WO2022239447A1 - 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 - Google Patents

流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 Download PDF

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Publication number
WO2022239447A1
WO2022239447A1 PCT/JP2022/010980 JP2022010980W WO2022239447A1 WO 2022239447 A1 WO2022239447 A1 WO 2022239447A1 JP 2022010980 W JP2022010980 W JP 2022010980W WO 2022239447 A1 WO2022239447 A1 WO 2022239447A1
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WIPO (PCT)
Prior art keywords
flow rate
fluid control
reference value
calculated
pressure sensor
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Ceased
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PCT/JP2022/010980
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English (en)
French (fr)
Japanese (ja)
Inventor
和宏 松浦
健太郎 長井
颯太 松本
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Horiba Stec Co Ltd
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Horiba Stec Co Ltd
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Priority to CN202280031520.1A priority Critical patent/CN117222957A/zh
Priority to US18/560,174 priority patent/US20240248496A1/en
Priority to KR1020237039839A priority patent/KR20240007170A/ko
Priority to JP2023520859A priority patent/JP7853965B2/ja
Publication of WO2022239447A1 publication Critical patent/WO2022239447A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/028—Controlling a pressure difference
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

Definitions

  • the present invention relates to fluid control devices and the like.
  • Patent Document 1 a differential pressure type mass flow controller in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from the upstream side.
  • the mass flow controller described above is arranged in at least one of a plurality of flow paths provided in parallel, and the downstream of these flow paths is connected to, for example, a process chamber.
  • a configuration connected to a path For example, in a semiconductor manufacturing system, the mass flow controller described above is arranged in at least one of a plurality of flow paths provided in parallel, and the downstream of these flow paths is connected to, for example, a process chamber.
  • a shut-off valve is provided downstream of the mass flow controller, and when both the shut-off valve and the fluid control valve are closed, when the shut-off valve is opened, the inside of the mass flow controller etc., remaining fluid flows out into the process flow path. Then, the pressure measured by the downstream pressure sensor decreases, and the pressure measured by the upstream pressure sensor decreases with a time difference caused by the fluid resistance element. As a result, a difference occurs between the pressures measured by the upstream pressure sensor and the downstream pressure sensor, and a flow rate corresponding to the pressure difference is output even though the fluid control valve is closed.
  • Such problems are not limited to semiconductor manufacturing systems, but may occur in various fluid control systems.
  • the present invention was made to solve the above problems, and its main object is to quickly stabilize the output flow rate while suppressing the unexpected output flow rate.
  • a fluid control device is a fluid control device in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from the upstream side, wherein the upstream
  • An actual flow rate calculation unit that calculates a flow rate based on the pressure measured by the side pressure sensor and the downstream pressure sensor, and a delayed flow rate that calculates a delayed flow rate by causing a response delay in the calculated flow rate calculated by the actual flow rate calculation section.
  • a calculation unit compares the absolute difference between a predetermined reference value and the calculated flow rate and the absolute difference between the reference value and the delayed flow rate, and determines the calculated flow rate or the delayed flow rate, whichever has the smaller absolute difference. and a flow rate output unit for outputting the flow rate.
  • the flow rate output unit outputs the flow rate that has the smaller absolute difference from the reference value, either the calculated flow rate or the delayed flow rate.
  • This phenomenon is also called a burst), and at first, a delayed flow rate closer to the reference value than the calculated flow rate is output. After that, since the calculated flow rate stabilizes more quickly, the calculated flow rate will overtake the lagging flow rate at a certain point and approach the reference value, and from that point on, the calculated flow rate that stabilizes quickly will be output. .
  • the delayed flow rate closer to the reference value than the calculated flow rate is output at the beginning of the burst, and from a certain point when the absolute difference from the reference value is reversed, Since the calculated flow rate that is quickly stabilized is output, it is possible to quickly stabilize the output flow rate while suppressing the flow rate that is unexpectedly output.
  • the output calculated flow rate (that is, the output value) should be zero.
  • the output value with the fluid control valve closed may vary slightly over time. From this, as shown in FIG. 9, if the output value in the state where the fluid control valve is closed shifts to a value smaller than zero, a burst will occur if the reference value remains set to zero.
  • the calculated flow rate is closer to zero than the delayed flow rate, so the calculated flow rate is output, and the waveform of the output flow rate (the solid line in FIG. 9) becomes distorted. Therefore, it is preferable to further include a reference value updating unit that updates the reference value at predetermined time intervals. With such a configuration, the reference value can be continuously set to an appropriate value, and an appropriate waveform can be output.
