JPWO2022239447A1 - - Google Patents
Info
- Publication number
- JPWO2022239447A1 JPWO2022239447A1 JP2023520859A JP2023520859A JPWO2022239447A1 JP WO2022239447 A1 JPWO2022239447 A1 JP WO2022239447A1 JP 2023520859 A JP2023520859 A JP 2023520859A JP 2023520859 A JP2023520859 A JP 2023520859A JP WO2022239447 A1 JPWO2022239447 A1 JP WO2022239447A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/028—Controlling a pressure difference
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Flow Control (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021081562 | 2021-05-13 | ||
| JP2021081562 | 2021-05-13 | ||
| PCT/JP2022/010980 WO2022239447A1 (ja) | 2021-05-13 | 2022-03-11 | 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022239447A1 true JPWO2022239447A1 (https=) | 2022-11-17 |
| JP7853965B2 JP7853965B2 (ja) | 2026-04-30 |
Family
ID=84028155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023520859A Active JP7853965B2 (ja) | 2021-05-13 | 2022-03-11 | 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240248496A1 (https=) |
| JP (1) | JP7853965B2 (https=) |
| KR (1) | KR20240007170A (https=) |
| CN (1) | CN117222957A (https=) |
| TW (1) | TWI910345B (https=) |
| WO (1) | WO2022239447A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006104535A1 (en) * | 2005-02-09 | 2006-10-05 | Honeywell International Inc. | Method and system for balancing bleed flows from gas turbine engines |
| JP2007200318A (ja) * | 2006-01-17 | 2007-08-09 | Fisher Controls Internatl Llc | 電空制御ループに対する初期条件が調整可能なリード・ラグ入力フィルタ装置 |
| JP2017215726A (ja) * | 2016-05-31 | 2017-12-07 | 株式会社堀場エステック | 流体制御装置 |
| JP2019020781A (ja) * | 2017-07-11 | 2019-02-07 | 株式会社堀場エステック | 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム |
| WO2020230574A1 (ja) * | 2019-05-14 | 2020-11-19 | 株式会社フジキン | 流量制御装置、流量制御方法、流量制御装置の制御プログラム |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200523532A (en) * | 2004-01-06 | 2005-07-16 | Boc Group Inc | Device, method, and system for controlling fluid flow |
| CN102713533B (zh) * | 2009-08-12 | 2016-12-28 | 微动公司 | 用于确定振动流量计中的零点偏移的方法和装置 |
| JP5454603B2 (ja) * | 2011-05-18 | 2014-03-26 | 株式会社デンソー | 流量測定装置 |
| JP6289997B2 (ja) * | 2014-05-14 | 2018-03-07 | 株式会社堀場エステック | 流量センサの検査方法、検査システム、及び、検査システム用プログラム |
| KR20160102807A (ko) | 2015-02-23 | 2016-08-31 | 주식회사 엘지화학 | 금속 실리콘 입자 분산액 및 이를 이용한 클로로실란의 제조방법 |
| JP2017200318A (ja) * | 2016-04-27 | 2017-11-02 | オリンパス株式会社 | 駆動装置および駆動方法 |
| JP6628754B2 (ja) * | 2017-03-01 | 2020-01-15 | 株式会社デンソー | 流量測定システム |
| US12259739B2 (en) * | 2019-04-30 | 2025-03-25 | Illinois Tool Works Inc. | Advanced pressure based mass flow controllers and diagnostics |
-
2022
- 2022-03-11 KR KR1020237039839A patent/KR20240007170A/ko active Pending
- 2022-03-11 WO PCT/JP2022/010980 patent/WO2022239447A1/ja not_active Ceased
- 2022-03-11 JP JP2023520859A patent/JP7853965B2/ja active Active
- 2022-03-11 US US18/560,174 patent/US20240248496A1/en active Pending
- 2022-03-11 CN CN202280031520.1A patent/CN117222957A/zh active Pending
- 2022-04-27 TW TW111115914A patent/TWI910345B/zh active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006104535A1 (en) * | 2005-02-09 | 2006-10-05 | Honeywell International Inc. | Method and system for balancing bleed flows from gas turbine engines |
| JP2007200318A (ja) * | 2006-01-17 | 2007-08-09 | Fisher Controls Internatl Llc | 電空制御ループに対する初期条件が調整可能なリード・ラグ入力フィルタ装置 |
| JP2017215726A (ja) * | 2016-05-31 | 2017-12-07 | 株式会社堀場エステック | 流体制御装置 |
| JP2019020781A (ja) * | 2017-07-11 | 2019-02-07 | 株式会社堀場エステック | 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム |
| WO2020230574A1 (ja) * | 2019-05-14 | 2020-11-19 | 株式会社フジキン | 流量制御装置、流量制御方法、流量制御装置の制御プログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117222957A (zh) | 2023-12-12 |
| WO2022239447A1 (ja) | 2022-11-17 |
| KR20240007170A (ko) | 2024-01-16 |
| US20240248496A1 (en) | 2024-07-25 |
| TWI910345B (zh) | 2026-01-01 |
| JP7853965B2 (ja) | 2026-04-30 |
| TW202244468A (zh) | 2022-11-16 |
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