CN117222957A - 流体控制装置、流体控制系统、流体控制装置用程序及流体控制方法 - Google Patents

流体控制装置、流体控制系统、流体控制装置用程序及流体控制方法 Download PDF

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Publication number
CN117222957A
CN117222957A CN202280031520.1A CN202280031520A CN117222957A CN 117222957 A CN117222957 A CN 117222957A CN 202280031520 A CN202280031520 A CN 202280031520A CN 117222957 A CN117222957 A CN 117222957A
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CN
China
Prior art keywords
flow rate
fluid control
calculated
reference value
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280031520.1A
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English (en)
Chinese (zh)
Inventor
松浦和宏
长井健太郎
松本飒太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Publication of CN117222957A publication Critical patent/CN117222957A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/028—Controlling a pressure difference
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
CN202280031520.1A 2021-05-13 2022-03-11 流体控制装置、流体控制系统、流体控制装置用程序及流体控制方法 Pending CN117222957A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-081562 2021-05-13
JP2021081562 2021-05-13
PCT/JP2022/010980 WO2022239447A1 (ja) 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

Publications (1)

Publication Number Publication Date
CN117222957A true CN117222957A (zh) 2023-12-12

Family

ID=84028155

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280031520.1A Pending CN117222957A (zh) 2021-05-13 2022-03-11 流体控制装置、流体控制系统、流体控制装置用程序及流体控制方法

Country Status (6)

Country Link
US (1) US20240248496A1 (https=)
JP (1) JP7853965B2 (https=)
KR (1) KR20240007170A (https=)
CN (1) CN117222957A (https=)
TW (1) TWI910345B (https=)
WO (1) WO2022239447A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060174628A1 (en) * 2005-02-09 2006-08-10 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
JP2007200318A (ja) * 2006-01-17 2007-08-09 Fisher Controls Internatl Llc 電空制御ループに対する初期条件が調整可能なリード・ラグ入力フィルタ装置
JP2017215726A (ja) * 2016-05-31 2017-12-07 株式会社堀場エステック 流体制御装置
JP2019020781A (ja) * 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
WO2020230574A1 (ja) * 2019-05-14 2020-11-19 株式会社フジキン 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200523532A (en) * 2004-01-06 2005-07-16 Boc Group Inc Device, method, and system for controlling fluid flow
CN102713533B (zh) * 2009-08-12 2016-12-28 微动公司 用于确定振动流量计中的零点偏移的方法和装置
JP5454603B2 (ja) * 2011-05-18 2014-03-26 株式会社デンソー 流量測定装置
JP6289997B2 (ja) * 2014-05-14 2018-03-07 株式会社堀場エステック 流量センサの検査方法、検査システム、及び、検査システム用プログラム
KR20160102807A (ko) 2015-02-23 2016-08-31 주식회사 엘지화학 금속 실리콘 입자 분산액 및 이를 이용한 클로로실란의 제조방법
JP2017200318A (ja) * 2016-04-27 2017-11-02 オリンパス株式会社 駆動装置および駆動方法
JP6628754B2 (ja) * 2017-03-01 2020-01-15 株式会社デンソー 流量測定システム
US12259739B2 (en) * 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060174628A1 (en) * 2005-02-09 2006-08-10 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
WO2006104535A1 (en) * 2005-02-09 2006-10-05 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
JP2007200318A (ja) * 2006-01-17 2007-08-09 Fisher Controls Internatl Llc 電空制御ループに対する初期条件が調整可能なリード・ラグ入力フィルタ装置
JP2017215726A (ja) * 2016-05-31 2017-12-07 株式会社堀場エステック 流体制御装置
JP2019020781A (ja) * 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
WO2020230574A1 (ja) * 2019-05-14 2020-11-19 株式会社フジキン 流量制御装置、流量制御方法、流量制御装置の制御プログラム

Also Published As

Publication number Publication date
WO2022239447A1 (ja) 2022-11-17
KR20240007170A (ko) 2024-01-16
US20240248496A1 (en) 2024-07-25
TWI910345B (zh) 2026-01-01
JP7853965B2 (ja) 2026-04-30
JPWO2022239447A1 (https=) 2022-11-17
TW202244468A (zh) 2022-11-16

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