WO2023079807A1

WO2023079807A1 - Cutting device and method for manufacturing cut article

Info

Publication number: WO2023079807A1
Application number: PCT/JP2022/030037
Authority: WO
Inventors: 聡子堀; 将馬大西; 翔吉岡; 京太郎堀本
Original assignee: Ｔｏｗａ株式会社
Priority date: 2021-11-08
Filing date: 2022-08-05
Publication date: 2023-05-11
Also published as: JP7193606B1; CN117794689A; TW202319205A; KR20240024291A; TWI812389B; JP2023069605A

Abstract

Provided are a cutting device capable of washing a flange, and a method for manufacturing a cut article.　The present invention comprises: a blade replacement mechanism for replacing a blade provided on a spindle part; and a washing mechanism for washing a pair of flanges for fixing the blade to the spindle part.

Description

CUTTING DEVICE AND CUTTING PRODUCT MANUFACTURING METHOD

The present invention relates to technology of a cutting device and a method of manufacturing a cut product.

Patent Document 1 discloses a cutting device equipped with a blade replacement mechanism that can replace the blade attached to the spindle. Specifically, the blade replacement mechanism described in Patent Literature 1 holds a blade and a flange for fixing the blade, which can be attached to and detached from the spindle. A blade change mechanism allows blade changes to occur automatically.

JP 2019-5857 A

Here, in the cutting device as described in Patent Document 1, cutting chips and water droplets generated during cutting may adhere to the flange, so it is preferable to clean the flange as appropriate. Therefore, from the viewpoint of reducing the work load, there is a demand for a technique capable of automatically cleaning the flange.

The present invention has been made in view of the above circumstances, and the problem to be solved is to provide a cutting device and a method for manufacturing a cut product that can clean the flange.

The problem to be solved by the present invention is as described above. In order to solve this problem, the cutting device according to the present invention includes a blade changing mechanism for changing a blade provided in a spindle portion, and a blade changing mechanism for changing the blade to the spindle. a cleaning mechanism for cleaning the pair of flanges for fixing to the part.

Further, the method for manufacturing a cut product according to the present invention includes steps of replacing the blade provided on the spindle portion using the cutting device, cleaning the pair of flanges, and cutting an object to be cut with the blade. and C. cutting the object.

According to the present invention, the flange can be cleaned.

BRIEF DESCRIPTION OF THE DRAWINGS The plane schematic diagram which showed the whole structure of the cutting device which concerns on one Embodiment. The perspective view which showed the positional relationship of a blade exchange mechanism, a washing|cleaning mechanism, and a spindle. The perspective view which showed the operation|movement of a moving part. FIG. 2 is an enlarged cross-sectional perspective view showing the configuration of the spindle section; (a) A perspective view showing the shape of the first cleaning sponge. (b) A perspective view showing a modification of the first cleaning sponge. (a) A schematic diagram showing how a blade is cleaned with air from an air nozzle. (b) A schematic diagram showing how the second flange and blade are removed from the spindle. (c) A schematic diagram showing how a used blade is stored. (d) The schematic diagram which showed a mode that the 2nd flange was wash|cleaned by the 2nd washing|cleaning sponge. (a) The schematic diagram which showed a mode that the holding|maintenance part hold|maintains an unused blade. (b) A schematic diagram showing how the first flange is cleaned with air from an air nozzle. (c) The schematic diagram which showed a mode that the 1st flange was wash|cleaned by the 1st washing sponge. (d) A schematic diagram showing how the second flange and blade are attached to the spindle.

<Configuration of cutting device 1>
First, the configuration of the cutting device 1 according to this embodiment will be described. In this embodiment, for example, the configuration of the cutting apparatus 1 will be described in the case of using a sealed substrate W obtained by resin-sealing a substrate on which a semiconductor chip is mounted as an object to be cut by the cutting apparatus 1 .

