TWI812389B - Cutting device and method of manufacturing cut product - Google Patents

Abstract

The present invention provides a cutting device capable of cleaning a flange and a method of manufacturing a cut product. The cutting device includes a blade replacement mechanism for replacing blades provided on the main shaft part, and a cleaning mechanism for cleaning a pair of flanges for fixing the blades to the main shaft part.

Description

Cutting device and method of manufacturing cut product

The present invention relates to a cutting device and a method of manufacturing a cut product.

Patent Document 1 discloses a cutting device including a blade replacement mechanism capable of replacing a blade mounted on a main shaft portion. Specifically, the blade replacement mechanism disclosed in Patent Document 1 holds a blade and a flange for fixing the blade, respectively, and is detachable from the main shaft. The blade replacement mechanism can automatically replace the blade. [Prior art documents] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2019-5857

[Problem to be solved by the invention]

Here, in the cutting device disclosed in Patent Document 1, cutting chips or water droplets generated during cutting may adhere to the flange, so it is preferable to appropriately perform the cleaning operation of the flange. Therefore, from the viewpoint of reducing work load, a technology that can automatically perform flange cleaning is required.

The present invention was completed in view of the above-mentioned situation, and the problem to be solved is to provide a cutting device capable of cleaning the flange and a method of manufacturing a cut product. [Means to solve the problem]

The problems to be solved by the present invention are as mentioned above. In order to solve the problems, the cutting device of the present invention includes: a blade replacement mechanism for replacing the blade provided on the main shaft; and a cleaning mechanism for fixing the blade to the main shaft. Clean the pair of flanges of the spindle part.

Furthermore, the method of manufacturing a cut product of the present invention includes the following steps: using the cutting device to replace the blade provided on the main shaft part; cleaning the pair of flanges; and utilizing the Use the blade to cut the object to be cut. [Effects of the invention]

According to the present invention, the flange can be cleaned.

<Structure of cutting device 1> First, the structure of the cutting device 1 of this embodiment is demonstrated. In this embodiment, for example, a structure of the cutting device 1 will be described when a sealed substrate W in which a substrate mounted with a semiconductor wafer is resin-sealed is used as an object to be cut by the cutting device 1 .

As the sealed substrate W, for example, a Ball Grid Array (BGA) packaging substrate, a Chip Size Package (CSP) packaging substrate, a Light Emitting Diode (LED) packaging substrate, etc. are used. Furthermore, as the object to be cut, not only the sealed substrate W but also a sealed lead frame in which a lead frame on which a semiconductor chip is mounted is resin-sealed may be used.

The cutting device 1 shown in FIG. 1 is a processing device that cuts a sealed substrate W as a cutting object into individual pieces into a plurality of cut products (products P). The cutting device 1 includes a substrate supply module A, a cutting module B, and a storage module C as constituent elements. Each component is detachable and replaceable with respect to other components.

<Substrate supply module A> The substrate supply module A mainly includes a substrate supply mechanism 11 and a control unit CTL.

The sealed substrate W as the object to be cut is carried out from the substrate supply mechanism 11 and transferred to the cutting module B by a transfer mechanism (not shown). The control unit CTL controls the operation of each part of the cutting device 1 . By controlling each part of the cutting device 1 by the control unit CTL, the sealed substrate W can be loaded in, the sealed substrate W can be cut, the product P can be inspected, the product P can be unloaded, and the like. Furthermore, the control unit CTL may be provided in a module other than the substrate supply module A. Furthermore, the control unit CTL may be divided into a plurality of units. For example, a control unit CTL may be provided in each module, and the control unit CTL may control each unit in association with each other.

＜Cutting module B＞ The cutting module B shown in FIG. 1 is mainly provided with a cutting platform 21, a cutting jig 22, a moving mechanism 23, a rotating mechanism 24, a spindle part 25, a partition wall 26, a blade replacement table 27, and a blade replacement table. Mechanism 100, closing part 200, first cleaning mechanism 310 (cleaning mechanism 300) and second cleaning mechanism 320 (cleaning mechanism 300).