  • the reference value update unit samples the calculated flow rate over a predetermined period of time, and when the absolute difference between the calculated flow rate and the reference value falls below an update threshold over the predetermined period of time, the sampled Preferably, one of the calculated flow rates is updated as the new reference value. With such a configuration, it is possible to update the stable output value from time to time while the fluid control valve is closed as the reference value.
  • the calculated flow rate does not stabilize immediately, and if the reference value is set or updated in that transient state, A calculated flow rate output in an unstable state may be set as a reference value. Therefore, a stable state determination unit that determines that the calculated flow rate is in a stable state when the absolute difference between the calculated flow rate and the reference value is less than a stable state threshold for a predetermined time, It is preferable that the sampling of the calculated flow rate by the reference value updating unit is started after the determination unit determines that the flow rate is stable. With such a configuration, sampling of the calculated flow rate by the reference value update unit does not start until the calculated flow rate stabilizes, and it is possible to prevent the calculated flow rate in an unstable state from being set as the reference value. can.
  • the calculated flow rate is unstable immediately after the fluid control valve is closed, so it is preferable that the function of the flow rate output unit is not exhibited at this point.
  • the function of the flow rate output unit is not exhibited at this point.
  • immediately after opening the fluid control valve there is a risk that the fluid remaining inside will flow back to the upstream side and the flow rate on the negative side may be unexpectedly output, so the flow output part will function to suppress this burst. It is preferable to leave it on. Therefore, it is preferable to further include a switching section for switching whether or not to cause the flow rate output section to compare the absolute differences. With such a configuration, the function of the flow rate output section can be enabled or disabled at appropriate timing.
  • the switching unit may enable the function of the flow rate output unit when the fluid control valve is in a closed state and the absolute difference between the calculated flow rate and the reference value is below a threshold value for determining validity. preferable. With such a configuration, the function of the flow rate output section can be enabled immediately after the calculated flow rate is stabilized immediately after the fluid control valve is closed.
  • the switching unit outputs the flow rate when the fluid control valve is in an open state and a value obtained by subtracting the measured pressure of the downstream pressure from the measured pressure of the upstream pressure sensor exceeds an invalid determination threshold. It is preferable to disable the function by the part. With such a configuration, immediately after the fluid control valve is opened, the function of the flow rate output section can be disabled after there is no risk of a burst caused by the backflow of the fluid remaining inside. It is possible to suppress the burst caused by backflow.
  • the time constant of the response delay generated by the delay flow rate calculation unit is set to the case where the fluid flows from the upstream side to the downstream side of the fluid resistance element, and the case where the fluid flows in the opposite direction. It is preferable that the current and the current flow are different from each other.
  • a fluid control system is characterized in that the above-described fluid control device is arranged in a part or all of a plurality of branch flow paths which are connected to a main flow path and are provided in parallel. It is. With such a fluid control system, the same effects as those of the fluid control device described above can be achieved.
  • a fluid control device program is a program used in a fluid control device in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from the upstream side.
  • An actual flow rate calculation unit that calculates a flow rate based on the pressures measured by the upstream pressure sensor and the downstream pressure sensor;
  • a delay flow rate calculation unit that calculates the flow rate compares the absolute difference between a predetermined reference value and the calculated flow rate, and the absolute difference between the reference value and the delay flow rate, and determines which of the absolute differences is smaller. It is characterized in that the computer functions as a flow rate output section that outputs the calculated flow rate or the delayed flow rate.
  • the fluid control method uses a fluid control device in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from the upstream side.
  • a delay flow rate calculating step of calculating a flow rate, an absolute difference between a predetermined reference value and the calculated flow rate, and an absolute difference between the reference value and the delay flow rate are compared, and the absolute difference is smaller. and outputting the calculated flow rate or the delayed flow rate.
  • FIG. 1 is a schematic diagram showing the configuration of a fluid control system according to one embodiment of the present invention
  • FIG. The schematic diagram which shows the structure of the fluid control apparatus of the same embodiment.
  • Graph showing unexpectedly output flow rate (burst).
  • the functional block diagram which shows the function of the control part of the same embodiment.
  • the graph which shows the lag flow calculated by the lag flow calculation part of the same embodiment.
  • the graph which shows the flow volume output by the flow volume output part of the same embodiment.
  • 4 is a flowchart showing operations of a stable state determination unit and a reference value update unit according to the embodiment; 4 is a flowchart showing the operation of the switching unit of the same embodiment; Graph showing the flow rate that can be output if the reference value is left at zero.
  • a fluid control device 100 of the present embodiment is used, for example, in a semiconductor manufacturing process, and as shown in FIG. 1, constructs a fluid control system 200 that controls the flow rate of fluid supplied to the process chamber CH.