As the sealed substrate W, for example, a BGA (ball grid array) package substrate, a CSP (chip size package) package substrate, an LED (light emitting diode) package substrate, or the like is used. Moreover, as the object to be cut, not only the sealed substrate W, but also a sealed lead frame obtained by resin-sealing a lead frame having a semiconductor chip mounted thereon may be used.

The cutting device 1 shown in FIG. 1 is a processing device that separates a plurality of cut products (products P) by cutting a sealed substrate W, which is an object to be cut. The cutting device 1 comprises a substrate supply module A, a cutting module B and a storage module C as components. Each component is removable and replaceable with respect to other components.

<Substrate supply module A>
The substrate supply module A is mainly provided with a substrate supply mechanism 11 and a controller CTL.

The sealed substrate W, which is the object to be cut, is unloaded from the substrate supply mechanism 11 and transferred to the cutting module B by a transfer mechanism (not shown). The control section CTL controls the operation of each section of the cutting device 1 . By controlling each part of the cutting device 1 by the control part CTL, loading of the sealed substrate W, cutting of the sealed substrate W, inspection of the product P, unloading of the product P, and the like can be performed. Note that the controller CTL can be provided in a module other than the substrate supply module A. Also, the control unit CTL can be divided into a plurality of units. For example, each module may be provided with a control unit CTL, and each unit may be controlled by linking the control units CTL.

<Cutting module B>
The cutting module B shown in FIG. 1 mainly includes a cutting table 21, a cutting jig 22, a moving mechanism 23, a rotating mechanism 24, a spindle section 25, a partition wall 26, a blade changing table 27, a blade changing mechanism 100, and a closing section. 200, a first cleaning mechanism 310 (cleaning mechanism 300) and a second cleaning mechanism 320 (cleaning mechanism 300) are provided.

In this embodiment, a twin-cut table type cutting device 1 having two cutting tables 21 is exemplified. A cutting jig 22 is provided on the cutting table 21 . The cutting table 21 can be moved in the Y direction by a moving mechanism 23 and can be rotated in the θ direction by a rotating mechanism 24 .

Also, in this embodiment, the cutting device 1 having a twin-spindle structure having two spindle portions 25 is exemplified. The two spindles 25 are independently movable in the X and Z directions.

The partition wall 26 is provided at an appropriate position so as to partition the space in which the spindle part 25 is arranged and the space in which the blade exchange table 27 is arranged. In this embodiment, the partition wall 26 is arranged behind one spindle portion 25 (on the right side in the drawing). Moreover, the partition wall 26 is arranged so as to surround the blade exchange table 27 . A part of the partition wall 26 is formed with an opening 26a that connects the space in which the spindle part 25 is arranged and the space in which the blade exchange table 27 is arranged.

1 and 2, a used blade housing section 27a housing a used blade 25a used in the spindle section 25 and a replacement unused blade 25a are housed on the upper surface of the blade exchange table 27. An unused blade accommodation portion 27b is provided. The used blade housing portion 27a is formed in a box shape with an open top. A second cleaning mechanism 320 (cleaning mechanism 300), which will be described later, is provided on the upper surface of the blade exchange table 27. As shown in FIG.

The configurations of the unused blade storage portion 27b and the used blade storage portion 27a are not limited to this embodiment, and can be arbitrarily changed. As an example, the used blade housing portion 27a may be configured to have a columnar member extending vertically. In such a configuration, it is possible to hold the blade 25a by inserting the center of the blade 25a into the cylindrical member.

The blade replacement mechanism 100 replaces the blade 25a provided on the spindle section 25. The blade exchange mechanism 100 is arranged behind the two spindles 25 (on the right side in the drawing). The blade replacement mechanism 100 is provided with a closing portion 200 capable of closing the opening 26 a of the partition wall 26 . The blade exchange mechanism 100 is also provided with a first cleaning mechanism 310 (cleaning mechanism 300), which will be described later.