In this embodiment, a double cutting platform type cutting device 1 having two cutting platforms 21 is exemplified. The cutting platform 21 is provided with a cutting jig 22 . The cutting platform 21 can be moved in the Y direction by the moving mechanism 23 and can be rotated in the θ direction by the rotating mechanism 24 .

Furthermore, in this embodiment, the cutting device 1 of the dual-spindle structure which has the two spindle parts 25 is illustrated. The two main shaft portions 25 can move in the X direction and the Z direction independently of each other.

The partition wall 26 is provided at an appropriate position to separate the space where the main shaft part 25 is placed and the space where the blade changing table 27 is placed. In this embodiment, the partition wall 26 is disposed behind one of the main shaft portions 25 (on the right side in the figure). Furthermore, the partition wall 26 is arranged to surround the blade changing table 27 . An opening 26 a is formed in a part of the partition wall 26 to connect the space where the main shaft part 25 is placed and the space where the blade replacement table 27 is placed.

The upper surface of the blade replacement table 27 shown in FIGS. 1 and 2 is provided with a used blade storage portion 27a that stores the used blades 25a used through the spindle portion 25, and an unused blade storage portion 27b that stores replacement blades. Unused blade 25a. The used blade housing 27a is formed in a box shape with an open upper surface. Furthermore, a second cleaning mechanism 320 (cleaning mechanism 300 ) to be described later is provided on the upper surface of the blade changing table 27 .

In addition, the structure of the unused blade accommodating part 27b and the used blade accommodating part 27a is not limited to this embodiment, and can be changed arbitrarily. As an example, the used blade accommodating part 27a may have a structure including a cylindrical member extending up and down. In this structure, the blade 25a can be held by inserting the center of the blade 25a into the cylindrical member.

The blade replacement mechanism 100 replaces the blade 25a provided in the main shaft part 25. The blade changing mechanism 100 is arranged behind the two main shaft parts 25 (on the right side in the figure). The blade replacement mechanism 100 is provided with a closing portion 200 capable of closing the opening 26 a of the partition wall 26 . Furthermore, the blade replacement mechanism 100 is provided with a first cleaning mechanism 310 (cleaning mechanism 300) described below.

In the cutting module B, while the sealed substrate W is held on the cutting platform 21, the cutting platform 21 and the two spindle portions 25 are relatively moved, whereby the sealed substrate W can be cut. Broken and monolithic. The blade 25a of the main shaft part 25 rotates in the plane including the Y direction and the Z direction, thereby cutting the sealed substrate W held on the cutting platform 21. At this time, the sealed substrate W may be cut while spraying cutting water toward the blade 25a.

＜Storage Module C＞ The storage module C is mainly provided with an inspection platform 31 and a tray 32 .

An assembly including a plurality of products P obtained by cutting the sealed substrate W into individual pieces is placed on the inspection stage 31 . A plurality of products P are inspected with an inspection camera (not shown) and sorted into good products and defective products. The sorted good products are stored in the tray 32 . The sorted defective products are stored in a separately prepared tray (not shown) and are excluded from the self-product P. Furthermore, in the storage module C, it is not necessarily necessary to inspect the product P.

＜Detailed structure of blade replacement mechanism 100 etc.＞ Next, the structures of the blade replacement mechanism 100, the closing part 200, and the cleaning mechanism 300 are described in more detail. In addition, the detailed structure, shape, etc. of each part of the blade replacement mechanism 100 etc. are not specifically limited, Therefore, in this embodiment, the shape etc. of each part are simplified as appropriate and shown.

＜Blade replacement mechanism 100＞ As shown in FIGS. 2 and 3 , the blade replacement mechanism 100 mainly includes a support part 110 , a holding part 120 and a moving part 130 .

The support part 110 supports the holding part 120 and the first cleaning mechanism 310 described later. The support part 110 can be formed by combining appropriate members (rod-shaped members, plate-shaped members, etc.). In this embodiment, the support portion 110 is formed in a long strip shape along one direction (the X direction in FIGS. 2 and 3 ).

The holding part 120 can hold the blade 25a provided on the main shaft part 25 and the second flange 25d for fixing the blade 25a to the main shaft part 25. The holding part 120 is provided at one end of the supporting part 110 in the longitudinal direction.