  • the above-described fluid control device 100 is arranged in part or all of a plurality of flow paths L2 (hereinafter also referred to as branch flow paths L2) provided in parallel.
  • the downstream of the branch flow path L2 is connected to the main flow path L1 communicating with the process chamber CH, for example.
  • the main flow path L1 is a flow path that can suddenly become higher in pressure than inside the fluid control device 100 .
  • Shut-off valves V1 and V2 are provided on the upstream side and downstream side of the fluid control device 100 in the branch flow path L2, respectively.
  • the fluid control device 100 has a fluid control valve 1, an upstream pressure sensor 21, a fluid resistance element 22, and a downstream pressure sensor 23 arranged in this order from the upstream side.
  • This is a differential pressure type mass flow controller in which a controller C that controls the fluid control valve 1 is packaged together with the fluid equipment. More specifically, the mass flow controller 100 includes a block B in which an internal flow path L3 is formed. A fluid having a pressure lower than that of the main flow path L1 described above flows. Note that the fluid control device 100 may further include a pressure sensor on the upstream side of the fluid control valve 1 .
  • the control unit C is a so-called computer including a CPU, a memory, an A/D converter, a D/A converter, and various input/output devices. As shown in FIG. By being executed, at least the functions of the actual flow rate calculation unit 24 and the valve control unit 3 are exhibited.
  • the actual flow rate calculator 24 calculates the flow rate of the fluid flowing through the internal flow path L3 from the pressures measured by the upstream pressure sensor 21 and the downstream pressure sensor 23 . That is, the upstream pressure sensor 21 , the fluid resistance element 22 , the downstream pressure sensor 23 , and the flow rate calculator constitute the differential pressure type flow rate sensor 2 . The calculated flow rate calculated by the actual flow rate calculator 24 is output to the valve controller 3 as the measured flow rate.
  • the valve control unit 3 performs flow rate feedback control of the opening of the fluid control valve 1 so that the deviation between the set flow rate set by the user and the calculated flow rate calculated by the actual flow rate calculation section 24 is reduced.
  • burst As a result, a difference occurs between the pressures measured by the upstream pressure sensor 21 and the downstream pressure sensor 23. As shown in the upper part of FIG. calculated flow rate is output (hereinafter, this phenomenon is also referred to as burst). Note that the burst in this case appears on the minus side.
  • a burst may appear on the positive side.
  • control unit C of the present embodiment further includes a function as a delayed flow rate calculation unit 4 that calculates a delayed flow rate in which a response delay is generated in the calculated flow rate, as shown in FIG. ing.
  • the delayed flow rate calculation unit 4 is configured using a low-pass filter, and calculates a delayed flow rate by generating a first-order lag in the calculated flow rate.
  • the low-pass filter may be an analog low-pass filter configured using resistive elements and capacitive elements, or may be a digital low-pass filter created by a program.
  • the time constant is set to different values depending on whether the fluid flows from the upstream side to the downstream side of the fluid resistance element 22 or when the fluid flows in the opposite direction.
  • the time constant is set to a different value depending on whether bursts to the negative side or bursts to the positive side.
  • the time constant of the response delay is set to different values depending on whether the pressure measured by the upstream pressure sensor 21 is higher than the pressure measured by the downstream pressure sensor 23 .
  • the time constant when the calculated flow rate is positive is set larger than the time constant when the calculated flow rate is negative.
  • the time constant when the calculated flow rate is positive may be set smaller than the time constant when the calculated flow rate is negative, or may be set to the same value.
  • bursts can be suppressed as shown by the solid line in FIG.
  • FIG. 5 shows a state in which the burst on the plus side is suppressed
  • the burst on the minus side can be similarly suppressed.
  • the delayed flow rate calculated by the delayed flow rate calculator 4 takes longer than the calculated flow rate until it stabilizes at the original flow rate (zero in FIG. 5) before the burst occurs.
  • the control unit C of the present embodiment compares the absolute difference between a predetermined reference value and the calculated flow rate and the absolute difference between the reference value and the delayed flow rate, and It further has a function as a flow rate output unit 5 for outputting the calculated flow rate or the delayed flow rate with the smaller absolute difference. That is, as shown in FIG. 4, the flow rate output unit 5 serves as a determination unit 51 that determines the flow rate to be output by comparing the absolute difference between the reference value and the calculated flow rate and the absolute difference between the reference value and the delayed flow rate. has the function of
  • the flow rate output unit 5 outputs the flow rate flowing through the flow rate sensor 2, that is, the calculated flow rate described above, to the display D or the like in a steady state in the semiconductor manufacturing process, for example. It is configured to output the flow rate in real time on a graph in which the flow rate is set on the vertical axis against time.