In the cutting module B, the sealed substrate W is cut by relatively moving the cutting table 21 and the two spindles 25 while the sealed substrate W is held on the cutting table 21. can be individualized. The blade 25a of the spindle part 25 cuts the sealed substrate W held on the cutting table 21 by rotating in a plane including the Y direction and the Z direction. At this time, the sealed substrate W can also be cut while spraying cutting water toward the blade 25a.

<Storage module C>
The storage module C is mainly provided with an inspection table 31 and a tray 32 .

On the inspection table 31, an assembly of a plurality of products P obtained by cutting the sealed substrate W into individual pieces is placed. A plurality of products P are inspected by an inspection camera (not shown) and sorted into non-defective products and defective products. The sorted non-defective products are accommodated in the tray 32 . The sorted defective products are accommodated in a separately prepared tray (not shown) and excluded from the products P. Note that it is not always necessary to inspect the product P in the storage module C.

<Detailed Configuration of Blade Exchange Mechanism 100, etc.>
Next, the configurations of the blade replacement mechanism 100, the blocking section 200, and the cleaning mechanism 300 will be described in more detail. Since the detailed structure, shape, etc. of each part of the blade exchange mechanism 100 and the like are not particularly limited, the shapes of each part, etc. are appropriately simplified and illustrated in this embodiment.

<Blade exchange mechanism 100>
As shown in FIGS. 2 and 3, the blade replacement mechanism 100 mainly includes a support section 110, a holding section 120 and a moving section .

The support part 110 supports the holding part 120 and the first cleaning mechanism 310 which will be described later. The support portion 110 can be formed by combining appropriate members (bar-shaped member, plate-shaped member, etc.). In this embodiment, the support part 110 is formed in a long shape elongated in one direction (the X direction in FIGS. 2 and 3).

The holding portion 120 is capable of holding the blade 25 a provided on the spindle portion 25 and the second flange 25 d for fixing the blade 25 a to the spindle portion 25 . The holding portion 120 is provided at one end portion of the support portion 110 in the longitudinal direction.

Here, using FIG. 4, the configuration of the spindle portion 25 (particularly, the portion related to fixing the blade 25a) will be described. FIG. 4 shows a partial cross section of one of the two spindles 25 (spindle 25 on the left side of the page in FIG. 2).

A substantially annular first flange 25c is fixed to the rotating shaft 25b of the spindle portion 25 . Furthermore, a substantially annular second flange 25d is provided so as to face the first flange 25c. The first flange 25c and the second flange 25d are embodiments of one flange and the other flange, respectively, according to the present invention.

The second flange 25d is pressed toward the first flange 25c by tightening the detachable member 25e such as a nut to the boss portion of the first flange 25c. A first contact surface 25f and a second contact surface 25g projecting in directions facing each other are formed on the outer peripheral portions of the first flange 25c and the second flange 25d. A substantially annular blade 25a is sandwiched and fixed between the first contact surface 25f and the second contact surface 25g.

The holding part 120 shown in FIGS. 2 and 3 can rotate the detachable member 25e attached to the spindle part 25 to attach and detach the detachable member 25e to the boss portion of the first flange 25c. Further, the holding portion 120 can hold the blade 25a and the second flange 25d independently. As a method for holding the blade 25a and the second flange 25d by the holding portion 120, for example, there is a method of holding the blade 25a by suction, a method of hooking the blade 25a or the like with a claw-like member to hold the blade 25a mechanically, and the like. mentioned.

Thus, the holding section 120 can remove the blade 25 a and the second flange 25 d attached to the spindle section 25 from the spindle section 25 . Moreover, the holding part 120 can attach the blade 25a and the second flange 25d that it holds to the spindle part 25 .

The moving part 130 moves the supporting part 110 in any direction. The moving part 130 mainly includes a rotating part 131 , a first linear moving part 132 , a second linear moving part 133 and a third linear moving part 134 .

The rotating part 131 rotates the supporting part 110 . The rotating portion 131 can support the supporting portion 110 and rotate the supporting portion 110 using the driving force of a driving source such as a motor. The rotating portion 131 can rotate the supporting portion 110 around an axis parallel to the Y direction.