Here, the structure of the main shaft part 25 (particularly the part related to the fixation of the blade 25a) is demonstrated using FIG. 4. FIG. 4 shows a partial cross-section of one of the two main shaft parts 25 (the main shaft part 25 on the left side of the paper in FIG. 2 ).

A substantially annular first flange 25c is fixed to the rotation shaft 25b of the main shaft portion 25. Furthermore, a substantially annular second flange 25d is provided to face the first flange 25c. Furthermore, the first flange 25c and the second flange 25d are respectively an embodiment of one flange and the other flange of the present invention.

By fastening the detachable member 25e such as a nut to the boss portion of the first flange 25c, the second flange 25d is pressed toward the first flange 25c. A first contact surface 25f and a second contact surface 25g protruding in opposite directions are formed on the outer peripheral portions of the first flange 25c and the second flange 25d. The substantially annular blade 25a is sandwiched and fixed between the first contact surface 25f and the second contact surface 25g.

The holding part 120 shown in FIGS. 2 and 3 rotates the detachable member 25e attached to the main shaft part 25, so that the detachable member 25e can be attached to and detached from the convex part of the first flange 25c. Furthermore, the holding part 120 can hold the blade 25a and the second flange 25d independently. Examples of a method for holding the blade 25a and the second flange 25d by the holding portion 120 include a method of adsorbing and holding the blade 25a, or a method of mechanically holding the blade 25a by hooking a claw-shaped member.

In this way, the holding part 120 can detach the blade 25 a and the second flange 25 d installed on the main shaft part 25 from the main shaft part 25 . Furthermore, the holding part 120 can attach the held blade 25a and the second flange 25d to the spindle part 25.

The moving part 130 moves the supporting part 110 in any direction. The moving part 130 mainly includes a rotating part 131, a first linear moving part 132, a second linear moving part 133, and a third linear moving part 134.

The rotation part 131 rotates the support part 110. The rotating part 131 can support the supporting part 110 and rotate the supporting part 110 using the driving force of a driving source such as a motor. The rotating part 131 can rotate the supporting part 110 around an axis parallel to the Y direction.

The first linear moving part 132 linearly moves the rotating part 131. The first linear moving part 132 can support the rotating part 131 and move the rotating part 131 using the driving force of a driving source such as a motor. The first linear moving part 132 can linearly move the rotating part 131 along the Y direction.

The second linear movement part 133 linearly moves the first linear movement part 132. The second linear movement part 133 can support the first linear movement part 132 and move the first linear movement part 132 using the driving force of a driving source such as a motor. The second linear movement part 133 can linearly move the first linear movement part 132 along the Z direction.

The third linear movement part 134 shown in FIG. 2 linearly moves the second linear movement part 133. The third linear movement part 134 can support the second linear movement part 133 and move the second linear movement part 133 using the driving force of a driving source such as a motor. The third linear movement part 134 can linearly move the second linear movement part 133 along the X direction.

By combining the movements of the various parts of the moving part 130 configured as described above, the supporting part 110 can be moved to an arbitrary position and the supporting part 110 can be rotated arbitrarily around the axis along the Y direction.

＜Closed part 200＞ The closing part 200 can close the opening 26a of the partition wall 26. The closing part 200 is formed in a plate shape corresponding to the shape of the opening part 26a. The sealing part 200 is arranged on one side of the support part 110 in the X direction (right side of the paper in FIG. 2 ). The closing part 200 is provided on the moving part 130 with the board surface facing the X direction. Specifically, the closing part 200 is provided in the second linear movement part 133 and can linearly move in the X direction by the third linear movement part 134 .

<Cleaning mechanism 300> The cleaning mechanism 300 is used to clean the flanges (the first flange 25c and the second flange 25d) used to fix the blade 25a to the main shaft part 25. The cleaning mechanism 300 mainly includes a first cleaning mechanism 310 and a second cleaning mechanism 320 .

The first cleaning mechanism 310 shown in FIG. 3 cleans the first flange 25c in a state of being attached to the main shaft part 25. The first cleaning mechanism 310 mainly includes a first cleaning sponge 311 and an air nozzle 312 .