  • the flow rate output unit 5 may be configured to transmit the calculated flow rate as numerical information to the user via a communication unit (not shown).
  • the flow rate output unit 5 is configured to output the flow rate closer to the reference value, out of the calculated flow rate and the delayed flow rate, as indicated by the solid line in FIG. 6 when a predetermined condition is satisfied.
  • the function by this flow volume output part 5 is called a burst cut function.
  • FIG. 6 illustrates a state in which the reference value is set to zero. It has a function as a value updating unit 7 . Furthermore, the control unit C of this embodiment further has a function as a switching unit 8 for enabling (ON) or disabling (OFF) the burst cut function according to a predetermined condition.
  • the output value output as the calculated flow rate should be zero.
  • the burst cut function of the flow rate output unit 5 can be effectively exhibited.
  • the output value when the fluid control valve 1 is closed may fluctuate slightly over time. From this, as shown in FIG. 9, if the output value in the state where the fluid control valve 1 is closed is shifted negatively, a burst occurs if the reference value is set to zero. At the beginning, the calculated flow rate is closer to zero than the delayed flow rate, so the calculated flow rate is output, and the waveform of the output flow rate (the solid line in FIG. 9) becomes distorted, and the burst cut function is effective. cannot effectively demonstrate.
  • control unit C of this embodiment is configured to sequentially update the reference value as described above.
  • the control unit C of this embodiment is configured to sequentially update the reference value as described above.
  • the fluid control valve 1 is switched from an open state to a closed state, the calculated flow rate does not stabilize immediately after the fluid control valve 1 is closed, and the reference value is updated during the transient state. is not desirable.
  • the stable state determination unit 6 determines that the fluid control valve 1 is closed and that the absolute difference between the calculated flow rate and the reference value continues for the first predetermined time T1. It is determined whether or not the calculated flow rate is below a predetermined stable state threshold value Th1 (S11), and if it is below, it is determined that the calculated flow rate is in a stable state (S12).
  • the initial reference value at the time of factory shipment is set to zero, and the first predetermined time T1 is set to several tens of seconds, for example. That is, the stable state determination unit 6 of the present embodiment determines that the calculated flow rate is in a stable state when the absolute difference between the calculated flow rate and zero falls below a predetermined stable state threshold value Th1 for, for example, several tens of seconds. do. If the absolute difference between the calculated flow rate and the reference value does not fall below the predetermined stable state threshold Th1 over the predetermined time, the determination of S11 is repeated.
  • the reference value update unit 7 updates the reference value. More specifically, after the stable state determination unit 6 determines that the calculated flow rate is in a stable state, the reference value updating unit 7 starts sampling the calculated flow rate over the second predetermined time T2 ( S13). Then, the reference value updating unit 7 determines whether the fluid control valve 1 is closed and the absolute difference between the calculated flow rate sampled in S13 and the reference value is below the update threshold value Th2 over the second predetermined time T2. It is determined whether or not (S14), and if it is below, one of the sampled calculated flow rates is updated as a new reference value (S15). Note that the first predetermined time T1 and the second predetermined time T2 may be the same time, or may be different times.
  • the reference value updating unit 7 of the present embodiment is configured to update the latest (most recent) calculated flow rate among the sampled calculated flow rates as a new reference value.
  • the reference value updating unit 7 may update the average value of the sampled calculated flow rates as a new reference value, or update the lowest calculated flow rate among the sampled calculated flow rates as a new reference value. It may be something to do.
  • the reference value updated by the reference value updating unit 7 is temporarily stored in a reference value storage unit 71 formed in a predetermined area of the memory.
  • the reference value stored in the unit 71 is output to the determination unit 51 of the flow output unit 5 and used by the flow output unit 5 to determine the burst cut function.
  • the stable output value can be updated as the reference value from time to time when the fluid control valve 1 is closed, and the reference value can be continuously set to an appropriate value, so the burst cut function can be used. can be effectively exerted. Furthermore, sampling of the calculated flow rate by the reference value updating unit 7 is not started until the calculated flow rate is stabilized, and it is possible to prevent the calculated flow rate in an unstable state from being set as the reference value.
  • the calculated flow rate is unstable immediately after the fluid control valve 1 is closed, so it is preferable that the function of the flow rate output unit 5 is not exhibited at this point.
  • the fluid remaining inside may flow backward to the upstream side, and the flow rate on the negative side may be unexpectedly output. is preferably left active.