The first linear moving part 132 moves the rotating part 131 linearly. The first linear moving part 132 supports the rotating part 131 and can move the rotating part 131 using the driving force of a driving source such as a motor. The first linear moving part 132 can linearly move the rotating part 131 along the Y direction.

The second linear movement section 133 linearly moves the first linear movement section 132 . The second linearly moving part 133 supports the first linearly moving part 132 and can move the first linearly moving part 132 using the driving force of a driving source such as a motor. The second linear movement part 133 can linearly move the first linear movement part 132 along the Z direction.

The third linear movement section 134 shown in FIG. 2 linearly moves the second linear movement section 133 . The third linearly moving part 134 supports the second linearly moving part 133 and can move the second linearly moving part 133 using the driving force of a driving source such as a motor. The third linear movement section 134 can linearly move the second linear movement section 133 along the X direction.

By combining the movement of each part of the moving part 130 configured as described above, the supporting part 110 can be moved to an arbitrary position and arbitrarily rotated around the axis along the Y direction.

<Blocking part 200>
The closing part 200 can close the opening 26 a of the partition wall 26 . The closing portion 200 is formed in a plate shape corresponding to the opening portion 26a. The closing part 200 is arranged on one side of the support part 110 (on the right side of the drawing in FIG. 2) in the X direction. The closing part 200 is provided on the moving part 130 with the plate surface facing in the X direction. Specifically, the blocking part 200 is provided on the second linear movement part 133 and can be linearly moved in the X direction by the third linear movement part 134 .

<Washing Mechanism 300>
The cleaning mechanism 300 is for cleaning the flanges (the first flange 25c and the second flange 25d) for fixing the blade 25a to the spindle portion 25. As shown in FIG. The cleaning mechanism 300 mainly comprises a first cleaning mechanism 310 and a second cleaning mechanism 320 .

The first cleaning mechanism 310 shown in FIG. 3 cleans the first flange 25c attached to the spindle portion 25. The first cleaning mechanism 310 shown in FIG. The first cleaning mechanism 310 mainly comprises a first cleaning sponge 311 and air nozzles 312 .

The first cleaning sponge 311 shown in FIGS. 3 and 5(a) is a cleaning member for cleaning the first flange 25c. The first cleaning sponge 311 is formed in a cylindrical shape having the same outer diameter as the first flange 25c. The first cleaning sponge 311 is attached to one longitudinal end of the support 110 via a disk-shaped attachment member 311a. The first cleaning sponge 311 is provided on the side opposite to the holding portion 120 in the longitudinal direction of the support portion 110 . In other words, the first cleaning sponge 311 is provided at a position inverted 180 degrees from the holding portion 120 with the rotating shaft of the rotating portion 131 as the center. In this embodiment, the "side opposite to the holding section 120" on which the first cleaning sponge 311 is arranged is an example of the "side different from the holding section" according to the present invention.

Note that the first cleaning sponge 311 is not limited to the cylindrical shape shown in FIG. 5(a), and may be of any shape. For example, as in a modification shown in FIG. 5B, a cylinder may be divided into a plurality of pieces. As a result, the corners of the sponge can clean the first flange 25c, and the cleaning ability of the first cleaning sponge 311 can be improved.

The air nozzle 312 shown in FIG. 3 can blow out compressed air supplied from a compressor (not shown). The air nozzle 312 is provided at one longitudinal end of the support 110 (on the same side as the first cleaning sponge 311). The air nozzle 312 is arranged with the blowing direction of air directed toward the first cleaning sponge 311 side.

The second cleaning mechanism 320 cleans the second flange 25d that has been removed from the spindle section 25 (held by the holding section 120). The second cleaning mechanism 320 mainly includes a second cleaning sponge 321 and a driving section 322 .