The first cleaning sponge 311 shown in FIG. 3 and FIG. 5( a ) is a cleaning member for cleaning the first flange 25 c. The first cleaning sponge 311 is formed in a cylindrical shape having the same outer diameter as the first flange 25c. The first cleaning sponge 311 is attached to one end of the support portion 110 in the longitudinal direction via a disk-shaped attachment member 311 a. The first cleaning sponge 311 is provided on the opposite side to the holding part 120 in the longitudinal direction of the supporting part 110 . In other words, the first cleaning sponge 311 is located at a position that is 180 degrees inverted from the holding part 120 with the rotation axis of the rotating part 131 as the center. In addition, in this embodiment, the "side opposite to the holding part 120" where the first cleaning sponge 311 is arranged is an example of the "side different from the holding part" in the present invention.

Furthermore, the first cleaning sponge 311 is not limited to the cylindrical shape shown in (a) of FIG. 5 , and can be formed into any shape. For example, the cylinder may be divided into a plurality of shapes like the modification shown in FIG. 5( b ). Thereby, the corner portion of the sponge can be used to clean the first flange 25c, thereby improving the cleaning ability of the first cleaning sponge 311.

The air nozzle 312 shown in FIG. 3 can spray compressed air supplied from a compressor (not shown). The air nozzle 312 is provided at one end of the support portion 110 in the longitudinal direction (the same side as the first cleaning sponge 311 ). The air nozzle 312 is arranged such that the air ejection direction is directed toward the first cleaning sponge 311 side.

The second cleaning mechanism 320 cleans the second flange 25d in a state in which the main shaft portion 25 is detached (a state held by the holding portion 120). The second cleaning mechanism 320 mainly includes a second cleaning sponge 321 and a driving part 322.

The second cleaning sponge 321 shown in FIG. 2 is a cleaning member for cleaning the second flange 25d. The second cleaning sponge 321 is formed in a cylindrical shape having the same diameter as the second flange 25d. The second cleaning sponge 321 is formed in the same shape as the first cleaning sponge 311 shown in FIGS. 5(a) and 5(b) . The second cleaning sponge 321 is provided on the upper surface of the blade replacement table 27 with the axis of the cylinder facing the Z direction.

The driving part 322 rotates the second cleaning sponge 321. The drive unit 322 has a drive source such as a motor, for example. The output shaft of the driving part 322 is connected to the second cleaning sponge 321 . The second cleaning sponge 321 can be rotated around an axis parallel to the Z direction by the driving force of the driving part 322 .

<Operation of blade replacement mechanism 100 etc.> Next, the operation of the blade replacement mechanism 100 and the cleaning mechanism 300 configured as above to replace the blade 25a provided in the main shaft part 25 and clean the first flange 25c and the second flange 25d will be described. In addition, the case where the blade 25a of one of the two main shaft parts 25 (for example, the main shaft part 25 on the left side of the paper in FIG. 2) is replaced is demonstrated below.

When the cutting device 1 is cutting the sealed substrate W, as shown by the two-dot chain line in FIG. 2 , the sealing portion 200 waits at a position to seal the opening 26 a of the partition wall 26 . By closing the opening 26a with the closing portion 200 in this way, the space in which the blade changing table 27 is arranged and the space in which the main shaft portion 25 is arranged can be divided. This prevents cutting chips or water droplets generated during cutting of the sealed substrate W from adhering to the blade replacement table 27 (especially the unused blade accommodating portion 27 b that accommodates the replacement blade 25 a ). In addition, in this state, the holding part 120 and the first cleaning mechanism 310 are located in the space where the blade replacement table 27 is arranged.

When the blade 25a is replaced or the like, cutting of the sealed substrate W by the cutting device 1 is temporarily interrupted. Furthermore, the blade 25a can be replaced and the first flange 25c and the second flange 25d can be cleaned at any time. For example, an appropriate sensor can be used to detect the wear amount of the blade 25a, and the blade 25a can be replaced when the wear amount exceeds a certain amount. Furthermore, the blade 25a may be replaced at a timing when the operation time of the cutting device 1, the production number of products P, etc. exceed a predetermined value.

