JP7853965B2 - 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 - Google Patents

流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

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Publication number
JP7853965B2
JP7853965B2 JP2023520859A JP2023520859A JP7853965B2 JP 7853965 B2 JP7853965 B2 JP 7853965B2 JP 2023520859 A JP2023520859 A JP 2023520859A JP 2023520859 A JP2023520859 A JP 2023520859A JP 7853965 B2 JP7853965 B2 JP 7853965B2
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JP
Japan
Prior art keywords
flow rate
fluid control
reference value
calculated
pressure sensor
Prior art date
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Application number
JP2023520859A
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English (en)
Japanese (ja)
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JPWO2022239447A1 (https=
Inventor
和宏 松浦
健太郎 長井
颯太 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
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Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Publication of JPWO2022239447A1 publication Critical patent/JPWO2022239447A1/ja
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Publication of JP7853965B2 publication Critical patent/JP7853965B2/ja
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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/028—Controlling a pressure difference
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
JP2023520859A 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 Active JP7853965B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021081562 2021-05-13
JP2021081562 2021-05-13
PCT/JP2022/010980 WO2022239447A1 (ja) 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

Publications (2)

Publication Number Publication Date
JPWO2022239447A1 JPWO2022239447A1 (https=) 2022-11-17
JP7853965B2 true JP7853965B2 (ja) 2026-04-30

Family

ID=84028155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023520859A Active JP7853965B2 (ja) 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

Country Status (6)

Country Link
US (1) US20240248496A1 (https=)
JP (1) JP7853965B2 (https=)
KR (1) KR20240007170A (https=)
CN (1) CN117222957A (https=)
TW (1) TWI910345B (https=)
WO (1) WO2022239447A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006104535A1 (en) 2005-02-09 2006-10-05 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
JP2007200318A (ja) 2006-01-17 2007-08-09 Fisher Controls Internatl Llc 電空制御ループに対する初期条件が調整可能なリード・ラグ入力フィルタ装置
JP2017215726A (ja) 2016-05-31 2017-12-07 株式会社堀場エステック 流体制御装置
JP2019020781A (ja) 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
WO2020230574A1 (ja) 2019-05-14 2020-11-19 株式会社フジキン 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200523532A (en) * 2004-01-06 2005-07-16 Boc Group Inc Device, method, and system for controlling fluid flow
CN102713533B (zh) * 2009-08-12 2016-12-28 微动公司 用于确定振动流量计中的零点偏移的方法和装置
JP5454603B2 (ja) * 2011-05-18 2014-03-26 株式会社デンソー 流量測定装置
JP6289997B2 (ja) * 2014-05-14 2018-03-07 株式会社堀場エステック 流量センサの検査方法、検査システム、及び、検査システム用プログラム
KR20160102807A (ko) 2015-02-23 2016-08-31 주식회사 엘지화학 금속 실리콘 입자 분산액 및 이를 이용한 클로로실란의 제조방법
JP2017200318A (ja) * 2016-04-27 2017-11-02 オリンパス株式会社 駆動装置および駆動方法
JP6628754B2 (ja) * 2017-03-01 2020-01-15 株式会社デンソー 流量測定システム
US12259739B2 (en) * 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006104535A1 (en) 2005-02-09 2006-10-05 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
JP2007200318A (ja) 2006-01-17 2007-08-09 Fisher Controls Internatl Llc 電空制御ループに対する初期条件が調整可能なリード・ラグ入力フィルタ装置
JP2017215726A (ja) 2016-05-31 2017-12-07 株式会社堀場エステック 流体制御装置
JP2019020781A (ja) 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
WO2020230574A1 (ja) 2019-05-14 2020-11-19 株式会社フジキン 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Also Published As

Publication number Publication date
CN117222957A (zh) 2023-12-12
WO2022239447A1 (ja) 2022-11-17
KR20240007170A (ko) 2024-01-16
US20240248496A1 (en) 2024-07-25
TWI910345B (zh) 2026-01-01
JPWO2022239447A1 (https=) 2022-11-17
TW202244468A (zh) 2022-11-16

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