The second cleaning sponge 321 shown in FIG. 2 is a cleaning member for cleaning the second flange 25d. The second cleaning sponge 321 is formed in a cylindrical shape having the same diameter as the second flange 25d. The second cleaning sponge 321 is formed in the same shape as the first cleaning sponge 311 shown in FIG. The second cleaning sponge 321 is provided on the upper surface of the blade exchange table 27 with the axis of the cylinder directed in the Z direction.

The driving section 322 rotates the second cleaning sponge 321 . The drive unit 322 has a drive source such as a motor, for example. The output shaft of the drive part 322 is connected to the second cleaning sponge 321 . The driving force of the driving portion 322 can rotate the second cleaning sponge 321 around an axis parallel to the Z direction.

<Operation of Blade Exchange Mechanism 100, etc.>
Next, the operation of the blade replacement mechanism 100 and the cleaning mechanism 300 configured as described above to replace the blade 25a provided on the spindle portion 25 and to clean the first flange 25c and the second flange 25d will be described. . In the following, the case of replacing the blade 25a of one of the two spindles 25 (for example, the spindle 25 on the left side of the drawing in FIG. 2) will be described.

When the cutting device 1 is cutting the sealed substrate W, the blocking part 200 stands by at a position blocking the opening 26a of the partition wall 26, as indicated by the two-dot chain line in FIG. By closing the opening 26a with the closing part 200 in this way, the space in which the blade exchange table 27 is arranged and the space in which the spindle part 25 is arranged can be separated. As a result, it is possible to prevent shavings and water droplets generated during cutting of the sealed substrate W from adhering to the blade exchange table 27 (particularly, the unused blade housing portion 27b housing the replacement blade 25a). can. In this state, the holding section 120 and the first cleaning mechanism 310 are located in the space where the blade exchange table 27 is arranged.

When replacing the blade 25a or the like, the cutting of the sealed substrate W by the cutting device 1 is temporarily interrupted. The replacement of the blade 25a and the cleaning of the first flange 25c and the second flange 25d can be performed at any timing. For example, the wear amount of the blade 25a can be detected by an appropriate sensor, and the blade 25a can be replaced when the wear amount exceeds a certain amount. Also, the blade 25a can be replaced at the timing when the operation time of the cutting device 1, the production number of the product P, and the like exceed a predetermined value.

When the blade 25a is replaced, etc., the moving part 130 moves the closing part 200 integrally with the supporting part 110 and the holding part 120, and the opening 26a of the partition wall 26 is opened. The support portion 110 and the like can move between the space on the spindle portion 25 side and the space on the blade exchange base 27 side through the opened opening portion 26a.

When replacing the blade 25a or the like, first, as shown in FIG. In this state, air is blown out from the air nozzle 312 to remove shavings and water droplets adhering to the blade 25a.

Note that cutting debris and water droplets that cannot be removed by the air nozzle 312 remain on the blade 25a. Then, as will be described later, when the second flange 25d and the blade 25a are removed from the spindle portion 25, chips and water droplets remaining on the blade 25a may adhere to the first flange 25c and the second flange 25d and contaminate them. be.

Next, as shown in FIG. 6(b), the support section 110 is turned over by the moving section 130, and the holding section 120 is moved to a position facing the blade 25a of the spindle section 25. As shown in FIG. Then, the second flange 25 d and the blade 25 a are removed from the spindle portion 25 by the holding portion 120 .

Next, as shown in FIG. 6(c), the holding part 120 is moved by the moving part 130 to a position facing the used blade storage part 27a provided in the blade exchange table 27 from above. Then, the holding portion 120 releases the blade 25a, and the used blade 25a is stored in the used blade storage portion 27a.

Next, as shown in FIG. 6(d), the moving part 130 moves the second flange 25d held by the holding part 120 to a position where it comes into contact with the upper surface of the second cleaning sponge 321 of the second cleaning mechanism 320. be. In this state, the drive unit 322 rotates the second cleaning sponge 321 to clean the surface of the second flange 25d (particularly, the second contact surface 25g shown in FIG. 4). As a result, chips and the like adhering to the second flange 25d can be removed.