When the blade 25a is replaced or the like, the closing part 200 is moved integrally with the support part 110 and the holding part 120 by the moving part 130, and the opening part 26a of the partition wall 26 is opened. The support portion 110 and the like are movable between the space on the spindle portion 25 side and the space on the blade replacement table 27 side via the opened opening 26 a.

When replacing the blade 25a, first, as shown in FIG. In this state, air is ejected from the air nozzle 312 to remove cutting chips or water droplets adhering to the blade 25a.

Furthermore, cutting chips or water droplets that cannot be removed by the air nozzle 312 will remain on the blade 25a. Therefore, as will be described later, when the second flange 25d and the blade 25a are removed from the spindle portion 25, cutting chips or water droplets remaining on the blade 25a may adhere to the first flange 25c and the second flange 25d, causing pollute.

Next, as shown in FIG. 6( b ), the support part 110 is reversed by the moving part 130 , and the holding part 120 is moved to a position facing the blade 25 a of the main shaft part 25 . Then, the second flange 25d and the blade 25a are detached from the main shaft part 25 through the holding part 120.

Next, as shown in FIG. 6( c ), the holder 120 is moved by the moving part 130 to a position facing the used blade accommodating part 27 a provided on the blade replacement table 27 from above. Then, the holding part 120 releases the holding part 120 of the blade 25a, and the used blade 25a is accommodated in the used blade accommodating part 27a.

Next, as shown in FIG. 6(d) , the second flange 25d held by the holding part 120 is moved by the moving part 130 to contact the upper surface of the second cleaning sponge 321 of the second cleaning mechanism 320 . Location. In this state, the second cleaning sponge 321 is rotated by the driving part 322 to clean the surface of the second flange 25d (especially the second contact surface 25g shown in FIG. 4). Thereby, cutting chips etc. adhering to the 2nd flange 25d can be removed.

Next, as shown in FIG. 7( a ), the moving part 130 moves the holding part 120 to a position facing the unused blade accommodating part 27 b provided in the blade changing table 27 from above. Then, the unused blade 25a accommodated in the unused blade accommodating part 27b is held by the holding part 120. As in this embodiment, the used blade storage portion 27a, the unused blade storage portion 27b, and the second cleaning mechanism 320 are provided on the same blade replacement table 27, whereby the holding portion 120 can be positioned between the used blade storage portion 27a and the second cleaning mechanism 320. The movement distance when moving between the unused blade accommodating part 27b and the second cleaning mechanism 320 is suppressed to be short.

Next, as shown in FIG. 7( b ), the support part 110 is moved by the moving part 130 , and the front end of the air nozzle 312 faces the first flange 25 c attached to the main shaft part 25 . In this state, air is ejected from the air nozzle 312 to remove cutting chips or water droplets adhering to the first flange 25c.

Next, as shown in FIG. 7( c ), the moving part 130 moves the first cleaning sponge 311 of the first cleaning mechanism 310 to a position in contact with the first flange 25 c installed on the main shaft part 25 . In this state, the main shaft part 25 rotates to clean the surface of the first flange 25c (especially the first contact surface 25f shown in FIG. 4). Thereby, cutting chips etc. adhering to the first flange 25c can be removed.

Next, as shown in (d) of FIG. 7 , the support part 110 is reversed by the moving part 130 , and the holding part 120 is moved to a position facing the first flange 25 c of the main shaft part 25 . Then, the second flange 25d and the blade 25a held by the holding part 120 are attached to the main shaft part 25.

In addition, in the above example, the operation|movement of replacing the blade 25a of one spindle part 25 etc. is demonstrated, but the operation|movement of replacing the blade 25a of the other spindle part 25 is also substantially the same, and a description is abbreviate|omitted.

As described above, when the replacement of the blade 25a of the main shaft part 25 and the cleaning of the first flange 25c and the second flange 25d are completed, the closing part 200 moves to the position of closing the opening 26a of the partition wall 26 again (see FIG. 2 ). Then, cutting of the sealed substrate W by the cutting device 1 is started again.

In this way, in this embodiment, the step of replacing the blade 25a provided in the spindle part 25 and the step of cleaning the first flange 25c and the second flange 25d can be performed in parallel. Furthermore, the step of cutting the sealed substrate W using the replaced blade 25a may be performed.