  • control unit C of the present embodiment is configured so that the switching unit 8 enables or disables the burst cut function of the flow rate output unit 5 based on predetermined conditions (valid conditions and invalid conditions to be described later). In other words, the switching unit 8 switches whether or not to allow the determination unit 51 of the flow rate output unit 5 to compare the absolute differences.
  • the switching unit 8 determines whether the fluid control valve 1 is in the closed state and the absolute difference between the calculated flow rate and the reference value is less than the validity determination threshold Th3 (hereinafter also referred to as the validity condition). (S21), and if this valid condition is satisfied, the burst cut function by the flow rate output unit 5 is validated (S22). That is, when this valid condition is satisfied, the flow rate output unit 5 outputs the flow rate closer to the reference value, out of the calculated flow rate and the delayed flow rate.
  • the validity determination threshold Th3 is stored in advance in the threshold storage section 81 set in a predetermined area of the memory. With such a configuration, the function of the flow rate output unit 5 can be enabled immediately after the fluid control valve 1 is closed and after the calculated flow rate is stabilized.
  • the switching unit 8 determines whether the fluid control valve 1 is in the open state and whether the value obtained by subtracting the measured pressure P2 of the downstream pressure from the measured pressure P1 of the upstream pressure sensor 21 exceeds the invalidity determination threshold Th4 (hereinafter , invalid condition) is determined (S23), and if the invalid condition is satisfied, the burst cut function of the flow rate output unit 5 is invalidated (S24). That is, when this invalid condition is satisfied, the flow rate output unit 5 outputs the calculated flow rate without outputting the delayed flow rate.
  • the invalidity determination threshold Th4 is stored in advance in the threshold storage unit 81 as shown in FIG. With such a configuration, immediately after the fluid control valve 1 is opened, the function of the flow rate output unit 5 can be disabled after there is no risk of a burst caused by the backflow of the fluid remaining inside. , can suppress such bursts.
  • the flow rate output unit 5 outputs the flow rate of the calculated flow rate or the delayed flow rate, whichever has the smaller absolute difference from the reference value.
  • a delayed flow rate closer to the reference value than the calculated flow rate is output at first. After that, since the calculated flow rate stabilizes more quickly, the calculated flow rate will overtake the lagging flow rate at a certain point and approach the reference value, and from that point on, the calculated flow rate that stabilizes quickly will be output. .
  • the delayed flow rate closer to the reference value than the calculated flow rate is output at the beginning of the burst, and from a certain point when the absolute difference from the reference value is reversed. outputs a calculated flow rate that is quickly stabilized, so it is possible to quickly stabilize the output flow rate while suppressing an unexpectedly output flow rate.
  • the delay flow rate calculator 4 causes a primary delay in the calculated flow rate, but it may cause a secondary delay in the calculated flow rate.
  • the switching unit 8 of the above-described embodiment enables the burst cut function when the fluid control valve 1 is in the closed state and the absolute difference between the calculated flow rate and the reference value is less than the validity determination threshold Th3.
  • the switching unit 8 may enable the burst cut function when the fluid control valve 1 is in the closed state and a predetermined period of time has elapsed since the fluid control valve 1 was in the closed state.
  • the fluid control valve 1 is in the open state, and the value obtained by subtracting the measured pressure P2 of the downstream pressure from the measured pressure P1 of the upstream pressure sensor 21 is the invalid determination threshold Th4.
  • the burst cut function is disabled when the value exceeds It may be something that disables the function.
  • the fluid control device 100 has been described as being used in semiconductor manufacturing processes, but the fluid control device 100 according to the present invention can be used in various systems other than semiconductor manufacturing processes. .
  • Fluid control device (mass flow controller) Reference Signs List 1 Fluid control valve 21 Upstream pressure sensor 22 Fluid resistance element 23 Downstream pressure sensor L3 Internal flow path C Controller 24 Actual flow rate calculation Part 2 ... Flow rate sensor 3 ... Valve control section 4 ... Delayed flow rate calculation section 5 ... Flow rate output section 51 ... Judgment section 6 ... Stable state judgment section 7 ... Reference value update Part 8 ... Switching part

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
PCT/JP2022/010980 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 Ceased WO2022239447A1 (ja)

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CN202280031520.1A CN117222957A (zh) 2021-05-13 2022-03-11 流体控制装置、流体控制系统、流体控制装置用程序及流体控制方法
US18/560,174 US20240248496A1 (en) 2021-05-13 2022-03-11 Fluid control device, fluid control system, fluid control device program, and fluid control method
KR1020237039839A KR20240007170A (ko) 2021-05-13 2022-03-11 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법
JP2023520859A JP7853965B2 (ja) 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

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