Next, as shown in FIG. 7(a), the holding section 120 is moved by the moving section 130 to a position facing the unused blade housing section 27b provided in the blade exchange base 27 from above. The unused blade 25a housed in the unused blade housing portion 27b is held by the holding portion 120. As shown in FIG. By providing the used blade housing portion 27a, the unused blade housing portion 27b, and the second cleaning mechanism 320 in the same blade exchange table 27 as in the present embodiment, the holding portion 120 can store the used blade housing portion 27a and the unused blade housing portion 27a. The movement distance when moving between the blade accommodating portion 27b and the second cleaning mechanism 320 can be kept short.

Next, as shown in FIG. 7(b), the support portion 110 is moved by the moving portion 130, and the tip of the air nozzle 312 is directed to the first flange 25c attached to the spindle portion 25. Then, as shown in FIG. In this state, air is blown out from the air nozzle 312 to remove shavings and water droplets adhering to the first flange 25c.

Next, as shown in FIG. 7(c), the moving part 130 moves the first cleaning sponge 311 of the first cleaning mechanism 310 to a position where it comes into contact with the first flange 25c attached to the spindle part 25. Then, as shown in FIG. In this state, the rotation of the spindle portion 25 cleans the surface of the first flange 25c (especially the first contact surface 25f shown in FIG. 4). As a result, chips and the like adhering to the first flange 25c can be removed.

Next, as shown in FIG. 7(d), the support section 110 is turned over by the moving section 130, and the holding section 120 is moved to a position facing the first flange 25c of the spindle section 25. As shown in FIG. Then, the second flange 25 d and the blade 25 a held by the holding portion 120 are attached to the spindle portion 25 .

In the above example, the operation of exchanging the blade 25a of one spindle portion 25 was explained, but the operation of exchanging the blade 25a of the other spindle portion 25 is generally the same, so the explanation is omitted. omitted.

As described above, when the replacement of the blade 25a of the spindle part 25 and the cleaning of the first flange 25c and the second flange 25d are completed, the closing part 200 moves to the position to close the opening part 26a of the partition wall 26 again. (See Figure 2). Thereafter, the cutting of the sealed substrate W by the cutting device 1 is resumed.

Thus, in this embodiment, the step of replacing the blade 25a provided on the spindle portion 25 and the step of cleaning the first flange 25c and the second flange 25d can be performed in parallel. Further, a step of cutting the sealed substrate W with the replaced blade 25a can be performed.

As described above, the cutting apparatus 1 according to the present embodiment includes a blade replacement mechanism 100 for replacing the blade 25a provided on the spindle portion 25, and a pair of flanges for fixing the blade 25a to the spindle portion 25. and a cleaning mechanism 300 for cleaning the first flange 25c and the second flange 25d).
By configuring in this way, the flange can be cleaned. Further, by cleaning the flange by the cleaning mechanism 300, it is possible to reduce the user's burden of cleaning work. By cleaning the flange, the blade 25a can be properly fixed.

The cleaning mechanism 300 includes a first cleaning mechanism 310 that cleans the first flange 25c (one flange) of the pair of flanges, and a second flange 25d (the other flange) of the pair of flanges. and a second cleaning mechanism 320 that cleans the
By configuring in this way, the pair of flanges can be cleaned more effectively by cleaning the pair of flanges individually.

The first cleaning mechanism 310 can clean the first flange 25c attached to the spindle portion 25, and the second cleaning mechanism 320 can clean the first flange 25c attached to the spindle portion 25. The second flange 25d can be cleaned.
With this configuration, the second flange 25d removed from the spindle portion 25 and the first flange 25c remaining on the spindle portion 25 when replacing the blade 25a can be cleaned.