As described above, the cutting device 1 of this embodiment includes the blade replacement mechanism 100 for replacing the blade 25a provided on the main shaft part 25, and the cleaning mechanism 300 for fixing the blade 25a to the main shaft part. 25 (the first flange 25c and the second flange 25d). With this structure, the flange can be cleaned. Furthermore, by using the cleaning mechanism 300 to clean the flange, the burden of the cleaning work on the user can be reduced. Furthermore, by cleaning the flange, the blade 25a can be properly fixed.

Furthermore, the cleaning mechanism 300 includes: a first cleaning mechanism 310 for cleaning the first flange 25c (one of the flanges) of the pair of flanges; and a second cleaning mechanism 320 for cleaning the pair of flanges. The second of the flanges 25d (the other flange) is cleaned. With such a structure, the pair of flanges can be cleaned separately, whereby the pair of flanges can be cleaned more effectively.

Furthermore, the first cleaning mechanism 310 can clean the first flange 25c in a state of being attached to the main shaft part 25, and the second cleaning mechanism 320 can clean the first flange 25c in a state of being detached from the main shaft part 25. The second flange 25d is cleaned. With such a configuration, when the blade 25a is replaced, the second flange 25d removed from the main shaft part 25 and the first flange 25c remaining in the main shaft part 25 can be cleaned separately.

Furthermore, the first cleaning mechanism 310 can clean the first flange 25c in a state where the first flange 25c mounted on the main shaft part 25 is rotated by the rotation of the main shaft part 25. Clean. With such a configuration, the first flange 25c can be cleaned by rotating the main shaft portion 25. Thereby, the structure of the first cleaning mechanism 310 can be simplified.

Furthermore, the blade replacement mechanism 100 includes: a holding part 120 that can hold the blade 25a and the second flange 25d; a supporting part 110 that supports the holding part 120 and the first cleaning mechanism 310; and a mobile The first cleaning mechanism 310 is provided on a side of the support part 110 that is different from the holding part 120 . With such a configuration, the first cleaning mechanism 310 and the holding part 120 are provided on different sides, thereby suppressing the center of gravity of the supporting part 110 from being deviated. Thereby, the support part 110 can be moved smoothly. In particular, in this embodiment, since the first cleaning mechanism 310 and the holding part 120 are provided on opposite sides, deviation of the center of gravity of the supporting part 110 can be effectively prevented.

Furthermore, the second cleaning mechanism 320 can clean the second flange 25d held by the holding part 120. With such a configuration, the second flange 25d held by the holding part 120 can be directly cleaned when the blade 25a is replaced, so the second flange 25d can be cleaned efficiently.

Furthermore, the cutting device 1 includes: a partition wall 26 that separates a space where the main shaft part 25 is placed and a space where the replacement blade 25a is placed, and has an opening 26a; and a closing part 200 that can be moved by the above-mentioned movement. The opening 26a is closed when the blade changing mechanism 100 is in a predetermined position. By configuring in this way, the holding part 120 etc. can be moved via the opening part 26a, and the opening part 26a can be closed by the closing part 200 as needed. For example, by closing the opening 26a with the closing portion 200 during cutting of the sealed substrate W, it is possible to prevent cutting chips and the like from adhering to the replacement blade 25a. Especially in this embodiment, in a state where the closing part 200 closes the opening 26a, the holding part 120 and the first cleaning mechanism 310 are arranged in the space on the side of the replacement blade 25a. Therefore, it is possible to prevent the sealed substrate W from being damaged. Chips and the like generated during cutting adhere to the holding portion 120 and the like.

Moreover, the manufacturing method of the product P (cut product) of this embodiment includes the following steps: using the cutting device 1, replacing the blade 25a provided on the main shaft part 25; and replacing the pair of blades 25a. The flange is cleaned; and the sealed substrate W (cutting object) is cut using the blade 25a. With this structure, the flange can be cleaned. Especially in this embodiment, the step of replacing the blade 25a and the step of cleaning the pair of flanges can be performed in parallel, so that the product P can be manufactured efficiently.

