with transmission slide blocks 346. If multiple transmission slide blocks 346 are provided, the two groups of clamping The components 10 are respectively fixed with the transmission sliders 346 , and the transmission motor 341 drives the clamping component 10 to move by driving the transmission belt 347 .

In one embodiment, each set of clamping assemblies 10 includes an assembly connecting plate 100, and the assembly connecting plates 100 of the two sets of clamping assemblies are respectively connected to the transmission sliders 346 on the two sets of transmission slide rails 345. , the moving direction of the component connecting plate 100 is consistent with the driving direction of the transmission belt 347, and the transmission belt 347 drives the clamping component 10 to move. A synchronous belt penetrating chamber 1 is formed between the transmission pressure plate 1 381 and the component connecting plate 100, and a transmission solid plate 371 fixed to the transmission pressure plate 1 381 is arranged in the synchronous belt penetrating cavity 1, and a transmission belt 347 located on the upper side of the component connecting plate 100 Pass through the synchronous belt through the cavity and be pressed by the transmission fixing plate 1 371, so that the transmission pressure plate 381 moves with the transmission belt 347, and then drives the clamping assembly 10 to move through the transmission belt 347, and the assembly connecting plate of another set of clamping assembly 10 The upper end surface of the 100 is fixed with a transmission platen 2 382, a synchronous belt penetrating cavity 2 is formed between the transmission platen 382 and the frame bottom plate 311, and a transmission platen 2 fixed to the transmission platen 382 is arranged in the synchronous belt penetrating cavity 2 372, the transmission belt 347 located on the lower side of the component connecting plate 100 passes through the second cavity through the synchronous belt and is pressed by the transmission solid plate 2 372, so that the transmission pressure plate 2 382 moves with the transmission belt 347, and then drives the clamping assembly 10 to move through the transmission belt 347 , the transmission motor 341 realizes the same direction or reverse movement of the two groups of clamping assemblies 10 through the transmission belt 347, thereby controlling the distance between the quartz boats clamped by the two groups of clamping assemblies 10.

In one embodiment, the contact surfaces of the first driving fixing plate 371 and the second driving fixing plate 372 and the driving belt 347 are provided with a toothed structure, and the toothed structure meshes with the driving belt. The toothed structure meshes with the transmission belt 347 to avoid relative movement between the two, thus ensuring the transmission efficiency of the transmission belt 347 .

In one embodiment, in order to alleviate the impact force generated when the two groups of clamping assemblies 10 stop moving, a buffer device is fixed on the upper end surface of the frame bottom plate 311. In this embodiment, the buffer device is provided with two groups and Close to the ends of two groups of transmission slide rails 345 respectively, the buffer device includes a limit mounting plate 363, a limit rod 361 and a stop block 362, and the limit mounting plate 363 is an L-shaped structure, such as a limit mounting plate 363 It includes a horizontal plate located on the horizontal plane and fixedly connected to the frame bottom plate 311 and a vertical plate located on the vertical plane. The limiting rod 361 is movably connected to the vertical plate. In this embodiment, the limiting rod 361 is set as a screw rod. The limit rod 361 runs through the vertical plate and is fixed by a nut, thereby adjusting the distance between the end of the limit rod 361 and the vertical plate. Block 362 is made of resilient material, thereby increasing the longevity of the structure.

In one embodiment, in order to prevent the quartz boat from colliding when the clamping components 10 move in the same direction, an anti-collision bar 400 is fixed on the side of the component connection plate 100 of a group of clamping components 10, and the anti-collision bar 400 An anti-collision washer 401 is fixed, and the anti-collision washer 401 is set as a soft elastic material, which can be cushioned and has a small degree of deformation under pressure, and has elastic recovery ability. In this embodiment, the anti-collision washer 401 The material is set to be polyurethane, so as to avoid collisions when the clamping component 10 clamps quartz boats of different sizes, and improve the safety level of the equipment.

In one embodiment, each set of clamping components 10 also includes a clamping mechanism 1010, the clamping mechanism 1010 is connected to the component connection plate 100 through the adapter plate 110 and the cylinder mounting plate 106, and the component connection plate 100 A symmetrical positioning cavity is fixed on the lower end surface of the lower end surface, and the positioning cavity is used for positioning the fixing of the component connection plate 100 and the adapter frame plate 110. The adapter frame plate 110 is fixedly connected with the cylinder mounting plate 106, and the clamping mechanism 1010 There are two groups, and the two groups of clamping mechanisms 1010 are symmetrically arranged on both ends of the cylinder mounting plate 106. The moving direction of the clamping mechanisms 1010 is perpendicular to the driving direction of the transmission belt 347, that is, the moving direction of the clamping mechanisms 1010 is in line with the clamping assembly 10 The direction of movement is vertical, the cylinder mounting plate 106 is fixed with a detection sensor 420 for detecting whether there is material in the quartz boat, the lower end surface of the frame bottom plate 311 is fixed with a sensor 410, and the adapter frame plate 110 is fixed with a The blocking piece matched with the sensor 410 , the cooperation between the sensor 410 and the blocking piece is used to detect the origin of the clamping assembly 10 .