Further, the first cleaning mechanism 310 can clean the first flange 25c while the first flange 25c attached to the spindle portion 25 is rotated by the rotation of the spindle portion 25. As shown in FIG.
With this configuration, the rotation of the spindle portion 25 can be used to clean the first flange 25c. As a result, the structure of the first cleaning mechanism 310 can be simplified.

Further, the blade replacement mechanism 100 includes a holding portion 120 capable of holding the blade 25a and the second flange 25d, a support portion 110 supporting the holding portion 120 and the first cleaning mechanism 310, and the and a moving part 130 capable of moving the support part 110 , and the first cleaning mechanism 310 is provided on a different side of the support part 110 from the holding part 120 .
By configuring in this way, by providing the first cleaning mechanism 310 and the holding portion 120 on different sides, it is possible to prevent the center of gravity of the support portion 110 from becoming biased. Thereby, the support part 110 can be smoothly moved. Particularly in this embodiment, since the first cleaning mechanism 310 and the holding portion 120 are provided on the opposite sides, the bias of the center of gravity of the support portion 110 can be effectively prevented.

Further, the second cleaning mechanism 320 can clean the second flange 25d held by the holding portion 120. As shown in FIG.
With this configuration, the second flange 25d held by the holding portion 120 can be washed as it is when the blade 25a is replaced, so the second flange 25d can be washed efficiently.

Further, the cutting device 1 partitions the space in which the spindle portion 25 is arranged and the space in which the replacement blade 25a is arranged, and is moved by the partition wall 26 having the opening portion 26a and the moving portion 130. and a closing portion 200 that closes the opening 26a when the blade changing mechanism 100 is in place.
With this configuration, the holder 120 and the like can be moved through the opening 26a, and the opening 26a can be closed by the closing part 200 as necessary. For example, by closing the opening 26a with the closing part 200 during the cutting of the sealed substrate W, it is possible to prevent shavings and the like from adhering to the replacement blade 25a. Particularly in this embodiment, when the closing portion 200 closes the opening portion 26a, the holding portion 120 and the first cleaning mechanism 310 are arranged in the space on the replacement blade 25a side. It is also possible to prevent shavings and the like generated during the cutting of W from adhering to the holding portion 120 and the like.

In addition, the method for manufacturing the product P (cut product) according to the present embodiment includes steps of replacing the blade 25a provided on the spindle portion 25 using the cutting device 1, and cleaning the pair of flanges. and a step of cutting the sealed substrate W (object to be cut) with the blade 25a.
By configuring in this way, the flange can be cleaned. Particularly in this embodiment, the process of replacing the blade 25a and the process of cleaning the pair of flanges can be performed in parallel, so that the product P can be manufactured efficiently.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and can be appropriately modified within the scope of the technical ideas of the invention described in the claims. .

For example, the configuration of the moving unit 130 of the present embodiment (see FIG. 3, etc.) is an example, and any configuration capable of moving the holding unit 120 and the first cleaning mechanism 310 to the required positions is a specific configuration. is not limited. Moreover, although the closing part 200 is provided in the second linearly moving part 133, the present invention is not limited to this. That is, the closing part 200 may be configured to be moved by the moving part 130 to close the opening 26a. is also possible.

In this embodiment, when cleaning the first flange 25c, an example is shown in which the spindle portion 25 is rotated (see FIG. 7(c)). is.

Further, the shapes of the first cleaning sponge 311 and the second cleaning sponge 321 are not limited to the shapes of this embodiment (see FIG. 5), and can be arbitrarily changed.

Further, although the cleaning mechanism 300 according to the present embodiment performs cleaning using sponges (the first cleaning sponge 311 and the second cleaning sponge 321) as cleaning members, the present invention is not limited to this. It is also possible to use a cleaning member (for example, a waste cloth, etc.).

In addition, the cleaning mechanism 300 according to the present embodiment cleans the flange with the sponge and the air nozzle 312, but the method of cleaning the flange is not limited to this, and any cleaning method can be used to clean the flange. It is possible. For example, it is also possible to clean the flange by spraying cleansing water on the flange, or to clean the flange by sucking chips and the like adhering to the flange. Also, the cleaning mechanism 300 can combine a plurality of cleaning methods to clean the flange.