The embodiments of the present invention have been described above. However, the present invention is not limited to the embodiments and can be appropriately modified within the scope of the technical idea of the invention described in the claims.

For example, the structure of the moving part 130 in this embodiment (see FIG. 3 etc.) is an example, and the specific structure is not limited as long as the holding part 120 and the first cleaning mechanism 310 can be moved to a desired position. Moreover, the closing part 200 is provided in the second linear moving part 133, but the present invention is not limited thereto. That is, the closing part 200 only needs to be a structure that can be moved by the moving part 130 to close the opening part 26 a. For example, the closing part 200 may be provided in the third linear moving part 134 independently of the second linear moving part 133 .

Furthermore, in this embodiment, an example is shown in which the main shaft part 25 is rotated when cleaning the first flange 25c (see (c) of FIG. 7 ). However, for example, the first cleaning sponge 311 may be rotated. structure.

Furthermore, the shapes of the first cleaning sponge 311 and the second cleaning sponge 321 are not limited to the shapes of this embodiment (refer to FIGS. 5(a) and 5(b) ), and may be changed arbitrarily.

Moreover, the cleaning mechanism 300 of this embodiment uses sponges (the first cleaning sponge 311 and the second cleaning sponge 321) as cleaning members to perform cleaning. However, the present invention is not limited to this, and any cleaning member (such as waste water, etc.) may also be used. Cotton (waste, etc.).

Moreover, the cleaning mechanism 300 of this embodiment uses a sponge and an air nozzle 312 to clean the flange, but the flange cleaning method is not limited to this, and any cleaning method can be used to clean the flange. For example, the flange may be cleaned by spraying cleaning water onto the flange, or the flange may be cleaned by sucking cutting chips adhering to the flange. Moreover, the cleaning mechanism 300 can also combine multiple cleaning methods to clean the flange.

Furthermore, this embodiment shows an example in which the first flange 25c is cleaned while the first flange 25c is attached to the main shaft part 25 (see FIG. 7(b) and FIG. 7(c) ). , but the present invention is not limited to this. For example, the first flange 25c may be cleaned in a state in which the first flange 25c is detached from the main shaft portion 25. At this time, a separate mechanism for attaching and detaching the first flange 25c may be provided to automatically attach and detach the first flange 25c.

Furthermore, in this embodiment, the holding part 120 and the first cleaning mechanism 310 are shown to be provided on the opposite side of the supporting part 110 (a position reversed by 180 degrees when viewed from the front, see FIG. 6( a ) to FIG. 6 (d), etc.), but the present invention is not limited thereto. The holding part 120 and the first cleaning mechanism 310 may be provided at any position of the supporting part 110. For example, the first cleaning mechanism 310 may be arranged at a position rotated by 90 degrees or at a position rotated by 120 degrees relative to the holding portion 120 .

Moreover, in this embodiment, the example in which both the holding part 120 and the first cleaning mechanism 310 are provided in the support part 110 and they are moved integrally is shown, but the present invention is not limited to this. For example, the holding part 120 and the first cleaning mechanism 310 may be provided in different members so that they can move independently of each other.

Furthermore, this embodiment shows an example in which cutting of the sealed substrate W by the cutting device 1 is temporarily interrupted to replace the blade 25a and clean the flange. However, the timing of replacing the blade 25a can be determined arbitrarily. For example, the blade 25 a may be replaced before starting cutting of the sealed substrate W by the cutting device 1 or after all cutting of the sealed substrate W by the cutting device 1 is completed. Furthermore, when the cutting device 1 is provided with a plurality of main shaft portions 25 as in this embodiment, the replacement of the blades 25a of the respective main shaft portions 25 may be performed at the same timing or at different timings.