In one embodiment, the clamping mechanism 1010 includes a driving cylinder 101 fixed on the cylinder mounting plate 106, a connecting plate 107 is fixed on the end surface of the output shaft of the driving cylinder 101, and a clamping claw is fixed on the connecting plate 107 The mounting plate 103, the side of the jaw mounting plate 103 is fixed with the jaws 102 located at the lower side of the connecting plate 107, two groups of jaws 102 are horizontally and symmetrically fixed at both ends of the jaw mounting plate 103, the jaws 102 The end face is fixed with a notch, and the notch spacing on the two sets of clamping jaws 102 matches the connecting rod spacing of the quartz boat. The design of the notch facilitates the clamping of the quartz boat and prevents the quartz boat from falling off, thereby improving the clamping efficiency and quality of the quartz boat. The jaw mounting plate 103 is connected with a supporting plate 104. In this embodiment, the supporting plate The plate 104 is arranged in an L-shaped structure, the supporting plate 104 includes a horizontal forming surface and a vertical forming surface, the vertical forming surface of the supporting plate 104 is fixedly connected with the lower end surface of the jaw mounting plate 103, and two groups of clamping jaws are clamped together. The horizontal molding surfaces of the two sets of supporting plates 104 of the mechanism 1010 are opposite to each other. During the clamping process of the quartz boat, the two groups of coaming plates of the quartz boat are respectively offset against the horizontal forming surface and the vertical forming surface of the supporting plate 104, that is, the supporting plate The horizontal molding surface of 104 supports the quartz boat, and the vertical molding surface of the supporting plate 104 restricts the movement of the quartz boat, that is, the quartz boat is limited, and the output shaft of the driving cylinder 101 is extended or retracted to drive the clamping. The movement of the mechanism 1010, thereby realizing the loosening or clamping movement of the quartz boat.

In one embodiment, in order to slow down the impact force generated when the output shaft of the driving cylinder 101 is retracted, a limit plate 105 is fixed on the cylinder mounting plate 106, a buffer rod is arranged on the limit plate 105, and the end surface of the buffer rod is fixed. A washer is provided, and the washer is opposite to the jaw mounting plate 103. The washer is made of soft elastic material, which can be used for cushioning and has little deformation under pressure, and has elastic recovery ability.

In summary, the benefits of this application are:

1), the application drives the transmission belt 347 through the transmission motor 341 to realize the synchronous movement of the two sets of clamping assemblies 10 in the same direction or in the opposite direction, and realizes the adjustability of the distance between the quartz boats. Clamping or loosening, simple structure and convenient operation.

2), the application through the design of the anti-collision bar 400 and the anti-collision washer 401 can effectively alleviate the impact force generated by the collision between the quartz boats.

3) In this application, through the design of the buffer rod and the washer, the impact force generated by the movement of the clamping mechanism 1010 on the equipment can be effectively relieved.

Claims

A jaw mechanism, comprising a transmission assembly, a clamping assembly, and a frame assembly carrying the transmission assembly and the clamping assembly;

The clamping components are provided with two groups, and the clamping components of the two groups are distributed in parallel;