Further, in the present embodiment, an example of cleaning the first flange 25c with the first flange 25c attached to the spindle portion 25 (see FIGS. 7B and 7C) was shown, but the present invention is not limited to For example, the cleaning of the first flange 25c may be performed after the first flange 25c is removed from the spindle portion 25. FIG. In this case, a separate mechanism for attaching and detaching the first flange 25c may be provided to automatically attach and detach the first flange 25c.

Further, in the present embodiment, an example in which the holding part 120 and the first cleaning mechanism 310 are provided on the opposite side of the support part 110 (a position reversed 180 degrees when viewed from the front, see FIG. 6, etc.) was shown, but the present invention is not limited to this, and the holding section 120 and the first cleaning mechanism 310 can be provided at arbitrary positions on the support section 110 . For example, the first cleaning mechanism 310 can be arranged at a position rotated by 90 degrees or rotated by 120 degrees with respect to the holding portion 120 .

Further, in this embodiment, both the holding part 120 and the first cleaning mechanism 310 are provided on the support part 110, and an example is shown in which they are moved integrally, but the present invention is not limited to this. For example, the holding part 120 and the first cleaning mechanism 310 may be provided on separate members and moved independently of each other.

In the present embodiment, cutting of the sealed substrate W by the cutting device 1 is temporarily interrupted to replace the blade 25a and clean the flange. The timing to perform can be determined arbitrarily. For example, the blade 25a can be replaced before the cutting device 1 starts cutting the sealed substrate W or after the cutting device 1 has completely cut the sealed substrate W. FIG. Further, when a plurality of spindle units 25 are provided in the cutting device 1 as in the present embodiment, the blades 25a of the respective spindle units 25 may be replaced at the same timing or at different timings. is also possible.

1 Cutting Device 25 Spindle 25a Blade

25c First Flange

25d Second Flange 26 Partition Wall 26a Opening 100 Blade Replacement Mechanism 110 Supporting Part 120 Holding Part 130 Moving Part 200 Blocking Part 300 Cleaning Mechanism 310 First Cleaning Mechanism 320 Second Cleaning Mechanism

Claims

a blade replacement mechanism for replacing the blade provided in the spindle;
a cleaning mechanism for cleaning a pair of flanges for fixing the blade to the spindle;
A cutting device.
The cleaning mechanism is
a first cleaning mechanism for cleaning one of the pair of flanges;
a second cleaning mechanism for cleaning the other flange of the pair of flanges;
2. The cutting device of claim 1, comprising:
The first cleaning mechanism is capable of cleaning the one flange attached to the spindle,
The second cleaning mechanism is capable of cleaning the other flange detached from the spindle.
3. A cutting device according to claim 2.
4. The first cleaning mechanism according to claim 2 or 3, wherein the one flange attached to the spindle portion is rotated by the rotation of the spindle portion, and is capable of cleaning the one flange. cutting device.
The blade exchange mechanism is
a holding part capable of holding the blade and the other flange;
a support portion that supports the holding portion and the first cleaning mechanism;
a moving part capable of moving the support part;
with
Said 1st washing|cleaning mechanism is a cutting device of Claim 3 or Claim 4 provided in the said support part on the different side from the said holding|maintenance part.
The cutting device according to claim 5, wherein the second cleaning mechanism is capable of cleaning the other flange held by the holding portion.
a partition wall having an opening that separates the space in which the spindle part is arranged and the space in which the replacement blade is arranged;
a closing part that is movable by the moving part and closes the opening when the blade replacement mechanism is at a predetermined position;
7. A cutting device according to claim 5 or claim 6, comprising a
Using the cutting device according to any one of claims 1 to 7, replacing the blade provided on the spindle portion, cleaning the pair of flanges, and and cutting an object to be cut.