1: Cut off device 11:Substrate supply mechanism 21: Cutting platform 22: Clamp for cutting 23:Mobile mechanism 24: Rotating mechanism 25:Spindle part 25a: Blade 25b:Rotation axis 25c: first flange 25d: Second flange 25e: Disassembly and assembly of components 25f: first contact surface 25g: Second contact surface 26:Partition wall 26a: opening 27:Blade changing station 27a: The blade storage part has been used 27b: Unused blade storage section 31: Inspection platform 32:Pallet 100:Blade changing mechanism 110:Support Department 120:Maintenance Department 130:Mobile Department 131:Rotation part 132: First linear movement unit 133: Second linear movement part 134: Third linear movement unit 200: Closed part 300: Cleaning mechanism 310: The first cleaning mechanism 311:The first cleaning sponge 311a: Installation components 312:Air nozzle 320: Second cleaning mechanism 321: Second cleaning sponge 322:Drive Department A:Substrate supply module B: Cut off module C: Storage module CTL:Control Department P:Products W: Sealed substrate X, Y, Z, θ: direction

FIG. 1 is a schematic plan view showing the overall structure of a cutting device according to an embodiment. FIG. 2 is a perspective view showing the positional relationship between the blade replacement mechanism, the cleaning mechanism, and the spindle. FIG. 3 is a perspective view showing the operation of the moving unit. Fig. 4 is an enlarged cross-sectional perspective view showing the structure of the main shaft portion. (a) of FIG. 5 is a perspective view showing the shape of the first cleaning sponge. FIG. 5( b ) is a perspective view showing a modification of the first cleaning sponge. (a) of FIG. 6 is a schematic diagram showing a state of cleaning the blade with air from the air nozzle. (b) of FIG. 6 is a schematic diagram showing the second flange and the blade being detached from the spindle. (c) of FIG. 6 is a schematic diagram showing a state of storing a used blade. (d) of FIG. 6 is a schematic diagram showing a state of cleaning the second flange using a second cleaning sponge. FIG. 7( a ) is a schematic diagram showing a state in which the holding portion holds an unused blade. (b) of FIG. 7 is a schematic diagram showing the state of cleaning the first flange with air from the air nozzle. (c) of FIG. 7 is a schematic diagram showing the state of cleaning the first flange using the first cleaning sponge. (d) of FIG. 7 is a schematic diagram showing the second flange and the blade being attached to the spindle.

25:Spindle part 25a: Blade 26:Partition wall 26a: opening 27:Blade changing station 27a: The blade storage part has been used 27b: Unused blade storage section 100:Blade changing mechanism 110:Support Department 120:Maintenance Department 130:Mobile Department 131:Rotation part 132: First linear movement unit 133: Second linear movement part 134: Third linear movement unit 200: Closed part 300: Cleaning mechanism 310: The first cleaning mechanism 311:The first cleaning sponge 320: Second cleaning mechanism 321: Second cleaning sponge 322:Drive Department X, Y, Z: direction

Claims (6)

A cutting device includes: a blade replacement mechanism to replace the blade provided on the main shaft part; and a cleaning mechanism to clean a pair of flanges for fixing the blade to the main shaft part, wherein the cleaning mechanism The mechanism includes: a first cleaning mechanism for cleaning one of the pair of flanges; and a second cleaning mechanism for cleaning the other of the pair of flanges, wherein the third cleaning mechanism A cleaning mechanism can clean one of the flanges in a state of being installed on the main shaft part, and the second cleaning mechanism can clean the other flange in a state of being detached from the main shaft part. . The cutting device according to claim 1, wherein the first cleaning mechanism is capable of cleaning the first cleaning mechanism in a state where the one flange mounted on the main shaft part is rotated by the rotation of the main shaft part. One of the flanges is cleaned. The cutting device according to claim 1 or claim 2, wherein the blade replacement mechanism includes: a holding part capable of holding the blade and the other flange; and a supporting part supporting the holding part and the other flange. a first cleaning mechanism; and a moving part capable of moving the support part, the first cleaning mechanism being provided in the support part at a location different from the holding part one side. The cutting device according to claim 3, wherein the second cleaning mechanism can clean the other flange held by the holding part. The cutting device according to claim 3, which includes: a partition wall that separates a space where the main shaft part is arranged and a space where the replacement blade is arranged, and has an opening part; and a closing part that can be moved by the movement. The blade replacement mechanism moves to close the opening when the blade replacement mechanism is in a predetermined position. A method of manufacturing a cut product, including the following steps: using the cutting device according to any one of claims 1 to 5, replacing the blade provided on the main shaft part; The pair of flanges is cleaned; and the cutting object is cut using the blade.

Images