The transmission components are respectively connected with two groups of the clamping components, and the transmission components are configured to adjust the distance between the two groups of the clamping components.
The gripper mechanism according to claim 1, wherein the frame assembly includes a frame bottom plate, a frame side plate and a frame connecting plate, two sets of frame side plates are fixed in parallel on both sides of the frame bottom plate, the The bottom plate of the frame is fixed with a bottom plate moving groove, the two sets of clamping assemblies are set to move in the bottom plate moving groove, the frame connecting plate is fixed on the upper end surface of the two sets of frame side plates, and the frame A frame cavity is formed between the connecting plate, the two sets of frame side plates and the frame bottom plate, and the transmission assembly is located in the frame cavity.
The jaw mechanism according to claim 2, wherein the transmission assembly includes a transmission motor, the two ends of the frame bottom plate are fixed with a transmission motor fixing base and a support base, and the output shaft of the transmission motor passes through the transmission The motor fixing seat, the extension part of the output shaft of the transmission motor is fixed with a transmission wheel, the support seat is rotatably provided with a transmission wheel, and a transmission belt is dynamically connected between the two groups of transmission wheels, and the frame bottom plate is fixed symmetrically. There is a transmission slide rail, and a transmission slider is slidably arranged on the transmission slide rail. The two sets of clamping components are respectively fixed with the transmission slider, and the transmission motor drives the clamping assembly by driving the transmission belt. Components move.
The jaw mechanism according to claim 3, wherein each set of clamping components includes a component connecting plate, and the component connecting plates of the two groups of clamping components are respectively fixed with the transmission sliders, one The upper end surface of the component connecting plate of the set of clamping components is fixed with a transmission pressure plate 1, and a synchronous belt penetrating cavity 1 is formed between the transmission pressure plate 1 and the component connecting plate, and the synchronous belt penetrates into the cavity 1 There is a transmission fixing plate fixed to the driving pressing plate, the transmission belt passes through the synchronous belt through cavity and is compressed by the driving fixing plate, the driving pressing plate moves with the transmission belt, and the other The upper end surface of the component connecting plate of a group of the clamping components is fixed with the second transmission pressure plate, and a synchronous belt is formed between the second transmission pressure plate and the bottom plate of the frame, and the synchronous belt penetrates through the second cavity There is a transmission fixing plate 2 fixed to the transmission pressing plate 2. The transmission belt passes through the synchronous belt through the cavity 2 and is pressed by the transmission fixing plate 2. The transmission pressing plate 2 moves with the transmission belt and passes The driving belt drives the two groups of clamping assemblies to move synchronously in the same direction or in opposite directions, and the moving direction of the assembly connecting plate is consistent with the driving direction of the driving belt.
The jaw mechanism according to claim 4, wherein each set of clamping components further includes a clamping mechanism, and the clamping mechanism is connected to the component connecting plate through an adapter plate and a cylinder mounting plate, so The component connecting plate is fixed with a symmetrical positioning cavity, and the positioning cavity positions the fixing of the component connecting plate and the adapter frame plate, and the adapter frame plate is fixedly connected with the cylinder mounting plate , there are two groups of clamping mechanisms, and the two groups of clamping mechanisms are symmetrically arranged at both ends of the cylinder mounting plate, the moving direction of the clamping mechanism is perpendicular to the moving direction of the clamping assembly, so The cylinder mounting plate is fixed with a detection sensor for detecting whether there is material in the quartz boat, the lower end surface of the frame bottom plate is fixed with a sensor, and the adapter frame plate is fixed with a block that cooperates with the sensor. The cooperation between the sensor and the blocking plate is used to detect the origin of the clamping assembly.
The jaw mechanism according to claim 5, wherein the clamping mechanism comprises a driving cylinder, the end face of the output shaft of the driving cylinder is fixed with a jaw mounting plate, and the side of the jaw mounting plate is fixed with Horizontally symmetrical jaws, the end faces of the jaws are fixed with notches, the distance between the notches on the two groups of jaws matches the distance between the connecting rods of the quartz boat, and the mounting plate of the jaws is connected to the supporting plate for the The quartz boat is supported and the quartz boat is limited, and the extension or retraction movement of the driving cylinder drives the movement of the clamping mechanism to control the release or clamping of the quartz boat.
The jaw mechanism according to claim 4, wherein, the contact surfaces of the first and second driving fixing plates and the driving belt are provided with a toothed structure, and the toothed structure is engaged with the driving belt.
The claw mechanism according to claim 3, wherein a horizontal chute is provided through the support seat, a driven shaft slidably connected to the chute is arranged between the support seats, and the transmission wheel Rotate with the driven shaft, the left and right sides of the chute are arc-shaped, the upper and lower sides of the chute are flat, and the sliding contact surface between the driven shaft and the chute is a plane, the driven shaft adjusts the tension of the transmission belt by sliding in the chute, and the length direction of the transmission slide rail is consistent with the transmission direction of the transmission belt.
The jaw mechanism according to claim 2, wherein, the frame connecting plate is fixed with two groups of symmetrical frame connecting grooves, and the frame connecting grooves are configured to position for the connection between the frame assembly and the external device.
According to the jaw mechanism according to claim 6, the jaw mechanism further includes a buffer device, the buffer device includes a limit installation plate, a limit rod and a stop block, the limit installation plate is an L-shaped structure, the The limit rod runs through the limit mounting plate, the block is fixed on the end of the limit rod, and the block is made of elastic material; the cylinder mounting plate is fixed with a limit plate, the A buffer rod is arranged on the limit plate, and a gasket is fixed on the end face of the buffer rod, and the gasket is opposite to the jaw mounting plate, and the gasket is set as a soft elastic material; the side of the component connecting plate is fixed An anti-collision bar is provided, and an anti-collision washer is fixed on the anti-collision bar, and the anti-collision washer is set as a soft elastic material.